TW200746349A - Stacking rings for wafers - Google Patents

Stacking rings for wafers

Info

Publication number
TW200746349A
TW200746349A TW096104642A TW96104642A TW200746349A TW 200746349 A TW200746349 A TW 200746349A TW 096104642 A TW096104642 A TW 096104642A TW 96104642 A TW96104642 A TW 96104642A TW 200746349 A TW200746349 A TW 200746349A
Authority
TW
Taiwan
Prior art keywords
wafers
ring
wafer
shippers
rings
Prior art date
Application number
TW096104642A
Other languages
English (en)
Inventor
Will D Harrison
Phil Glynn
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200746349A publication Critical patent/TW200746349A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
TW096104642A 2006-02-08 2007-02-08 Stacking rings for wafers TW200746349A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77183906P 2006-02-08 2006-02-08

Publications (1)

Publication Number Publication Date
TW200746349A true TW200746349A (en) 2007-12-16

Family

ID=38345802

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096104642A TW200746349A (en) 2006-02-08 2007-02-08 Stacking rings for wafers

Country Status (2)

Country Link
TW (1) TW200746349A (zh)
WO (1) WO2007092557A2 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107004627A (zh) * 2014-11-27 2017-08-01 阿基里斯株式会社 环形间隔件
CN112352307A (zh) * 2018-06-27 2021-02-09 村田机械株式会社 基材载体及基材载体堆叠

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008013468U1 (de) * 2008-10-14 2008-12-18 Christian Senning Verpackungsmaschinen Gmbh & Co. Verpackungen für dünnflächige, scheibenförmige Produkte
US10896834B2 (en) 2014-02-25 2021-01-19 Entegris, Inc. Wafer shipper with stacked support rings
EP3231009B1 (en) * 2014-12-08 2021-07-07 Entegris, Inc. Horizontal substrate container with integral corner spring for substrate containment
US10832927B2 (en) * 2015-12-18 2020-11-10 Texas Instruments Incorporated Interlocking nest wafer protector
DE102016113924B4 (de) 2016-07-28 2024-06-13 Infineon Technologies Ag Waferbox und Verfahren zum Anordnen von Wafern in einer Waferbox
US11257700B2 (en) * 2017-08-29 2022-02-22 Daewon Semiconductor Packaging Industrial Company Separators for handling, transporting, or storing semiconductor wafers
HUE054704T2 (hu) * 2018-12-06 2021-09-28 Heraeus Deutschland Gmbh & Co Kg Csomagolási egység szubsztrátok számára

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6550619B2 (en) * 2000-05-09 2003-04-22 Entergris, Inc. Shock resistant variable load tolerant wafer shipper
US6926150B2 (en) * 2003-02-05 2005-08-09 Texas Instruments Incorporated Protective interleaf for stacked wafer shipping
US20050072121A1 (en) * 2003-10-06 2005-04-07 Texas Instruments Incorporated Method and system for shipping semiconductor wafers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107004627A (zh) * 2014-11-27 2017-08-01 阿基里斯株式会社 环形间隔件
CN112352307A (zh) * 2018-06-27 2021-02-09 村田机械株式会社 基材载体及基材载体堆叠

Also Published As

Publication number Publication date
WO2007092557A2 (en) 2007-08-16
WO2007092557A3 (en) 2008-07-17

Similar Documents

Publication Publication Date Title
TW200746349A (en) Stacking rings for wafers
USD631284S1 (en) Top for beverage container
USD620310S1 (en) Base for a drinking mug
USD698904S1 (en) Vacuum flange ring
USD582206S1 (en) Top for beverage container
USD629880S1 (en) Diffuser
USD708945S1 (en) Bottle stopper
USD648177S1 (en) Beverage container
USD684483S1 (en) Container
USD650677S1 (en) Container base
USD652622S1 (en) Handle bag without flap
USD570159S1 (en) Beverage container
USD682690S1 (en) Protective shipping cap
USD653560S1 (en) Reversible beverage package, carrier and builder
USD683220S1 (en) Bottle
USD634586S1 (en) Plate
USD638112S1 (en) Diffuser
USD576735S1 (en) Petal vent for a baby bottle
TW200717747A (en) Wafer-to-wafer stacking with supporting pedestals
USD714144S1 (en) Closure for a container
USD683627S1 (en) Bottle
USD673754S1 (en) Shipping pallet
USD685031S1 (en) Combined bottle tag and bottle
USD666102S1 (en) Container
USD650546S1 (en) Shipping pallet