TW200738348A - Coating method, coating apparatus and memory medium - Google Patents
Coating method, coating apparatus and memory mediumInfo
- Publication number
- TW200738348A TW200738348A TW096101501A TW96101501A TW200738348A TW 200738348 A TW200738348 A TW 200738348A TW 096101501 A TW096101501 A TW 096101501A TW 96101501 A TW96101501 A TW 96101501A TW 200738348 A TW200738348 A TW 200738348A
- Authority
- TW
- Taiwan
- Prior art keywords
- coating
- resist
- scanning
- nozzle
- finish
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006010762A JP4564454B2 (ja) | 2006-01-19 | 2006-01-19 | 塗布方法及び塗布装置及び塗布処理プログラム |
JP2006027471A JP4516034B2 (ja) | 2006-02-03 | 2006-02-03 | 塗布方法及び塗布装置及び塗布処理プログラム |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200738348A true TW200738348A (en) | 2007-10-16 |
TWI313193B TWI313193B (en) | 2009-08-11 |
Family
ID=38501759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096101501A TWI313193B (en) | 2006-01-19 | 2007-01-15 | Coating method, coating apparatus and memory medium |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR101346887B1 (zh) |
TW (1) | TWI313193B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109574511A (zh) * | 2017-09-29 | 2019-04-05 | 中外炉工业株式会社 | 基板的涂布方法以及基板的涂布装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010146928A1 (ja) * | 2009-06-19 | 2010-12-23 | タツモ株式会社 | 基板用塗布装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07335527A (ja) * | 1994-06-08 | 1995-12-22 | Dainippon Screen Mfg Co Ltd | 処理液塗布装置 |
JP4130058B2 (ja) * | 2000-10-10 | 2008-08-06 | 東京応化工業株式会社 | 塗布方法 |
JP4562412B2 (ja) * | 2004-03-25 | 2010-10-13 | 東京応化工業株式会社 | 塗膜形成方法 |
-
2007
- 2007-01-15 TW TW096101501A patent/TWI313193B/zh active
- 2007-01-18 KR KR1020070005581A patent/KR101346887B1/ko active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109574511A (zh) * | 2017-09-29 | 2019-04-05 | 中外炉工业株式会社 | 基板的涂布方法以及基板的涂布装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI313193B (en) | 2009-08-11 |
KR101346887B1 (ko) | 2013-12-31 |
KR20070077089A (ko) | 2007-07-25 |
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