TW200746241A - Non-planar surface structures and process for microelectromechanical systems - Google Patents

Non-planar surface structures and process for microelectromechanical systems

Info

Publication number
TW200746241A
TW200746241A TW096112529A TW96112529A TW200746241A TW 200746241 A TW200746241 A TW 200746241A TW 096112529 A TW096112529 A TW 096112529A TW 96112529 A TW96112529 A TW 96112529A TW 200746241 A TW200746241 A TW 200746241A
Authority
TW
Taiwan
Prior art keywords
layers
movable
stationary
voids
mems device
Prior art date
Application number
TW096112529A
Other languages
English (en)
Inventor
Qi Luo
Sriram Akella
Lior Kogut
Original Assignee
Qualcomm Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Inc filed Critical Qualcomm Inc
Publication of TW200746241A publication Critical patent/TW200746241A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0008—Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
TW096112529A 2006-04-19 2007-04-10 Non-planar surface structures and process for microelectromechanical systems TW200746241A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/406,981 US7527996B2 (en) 2006-04-19 2006-04-19 Non-planar surface structures and process for microelectromechanical systems

Publications (1)

Publication Number Publication Date
TW200746241A true TW200746241A (en) 2007-12-16

Family

ID=38543977

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096112529A TW200746241A (en) 2006-04-19 2007-04-10 Non-planar surface structures and process for microelectromechanical systems

Country Status (3)

Country Link
US (1) US7527996B2 (zh)
TW (1) TW200746241A (zh)
WO (1) WO2007126919A2 (zh)

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US20100177411A1 (en) * 2009-01-09 2010-07-15 Shashikant Hegde Wafer level lens replication on micro-electrical-mechanical systems
US7864403B2 (en) * 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
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US20130120416A1 (en) * 2011-11-11 2013-05-16 Qualcomm Mems Technologies, Inc. Storage capacitor for electromechanical systems and methods of forming the same
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