TW200808493A - Polishing device - Google Patents

Abstract

To provide a polishing device for polishing the edges of a glass base board, capable of simply changing a load receptacle in accordance with the size of the glass base board. The polishing device is composed of a runner 1 to run advancing and retreating with an advance/retreat running means A, a table 7 equipped with a function to attract and hold the load receiving glass base board X installed in the center part of the runner in such a way as revolving with a revolving means B, two base board receiving stages 13 arranged parallel at two confronting edges of the table in such a way as running as approaching and going apart from each other with a guide means, a slide running means E to run the two stages approaching and going apart from each other, and circuit whetstones 21 installed on both sides of the runway for the runner for polishing the peripheral edges of the base board, wherein either of the table and the stages is/are elevated and sunk by an elevating/sinking means.

Description

200808493 IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a polishing apparatus for grinding an edge of a glass substrate. [Prior Art]

In order to polish the edge of the glass substrate, a glass substrate is placed on the holder of the traveling body that travels in the front-rear direction in advance, and the glass substrate is held by suction. Next, the both sides of the glass substrate are edging by rotating the grindstone provided on both sides of the traveling path while driving the holder stage forward. When the grinding is completed and the traveling body is stopped, the holding frame and the glass substrate are rotated by 90 degrees, and then the holding frame and the glass substrate are moved rearward together. When the holder frame and the glass substrate are moved rearward together, the other side edges of the glass substrate are edging by the rotating grindstones on both sides of the walking path (refer to Japanese Patent No. 1, hereinafter referred to as Patent Document 1). However, according to the structure described in the patent document i, the size (flat_) of the load-bearing glass substrate (ge) is smaller than the size of the glass plate (substrate area), so that the abrasive edge of the glass-battery substrate protrudes from the load. The edge of the segment. question. Therefore, there has been developed a question that can be 'n' can be carried out by one carrier segment. However, according to Patent Document 2, the number of newspapers reported below = Patent Document 2). The table, or the extension of the carrying arm, and the addition of the second two J glass substrate mouth 忖 only provide the smallest to largest pair of the main frame. However, because of the suction = beam 俾, a gantry can cope with the sub-frame block. In the autumn, the soldiers are in a good position. · In addition, the polishing apparatus provided by the present invention can prevent the error of the angular extent (quantity) of the edging process of the glass substrate. In order to solve the above problems, the structure of the polishing apparatus of the present invention comprises: a traveling body that advances and retreats by moving forward and backward moving means; and a working platform having a function of attracting and holding a glass substrate. The center of the walking body is inspected, and the two bearing sections of the glass substrate are mounted side by side on the opposite side of the top surface of the platform, and And approaching each other or leaving each other: - _ walking device, which makes the two carrying sections close to each other, leaving; and the walking path installed on the binding body is thin 3 彳 to grind the substrate __ 愤 磨And using the lifting device to lift or lower one of the working platform or the carrying section. Stone's further, between the walking body and the working platform with the attraction and retention function, the set of the cookware and the holding work of the Wei (4) θ secret device, and the camera _ _ _ _ _ _ _ _ _ _ The _correction device is driven by the read data, and the θ extraction and/or 忒 working flat are interlocked to correct the error of the lateral declination of the glass substrate. In addition, the embodiment of the grinding apparatus of the present invention comprises: - a walking body 'the storage is moved forward and backward by the advance and retreat; and the working platform is supported by the _ substrate. Between the walking bodies, a θ-axis t-suit is placed; two carrying sections carrying the glass substrate are moved between the two; and a suction holding device is mounted on the moving body, and is held by lifting and lowering. And engraving the glass substrate on the work platform; and making the absorption ', the temple clothes are rotated and rotating the device' and the camera reads the two sides of the alignment of the glass substrate, and by means of the material Close to or away from each other, the system is such that the two load-bearing sections are close to each other, leaving; mounted on the traveling body = two sides of the walking path to grind the rotating grindstone on both sides of the glass substrate; a moving body, the bean body advances After the stop travel position is directly above and away from the travel route, 6200808493, "According to the data read, the θ-axis correction device is driven, and the 0-axis repair is placed as a platform to correct the side of the glass substrate. The error of the angular amplitude. As described above, the polishing apparatus of the present invention is used for the forward movement of the traveling body, and the glass is replaced by the glass plate = the center of the board and the traveling body is completely advanced, and the working platform is made. Rise and rotate 9 degrees, ^ work thousands of units drop 'bearing glass substrate by the bearing, or the load-bearing section rises, load work = upper = glass substrate, then the load-bearing section is lowered, money, the mobile body moves back and forth In the middle, the remaining side edges of the glass substrate are polished, so that the grinding efficiency can be improved and the bearing of the glass substrate can be achieved by matching the ruler (10) of the glass substrate in parallel with each other. , the second carving > 疋 ’ ' does not need to cooperate with the base of the slab to change the platform. In particular, when the US plate is rectangular, when the traveling body is ground in the process of advancing and retreating, the side of the short side is polished, and the long side is polished, and the edge is changed to the long side with the rotation of the glass substrate. Position) When the position is changed, the glass substrate can be carried by changing the position of the carrying section. Furthermore, the side camera reads the alignment of the glass substrate, and the _ θ axis corrects the clothing so that the substrate with the function of holding the substrate is rotated in a timely or reverse direction, and correction is performed at the same time to avoid occurrence. The error of the angular amplitude (quantity). Therefore, not only can a uniform angular processing (high precision) be achieved, but also an automatic correction of the angle error can be achieved. Therefore, when the error is corrected, the shirt should be lifted and held to maintain the 'rotating glass substrate'. Correction, and then attracting projects that maintain a large number of programs such as angles, and can improve problems such as low-precision two-corner machining caused by inaccurate error correction. And again/and again, when the glass substrate is corrected, that is, the camera reads the de-labeling of the glass substrate that is held in the binding body: H is used as a platform to correct the angle of the glass plate, and the <9 axis is used in advance. The correcting device rotates the glass substrate that is attracted and held together with the working platform to perform correction, and then transfers the traveling body to the grinding on both sides of the completed side: and has stopped at 200808493. , money, the glass substrate on the working platform that has been unattractively held is moved downward by the lifting device _ then the holding device is attracted to hold 'to carry'. Then, the lifting device is used to drive the suction holding device to rise with the glass substrate. The rotating device is used to call and rotate the suction holding device and the glass substrate. 2 The glass substrate is carried on the working platform and attracted and held. Then, the driver is driven to go back and the experience is The forwarded towel carries out the alignment of the camera, and the reading of the working platform in the correction method is corrected, and the grinding on both sides of the rotating grindstone is used to achieve uniform amplitude ( That is, with high precision, the chamfering process, the movement of the pasteable body, the supply of the glass substrate to the I platform or the removal of the corners. The embodiment of the present invention is as follows: [Embodiment] The implementation of the present invention shown in Figures 1 through 6 causes the walking body to advance or retreat by the advancement. < £ Α : The foregoing advance and retreat mobile device is as shown in the figure: it is laid along the direction of the button - the road 2; the / month block 3 # is mounted on the two sides of the bottom of the walking body, and slidably fastens the upper track 2 , Λ 技 4 4 '' is set parallel to the rail guide and rotates at a fixed position; a mother _ 才王 5 Γ clothing: under the walking body, and screwed to the male bolt 4; and can drive the The mother bolt 5 reverses the younger brother-motor 6; the forward or reverse rotation of the first motor 6 causes the line to be introduced or retracted, but the scope of the present invention is not limited thereto, and the walking can be driven by the configuration of the device. The body advances or retreats. Further, the center of the top surface of the traveling body 1 is provided with a working platform 7, which has a suction holding function of the load-bearing glass substrate X which is rotated by the lowering and lowering (V and rotated by the rotating device c.) The above-mentioned working platform 7 is formed by a plurality of suction small hole basins formed on the top wall to constitute a glass substrate X which can be sucked and held by the working platform 7 by the suction working platform 7. The lifting device is as shown. Via the canister 9 to install the working platform 7, 200808493 = by the extension of the π tank 9 & lift. The upper ship transfer device c is as shown in the figure below the stand below the set of teeth 1G 'Saki recorded 1Q no second peak 12 bite, and operate 2 motor tons to work platform 7, but can also make the reading platform lift or rotate by other means. Heart ί working platform 7 top mosquitoes 4 mesh pairs of two sides of the parallel loading of the glass substrate X 13. The handle carrier segments 13 are close to each other or separated from each other by the material device D. The carrier segments 13 are formed by a square material that is turned into a series, and the walking body garment is provided with a vertical cross for the walking direction. Two guide rails 14, and the guide rails are mounted on the sliders 15 below the two ends of the carrying section 13 The engagement is made freely. The driving of the two airborne U3 Ittf moving devices E arranged side by side is close to or away from each other. The sliding traveling device E has a male bolt as shown in the figure, which is subjected to the third motor W. = drive can be rotated in the solid position (4); _ mother bolt, which is screwed into the male screw check, and loaded: the load-bearing section 13' and the load-bearing section ^ π is moved due to the reversible rotation _ of the third motor 16 Close to each other or _, but the implementation of the position of the 并 并 不限 不限 不限 不限 不限 不限 承载 承载 承载 承载 承载 承载 承载 承载 承载 承载 承载 木 木 木 木 木 木 木 木 木 木 木 木 木 木 木 木 木 木 木 木 木 木The upper corners of the two sides of the crucible or the upper and lower corners of the crucible. #然, Rotate the grindstone 21 = face phase · _ can be collected "knowledge mode, money depends on the edge of the substrate 磨 grinding edge 対 _ data to adjust, such as the franchise The method is divided into four parts: the secret bearing age, the scale of the row is in the row 13 of the row 1, the top surface of the row is flush with the top surface of the carrying section 13, and the correction is taken to take the _substrate X When the glass substrate χ 重量 itself weight secret twist = '. As described above, the 7th riding money thief in the stop state line The carrier section 13 is placed on the substrate X (as shown in Fig. 3). At this time, the size of the glass substrate X drives the third motor 16 so that the carrier segments are close to or away from each other, and are adjusted to be most suitable for carrying. Location. Month 9 200808493 In addition, as shown in Figure 4, the glass substrate X, keep it. And live the work of the mouth 7, 7 on the work platform 7 to hold the glass substrate X- and ^ to ^ forward, move three to Rotate the male bolt 4 ' to make the walking body 1 and the glass substrate X i i ^ research riti4 to ride the rework honing stone 21, and along the time when the = stop, 'still maintain the attraction of the working platform 7, with the use of rotating skirt C The work Χ is raised as shown in Fig. 5, and the device is lowered to make the work level a 1, the glass plate Χ is rotated by 90 degrees, and then the substrate is raised.乍Thousands of mouths 7 and the broken glass substrate Χ are lowered together, and the length of the glass body 1 is carried by the carrying section 13 (for example, for walking η square squirting, - to the most suitable for completing the compensation, by the work _ 7 solution _==== = = Bay example (as shown) is used by the lifting device only 'the working platform is only given to the carrying section 13 by the rotating device c only to give the rotating light D Drr' (for example, bearing (four) snail π % ' The purpose of equalizing the function of 幵 。 ? ? 私 私 私 私 私 施 施 施 施 施 施 施 施 施 施 施 施 施 施 施 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖 赖9, 1G diagram shown in ^ 2 2 = can = use the reversible rotation of the fourth motor 31, as shown in the figure "between the body 1 and 咕 9" and along the nominal or reverse time will be the working platform 7 200808493 正所 f肖度'only, the second implementation of the filament is set in this example between the canister 9 and the working platform 7', that is, as long as the shawl plate X can be used to correct the required angle can. Use the Ζίτ 22 correction device Κ reversible fourth motor is rotating, take advantage of (four), t dine, take the route to the upper right, one of the upper left side, the camera P1, Ρ2 read the machine = the opposite side of the silk plate X Aligning the target 丫, in addition, installing a device to calculate the traversing direction before the _substrate X, Chading dingli' and according to the calculation result, driving the control device, promoting the fourth horse, and driving the suction The working platform of the board is 7 or in time; 21 The original 1' hunting is corrected by the rotation angle error, and the fresh side is used between the rotating grindstone side and the end of the chamfering process to avoid the chamfering process. The problem of the occurrence of defective products is increased by 4 degrees, which is improved. The lowering of the above-mentioned cameras P1 and P2 can be based on the glass reference Y _ pair (left and right) distance _ the whole position. Mi, left and right pairs = 8 strong 9, 10 shown above, the above position adjustment is achieved by the following structure: Hundreds of first, the shock-support frame 32, is a transverse full-length support frame 32 on the full length of the loading rail 33. Then, the sliders 35 of the left and right bases 34 are slidably engaged with the guide rails. The car has a left thread. (Between the middle and the other, the re-wheel 37 of the car 36 is combined with the base of the threaded rod 37, and the first and the second are respectively mounted on the left and right sides S i , , and the side, and the motor 5 drives the threaded rod 36 to reversely rotate. The ground rotation is close to the position where the cameras P1 and P2 are positioned to be aligned with the marker 互 in the phase 11 200808493. Figs. 11 and 12 show a third embodiment of the present invention, and in the third embodiment, the walking system is as shown in the figure. The advance and retreat moving device A has the structure according to the third embodiment, and therefore will not be redundantly described here. The removing body 1 is provided with a working platform 7 having a bearing glass. Substrate and attract

Maintaining the function, the surface of the working platform 7 is juxtaposed on the opposite sides of the working platform 7 with the guiding device D

The two carrying sections 13 which are close to or away from each other are driven by the sliding running device E to approach or leave each other. The above-described work platform 7 having the suction and holding function has the same structure and function as the first embodiment and the like. Further, on both sides of the traveling path of the traveling body 1, a rotating grindstone 21 for grinding the upper corners of the glass substrate X or the upper and lower corners is applied. The relative spacing between the left and right sides of the Tianran 'Fanglan Refracting Stones 21 can be adjusted according to the conventional method, which is adjusted according to the data on both sides of the glass substrate X (grinding, stupid, shi/shida). For example, the method of Patent Document 1. In addition, the rotating grindstone 21 is a ν-shaped groove honing stone or a cup-shaped multi-function (MULTI) grindstone. % (4) ^ 1 Real surface state of the modified bearing 22, off bearing The distortion caused by the weight of the glass substrate X itself. "The earth H heart is moved by the moving device F to move between the position immediately above the stop position of the traveling body 1 and the retracted position of the _walking path. The above-mentioned privately-packed clothes are provided with a holding cup and a fixed cup, and both ends are rotatably coupled to the ends of the track 43 by bearings; two 12 200808493 41 ^ ? 44 i? α ' and E,, The motor 46' is capable of driving the screw p in a reverse rotation, between the position directly above the work platform 7 that is stopped forward, and from the positive position, by the reversible rotation of the sixth motor 46. == Mechanical arm structure, etc. to achieve an equal purpose. ~4 or gamma ^ 'shift The body G system is provided with a lining member 47 which is lifted and lowered by 2 = and is suspected to rotate by a rotating device whose axis of rotation is 90 degrees vertically, while carrying the glass substrate 上 on the work platform 7. In the case of the slewing ship, the C-system is mounted on the base 41 τ as shown in the figure, and the arrangement is as shown in the figure between the motor 48 and the sense member 47 (also, _; The relative position of the upper and lower sides. At this time, the guiding member 5 is slidable as shown in the figure. The end of the limb is slidably inserted into the shaft, and the shaft is formed by the member, so that the two sides are each 41% and 47 years old. The suspicion of the Wei contact piece 47 is composed of the basin body, and the bottom surface is worn by /==, which sucks the ship, which is one of the =2 走2, the body of the body 1 is strong and quot; P1, 'The hunting is read by the money machine P1, P2, and the alignment of the surface corners of the glass substrate X that is attracted to the workpiece table 7 is marked as γ. 安装 The installation structure of the machine P1 and Ρ2 is solved by the left and right sides. The photographing of the cameras P1 and Ρ2 is close to each other, and the method of moving away from the hand and the manufacturing thereof are the same as those of the second embodiment, and therefore will not be described again, and will not be redundantly described. The shift amount of the quasi-marks before and after the traveling direction of the read glass substrate χ of the cameras P1 and Ρ2 is calculated by the external computing device for correction. The correction is performed by the 0-axis correction device 。. The shaft correcting device κ is the same as that of the second embodiment, that is, the motor 13 200808493 31 mounted under the working platform 7 of the traveling body, and the motor 31 is driven clockwise or rotated to correspond to the reading calculation. At the position of the position, the rotating work platform 7 and the glass substrate 吸引 that is sucked and held are rotated to achieve the purpose of correction. After the grinding element is formed, the working platform 7 carrying the glass substrate 停止 stops at the forward position and stops directly above the glass substrate X. The pad member 47 of the moving body G is lowered by the driving of the lifting device B, and is in contact with the glass substrate 上 on the work platform 7, and at this time, the suction on the side of the work platform 7 can be released, and the pad member 47 side is attracted. That is, the glass substrate X will be attracted and held by the spacer member 47, and then the lifting device B is driven to pull the glass substrate 工作g working platform 7. Then, the motor 48 of the rotating device C is driven 90 degrees to rotate the glass substrate χ, the lining device B _ pad member 47 and the glass substrate χ are lowered, and the glass substrate X is carried by the working platform 7 and is operated by When the platform 7 is attracted, the glass substrate is held, and the pad member 47 is released from the temple B, and the material drop device B is raised. Then, the work platform 7 is driven back, and then moved back. In the above, the camera P1, p2 is used to read the alignment mark 丫, and the shift position is calculated from the read data, and the zero-axis correcting device_motor 31 is driven as described above, and the rotating grindstone 21 is used. Perform the chamfering of the remaining sides. Thus, uniform chamfering of the sides of each φ can be achieved. When the traveling body 1 advances, the lifting device B is lowered, and the glass substrate is brought into contact with each other, and is attracted by the spacer member 47 to hold the glass substrate X, and the suction and holding of the work platform 7 are released.

Finally, the glass substrate χ pad member 47 is raised by the lifting device B, and the glass substrate is sucked to the position above the conveyor belt s by the private device F, and then the _ substrate is transferred and read by using the liter IV device 8 In the feeding belt, the attraction of the same-domain mat member is also provided. The glass substrate X can be used for the work platform. ▲ In addition, the second and third embodiments of the present invention are read by the camera ρι, p2. Aligning the target w Y sub-data to obtain the data for the 0-axis rotation correction to achieve a uniform glass substrate X 14 200808493

The amount of de-orientation of the side (de-angled amplitude), at this time, can be used in the customary way of 2005-223593, etc. f wood: Bente 2002. [Simplified illustration] Gentlemen's standard Read. Fig. 1 is a plan view showing an embodiment of the present invention. Fig. 2 is a longitudinal sectional view showing the embodiment shown in Fig. 1 . = Fig. 1, the longitudinal side view of the embodiment shown in Fig. 1: The figure of the figure shows that the glass plate maintains the state = the longitudinal direction of the glass substrate is rotated; the forged front view of the substrate is left. The brother 7 is a schematic diagram of the engineering operation. Fig. 8 is a plan view showing a second embodiment. ^9 is an enlarged longitudinal sectional view of Fig. 8. Fig. 10 is a partial enlarged side view of Fig. 9. Fig. 11 is an enlarged longitudinal side view showing the third embodiment. The music diagram 12 shows a longitudinal front view of the third embodiment. [Main component symbol description] Advance and retreat mobile device 3795〇5 or

A

B C D E F G K Lifting device Rotating device Guide device Sliding mobile device Mobile device Mobile body Θ Axis correction device P1 ' P2 Camera S Wheel belt X Glass substrate 15 200808493

Y standard 1 walking body 2 track 3 slider 4 male bolt 5 female bolt. 6 first motor 7 working platform 8 suction small hole 9 steam can 10 biting tooth 11 second motor 12 gear 13 carrying section 14 guide 15 slider 16 Third motor 17 Male bolt 18 Female bolt 21 Rotary grindstone 22 Carrying section 31 Fourth motor 32 Support frame 33 Guide rail 34 Base 35 Slider 36 Threaded rod 16 200808493 37 Nut 38 Fifth motor 41 Base 42 Slider 43 Track 44 Screw 45 nut 46 sixth motor 47 pad member 48 motor 49 steam can 50 guiding member

Claims (1)

200808493 X. Patent Application Range: 1. A grinding device comprising: a traveling body that advances or retreats by moving forward and backward moving devices; a working platform having a function of attracting and holding a glass substrate, and mounting At the center of the body, and rotated by the driving of the rotating device; the two carrying sections carrying the glass substrate are mounted on opposite sides of the top surface of the (four) working platform in parallel, and are mutually guided by the guiding device Approaching or leaving each other; / month moving walking, which makes the two carrying sections close to or away from each other; and clothing "on both sides of the walking path of the walking body to grind the rotating grindstone on both sides of the glass substrate; And lifting or lowering one of the working platform or the carrying section by the lifting device. 2. The grinding device according to the application of the patent application, wherein the working platform having the attraction holding function is disposed between the traveling body and the working platform having the attraction holding function, and the photographic lens is taken Laiji (4) Xianxian, according to the data taken by the item (9-axis correction device, and the axis-free correction is linked with the working platform to correct the error of the lateral angle of the glass substrate.) The device, comprising: a walking plate, which is advanced or retracted by the advancing and retreating mobile device; - a working platform having a glass substrate that is held by the crucible, and a 0-axis correction device is disposed between the walking bodies; ) Glass-based _ two-piece joints, which are co-located on the opposite sides of the Qiaotai Gu, and are close to each other or separated from each other by means of guiding means: a sliding walking device, which enables the two yokes to interact with each other Approaching or leaving; loading = walking path of the walking body _, grinding the two sides of the glass substrate to move, the body, which is directly above the walking route position of the walking surface after stopping and leaving the walking route Move between retracted positions; 18 200808493 • Attracting and holding, and clothing, which is installed on the mobile (4) ^ fine 丨 工作 工作 = = = = = = = 顺 驱 驱 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; The alignment lining of the glass substrate is read by a camera, and the axis correction device is driven according to the data taken by the _, and the θ-axis correction device is swayed by the operation, and the error of the lateral angle of the glass substrate is deviated. > 19