TW200724853A - Measuring system with zero Abbe error and method thereof - Google Patents

Measuring system with zero Abbe error and method thereof

Info

Publication number
TW200724853A
TW200724853A TW094146913A TW94146913A TW200724853A TW 200724853 A TW200724853 A TW 200724853A TW 094146913 A TW094146913 A TW 094146913A TW 94146913 A TW94146913 A TW 94146913A TW 200724853 A TW200724853 A TW 200724853A
Authority
TW
Taiwan
Prior art keywords
sample
measuring system
abbe error
moving table
linear scales
Prior art date
Application number
TW094146913A
Other languages
Chinese (zh)
Other versions
TWI267622B (en
Inventor
Chyan-Chi Wu
Han-Fu Wang
Cheng-Chih Hsu
Chen-Yu Wang
Bor-Jiunn Wen
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW94146913A priority Critical patent/TWI267622B/en
Application granted granted Critical
Publication of TWI267622B publication Critical patent/TWI267622B/en
Publication of TW200724853A publication Critical patent/TW200724853A/en

Links

Abstract

A measuring system with zero Abbe error is provided. The measuring system includes a moving table, a detecting device and a first and a second three-dimensional linear scales. The moving table carries a sample to be measured. The detecting device is to detect the sample profile and measure a vertical height of a measuring point relative to the moving table. The first and the second three-dimensional linear scales are oppositely arranged against the sample, and are able to move vertically to fine-tune their vertical height. In this way, the vertical heights of the sample and the linear scales are at the same level, so as to eliminate the Abbe error during the sample measurement.
TW94146913A 2005-12-28 2005-12-28 Measuring system with zero Abbe error and method thereof TWI267622B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94146913A TWI267622B (en) 2005-12-28 2005-12-28 Measuring system with zero Abbe error and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94146913A TWI267622B (en) 2005-12-28 2005-12-28 Measuring system with zero Abbe error and method thereof

Publications (2)

Publication Number Publication Date
TWI267622B TWI267622B (en) 2006-12-01
TW200724853A true TW200724853A (en) 2007-07-01

Family

ID=38220390

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94146913A TWI267622B (en) 2005-12-28 2005-12-28 Measuring system with zero Abbe error and method thereof

Country Status (1)

Country Link
TW (1) TWI267622B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109916315B (en) * 2019-03-29 2024-02-23 华侨大学 Measuring device based on separation type grating
TWI759970B (en) * 2020-11-20 2022-04-01 微正股份有限公司 Optical scale ball bar and measurement data processing method thereof
CN114518068A (en) * 2020-11-20 2022-05-20 微正股份有限公司 Double-reading head optical ruler ball rod and measured value processing method thereof
CN114877840B (en) * 2022-06-06 2023-07-14 武汉理工大学 Electric triggering type soft measuring head calibration device and calibration method

Also Published As

Publication number Publication date
TWI267622B (en) 2006-12-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees