TW200808628A - Filling device of conveying box - Google Patents

Filling device of conveying box Download PDF

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Publication number
TW200808628A
TW200808628A TW095129271A TW95129271A TW200808628A TW 200808628 A TW200808628 A TW 200808628A TW 095129271 A TW095129271 A TW 095129271A TW 95129271 A TW95129271 A TW 95129271A TW 200808628 A TW200808628 A TW 200808628A
Authority
TW
Taiwan
Prior art keywords
box
filling
transfer box
gas
seat
Prior art date
Application number
TW095129271A
Other languages
Chinese (zh)
Other versions
TWI332927B (en
Inventor
Yung-Shun Pan
Original Assignee
Gudeng Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gudeng Prec Ind Co Ltd filed Critical Gudeng Prec Ind Co Ltd
Priority to TW095129271A priority Critical patent/TW200808628A/en
Priority to US11/889,094 priority patent/US20080035237A1/en
Publication of TW200808628A publication Critical patent/TW200808628A/en
Application granted granted Critical
Publication of TWI332927B publication Critical patent/TWI332927B/zh

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Library & Information Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Vacuum Packaging (AREA)

Abstract

The present invention relates to a filling device of conveying box. An accommodating space is formed in a work platform for storing the conveying box and the conveying box is used to receive objects to be processed. The conveying box is composed of a cover member and a seat member, and a disassembling device is provided between the cover member and the seat member for fixing or releasing the cover member and the seat member. The other side of the conveying box is provided with a displacement mechanism. When it is in use, a fixing status of the cover member and the seat member is firstly released through the disassembling device and then the cover member and the seat member are separated by the displacement mechanism, so that an operation of filling inert gas can be proceeded, and contaminations on a photomask can be controlled by the movement and the gas current direction of the insert gas, thereby preventing debris generated due to friction during the filling operation and effectively maintaining cleanness in the conveying box.

Description

200808628 九、發明說明： 【發明所屬之技術領域】 本發明為提供一種傳送盒之填充裝置，尤指SΜ I F系 統所使用之傳送盒的填絲置，其可讓光罩進人具氣密性之 置放工間進行充填惰性氣體，不但可利用惰性氣體之運動與 氣流方向控制光罩之污染物，且可有效保持傳送盒内的娜 度。 【先前技術】 、按’當進入21世紀，人類生活已經進入了數位時代的 領域中，現今許多人類生關遭的物品、用具均讀位化高 科，產品取而代之’不僅帶給人們許多方便，也同時得以享 又回科技的文明進步成果，而在數位化的時代中，大多數電 器物品、用具都會與數位科技有關係或以高科技j c晶片進 行操控，以達到自動化的迅速、確實之目的，所以人類生活 在數位科，領域之中，則必須以更進步的數位知識、技術來 控制各種高科技產物，例如：電腦、電視、影音設備、大樓 中央f理、Α車、飛機等等食、衣、住、行的相關產品、用 具’其中焉科技I C晶片係為相當重要的組成元件，所以有 人宣稱I C晶片為產業之米，因為！ c晶片是由極精密的積 體電路組成，其製造過程是糊光罩在無塵室的環境中使用 而精您度的機台對矽晶圓進行高精密度的積層作業來完成， 其機台、廠房等製造成本是非常高昂的，因此在製造晶圓的 過权中，產。口良率可以決定一間半導體工廠獲利與否，因此 致力於提高產品的良率是每一間半導體工廠經營者最重要的 200808628 第4，5 3 2，^:^之⑽以統已於美國專利 說明。SMI \ 4 ’ 5 3 4，3 8 9號中有所 中所受之微粒通量、、。可局!半晶體製程之儲運過程 氮氣）基本周圍之氣態介質（例如空氣或 微粒不致進入==:::定：，圍環境中之 二無，氣體，為二==: 運動、氣財向及外部料物均受㈣。 知體之 送晶:光晶圓或光罩’都會採用傳送盒來輸 氧化而毀損，請來:=充，性氣體以防止光罩產生 填充氣體時之示意圖二、二=系：:送盒於 、J及不思圖（一），由圖中可清接 穿-有送盒Α為設置有埠口 A 1 ’並於埠口 A 1内 口又有真充裝置B，而填充裝置B為設置有一凹 裝置_套設有—彈簧C，當對傳送盒A 充物，為先將充氣管D推人填充裝置B所設之凹槽b工内 二並推動填充裝置B使缺槽B 2移動，且使彈簣C產生彈性 變瓜而’、有回復力，再將氣體藉由缺槽B 2充填至傳送盒a 内田^填tl畢B守抽出充氣管D，而填充裝置b會藉由彈菁 C之回復力而恢復為充氣前之位置並成〆閉合狀態，然上述 填充裝置B於使料係彻彈簧c及充氣扣來產生移動， 而將氣體充填至傳送盒A内，轉簀B會與琿σΑι及填充 裝置Β產生極大的摩擦，容易在摩擦接觸雜產生細屑，、而 細屑會隨著統動作而破壞了傳送盒Α_潔淨度，並因此 6 200808628 率，且此種作法於組裝時相當的繁雜 危害到整個晶圓生產中的品質和良 ’使加工成本大幅上升 5，何:免充赚氣體之程中因摩擦 而產生細屑，以有效保持傳送盒内 =動與氣流方向控制光罩之污染物二== 之tn’即魏事此行#之蝴麵麻欲研究改善 【發明内容】 並作t根據上述諸點缺失之考量，翻人乃觀相關資料 从分析與探討，經由乡方評估 進㈣麵不捨的試作與修改，始設 傳迗益之填充裝置的發明專利誕生者。 定#之^要目的乃在於利用拆解裝置解除傳送盒之固 產生八離，麟位移機構帶轉送盒以使座體與蓋體 t=離’並使傳送盒所容置之鮮進人置放空間，同時讓 内的密閉狀以進行充填惰性氣體，以有效保持傳送盒 的1、〜’並细舰氣體之運動與氣流方向控制光罩之 =方;7步防止光罩產生氧化而毀損。 翻為軸上述目輯制之技術手段及其功效 之槿實施例配合圖式詳述如下，俾使審委對本發明 特徵能有更深入且具體的瞭解。 體外二 '三' 五圖所示’係為本發明之立 θ體分解圖、傳送盒之立體分解圖以及較佳實施 7 200808628 田圓T N >穿跫的看出7令货明炙得 11、傳送盒12、拆 ^邶解傳送盒之示意圖，由圖中可清 送盒之填充裝置1係包括有工作平台丄丄、 解農置1 3以及位移;1¾構1 4所組成，其中： 間it作平台1 1内為具有置放空間11 0，並於置放空 /之上、下兩侧分別設有第—開σ1丄i與第二開口 ^ ^而置放空間i i 〇 _設有可充填惰性氣體之蜂口200808628 IX. INSTRUCTIONS: [Technical Field] The present invention provides a filling device for a transport box, in particular, a filling box for a transport box used in the SΜ IF system, which allows the reticle to be airtight. The filling chamber is filled with an inert gas, which not only utilizes the movement of the inert gas and the direction of the air flow to control the contaminants of the reticle, but also effectively maintains the degree of the inside of the transfer box. [Previous technology], according to 'When entering the 21st century, human life has entered the field of digital era. Nowadays, many human beings have been read and processed in high-tech, and the product has replaced it with not only bringing convenience to people, but also At the same time, we can enjoy the progress of civilization and technology, and in the era of digitalization, most electrical appliances and appliances will be related to digital technology or controlled by high-tech jc chips to achieve the rapid and reliable purpose of automation. Therefore, human beings living in the digital sciences and fields must control various high-tech products with more advanced digital knowledge and technology, such as computers, televisions, audio-visual equipment, central buildings, vehicles, airplanes, etc. The related products and appliances of clothing, housing and travel are among the most important components of the IC chip, so some people claim that the IC chip is the industry rice, because! c chip is composed of extremely precise integrated circuit, the manufacturing process is the use of the paste mask in the clean room environment, and the precision machine is used to perform high-precision lamination work on the silicon wafer. The manufacturing costs of Taiwan and factory buildings are very high, so they are produced in the process of manufacturing wafers. The mouth rate can determine whether a semiconductor factory is profitable or not. Therefore, the company is committed to improving the yield of products. The most important thing for every semiconductor factory operator is 200808628. 4,5 3 2,^:^(10) US patent description. The flux flux of particles in SMI \ 4 ’ 5 3 4, 3 8 9 . Can be bureaucratic! Semi-crystal process storage and transportation process Nitrogen) Basic ambient gaseous medium (for example, air or particles do not enter ==::: set: two in the surrounding environment, gas, two ==: sports, gas Both the external and external materials are subject to (4). The crystal of the body: the optical wafer or the reticle will be destroyed by the transfer box, please come to: = charge, the gas to prevent the hood from filling gas Second, second = system:: send the box in, J and do not think (1), can be clear through the picture - there is a box to set up a mouth A 1 ' and in the mouth of the mouth A 1 The charging device B is provided, and the filling device B is provided with a concave device _ sleeve-spring-c. When the conveying box A is filled, the inflation tube D is first pushed into the groove b of the filling device B. And pushing the filling device B to move the missing groove B 2, and causing the elastic c to elastically change the melon and have a restoring force, and then filling the gas into the conveying box a by the missing groove B 2 Inflating the tube D, and the filling device b is restored to the position before the inflation by the restoring force of the elastic cyanine C and is in a closed state, and the filling device B is used as the material. The spring c and the air-filled buckle are used to generate the movement, and the gas is filled into the transfer box A, and the transfer B will generate great friction with the 珲σΑι and the filling device, and it is easy to generate fine chips and friction in the friction contact. Will destroy the transfer box Α _ cleanliness with the overall action, and therefore 6 200808628 rate, and this method is quite cumbersome in assembly and the quality and goodness of the entire wafer production greatly increase the processing cost 5, : In the process of freeing the gas, the fines are generated due to the friction, so as to effectively maintain the contaminant of the mask in the direction of the movement and the direction of the airflow, and the tn of the mask is the same as the tn of the Wei Shi. Improve [invention content] and make t according to the above-mentioned points of lack of consideration, turn over the people and see the relevant data from the analysis and discussion, through the township assessment into the (four) face-to-face test and modification, the establishment of the Chuanyiyi filling device The birth of the invention patent is to use the dismantling device to release the solidification of the transport box, and the lining mechanism has a transfer box to make the seat and the cover t= away from the 'and the transport box is accommodated. Fresh into the space, When the inside is sealed, the inert gas is filled to effectively maintain the movement of the conveyor box, and the movement of the gas and the direction of the airflow control the mask; 7 steps prevent the mask from being oxidized and destroyed. The technical means and the effects of the above-mentioned system are detailed as follows, so that the reviewer can have a deeper and more specific understanding of the features of the present invention. The in vitro two 'three' five figure is shown as The exploded view of the θ body of the present invention, the exploded view of the transfer box, and the preferred implementation 7 200808628 Tian Yuan TN > see through the 7 orders of the goods, the delivery box 12, the removal of the transfer box Schematically, the filling device 1 of the clearable cassette in the figure comprises a working platform 解, a cultivating device 13 and a displacement; 13⁄4 constituting a frame 4, wherein: the space is placed in the platform 1 1 with a space for placement 11 0, and the first opening σ1丄i and the second opening ^ ^ are respectively disposed on the venting/upper and lower sides, and the space ii 〇_ is provided with a bee that can be filled with an inert gas

2λj二i2為设置於工作平台1卜側，其傳送盒1 物2,且傳送盒12為頻12ι及蓋 之定f f ΐ組成，而座體1 2 1上為設有可财位加工物2 有固U 21 1，並於座體121及蓋體12 2之間設 疋1 23，以供座體121及蓋體i22相連固定。 該拆解裝置1 3為具有可解除傳送盒丨2_之固定件 =3的動力結構131與滑塊132，且滑塊132設有 ^固疋件12 3之扣孔的複數凸柱’並透過動力結構1 3 1讓滑塊1 3 2帶細定件1 2 3位移。 該位移機構i 4為設置於工作平台i工另側，且位移機 =4為具有支臂141及連接於支臂141上之支撐部工 j所組成，並使支臂141透過馬達、齒輪、皮帶、氣麗 。5、’由壓紅等傳祕構帶動呈—輯位移讀支撐部1 4 2於工作平台11之置放空間110内活動位移。 5月同時參閱第二、三、四、五圖所示，係為本發明之立 體^解圖、傳送盒之立體分解圖、較佳實施例置人傳送盒之 不思圖以及較佳實施例拆解傳送盒之示意圖，由圖中所示可 清楚的看出，本發明之傳送盒之填充裝置1為可進-步設置 8 200808628 3=二機箱3内則具有可供收 ΐ二ί:=31 一側設有掀合部32,當使用3 物2可為光罩、基板或電 】=其加工 部14 2頂持傳送盒12，_掀^3,4;支樓 並同時啟叙、宣从 σ F3 2關閉機箱3 ’ 1動運作開關，糾，拆解裝置i 3為利用動力 1 3 1讓滑塊工3 2之凸柱帶 丨、口冓 23向外移動，使傳送盒12之】匕=之固定件1 生分離狀態。 Z之座體121與蓋體，22產 體八=時f閱第二、四、六、七圖所示，係為本發明之立 =之較，置入傳送盒之示意圖、較佳實施例填 圖以及填充氣體時之示意圖，由圖中所示可 Π出，當傳送盒12之座體121缝體122 ” 3之滑塊132為抵持蓋體122，而位 /1 9晰±之支臂1 4 1即開始向下位移，並帶動支樓部1 之座體121τ降’而支撐部142下降後可封 閉工解台i R置放㈣i i ◦所設的第二開口 Η?， 並使傳送盒12之蓋體122同時封閉置放空間i i 〇之第 一開口 1 11，進而使置放空間Η 〇呈-氣密性效果，即 可利用置放空附i 〇之埠π i!3充填惰性氣體，而所充 填之h性氣體可為氮氣、氦氣或氖氣，待充填完畢後，其位 移機構14之支臂141即開始向上位移，並帶動支撐部工 4 2所支撐之座體工21上升，再利用拆解裝置工3透過動 力名口構131讓滑塊13 2之凸柱帶動傳送盒丄2兩側之固 9 200808628 定件12 3向内移動，使傳送盒12之座體121與蓋體工 2 2相互組合固定，此時即可開啟機箱3並取出置放有加工 物2之傳送盒12。2λj2 i2 is disposed on the working platform 1 side, which transports the box 1 object 2, and the transport box 12 is composed of the frequency 12 ι and the cover ff ΐ, and the seat body 1 2 1 is provided with the wealth processing workpiece 2 There is a solid U 21 1, and a 疋1 23 is provided between the seat body 121 and the cover body 12 2 to fix the seat body 121 and the cover body i22. The disassembling device 13 is a power structure 131 and a slider 132 having a fixing member=3 capable of releasing the transport cassette 丨2_, and the slider 132 is provided with a plurality of studs of the buttonholes of the securing member 12 3 and The slider 1 3 2 is displaced by the fine member 1 2 3 through the power structure 1 3 1 . The displacement mechanism i 4 is disposed on the other side of the working platform i, and the displacement machine=4 is composed of a support arm 141 and a support portion connected to the support arm 141, and the support arm 141 is transmitted through the motor, the gear, Belt, sleek. 5, 'by the red pressure and other secrets to drive the rendering - the displacement read support portion 1 4 2 in the placement space 110 of the working platform 11 movable displacement. Referring to the second, third, fourth and fifth figures in May, the present invention is a perspective view of the present invention, an exploded perspective view of the transport box, a preferred embodiment of the transport box, and a preferred embodiment. A schematic diagram of disassembling the transport box, as can be clearly seen from the figure, the filling device 1 of the transport box of the present invention is settable in a step-by-step manner. 8200808628 3=The second chassis 3 has an available capacity: =31 One side is provided with a splicing part 32, when using 3 things 2 can be a reticle, a substrate or a battery 】= its processing part 14 2 holds the transfer box 12, _ 掀 ^ 3, 4; Xuan from σ F3 2 to close the chassis 3 '1 move the switch, correct, disassemble the device i 3 to use the power 1 3 1 to make the slider of the slider 3 2, the mouth 23 to move outward, so that the transfer box 12] 匕 = the fixed part 1 is separated. Z seat 121 and cover body, 22 product body 8 = time f read the second, fourth, sixth, and seventh figures, which is a comparison of the present invention, a schematic diagram of the insertion box, and a preferred embodiment The drawing and the schematic diagram of filling the gas can be extracted as shown in the figure. When the slider 132 of the body 122 of the transfer case 12 is the cap 132 of the body 122, the position is fixed. The arm 14 1 starts to be displaced downward, and drives the seat 121 θ of the branch portion 1 to descend, and the support portion 142 is lowered to close the second opening 设 of the set i i 置 (4) i i ,, And the cover 122 of the transport box 12 is simultaneously closed to the first opening 1 of the space ii, and the space Η 〇 is air-tight, so that the 埠 π i can be placed with the i !! 3 is filled with an inert gas, and the filled gas can be nitrogen, helium or neon. After the filling is completed, the arm 141 of the displacement mechanism 14 starts to move upward and drives the support portion 4 2 to support The body worker 21 is raised, and then the dismantling device 3 is passed through the power name port 131 to cause the protrusions of the slider 13 2 to drive the solids on both sides of the transport box 2008 2 200808628 Fixings 12 3 Moving inwardly, the seat body 121 of the transfer case 12 and the cover body 2 2 are combined and fixed, and at this time, the case 3 can be opened and the transfer case 12 in which the workpiece 2 is placed can be taken out.

再者，上述較佳實施例之拆解裝置13，為僅使座體工 21及蓋體122呈分離、結合固定狀態，其動力結構工3 1可為馬達、螺桿，為僅需讓滑塊i 3 2產生位移，並帶動 固定件1 2 3健，且滑塊1 3 2之設置可_其它等效结 構來改變，均應_包含於本發明之專利範圍内，合予陳^ 立體2時參閲第三、八、九圖所示，係為本發明傳送盒之 ^圖:另一較佳實施例填充氣體前之示意圖以及填充 =二，圖’由圖中所示可清楚的看出，該位移機構1 傳送盒12上方，且支臂1 4 1 -端為 並使位移機構14之支臂141:工2 = 二HZ 3吸附傳送盒12之蓋體12 2上， 之蓋體122上;開=^並帶動吸盤143所吸取 2形成分離狀態，當蓋们^上2 1與蓋體1 2 ====1°1 3 11 °^σ 11 =同時復位’將蓋體1 2 2放:座體=4之支臂二 ⑴與蓋體…重新固定，即可== 200808628 盒1 2。 是以，本發明之傳送盒12之填充裝置1於實際使用時 為具有以下優點： (-）本發明將置放空間i i 〇封閉以呈—氣密性效果，即 可利用置放空間11〇之複數埠口1 13充填惰性氣 體，可有效減少摩擦的產生，並可保持傳送盒i 2内 的潔淨度。 (一）本發明透過置放空間1 1 〇之複數埠口 1 1 3充填惰 性氣體，以利用惰性氣體之運動與氣流方控制加工物 一 2之污染物，進一步防止加工物2產生氧化而毀損。 (三）本發明僅需讓使用者開啟工作平台i i或機箱3後， 並將置放有加工物2之傳送盒12放入即可進行充填 ，操作簡單且便利。 惟’以上所述僅為本發明之較佳實施例而已，非因此即 =限本發日月之專利範圍，故舉凡本發明說明書及圖式内 容所為之㈣料及·結觀化，騎猶包含於本發明 之專利範圍内，合予陳明。 4上所述’本發明上述之傳送盒之填絲置於使用時， 為確實能制其功效及目的，故本發賴為 之 ^至為符合發明專利之申請要件，麦依法提出申請，盼 2早曰賜准本案’以保障發明人之辛苦發明，倘若鈞局 ϊί有任何稽疑’請不錄函指示，發明人定當竭力配合， 200808628 【圖式簡單說明】 ，一圖係為本發明之立體外觀圖。 $二圖係為本發明之立體分解圖。 第三圖係為本發明傳送盒之立體分解圖。ί = 口 發明較佳實施例置人傳送盒之示意圖。 ί f係為本發明較佳實施例拆解傳送盒之示意圖。 f，、圖較佳實施例填充氣體前之示意圖。 春 ®係為本發.佳實關填絲辦之示意圖。 ί 2 發明另—較佳實施例填充氣體前之示意圖。ί i ίί明另—較佳實施例填充氣體。 h 圖係為習用傳送盒於填充氣體時之示意圖（一）。 第十一圖係為習用傳送盒於填充氣體時之示意圖（二）。 【主要元件符號說明】 1、填充裴置 % 11、工作平台 12 3、固定件 110、 置放空間 13、拆解裝置 111、 第一開口 131、動力結構Furthermore, in the disassembling device 13 of the above preferred embodiment, only the seat body 21 and the cover body 122 are separated and coupled, and the power structure 31 can be a motor or a screw, so that only the slider is required. i 3 2 generates displacement, and drives the fixing member 1 2 3, and the setting of the slider 1 3 2 can be changed by other equivalent structures, and should be included in the patent scope of the present invention, and combined with Chen 2 stereo 2 Referring to the third, eighth and ninth figures, it is a diagram of the transport box of the present invention: another preferred embodiment is a schematic diagram of filling before gas and filling = two, and the figure 'clearly seen from the figure The displacement mechanism 1 is above the transfer box 12, and the arm 14 1 - end is such that the arm 141 of the displacement mechanism 14: 2 2 = 2 HZ 3 adsorbs the cover 12 2 of the transfer case 12, the cover 122; open = ^ and drive the suction cup 143 to draw 2 to form a separation state, when the cover ^ 2 1 1 and the cover 1 2 ====1 °1 3 11 ° ^ σ 11 = simultaneous reset 'will cover 1 2 2 release: seat body = 4 arm two (1) and cover body ... re-fixed, you can == 200808628 box 1 2. Therefore, the filling device 1 of the transport case 12 of the present invention has the following advantages in practical use: (-) The present invention closes the placement space ii 呈 to have an airtight effect, and can utilize the placement space 11〇 The plurality of mouths 13 13 are filled with an inert gas, which can effectively reduce the generation of friction and maintain the cleanliness in the transfer box i 2 . (1) The present invention fills the inert gas with a plurality of ports 1 1 3 of the space 1 1 to control the pollutants of the processed material 2 by the movement of the inert gas and the air flow to further prevent the oxidation of the processed material 2 and damage. . (3) The present invention only needs to allow the user to open the work platform i i or the chassis 3, and put the transfer box 12 on which the processed object 2 is placed into the container to be filled, and the operation is simple and convenient. However, the above description is only for the preferred embodiment of the present invention, and therefore, it is not limited to the patent scope of the present invention. Therefore, the description and the contents of the present invention are based on (4) materials and observations. Within the scope of the patent of the present invention, it is combined with Chen Ming. 4, the above-mentioned transfer box of the above-mentioned transfer box is placed in use, in order to be able to make its efficacy and purpose, so the hair is made to meet the application requirements of the invention patent, and the application is filed in accordance with the law. 2 Early in the case of the case to protect the inventor's hard work, if there is any doubt in the bureau, please do not write a letter, the inventor will try to cooperate, 200808628 [Simple diagram], a picture is the invention The stereoscopic appearance. $2 is an exploded perspective view of the present invention. The third figure is an exploded perspective view of the transport case of the present invention. ί = Port A schematic diagram of a preferred embodiment of the present invention. f f is a schematic diagram of disassembling a transport box in accordance with a preferred embodiment of the present invention. f, a schematic view of the preferred embodiment before filling with a gas. The Chun ® is the schematic diagram of the Jia Shi Guan. ί 2 EMBODIMENT OF THE PREFERRED EMBODIMENT A preferred embodiment of the gas before filling. i i ίί - Another embodiment of the filling gas. h Figure is a schematic diagram of the conventional transfer box when filling the gas (1). The eleventh figure is a schematic diagram (2) of a conventional transfer case when filling a gas. [Description of main component symbols] 1. Filling device % 11, working platform 12 3. Fixing member 110, placing space 13, disassembling device 111, first opening 131, power structure

13 2、滑塊 12、傳送盒 1 2 1、座體 14、位移機構 1 41、支臂 1211、定位裝置 12 2、蓋體 14 2、支撐部 14 3、吸盤 12 200808628 2、加工物 3 2、掀合部 3、機箱 31、容置室 A、 傳送盒 A 1、埠口 B2、缺槽 B、 填充裝置 B 1、凹槽 C、 彈簧 D、 充氣管 1313 2. Slider 12, transfer box 1 2 1, seat body 14, displacement mechanism 1 41, arm 1211, positioning device 12 2, cover body 14, support portion 14 3, suction cup 12 200808628 2, processed object 3 2 , the merging portion 3, the chassis 31, the accommodating chamber A, the transport box A 1, the sputum B2, the sump B, the filling device B 1, the groove C, the spring D, the inflation tube 13

Claims (1)

200808628 十、申請專利範園： 1之Γ裝置’其中該傳送盒内可供收容有預設加 =，及讀微加工物之定倾置，且魏纽由蓋體及 座體所相互組合喊，而蓋體與座體之間設有峡件，直上 設有至少-個以上之扣孔，該填充裝置包括有： - 體妨=具有置放空間，可供收容傳送盒與填充氣 Lr 兩側分別設有第—開口與第二開口，而 置放二間设有至少一個填充氣體用之琿口； 於該工作平台之-側，具有動力結構與滑塊 插人傳送盒之固定件之扣孔的複數凸柱，透 二使滑塊帶動之固定件位移’藉以解除傳送盒之 盒體及座體的鎖定狀態；以及 構，設置於紅作平台之第二開口侧，用以使傳送 座體產生相對位移運動，該位移機構具有-驅動 μ連接一支臂’支臂一端設有可頂持傳送盒之支撐部，支 撐部設有可吸取傳送盒之吸盤。 2項所述之傳送盒之填充裝置，其中該填 係由下列之群組中擇—或組合而成：—惰性氣體、一 乾远冷空氣、一氮氣及一純氣體。 3概，項所述之傳送盒之填充裝置，其中該拆 、=置之動力結構係由下狀群組中擇—或組合而成：馬達 、W輪”㈣條、皮f與皮帶輪、線性滑塊與滑轨 、氣壓缸及 >由壓缸等。 4 2請專概圍第1項所述之傳送盒之填充裝置，其中該位 機構之驅動部係由下列之群組中擇一或組合而成：馬達、 200808628 氣塵缸及& 齒條、絲與转輪、線歸塊與滑執、 5、:=範圍第丄項所述之傳送盒购置， 6 w 開口係組接至傳送盒之蓋體。 ’、Χ 作平台送盒之填充装置，其中讀工 7 内 且 可供收之填充裝置，其中該傳送念 傳送盒係由蓋體及座體所相====位裝置， 設於該工作料之11=以上之扣孔’該拆解裝置係 可插入傳if之_#^ 7力結频概，騎塊設有 =動之固定件位移’藉以解除傳送盒之蓋趙及座： 8 、與皮帶輪、線性滑塊與滑二==輪等與齒條、皮帶 種位移機構，_於傳送盒之填 ，及定位預設加工物之=: 設有^定件’ _與座體之間 =:斜台之第二_，用以使傳送盒 生相對位移運動，該位移機構具有一驅動部以連接 取傳有可頂持傳送盒之支樓部，支撐部設有可吸 15 200808628 10 =申請專利範圍第9項所述之位移機構，其中該驅動部係 :列之群組中擇-或組合而成：馬達、齒輪與窗條、皮 帶/、皮帶輪、線性滑塊與·、_缸及關紅等。 種之填絲置’其巾轉送盒时供收容有預設 研；5⑽及核賊加I物之粒裝置，且舰盒係由蓋 供所相互組合而成’而蓋體與座體之間設有固定件 财拆卸之固定與分離使用，該填充裝置包括有： 氣ς作平台’内部具有置放空間，可供收容傳送盒與填充 ;=，設啊平台之—側，具有一動力結構與 ^動，、’透過該動力結構使作動件帶動傳動盒之固定件位 解除?达盒之蓋體及座體的鎖定狀態；以及 離之蓋置賴I作平台之糊，用喊傳送盒分 離之盎體與座體產生相對位移運動。 12 送ί之氣，填充機箱，其中該傳送盒内可供收容有 二υ工，及疋位預設加工物之定位裝置，且送各係 ir=r相互組合而成，而蓋體與座體之間設有固 離使用 體之間設有固定件供可拆奸之固定與分 離使用，該氣體填充機箱包含： 4相體’畴具有—容置m與安 :ΐ=!裝部之填充裝置，該填充褒置包括有： 可供收容傳送盒與填充 工作平台，内部具有置放空間， 氣體； 拆解裝置’没於該工作平台 作動件，透職動力叫側具有—動力結構與 力…構使作動件帶動傳動盒之固定件位 16 200808628 移，藉以解除傳送盒之蓋體及座體的鎖定狀態；以及 一位移機構，設置於該工作平台之另側，用以使傳送盒分 離之蓋體與座體產生相對位移運動。 1 3、如中請專利細第χ 2項所述之傳送盒之氣體填充機箱， 其中該箱體進一步設置有一掀合部。 4、如申請專利範圍第i 2項或第13項所述之200808628 X. Application for Patent Fan Park: 1 Γ Γ ' 其中 其中 其中 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 传送 传送 传送 传送The girth member is arranged between the cover body and the seat body, and at least one or more button holes are arranged directly thereon. The filling device comprises: - a body structure = a space for accommodating the transport box and the filling gas Lr The side is respectively provided with a first opening and a second opening, and two sides are provided with at least one opening for filling gas; on the side of the working platform, there is a fixing structure of the power structure and the slider inserted into the conveying box a plurality of protrusions of the buckle hole, which are used to displace the fixing member driven by the slider to cancel the locked state of the box body and the seat body of the conveying box; and the second opening side of the red platform for conveying The seat body generates a relative displacement movement, and the displacement mechanism has a drive-pulse connection to an arm. The arm has a support portion for holding the transfer box at one end, and the support portion is provided with a suction cup for sucking the transfer box. A filling device for a transfer case according to any of the preceding claims, wherein the filling is selected from the group consisting of: an inert gas, a dry cold air, a nitrogen gas, and a pure gas. 3, the filling device of the transfer box, wherein the power structure of the split and the set is selected or combined by a lower group: a motor, a W wheel (four), a skin f and a pulley, and a linear Slider and slide rail, pneumatic cylinder and > by pressure cylinder, etc. 4 2 Please refer to the filling device of the transfer box described in item 1, wherein the drive unit of the position mechanism is selected from the following groups. Or a combination: motor, 200808628 gas cylinder and & rack, wire and runner, line return block and slippery, 5, := range of the transfer box described in item ,, 6 w open system assembly To the cover of the transfer box. ', Χ is the filling device for the platform to send the box, wherein the filling device is available in the reading 7, wherein the transfer box is composed of the cover body and the seat body ==== The bit device is provided in the button hole of the working material 11=above. The disassembling device can be inserted into the _#^7 force knot frequency of the if, and the riding block is provided with the movable part displacement of the moving part to release the transfer box. Cover Zhao and seat: 8, with pulley, linear slider and slide two == wheel and other racks, belt type displacement mechanism, _ transmission Filling, and positioning the preset workpiece =: There is a fixed part ' _ between the seat and the seat =: the second _ of the inclined table, for the relative movement of the transfer box, the displacement mechanism has a driving part The connecting portion of the support box can be connected and transmitted, and the supporting portion is provided with a displacement mechanism according to item 9 of 200808628 10 = Patent Application No. 9, wherein the driving unit is selected from the group of columns - Or a combination: motor, gear and window strip, belt /, pulley, linear slider and ·, _ cylinder and off red, etc. The filling of the type of 'the towel transfer box for the containment of the preset research; 5 (10) and The nuclear thief adds the grain device of the I object, and the ship box is formed by the combination of the cover and the supplier, and the fixing body is fixed and separated between the cover body and the seat body, and the filling device comprises: The platform has a space for receiving the transfer box and filling; =, the side of the platform is provided with a power structure and movement, and the actuator is used to drive the fixed position of the transmission box through the power structure. Disarming the cover of the box and the locked state of the seat; The paste of the platform is separated from the body by the shouting box to produce a relative displacement movement. 12 The air is sent to fill the chassis, wherein the transfer box can accommodate two workers, and the preset processing object Positioning device, and sending each system ir=r to each other, and a fixing member between the cover body and the base body is provided for fixing and separating the detachable object, and the gas-filled chassis includes : 4 phase body 'domain has - housing m and safety: ΐ =! loading part of the filling device, the filling device includes: for housing the transfer box and the filling work platform, the interior has a space for placement, gas; dismantling The device 'is not used in the working platform, and the power-driven side has the power structure and the force. The actuator moves the fixed position of the transmission box 16 200808628, thereby releasing the locking state of the cover and the seat of the transmission box. And a displacement mechanism disposed on the other side of the working platform for causing relative displacement movement of the cover body and the base body separated by the transfer box. 1 . The gas-filled casing of the transfer box according to the above-mentioned patent, wherein the casing is further provided with a merging portion. 4. As stated in item i 2 or item 13 of the patent application scope 填充機箱，其中該箱體之容置空間與外界交接處 氣密元件。 又’The airtight component is filled in the chassis, where the housing space of the cabinet is connected to the outside. also'
TW095129271A 2006-08-09 2006-08-09 Filling device of conveying box TW200808628A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW095129271A TW200808628A (en) 2006-08-09 2006-08-09 Filling device of conveying box
US11/889,094 US20080035237A1 (en) 2006-08-09 2007-08-09 Gas filling facility for photomask pod or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095129271A TW200808628A (en) 2006-08-09 2006-08-09 Filling device of conveying box

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TW200808628A true TW200808628A (en) 2008-02-16
TWI332927B TWI332927B (en) 2010-11-11

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