TW200740322A - Coating liquid feeding unit - Google Patents

Coating liquid feeding unit

Info

Publication number
TW200740322A
TW200740322A TW096105610A TW96105610A TW200740322A TW 200740322 A TW200740322 A TW 200740322A TW 096105610 A TW096105610 A TW 096105610A TW 96105610 A TW96105610 A TW 96105610A TW 200740322 A TW200740322 A TW 200740322A
Authority
TW
Taiwan
Prior art keywords
coating liquid
feeding
feeding unit
disposed
stocking
Prior art date
Application number
TW096105610A
Other languages
English (en)
Inventor
Nobuhiko Murai
Toyoji Terada
Original Assignee
Toray Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Eng Co Ltd filed Critical Toray Eng Co Ltd
Publication of TW200740322A publication Critical patent/TW200740322A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material

Landscapes

  • Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Pens And Brushes (AREA)
TW096105610A 2006-03-01 2007-02-15 Coating liquid feeding unit TW200740322A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006055218A JP2007229635A (ja) 2006-03-01 2006-03-01 塗布液供給装置

Publications (1)

Publication Number Publication Date
TW200740322A true TW200740322A (en) 2007-10-16

Family

ID=38458881

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096105610A TW200740322A (en) 2006-03-01 2007-02-15 Coating liquid feeding unit

Country Status (4)

Country Link
JP (1) JP2007229635A (zh)
KR (1) KR101313484B1 (zh)
TW (1) TW200740322A (zh)
WO (1) WO2007099766A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009172491A (ja) * 2008-01-22 2009-08-06 Daikin Ind Ltd 静電噴霧装置
CN105537051A (zh) * 2015-12-08 2016-05-04 无锡万能胶粘剂有限公司 一种粘合剂的涂刷装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5513683U (zh) * 1978-07-12 1980-01-28
JPS58163372A (ja) * 1982-03-24 1983-09-28 テルモ株式会社 血液中気泡除去装置
JPH09192568A (ja) * 1996-01-22 1997-07-29 Chugai Ro Co Ltd ダイコータへの塗料供給装置
JP3414572B2 (ja) * 1996-02-06 2003-06-09 東レ株式会社 塗布装置および塗布方法
JP3628895B2 (ja) * 1999-01-28 2005-03-16 大日本スクリーン製造株式会社 処理液供給装置

Also Published As

Publication number Publication date
WO2007099766A1 (ja) 2007-09-07
KR101313484B1 (ko) 2013-10-01
JP2007229635A (ja) 2007-09-13
KR20080108093A (ko) 2008-12-11

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