TW200734826A - Exposing method for manufacturing flat panel display - Google Patents

Exposing method for manufacturing flat panel display

Info

Publication number
TW200734826A
TW200734826A TW095107305A TW95107305A TW200734826A TW 200734826 A TW200734826 A TW 200734826A TW 095107305 A TW095107305 A TW 095107305A TW 95107305 A TW95107305 A TW 95107305A TW 200734826 A TW200734826 A TW 200734826A
Authority
TW
Taiwan
Prior art keywords
flat panel
panel display
resolution
patterned layer
exposing method
Prior art date
Application number
TW095107305A
Other languages
English (en)
Other versions
TWI327257B (en
Inventor
Cheng-Chi Wang
Original Assignee
Chi Mei Optoelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chi Mei Optoelectronics Corp filed Critical Chi Mei Optoelectronics Corp
Priority to TW095107305A priority Critical patent/TWI327257B/zh
Priority to US11/681,325 priority patent/US7851141B2/en
Publication of TW200734826A publication Critical patent/TW200734826A/zh
Application granted granted Critical
Publication of TWI327257B publication Critical patent/TWI327257B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2024—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure of the already developed image
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70458—Mix-and-match, i.e. multiple exposures of the same area using a similar type of exposure apparatus, e.g. multiple exposures using a UV apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7084—Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels
TW095107305A 2006-03-03 2006-03-03 Exposing method for manufacturing flat panel display TWI327257B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW095107305A TWI327257B (en) 2006-03-03 2006-03-03 Exposing method for manufacturing flat panel display
US11/681,325 US7851141B2 (en) 2006-03-03 2007-03-02 Flat panel display manufacturing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095107305A TWI327257B (en) 2006-03-03 2006-03-03 Exposing method for manufacturing flat panel display

Publications (2)

Publication Number Publication Date
TW200734826A true TW200734826A (en) 2007-09-16
TWI327257B TWI327257B (en) 2010-07-11

Family

ID=38749928

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095107305A TWI327257B (en) 2006-03-03 2006-03-03 Exposing method for manufacturing flat panel display

Country Status (2)

Country Link
US (1) US7851141B2 (zh)
TW (1) TWI327257B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4550126B2 (ja) * 2008-04-25 2010-09-22 東京エレクトロン株式会社 エッチングマスク形成方法、エッチング方法、および半導体デバイスの製造方法
FR2974194B1 (fr) 2011-04-12 2013-11-15 Commissariat Energie Atomique Procede de lithographie
JP2013033870A (ja) * 2011-08-02 2013-02-14 Canon Inc 半導体デバイスおよびその製造方法
US8815498B2 (en) * 2012-08-22 2014-08-26 Nanya Technology Corp. Method of forming tight-pitched pattern
US9217917B2 (en) * 2014-02-27 2015-12-22 Taiwan Semiconductor Manufacturing Company, Ltd. Three-direction alignment mark

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6187486B1 (en) 1999-01-05 2001-02-13 Worldwide Semiconductor Manufacturing Corp. Method of multi-exposure for improving photolithography resolution
JP3619513B2 (ja) 2001-12-21 2005-02-09 エイエスエムエル ネザランドズ ベスローテン フエンノートシャップ デバイス製造方法、それにより製造されたデバイスおよびそのためのリソグラフィ装置
JP2005062802A (ja) 2003-07-28 2005-03-10 Advanced Display Inc 薄膜トランジスタアレイ基板の製法
DE102004013886A1 (de) * 2004-03-16 2005-10-06 Carl Zeiss Smt Ag Verfahren zur Mehrfachbelichtung, Mikrolithografie-Projektionsbelichtungsanlage und Projektionssystem
US20080085471A1 (en) * 2006-10-10 2008-04-10 Anderson Brent A Photolithographic method using multiple photoexposure apparatus

Also Published As

Publication number Publication date
TWI327257B (en) 2010-07-11
US20070275311A1 (en) 2007-11-29
US7851141B2 (en) 2010-12-14

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees