JP2007098564A - Polishing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing device for polishing the edges of a glass base board, capable of simply changing a load receptacle in accordance with the size of the glass base board. <P>SOLUTION: The polishing device is composed of a runner 1 to run advancing and retreating with an advance/retreat running means A, a table 7 equipped with a function to attract and hold the load receiving glass base board X installed in the center part of the runner in such a way as revolving with a revolving means B, two base board receiving stages 13 arranged parallel at two confronting edges of the table in such a way as running as approaching and going apart from each other with a guide means, a slide running means E to run the two stages approaching and going apart from each other, and circuit whetstones 21 installed on both sides of the runway for the runner for polishing the peripheral edges of the base board, wherein either of the table and the stages is/are elevated and sunk by an elevating/sinking means. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a polishing apparatus for polishing the edge of a glass substrate.

  In order to polish the edge of the glass substrate, first, the glass substrate is placed on a holding base of a traveling body that runs in the front-rear direction, and the glass substrate is held by a suction method.

  Next, the edges of the two sides of the glass substrate are polished with a rotating grindstone disposed on both sides of the traveling path while the holding table is traveling forward.

  When the traveling body moved forward after polishing stops, the glass substrate is turned 90 degrees together with the holding base, and then the glass substrate is moved rearward together with the holding base.

  At this time, the remaining two edges of the glass substrate are polished by a rotating grindstone on both sides of the traveling path (Patent Document 1).

  By the way, according to the structure of Patent Document 1, the size (plane area) of the stage on which the glass substrate is placed (load receiving) is made smaller than the size (plate area) of the glass substrate, and the polishing edge of the glass substrate is set to the stage. It protrudes from the edge of the.

  This factor is to avoid collision between the grinding wheel and the edge of the stage.

  Then, depending on the size of the glass substrate, a stage is required according to the size, and there is a problem that the stage needs to be replaced.

Therefore, there is a table in which the size placement (load receiving) of the glass substrate is performed from one table to the maximum (Patent Document 2).
Japanese Patent No. 3470057 Japanese Patent Laid-Open No. 2004-243411

  By the way, according to the structure of Patent Document 2, only a minimum main table or a sub table block is attached to an arm extending from each side of the main table according to the size of the glass substrate, and one unit for processing from a small size to a large size. It can be supported by.

  Then, since the sub table block is removed and the sub table block is attached one by one as the size is changed, there is a problem that the setup change takes time, and it takes a long time to significantly reduce the efficiency.

  In view of this, the present invention makes it very easy to change the load receiving according to the size of the glass substrate.

  Then, an error is prevented from occurring in the chamfering width (amount) of edge polishing of the glass substrate.

  In order to solve the above-described problems, the present invention provides a traveling body that advances and retreats by advancing and retreating means, and a table with a suction holding function of a load receiving glass substrate that is provided at the center portion of the traveling body so as to be turned by a turning means. Two parallel glass substrate receiving stages provided so as to approach and separate from the opposite two sides of the table by guide means, slide traveling means for causing both stages to approach and separate, and the traveling body And a circuit grindstone for polishing the edge of the glass substrate provided on both sides of the traveling path, and adopts a configuration in which either one of the table or the stage is moved up and down by the lifting means.

  In addition, the θ axis correction means of the table with the absorption holding function is interposed between the traveling body and the table with the suction holding function, and the error of the edge chamfering width is corrected by reading the alignment mark of the glass substrate with the camera. A configuration in which the θ-axis correcting means is operated so as to operate is adopted.

Furthermore, a traveling body that travels forward and backward by the advancing and retreating means, a table with a suction holding function of the load receiving glass substrate provided on the traveling body via the θ-axis correcting means, and guide means on the opposite two sides on the table Two parallel glass substrate receiving stages provided so as to move closer to and away from each other, slide traveling means provided so as to move both stages closer to and away from each other, and glass substrates provided on both sides of the traveling path of the traveling body A rotating grindstone for edge polishing, a moving body provided so as to be moved by a moving means between a position directly above the traveling path of the traveling stop position of the traveling body and a retracted position deviating from the traveling path, and the moving body A suction holding means provided so that the glass substrate on the table is sucked and held by a lifting means, and a turning means provided so as to turn the absorption holding means. To adopt a configuration in which in conjunction to operate the θ-axis correction means so as to read the alignment marks of the glass substrate performs error correction of the edge chamfer width by.

  As described above, according to the polishing apparatus of the present invention, the two edges of the glass substrate that is loaded on the stage and sucked and held on the table in the middle of the forward traveling of the traveling body are polished by the rotating grindstone, After the traveling body moves forward, the table is raised and the glass substrate is turned by turning 90 degrees, and then the table is lowered to receive the glass substrate on the stage, or the stage is raised to receive the glass substrate on the table. After lowering the stage, the remaining two edges of the glass substrate are polished with a rotating grindstone while the traveling body is moving backward, so that the four edges of the glass substrate are efficiently polished and according to the size of the glass substrate. By moving the parallel stages closer to or away from each other, it becomes possible to receive goods according to the size of the glass substrate.

  For this reason, the exchange of the table according to the size of the glass substrate becomes unnecessary.

  In particular, when the glass substrate is rectangular, it is possible to polish the short edge on the one hand and the long edge on the other hand when the traveling body is advanced and retracted, and with the rotation of the glass substrate. Even when the position of the moving edge (for example, by changing the polishing position from the short side to the long side) is changed, the glass substrate can be received by changing the position of the stage.

  Also, the glass substrate alignment mark is read by the camera, and the table with suction holding function of the glass substrate is rotated clockwise or counterclockwise by the θ-axis correction means so that no error occurs in the chamfer width (amount). To do.

  This enables chamfering with a uniform width (high accuracy) and automatic correction of angular errors. First, correction of errors as in the past is performed by first removing the suction hold by suction and correcting the rotation of the glass substrate. Thereafter, the troublesome process of holding the angle by suction is not necessary, and problems such as inaccurate chamfering because the error cannot be completely corrected can be eliminated.

  In addition, when it is necessary to correct the angle of the glass substrate by reading the alignment mark of the glass substrate held on the table of the traveling body with a camera, the suction holding glass substrate is swung with the table by the θ-axis correcting means to correct it. In addition, after moving the moving body directly above the glass substrate at the time of stopping forward traveling after polishing the two edges, the glass substrate released from suction holding on the table is sucked by the suction holding means lowered by the lifting means After holding and receiving the cargo, the glass substrate received together with the suction holding means together with the glass substrate is raised by the lifting means, and then the glass substrate is turned 90 degrees together with the suction holding means by the turning means, and then the glass substrate is placed on the table. After receiving and sucking and holding, the traveling body is moved backward, and then the traveling body is moved forward while traveling forward. When the alignment mark is read by the camera and the correction is required, the table is swiveled and the remaining two sides are polished by the rotating grindstone, so that the chamfering process can be performed with a uniform width (high accuracy) and the moving body. It is also possible to supply the glass substrate onto the table and to remove the chamfered glass substrate by using the movement of.

  A first embodiment of the present invention will be described with reference to the accompanying drawings.

  In the first embodiment of the present invention, as shown in FIGS. 1 to 6, the traveling body 1 moves forward and backward by the forward / backward traveling means A.

  In the illustrated case, the advancing / retreating means A includes a rail 2 laid in the front-rear direction, a slider 3 provided on both sides of the lower surface of the traveling body 1 and slidably engaged with the rail 2, and fixed in parallel with the rail 2. The male screw 4 provided to rotate at the position, the female screw 5 attached to the lower surface of the traveling body 1 and screwed into the male screw 4, and the first motor 6 that reversibly drives the male screw 4, Although the traveling body 1 is moved forward and backward by forward rotation and reverse rotation operation of the motor 6, it is not limited, and the traveling body 1 may be moved forward and backward depending on the configuration.

  Further, a table 7 having a suction holding function for the load receiving glass substrate X which is moved up and down by the lifting means B and turned by the turning means C is provided at the center on the traveling body 1.

  In the illustrated case, the table 7 is formed by a box having an infinite number of suction holes 8 on the top wall, and the table 7 is sucked to hold the glass substrate X placed on the table 7 by suction. In the illustrated case, the lifting / lowering means B is installed on the traveling body 1 via the cylinder 9 via the cylinder 9 so as to be lifted / lowered by the expansion / contraction of the cylinder 9. The gear 12 driven by the second motor 11 is meshed with the tooth portion 10 provided on the outer periphery of the lower part, and the table 7 is turned by the operation of the second motor 11, but it is raised and lowered by other methods. There is also.

  Further, on the opposite two sides of the table 7 are provided two load receiving stages 13 and 13 for the glass substrates X arranged in parallel, which are moved closer to and away from each other by the guide means D.

  The above-described stages 13 and 13 are made of square bars having a horizontal load receiving upper surface, and provided with two guide rails 14 that intersect at right angles to the traveling direction on the traveling body 1, and the stages 13 and 13 are provided on the guide rails 14 and 14. The sliders 15 provided on the lower surfaces of the both end portions are slidably engaged.

  Both stages 13 and 13 arranged in parallel are made to slide toward and away from each other by the slide travel means E.

  In the illustrated case, the slide travel means E is composed of a male screw 17 that is reversibly driven at a fixed position by a third motor 16 and a female screw 18 that is screwed into the male screw 17 and attached to the stages 13 and 13. Although the surface stages 13 and 13 are slid in the approach and separation directions by the reversible operation of the third motor 16, they may be slid by other methods.

  Further, on both sides of the traveling path of the traveling body 1, there are provided rotating grindstones 21 and 21 for polishing only the upper corners of the two sides of the glass substrate X or the upper and lower corners.

  Of course, the distance between the left and right rotating grindstones 21 and 21 is adjusted by numerical control according to the dimension between the two sides (polishing edges) of the glass substrate X as is well known. For example, the method of Patent Document 1 is adopted.

  In the figure, reference numeral 22 denotes a correction stage provided between the stages 13 and 13 on the traveling body 1 so that the upper surface is flush with the upper surface of the stage 13. The distortion caused by the own amount of the glass substrate X received by the correction stage 22. Preventing the occurrence of

  If comprised as mentioned above, as shown in FIG. 7, the glass substrate X will be mounted on the stage 13 of the traveling body 1 which has stopped retreating, and will be received (shown in FIG. 3).

  At this time, the surface stages 13 and 13 are slid in the approach or separation direction by the operation of the third motor 16 depending on the size of the glass substrate X, and are moved to an optimum position for receiving the cargo.

  Further, as shown in FIG. 4, the inside of the table 7 is sucked and the glass substrate X is sucked and held on the table 7.

  Next, the male screw 4 is driven by the forward rotation operation of the first motor 6, and the glass substrate X is moved forward together with the traveling body 1 while moving the glass substrate X by the rotating grindstones 21 and 21 as shown in FIG. Polish two edges along the running direction.

  When the traveling body 1 stops in front, the glass substrate X is first lifted together with the table 7 by the lifting means B as shown in FIG. After the substrate X is turned 90 degrees, the glass substrate X is lowered together with the table 7 by the lifting means B, and the glass substrate X is received on the stages 13 and 13 as shown in FIG.

  At this time, according to the length of the edge of the glass substrate X, both the stages 13 and 13 (for example, with respect to the long side support at the time of advancement of the traveling body 1, the support edge after turning is set to the short side). Then, both stages 13 and 13 are slid in the approaching direction and adjusted to the optimum load receiving position.

  Then, while the traveling body 1 is traveling backward by the reverse operation of the first motor 6 after turning, the remaining two edges of the glass substrate X are polished by the rotating grindstones 21 and 21 while traveling as shown in FIG. To do.

  The polished glass substrate is removed from the suction holding state by the table 7.

  In the above-described embodiment (in the case of illustration), the table 7 is raised and lowered by the raising / lowering means B. However, the table 7 is given only the turning function by the turning means C, and the stage 13 has the raising / lowering function (for example, For example, a cylinder may be interposed between the stage 13 and the female screw 18 to achieve the same purpose.

  The rotary grindstone 21 uses a V-groove grindstone, a cup grindstone, a multi grindstone or the like.

  In the second embodiment of the present invention, as shown in FIGS. 8, 9, and 10, between the traveling body 1 of the first embodiment and the table 7 with a suction holding function, the θ axis correction of the table 7 is performed. Means K are interposed.

  As the θ-axis correcting means K, a fourth motor 31 that performs a reversible operation is used. In the illustrated case, the fourth motor 31 is interposed between the traveling body 1 and the cylinder 9 and the table 7 together with the cylinder 9 is turned clockwise or counterclockwise. Although it was made to turn at an angle required for correction, it is not limited, For example, you may arrange | position between the cylinder 9 and the table 7. FIG. In short, the glass substrate X may be rotated by an angle necessary for correction.

The fourth motor 31 as the θ-axis correcting means K is operated at the corners on both sides of the glass substrate X in the middle of traveling by the pair of cameras P ₁ and P ₂ arranged on the upper left and right of the traveling path of the traveling body 1. The alignment mark Y is read, and the displacement amount of the alignment mark Y before and after the traveling direction of the glass substrate X accompanying this reading is calculated by a connected arithmetic device, and the control device reversibly operates the fourth motor 31 based on the calculation. Then, the suction-holding table 7 of the glass substrate X is turned clockwise and counterclockwise.

  The cause of this turning is that the chamfering width by the rotating grindstone 21 with the correction of the turning angle error is uniform so that there is no difference between the chamfering start side and the chamfering end side. It is to eliminate the occurrence.

The cameras P ₁ and P ₂ can be adjusted in position according to the width of the glass substrate X, that is, the opposing (left and right) distance of the left and right alignment marks Y.

As shown in FIGS. 8, 9, and 10, the position adjustment is performed by providing a frame 32 that crosses over the traveling path of the traveling body 1, and a guide rail 33 that is provided along the entire length of the frame 32. The slider 35 is slidably engaged, and a male screw provided with a right-handed screw from the middle to one end and a left-handed screw from the middle to the other end is supported so as to freely rotate at a fixed position along the entire length of the frame 32. one female screw 37 of which is held on left and right both base 34 to the right thread of the male screw 36 into the screw 36, the other female screw 37 narrowing Haji respectively to the left screw of the male screw 36, the camera P ₁ to the bases 34 , P ₂ is installed.

Then, the male screw 36 is reversibly driven by the fifth motor 37 so that the cameras P ₁ and P ₂ together with the base 34 are moved toward and away from each other so as to match (match) the position of the alignment mark Y. is there.

  In the third embodiment of the present invention, as shown in FIGS. 11 and 12, the traveling body 1 is advanced and retracted by the advance / retreat means A.

  The advancing / retreating means A is the same as in the first embodiment, and a description of the advancing / retreating method is omitted.

  Further, on the traveling body 1, a table 7 having a suction holding function for the glass substrate X to be received is provided, and two parallel sides that are moved closer to and away from each other by the guide means D on the opposite two sides of the table 7. The receiving stages 13 and 13 of the glass substrate X to be provided are provided, and both stages 13 and 13 are slid toward and away by the slide travel means E.

  The table 7 with the suction holding function, the slide guide means D and the slide travel means E of the stages 13 and 13 are the same as those in the first embodiment, and the description of the configuration and operation is omitted.

  Further, on both sides of the traveling path of the traveling body 1, there are provided rotating grindstones 21 and 21 for polishing only the upper corners of the two sides of the glass substrate X or the upper and lower corners.

  Of course, the distance between the left and right rotating grindstones 21 and 21 is adjusted by numerical control according to the dimension between the two sides (polishing edges) of the glass substrate X as is well known. For example, the method of Patent Document 1 is adopted.

  The rotating grindstone 21 uses a V grindstone, a cup grindstone, a multi grindstone, or the like.

  In addition, the correction stage 22 is provided similarly to 1st Embodiment, and generation | occurrence | production of the distortion by the dead weight of the glass substrate X which received the load is prevented.

  In addition, a moving body G is provided that moves by the moving means F between a position directly above the traveling path where the traveling body 1 has stopped moving forward and a retracted position that deviates from the traveling path.

  In the illustrated case, the moving means F includes a horizontal rail 43 slidably engaged with a slider 42 provided on the base 41 of the moving body G, and a bearing so that both ends of the rail 43 rotate freely at both ends. And the sixth motor 46 that reversibly drives the male screw 44. The movable body G is reversibly operated by the sixth motor 46. Is moved forward and backward between the position immediately above the table 7 that has stopped moving forward and the retracted position that is removed from the position directly above, but the same purpose is achieved by other configurations, for example, the engagement between the pinion with a drive function and the rack, the telescopic arm, etc. May be achieved.

  Further, the moving body G has a pad 47 with a suction holding function for lifting and lowering by the lifting means B and turning by the turning means C having a vertical rotation axis of 90 degrees and receiving the glass substrate X on the table 7. It is provided.

  In the illustrated case, the turning means C has a turning motor 48 mounted on the lower surface of the base 41, and the lifting means B is provided with a cylinder 49 interposed between the turning motor 48 and the pad 47 in the illustrated case. The upper and lower arrangements of the motor 48 and the cylinder 49 may be reversed. As shown in the figure, the opposite surfaces of the guide member 50 made of a cylindrical body and a shaft member that are slidably fitted on the opposite sides are placed on the base 41 and the pad. 47, and the rotation of the pad 47 is stopped.

  The suction holding function of the pad 47 uses a box having numerous small holes (not shown) on the bottom wall of the pad 47, sucks the inside of the box, and sucks and holds the glass substrate X on the lower surface of the pad 47. It is supposed to be.

Also, a pair of cameras P ₁ and P ₂ are arranged on the upper left and right sides of the traveling path of the traveling body 1, and the alignment marks Y at the corners on the upper surface of the suction holding glass substrate X on the table 7 by these cameras P ₁ and P ₂ . Is supposed to read.

The movement in the approaching / separating direction to match the cameras P ₁ and P ₂ directly above the cameras P ₁ and P ₂ and the left and right alignment marks Y is the same as in the second embodiment, and the illustration, configuration, and description of the operation are omitted. .

  The shift amount of the alignment mark Y before and after the glass substrate X in the traveling direction accompanying the reading is calculated by a connected arithmetic unit, and is corrected based on the calculation.

  In the above correction, the motor 31 as the θ-axis correcting means K, which is installed on the lower side of the table 7 of the traveling body 1, is operated in the clockwise and counterclockwise directions according to the deviation amount. Then, the suction and holding glass substrate X together with the table 7 is rotated.

  When the table 7 is stopped at the forward movement position together with the polished glass substrate X, the pad 47 of the moving body G stopped immediately above the glass substrate X is lowered by the operation of the elevating means B, and the glass substrate X on the table 7 is lowered. First, the suction on the table 7 side is released, then the pad 47 side is sucked, the glass substrate X is sucked and held on the mat 47, and then the table B is moved from above the table 7 by the operation of the lifting means B. The glass substrate X is levitated.

  Thereafter, the glass substrate X is turned by the 90-degree operation of the motor 48 of the turning means C, and after turning, the glass substrate X is lowered together with the pad 47 by the operation of the lifting means B, and the glass substrate X is placed on the table 7. After that, the glass substrate X is absorbed and held on the table 7, and then the suction of the glass substrate X by the pad 47 is released, and then the pad 47 is raised by the operation of the elevating means B.

  After that, the table 7 is moved backward and moved forward after moving backward.

During this advancement, the alignment mark Y is read by the cameras P ₁ and P ₂ as described above, and the shift amount accompanying the reading is corrected by operating the motor 31 of the θ-axis correction means K as described above, and the rotating grindstone 21 Chamfer the two remaining edges. Then, the chamfer width of each edge is made uniform.

  When the forward movement of the traveling body 1 is completed, the pad 47 is moved down on the glass substrate X by the lifting means B, the glass substrate X is sucked and held by the pad 47, and the suction holding of the glass substrate X by the table 7 is released.

  Thereafter, the pad 47 is raised together with the glass substrate X by the lifting means B, and then the glass substrate X is transferred onto the carry-out conveyor S by the operation of the moving means F. After the transfer, the glass substrate X is transferred onto the carry-out conveyor S by the lift means B. Release the suction (on the side of the pad 47) and transfer. The glass substrate X can be supplied onto the table 7 using the pad 47.

Incidentally, the reading of the alignment mark Y by the cameras P ₁ and P ₂ for performing the uniform θ-axis turning correction of the edge chamfering amount (chamfering width) of the second and third embodiments is, for example, Japanese Patent Application No. 2002-379505. No. or Japanese Patent Application No. 2005-223593.

It is a top view which shows 1st Embodiment of this invention. It is a longitudinal front view same as the above. It is the longitudinal section side view. It is a vertical front view which shows suction holding | maintenance of a glass substrate. It is a vertical front view which shows turning of a glass substrate. It is a vertical front view which shows grinding | polishing of the two sides with which a glass substrate remains. FIG. It is a top view which shows 2nd Embodiment. It is a vertical expansion front view same as the above. It is the same part notch large side view. It is a vertical expansion side view which shows 3rd Embodiment. It is the longitudinal section front view.

Explanation of symbols

A Advancing / retreating means B Lifting means C Turning means D Guide means E Slide traveling means X Glass substrate Y Alignment mark 1 Traveling body 2 Rail 3 Slider 4 Male screw 5 Female screw 6 First motor 7 Table 8 Small hole 9 Cylinder 10 Tooth part 11 Second motor 12 Gear 13 Stage 14 Guide rail 15 Slider 16 Third motor 17 Male screw 18 Female screw 21 Rotary grindstone K θ-axis correction means P ₁ , P ₂ Camera 31 Fourth motor 32 Frame 33 Guide rail 34 Base 35 Slider 36 male screw 37 fifth motor F moving means G moving body 41 base 42 slider 43 rail 44 male screw 45 female screw 46 sixth motor 47 pad 48 turning motor 49 cylinder 50 guide member

Claims (3)

  A traveling body that advances and retreats by the advancing and retreating means, a table with a suction holding function of a load receiving glass substrate that is provided at the center portion of the traveling body by the turning means, and guide means on opposite two sides of the table. Two side-by-side glass substrate receiving stages provided so as to move toward and away from each other, slide traveling means for causing both stages to move toward and away from each other, and edges of the glass substrate provided on both sides of the traveling path of the traveling body A polishing apparatus comprising a circuit grindstone for polishing, wherein either one of the table or the stage is moved up and down by a lifting means.   The θ-axis correcting means of the table with the absorption holding function is interposed between the traveling body and the table with the suction holding function, and the error of the edge chamfering width is corrected by reading the alignment mark of the glass substrate with a camera. The polishing apparatus according to claim 1, wherein the θ-axis correction unit is interlocked to operate.   A traveling body that advances and retreats by the advancing and retreating means, a table with a suction holding function of the load receiving glass substrate provided on the traveling body via the θ-axis correcting means, and a guide means on the opposite two sides of the table by approaching and moving away from each other Two glass substrate receiving stages arranged side by side, slide running means provided to move both stages closer to and away from each other, and edges of the glass substrates provided on both sides of the running path of the traveling body A grinding wheel for polishing, a moving body provided so as to be moved by a moving means between a position directly above the traveling path of the forward stop position of the traveling body and a retracted position deviating from the traveling path, and an elevating means on the moving body And a suction holding means provided to suck and hold the glass substrate on the table, and a turning means provided to turn the absorption holding means. Polishing apparatus is characterized in that interlocked allowed to operate the θ-axis correction means so as to correct the error of the edge chamfer width by reading the alignment marks of the glass substrate.

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