CN114518068A - Double-reading head optical ruler ball rod and measured value processing method thereof - Google Patents
Double-reading head optical ruler ball rod and measured value processing method thereof Download PDFInfo
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- CN114518068A CN114518068A CN202011312866.8A CN202011312866A CN114518068A CN 114518068 A CN114518068 A CN 114518068A CN 202011312866 A CN202011312866 A CN 202011312866A CN 114518068 A CN114518068 A CN 114518068A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 141
- 238000003672 processing method Methods 0.000 title abstract description 6
- 238000005259 measurement Methods 0.000 claims abstract description 125
- 238000000034 method Methods 0.000 claims abstract description 26
- 238000012545 processing Methods 0.000 claims description 34
- 230000009977 dual effect Effects 0.000 claims description 24
- 238000009987 spinning Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 abstract description 2
- 238000013461 design Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
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- 230000036544 posture Effects 0.000 description 5
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- 230000007246 mechanism Effects 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
Abstract
The invention provides a double-reading head optical scale ball rod and a measurement value processing method thereof, which comprises a first grating scale, a second grating scale, a first reading head and a second reading head, wherein the first reading head reads a first measurement value from the first grating scale, and the second reading head reads a second measurement value from the second grating scale. The first grating scale, the second grating scale, the first reading head and the second reading head are arranged according to a setting, so that a known relation exists between a first Abbe error in the first measurement value and a second Abbe error in the second measurement value. The invention also provides a measured value processing method, which processes the first measured value and the second measured value according to the relation between the first Abbe error and the second Abbe error to obtain a correct measured value. Thereby improving the measurement accuracy.
Description
Technical Field
The present invention relates to a ball bar and a method for processing measured values thereof, and more particularly, to an optical ruler ball bar having dual heads and a method for processing measured values thereof.
Background
The ball bearing is provided with a measuring ball at two ends of the ball rod and matched with the ball socket, and the ball bearing is provided with a displacement sensor for measuring the distance between the ball centers of the ball bearing at the two ends (which can be simply called as the center distance). Because the ball bearing has no rotational constraint, the ball rod can freely rotate on the axis formed by the ball centers of the ball bearings at the two ends, and has an uncertain spin angle. The club in this specification may also be a ball bearing with a measuring ball at one end and a ball socket at the other end, and other types of joints, such as universal joints. When the cue is used for measuring the distance between two points in space, an included angle is formed between the cue and a horizontal plane, and the included angle can be called as an inclined angle. The measured attitude of the club is determined by three factors: center distance, tilt angle, and spin angle.
Because the displacement sensor of the ball arm is not completely ideal, a back gap exists between the linear guide elements, the self weight can cause the structure to flex, the environmental temperature change can cause the element to deform, and the like, the measured value of the ball arm does not have a simple linear relation with the central distance, and the measurement error can occur.
The optical scale is used as a displacement sensor by an operator, the ball rod can be called an optical scale ball rod, the optical scale ball rod comprises a scale component and a reading head component, the reading head is fixed on the reading head component, the grating scale is fixed on the scale component, and guide elements such as a guide rod and a bush are arranged on the scale component and the reading head component, so that the scale component and the reading head component can be guided to move linearly, and displacement sensing signals of the reading head can be sent out in a wire or wireless mode. In the optical scale rod, a measurement error occurs when a back clearance exists between the bushing and the guide rod, the reason for the error is deeply researched, the back clearance between the bushing and the guide rod is found to enable the reading head to be not parallel to the grating scale, a deflection angle exists between the bushing and the guide rod, a measurement point on the grating scale can deviate due to the deflection angle, the reading head can sense extra displacement, and the measurement error is caused, is related to the distance between the reading head and the grating scale and the deflection angle, and can be classified as Abbe error (Abbe error).
To describe the movement of the ball reading head of the optical ruler relative to the grating ruler, a grating ruler coordinate system can be defined, which takes the central line of the surface of the grating ruler as XSThe axis is positive in the direction of increasing the center distance of the grating scale relative to the reading head, and positive in the direction of the normal line of the scale surfaceSThe axis direction, and then the right hand rule defines YSA shaft. Under this definition, the reading head is relative to the grating scale coordinate system XSThe rotation of the shaft being Roll (Roll), for YSThe rotation of the shaft is Pitch (Pitch), for ZSThe rotation of the shaft is Yaw (Yaw).
When the guiding element of the optical scale ball rod, such as the bush and the guiding rod, have back clearance, the scale component and the reading head component will rotate around the measuring ball at the end under the action of gravity, and when the scale surface of the optical scale ball rod grating scale is upward, the reading head will have a grating scale coordinate system Y relative to the grating scaleSThe pitching rotation of the shaft causes the measurement point to change, causing the above-mentioned abbe error. Light (es)The bending stiffness of the optical ruler ball rod is limited, the optical ruler ball rod can be deflected under the action of gravity, and the deflection can cause the reading head to rotate in a pitching mode relative to the grating ruler, so that the Abbe error is caused.
Referring to fig. 1, fig. 1 shows a schematic view of an optical ruler ball rod 100 placed on a calibration plate 10, wherein the calibration plate 10 is horizontally placed. The optical ruler-ball rod 100 can be composed of a reading head assembly 101 and a ruler assembly 103, the reading head assembly 101 includes a reading head 102, the ruler assembly 103 includes a grating ruler 104, the measuring balls at two ends are respectively PBAnd PPIt is shown that when the rotation angle of head 102 with respect to grating scale 104 is roll angle a with respect to the Xs axis, pitch angle B with respect to the Ys axis, yaw angle C with respect to the Zs axis, and grating scale 104 moves in the positive direction of the Xs axis with respect to head 102, the center distance increases.
Referring to fig. 2A, fig. 2A is another schematic view showing an optical ruler ball 100 disposed on a calibration plate 10, fig. 2A is a front view showing a spin angle of 0 degree, and two measurement balls P are assumedBAnd PPWith a center distance d therebetween (not shown in fig. 2A). When the scale surface of the linear scale 104 is horizontal and the Zs axis (shown in fig. 1) is pointing upward, the spin angle is defined as 0 degrees and the measurement value is d1, and in this measurement position, when there is a backlash between the bushing and the guide bar of the optical scale 100, the scale assembly 103 and the readhead assembly 101 will respectively measure the ball P at their ends under the action of gravityPAnd PBRotation, i.e. the head 102 has a grating scale coordinate system Y with respect to the grating scale 104SPitch rotation of the shaft (shown in FIG. 1) causes the readhead 102 to be no longer parallel to the scale 104, at a pitch angle B1As shown in fig. 2A.
The optical path of the read head 102 is designed such that when the read head 102 is parallel to the scale surface of the grating scale 104, the plane formed by the light emitted from the read head 102 and the light reflected from the surface of the grating scale 104 is perpendicular to the surface of the grating scale 104, so that when the read head 102 is not parallel to the scale surface of the grating scale 104, there is a pitch angle B between the two1When the light source is used, the plane formed by the emitted light and the reflected light is not perpendicular to the surface of the grating ruler any more and has a pitch angle B1The measuring point is in X of the grating ruler coordinate systemSThe axis (shown in FIG. 1) is shifted, and the reading head 102 senses this additional shift, resulting in a measurement error e, which is measured by the distance between the reading head 102 and the surface of the grating scale 104 and the pitch angle B1The decision, therefore, is one of the abbe errors.
Referring to fig. 2B, fig. 2B is a schematic view of an optical ruler ball stick 100 being placed on a calibration board 10, and fig. 2B and fig. 2A are the same optical ruler ball stick 100, in which the optical ruler ball stick 100 rotates by-90 degrees, that is, the spin angle of the optical ruler ball stick 100 is-90 degrees, the scale surface of the grating scale 104 rotates from horizontal to vertical, the center distance d (not shown in fig. 2B) between the centers of two tees is not changed, but the measurement posture of the optical ruler ball stick 100 is changed, and the spin angle is-90 degrees. Due to backlash and gravity, the readhead assembly 101 is now at a yaw angle C relative to the scale assembly 1031The yaw angle C1Resulting in a lateral offset of the measurement point from the face of the grating scale 104, a new measurement d2, d1, can be found for the optical scale 100>d2。
When the spin angle of the optical ruler 100 is-90 degrees, under the action of gravity, the back clearance between the guide rod and the bushing makes the reading head 102 generate a Yaw (Yaw) rotation with respect to the grating ruler 104, i.e. for ZSThe shaft (shown in figure 1) rotating with a yaw angle C1At this time, the measurement point on the grating ruler 104 is mainly at the Y of the grating rulerSAxial (shown in FIG. 1) direction, rather than at the X of the grating scaleSThe axial or measurement direction shift causes little measurement variation, so that in this measurement attitude, i.e., at a spin angle of-90 degrees, the read head 102 does not read additional measurement error, and there is no Abbe error in the measured value d 2.
When the spin angle is changed from 0 degree to-90 degrees, the Abbe error is gradually reduced from the maximum to zero. When the spin angle is known, the abbe error can be calculated from the maximum abbe error and the spin angle. Note that when the spin angle is 0 degrees, the same backlash will result in different pitch angles at different center distances, and the corresponding maximum abbe errors will be different.
Please refer toReferring to fig. 3, fig. 3 is a schematic view showing a measurement posture of an optical ruler ball bar 100 for measuring a distance between two points in a three-dimensional space. In a reference coordinate system (with X)RAxis, YRAxis and ZRShaft) has two measuring balls PBAnd PPMeasuring ball PBAnd PPThe center distance between the two is d, the inclination angle between the optical ruler ball rod 100 and the horizontal plane is alpha, the spin angle is gamma, and the normal vector of the grating ruler is nSThe measurement attitude is determined by the center distance d, the tilt angle α, and the spin angle γ. Due to the measuring ball PBAnd PPThe optical scale ball rod 100 is adsorbed in a magnetic ball socket not shown in the figure, no additional constraint design is provided, the optical scale ball rod 100 can spin, the spin angle gamma is unknown, the measurement posture of the optical scale ball rod 100 is unknown, and the Abbe error caused by the back clearance cannot be determined.
To eliminate abbe error caused by back clearance in the optical ruler ball rod, a pre-force can be applied between the guide elements, but the pre-force is extremely difficult to control accurately, so that additional friction force between the guide elements is caused, precision measurement is influenced, and in addition, even if zero back clearance is initially generated, back clearance still occurs between the guide elements due to abrasion after long-time use.
Therefore, it is an objective of the related manufacturers to eliminate abbe error and other errors caused by backlash in the measured values.
Disclosure of Invention
One embodiment of the present invention provides a dual-reading head optical ruler ball rod, which includes a first grating ruler, a second grating ruler, a first reading head and a second reading head, wherein the first reading head reads a first measurement value from the first grating ruler, and the second reading head reads a second measurement value from the second grating ruler, wherein the first grating ruler, the second grating ruler, the first reading head and the second reading head are arranged according to a setting, such that a first abbe error in the first measurement value and a second abbe error in the second measurement value have a known relationship.
According to an embodiment of the dual-readhead optical scale ball bar, the dual readhead optical scale ball bar may further include a first component and a second component, wherein the first component is provided with a first grating scale and a first readhead; the second assembly is provided with a second grating ruler and a second reading head which are linearly guided with the first assembly.
According to an embodiment of the aforementioned dual-readhead optical scale ball bar, the aforementioned dual readhead optical scale ball bar may further include a scale assembly and a readhead assembly, wherein the scale assembly is provided with a first grating scale and a second grating scale, and the readhead assembly is provided with a first readhead and a second readhead, and is linearly guided by the scale assembly.
According to an embodiment of the aforementioned dual-reading head optical ruler cue, the first grating ruler and the second grating ruler can be disposed parallel or perpendicular to each other.
According to an embodiment of the above-mentioned dual-reading optical ruler, the first abbe error and the second abbe error have opposite signs.
According to an embodiment of the dual pick-up optical ruler and club, the known relationship may be a proportional relationship, a high-order functional relationship, or a sine and cosine functional relationship.
According to an embodiment of the dual pick-up optical ruler ball rod, the dual pick-up optical ruler ball rod is connected to a restraint device, and the restraint device restrains the dual pick-up optical ruler ball rod from spinning.
According to an embodiment of the dual-reading head optical ruler ball rod, the dual-reading head optical ruler ball rod is applied to a parallel mechanism six-dimensional measuring device.
According to an embodiment of the dual-reading head optical ruler cue, the first grating ruler and the second grating ruler are relative or absolute.
Another embodiment of the present invention provides a method for processing a measurement value of a dual-reading head optical ruler ball rod, which includes a first measurement value obtaining step, a second measurement value obtaining step, and a measurement value processing step. In the first measurement value obtaining step, a first measurement value is read by a first reading head, and the first measurement value comprises a first Abbe error; in the second measurement value obtaining step, a second measurement value is read by a second reading head, the second measurement value comprises a second Abbe error, and the first Abbe error and the second Abbe error have a known relation; in the measured value processing step, the first measured value and the second measured value are processed according to the known relation to obtain a correct measured value.
According to an embodiment of the method for processing the measured value of the dual readhead optical ruler, the known relationship is a proportional relationship, a high order function relationship, or a sine and cosine function relationship in the step of processing the measured value.
According to an embodiment of the method for processing the measured value of the dual-readhead optical scale bar, in the step of processing the measured value, a ratio is obtained according to the actual center distance and the actual tilt angle of the dual-readhead optical scale bar, and the first measured value and the second measured value are processed according to the ratio to obtain the correct measured value.
According to an embodiment of the method for processing the measured value of the dual-readhead optical ruler ball rod, in the step of processing the measured value, a maximum abbe error is obtained from an actual center distance and an actual tilt angle of the dual-readhead optical ruler ball rod, and the first measured value and the second measured value are processed by the maximum abbe error to obtain a correct measured value.
According to an embodiment of the method for processing the measured value of the dual-reading head optical ruler ball rod, in the step of processing the measured value, the first measured value and the second measured value are processed according to the actual spin angle of the dual-reading head optical ruler ball rod, so as to obtain the correct measured value.
According to an embodiment of the method for processing the measurement value of the dual-readhead optical ruler, in the step of processing the measurement value, the spin angle of the dual-readhead optical ruler is obtained according to a constraint condition of a constraint.
Drawings
FIG. 1 shows a schematic view of an optical ruler cue present placed on a calibration plate;
FIG. 2A is another schematic view of a conventional optical ruler ball bar being placed on a calibration plate;
FIG. 2B is a schematic view of a prior art optical square cue placed on a calibration plate;
FIG. 3 is a schematic view showing a measurement posture of an optical ruler ball rod for measuring a distance between two points in a three-dimensional space;
FIG. 4 is a schematic view of a dual readhead optical ruler ball bar according to a first embodiment of this invention;
FIG. 5 shows a schematic view of a dual readhead optical ruler ball bar according to a second embodiment of this invention;
FIG. 6 is a schematic view of a dual readhead optical ruler ball bar according to a third embodiment of this invention; and
fig. 7 is a schematic diagram illustrating a method for processing measured values of a dual-readhead optical ruler ball according to a fourth embodiment of this invention.
Wherein the reference numerals are as follows:
10: correcting plate
100: optical ruler ball rod
200, 300, 400: double-reading head optical ruler ball rod
102: reading head
104: grating ruler
101, 210, 401: read head assembly
103, 220, 403: ruler assembly
350: first assembly
360: second assembly
402: first read head
404: second grating ruler
405: second reading head
406: first grating ruler
407, 408: signal conductor
500: method for processing measured value of double-reading-head optical ruler ball rod
A: roll angle
B，B1: pitch angle
C，C1: yaw angle
d: center distance
e: measurement error
g1，g2: distance between two adjacent plates
h: offset distance
nS: grating ruler normal vector
P, Q, P, Q: measuring point
P ', Q': arc point
PB，PP: measuring ball
R1: first read head
R2: second reading head
S01: a first measurement value obtaining step
S02: second measurement value obtaining step
S03: measured value processing step
S1: first grating ruler
S2: second grating ruler
Xs, Ys, Zs: axes of coordinate system of grating ruler
XR，YR，ZR: axes of reference coordinate system
α: angle of inclination
θ: angle of rotation
γ: spin angle
Detailed Description
The invention provides a double-reading head optical ruler ball rod, wherein Abbe errors caused by backlash in measured values can be eliminated. In order to eliminate abbe error caused by backlash in the double-reading head optical scale ball rod, in the double-reading head optical scale ball rod of an embodiment, a reading head and a corresponding grating scale are additionally arranged outside an original grating scale and a corresponding reading head, which are hereinafter referred to as a first reading head, a second reading head, a first grating scale and a second grating scale respectively. The first reading head measures a first measurement value of the first grating scale, the second reading head measures a second measurement value of the second grating scale, the first measurement value and the second measurement value respectively comprise a first Abbe error and a second Abbe error, the arrangement and arrangement of the first reading head, the second reading head, the first grating scale and the second grating scale enable the first Abbe error in the first measurement value and the second Abbe error in the second measurement value to have a known relationship, namely, the first reading head, the second reading head, the first grating scale and the second grating scale are arranged, and the first Abbe error and the second Abbe error can have a relationship related to the arrangement and arrangement. In one embodiment, the dual-reading head optical scale ball rod is composed of a first assembly and a second assembly which are guided linearly, the first assembly is provided with a first reading head and a second grating scale, and the second assembly is provided with a first grating scale and a second reading head. The first assembly and the second assembly are both provided with guide rods, and are additionally provided with bushings.
In another embodiment, the dual-reading head optical scale ball rod is composed of two scale components and a reading head component which are guided linearly, a first grating scale and a second grating scale are arranged on the scale components, and a first reading head and a second reading head are arranged on the reading head component. The ruler assembly and the reading head assembly are both provided with guide rods, and are additionally provided with bushings.
In an embodiment, the first grating scale and the second grating scale are arranged in parallel to each other, so that the signs of the first abbe error and the second abbe error are opposite. In another embodiment, the first grating scale and the second grating scale are perpendicular to each other or have a known angle, and the first abbe error and the second abbe error have a sine and cosine function relationship.
In one embodiment, the dual-reading head optical ruler ball rod of the present invention is applied to a parallel mechanism six-dimensional measuring device, the parallel mechanism six-dimensional measuring device may include an upper plate and a lower plate, the six dual-reading head optical ruler ball rods are respectively connected to the upper plate and the lower plate, and since abbe error of each dual-reading head optical ruler ball rod is eliminated or almost eliminated, each dual-reading head optical ruler ball rod has accurate measurement value, so that the parallel mechanism six-dimensional measuring device has extremely high measurement accuracy.
The invention also provides a method for processing the measured value of the double-reading head optical ruler ball rod, which processes the first measured value and the second measured value according to the known relation between the first Abbe error and the second Abbe error in the first measured value and the second measured value to obtain the correct measured value.
In one embodiment, the first grating scale and the second grating scale are parallel to each other, the first abbe error and the second abbe error have opposite signs, and the first abbe error and the second abbe error have a proportional relationship, and the first measurement value and the second measurement value are processed according to the proportional relationship to obtain a correct measurement value. In one embodiment, the proportional value between the first Abbe error and the second Abbe error of the double-reading head optical scale ball rod under different central distances and inclined angles is stored, the proportional value between the first Abbe error and the second Abbe error is obtained according to the actual central distance and inclined angles of the double-reading head optical scale ball rod during measurement, and the first measurement value and the second measurement value are processed according to the proportional value.
In another embodiment, the scale surface of the first grating scale and the scale surface of the second grating scale are perpendicular to each other, the first abbe error and the second abbe error have a sine and cosine function relationship, and the first measurement value and the second measurement value are processed according to the sine and cosine function relationship to obtain a correct measurement value. In another embodiment, the correct measurement is derived from the first measurement, the second measurement, and the maximum Abbe error at the known center distance. In one embodiment, the maximum abbe error values of the dual-reading head optical ruler ball rod at different center distances and inclination angles are pre-established and stored, and the maximum abbe error values are obtained from the center distances and the inclination angles of the actual quantity of the dual-reading head optical ruler ball rod during measurement, and are used for processing the first measurement value and the second measurement value to obtain the correct measurement value. In one embodiment, the first measurement value, the second measurement value and the spin angle of the dual-reading head optical ruler ball rod are used for obtaining a correct measurement value.
The details of the double-reading optical ruler ball rod and the processing method of the measured value of the double-reading optical ruler ball rod of the invention will be described later.
Referring to fig. 4, a schematic diagram of a dual-reading head optical ruler ball rod 200 according to a first embodiment of the invention is shown, the dual-reading head optical ruler ball rod 200 is designed in a way that a grating ruler is combined with a grating ruler to form a component, and includes a reading head component 210 and a ruler component 220, the reading head component 210 includes a first reading head R1And a second reading head R2The ruler component 220 comprises a first grating ruler S1And a second grating scale S2First grating scale S1A second grating scale S2First head R1And a second read head R2There is a setup arrangement shown in fig. 4. First grating ruler S1And a second grating scale S2The surfaces of the two sides of the ruler are opposite and parallel to each other, and the measuring balls at the two ends of the double-reading head optical ruler ball rod 200 are PB、PPShowing that the design parameters include a first grating scale S1And a second grating scale S2And two measuring balls PB、PPDistance g between center lines1、g2And a first read head R1And a second read head R2Offset distance h in the measurement direction. The first grating scale S is provided when the reading head assembly 210 and the scale assembly 220 do not rotate relatively1And a second grating scale S2P, Q, and the first grating scale S is arranged when the reading head assembly 210 and the scale assembly 220 have a relative rotation angle theta1And a second grating scale S2The measuring points on the arc points are respectively P, Q, P, Q are respectively turned to arc points P ', Q', PPP＝PPP'，PPQ＝PPQ', thus the first grating scale S1First Abbe error and second grating ruler S2Respectively P 'P and Q' Q, noting that the first grating scale S is adjusted to a second abbe error1And a second grating scale S2Arranged on two measuring balls PB、PPThe upper and lower sides of the central line are provided with a first grating ruler S1The first Abbe error P' P is negative and the second grating scale S2Has a positive value.
Referring to fig. 5, a schematic diagram of a dual-readhead optical ruler ball bar 300 according to a second embodiment of the present invention is shown, in which the dual-readhead optical ruler ball bar 300 is designed in such a way that a readhead matches a grating to form a component, and includes a first component 350 and a second component 360, and a first readhead R is fixed on the first component 3501And a second grating scale S2The second component 360 is fixed with a corresponding first grating ruler S1And a second read head R2First grating scale S1And a second grating scale S2The ruler surfaces are arranged in parallel opposite to each other, and the measuring balls at the two tail ends of the double-reading head optical ruler ball rod 300 are PB、PPAnd (4) showing. The design parameters include a first grating scale S1And a second grating scale S2And two measuring balls PB、PPDistance g between center lines1、g2And a first read head R1And a second read head R2Offset distance h in the measurement direction. In the first placeWhen the assembly 350 and the second assembly 360 do not rotate in opposite pitching directions, the first grating ruler S1And a second grating scale S2P, Q, when the first and second components 350 and 360 have a relative rotation angle theta, the first grating scale S1And a second grating scale S2The measuring points are P and Q respectively, and the P measuring point is rotated to arc points P', PPP＝PPP', thus the first grating scale S1First Abbe error and second grating scale S2The second abbe errors of (a) are P' P and QQ, respectively. First read head R in FIG. 51Has a negative value, and a second reading head R2Is positive.
Thus, for such a dual-readhead optical scale ball bar having two parallel scales (i.e., a first scale and a second scale), the distance g1、g2And the offset distance h is a design parameter, and the actual design parameter may deviate after manufacturing and assembling. The rotation angle θ itself increases with increasing clearance due to wear of the guide element, and although P ', QQ, or Q ' Q is nonlinear or higher order function with respect to the rotation angle θ, because P ', QQ, or Q ' Q is very small, the relationship between P ', QQ, or Q ' Q and the rotation angle θ can be approximated by a linear relationship, for example, by a proportional value k to establish the relationship between P ' P and QQ:
P'P*＝k×QQ* (1)；
thus, when the correct measurement is m, the first measurement of the first read head is
First measured value
The first Abbe error in (a) is e1The second measurement of the second read head is
Second measured value
The second Abbe error in (1) ise2，e1And e2The ratio between k:
e1＝k*e2 (4)；
by solving formulae (2) to (4), it can be found that:
in equation (5), it can be seen that when the ratio k is known, the correct measurement m of such a dual-reading optical scale with two parallel gratings can be determined from the ratio k, and the first measurement of the first reading head
And a second measurement of a second read head
And calculating to obtain the product, wherein under specific design parameters, k is 1,
the first Abbe error e with opposite signs1With a second Abbe error e2Can pass the first measurement value
And a second measured value
Is eliminated by addition. In addition, there is no spin angle factor of the spherical rod in the formula (5), e1And e2The proportional relation of the formula (4) is still established when the spin angle is varied, and this is thatThe advantages of the dual-reading head optical ruler ball rod with the two parallel grating rulers. When the proportional value k changes along with the central distance and the inclination angle, a functional relation between the proportional value k and the central distance and the inclination angle can be established, and the proportional value k is obtained according to the actual central distance and the actual inclination angle of the double-reading-head optical ruler ball rod during measurement.
Referring to fig. 6, a schematic diagram of a dual-readhead optical scale ball bar 400 according to a third embodiment of the present invention is shown, in which two grating scales of the dual-readhead optical scale ball bar 400 are designed in a mutually perpendicular manner, and include a readhead assembly 401 and a scale assembly 403, a first readhead 402 and a second readhead 405 are fixed on the readhead assembly 401, a first grating scale 406 and a second grating scale 404 are fixed on the scale assembly 403, the first grating scale 406 and the second grating scale 404 are arranged in a mutually perpendicular manner, and a signal conducting wire 407 of the first readhead 402 and a signal conducting wire 408 of the second readhead 405 are led out from the same side of the dual-readhead optical scale ball bar 400. The advantage of the perpendicular arrangement of the first and second linear scales 406, 404 is that the first abbe error in the first measurement value is orthogonal to the second abbe error in the second measurement value, for example, when the dual-head optical scale ball 400 is horizontally placed on two ball sockets, not shown, the scale of the first linear scale 406 is vertical, and the scale of the second linear scale 404 is horizontal, the first abbe error is zero, and the second abbe error has a maximum value; when the dual-reading head optical ruler ball arm 400 spins 90 degrees (i.e. the spin angle is 90 degrees), the first grating scale 406 becomes horizontal, and the second grating scale 404 becomes vertical after the first grating scale faces upward, at this time, the first abbe error has the maximum value, and the second abbe error is zero, and by arranging the two grating scales perpendicular to each other, the dual-reading head optical ruler ball arm 400 can obtain a correct measurement value by processing the first measurement value and the second measurement value.
In such a dual-reading optical ruler-ball rod 400 with a vertically arranged grating scale, the first abbe error and the second abbe error can be expressed by a trigonometric function relationship, as shown in the following two formulas, wherein the first measurement value of the first reading head 402 is m1The second measurement of the second read head 405 is m2Then:
m1＝m+a·sin(γ1) (6)
m2＝m+a·cos(γ1) (7)。
wherein, γ1For the spin angle, m is the correct measurement without Abbe error, and a is the maximum Abbe error. Gamma ray1When the scale surface of the first linear scale 406 is vertically forward when 0, the first measurement value m1No abbe error (i.e., zero first abbe error); the surface of the second grating scale 404 is horizontal and upward, and the second measurement value m2With the maximum abbe error a.
The following equations (6) and (7) can be derived:
(m1-m)2+(m2-m)2＝a2 (8)；
from equation (8), m has two solutions:
gamma can be obtained from the two formulas of (6) and (7)1The solution is:
then the valid solution in the second solution of m is:
during measurement, a first measured value m that can be measured by the first reading head 4021And a second measurement m measured by a second readhead 4052And the maximum Abbe error a obtained by the equation (8), and the measured value m without Abbe error is obtained by the equation (11). Note that the error relationship in the formula (11) does not include the spin angle γ1That is, equation (11) is valid for any spin angle, which is an advantage of providing two mutually perpendicular rulers.
The spin angle gamma of the double-reading head optical ruler ball rod in the two formulas (6) and (7)1Can be obtained by designing a restraint deviceThe device is the subject of another patent application of the inventor and is only briefly described below.
The ball bearing is formed by the ball and the ball socket at the two tail ends of the double-reading-head optical ruler ball rod, the double-reading-head optical ruler ball rod can spin freely, and the spin angle is unknown. In one embodiment, the restraint device may include a secondary restraint member fixed to one end of the dual-reading head optical ruler ball rod and a primary restraint member fixed to the outside of the dual-reading head optical ruler ball rod, the secondary restraint member and the dual-reading head optical ruler ball rod move together, the primary restraint member has a shape that forms a restraint condition for the mating secondary restraint member, the secondary restraint member may be a sphere or a rod fixed to the dual-reading head optical ruler ball rod and has a specified geometric characteristic, such as being disposed in the X coordinate system of the grating rulerS-ZSThe main restraint piece is fixed outside the double-reading-head optical ruler ball rod and has a shape matched with the auxiliary restraint piece, the main restraint piece is two plates or rods for example to form a gap, the auxiliary restraint piece is restrained in the gap to move, and the self-rotating angle of the double-reading-head optical ruler ball rod can be calculated according to the position and the direction of the shape. In one embodiment of the invention, the secondary restraint is a ball connected to one end of the dual-head optical ruler ball rod and is limited by the primary restraint to move on the center of a circular arc track.
In another embodiment, the restraint device may include a return spring and a spring seat, the spring seat is fixed outside the dual-reading head optical ruler ball rod, one end of the return spring is fixed on the dual-reading head optical ruler ball rod and has a starting point, the other end of the return spring is fixed on the spring seat and has a terminal point, the return spring between the starting point and the terminal point has a force balance state, the force balance state forms a restraint condition, the self-rotation angle of the dual-reading head optical ruler ball rod is determined, when the dual-reading head optical ruler ball rod is subjected to external force spinning, the return spring deviates from the force balance state to generate a return force, so that the dual-reading head optical ruler ball rod has a new self-rotation angle in a new force balance state.
Thus, in FIG. 6, the two rulers are vertically arrangedThe dual-reading head optical ruler ball rod 400, at a spin angle gamma1In known cases, the two formulas (6) and (7) can be used to obtain:
equation (13) shows that the first measurement m can be obtained1The second measured value m2And a known spin angle gamma1The measured value m without Abbe error is calculated, and the formula (13) further highlights the advantages of vertically arranging two grating rulers: when calculating the measured value m without abbe error, the change of the abbe error when the guide element is worn or the change of the abbe error when the center distance is changed may not be considered. The formula (13) shows that when the dual-head optical ruler ball rod 400 is vertically disposed on the two optical rulers, the spin of the two optical rulers is restrained by the restraint device, and the spin angle γ is obtained by calculating the restraint condition1Then, the maximum Abbe error a of the measured object under different measurement postures is established without carrying out measurement experiments in advance, and only the first measurement value m is needed1A second measured value m2And a spin angle gamma calculated from the constraint conditions1And then the measured value m without Abbe error can be accurately calculated. This method of formula (13) can also be used in cross-comparison with the method of formula (11).
At a spin angle gamma1When the angle is 45 degrees, equation (13) shows that the numerator and denominator are both zero, and the first measurement value m is1And a second measured value m2The same is true. Therefore, is in gamma1When 45 degrees, the formula (6) or (7) can be returned, and m is obtained from the known maximum abbe error a:
therefore, the restraint device used by the ball rod with the double reading heads and the two vertically arranged grating rulers is better to avoid the self-rotation during the measurementAngle gamma1The maximum abbe error a can be monitored in equation (8) at 45 degrees, and the spin angle γ can be determined by measuring the maximum abbe error a in different measurement positions1A measurement m without abbe error can still be calculated at or around 45 degrees.
Referring to fig. 7 and also referring to fig. 4 to 6, in which fig. 7 shows a schematic diagram of a method 500 for processing a measurement value of a dual-reading optical ruler ball rod according to the embodiment of fig. 6 of the present invention. The method 500 for processing the measured value of the dual readhead optical ruler ball bar may include a first measured value obtaining step S01, a second measured value obtaining step S02, and a measured value processing step S03. In the first measurement value obtaining step S01, the first head R is used1Reading a first measurement, the first measurement comprising a first abbe error; in the second measurement value obtaining step S02, the second reading head R is used2Reading a second measurement value, wherein the second measurement value comprises a second Abbe error, and the first Abbe error and the second Abbe error have a known relation; in the measured value processing step S03, the first measured value and the second measured value are processed according to the known relationship to obtain an accurate measured value. The details of the method 500 for processing the measured value of the dual readhead optical ruler ball bar are as described above and will not be described again.
The above describes a dual-reading head optical ruler ball rod, which, through the arrangement of the first reading head, the second reading head, the first grating ruler and the second grating ruler and the corresponding processing method of the measured value, can obtain correct measured values, and professionals can make other designs for eliminating Abbe errors according to the configuration and the method provided by the invention, however, all of them are included in the inventive method or principle disclosed above, for example, the grating scales of the dual-reading head optical ruler cue are not necessarily perpendicular to each other, other angles may exist between the two, when the first abbe error and the second abbe error have other relations, can be processed to obtain the correct measurement value, the club can also use other kinds of displacement sensors, in addition, the two ends of the dual-readhead optical ruler Ball according to this invention are not limited to Ball joints, but may be other types of joints, such as Pivot joints (Pivot joints) or universal joints (U-joints).
Although the present invention has been described with reference to the above embodiments, it should be understood that various changes and modifications can be made therein by those skilled in the art without departing from the spirit and scope of the invention.
Claims (15)
1. A dual reading head optical ruler ball rod is characterized by comprising:
a first grating scale;
a second grating scale;
the first reading head reads a first measurement value from the first grating ruler; and
the second reading head reads a second measurement value from the second grating ruler;
wherein the first grating scale, the second grating scale, the first read head and the second read head have an arrangement such that a first Abbe error in the first measurement value has a known relationship with a second Abbe error in the second measurement value.
2. The dual readhead optical ruler cue of claim 1, further comprising:
the first component is provided with the first grating ruler and the first reading head; and
and the second assembly is provided with the second grating ruler and the second reading head, and is linearly guided with the first assembly.
3. The dual readhead optical ruler cue of claim 1, further comprising:
the ruler component is provided with the first grating ruler and the second grating ruler; and
a reading head assembly, provided with the first reading head and the second reading head, and linearly guided with the scale assembly.
4. The dual readhead optical ruler ball of claim 1, wherein the first and second rulers are parallel or perpendicular to each other.
5. The dual readhead optical ruler of claim 1, wherein the first abbe error is opposite in sign to the second abbe error.
6. The dual readhead optical ruler of claim 1, wherein the known relationship is a proportional relationship, a higher order functional relationship, or a sine and cosine functional relationship.
7. The dual readhead optical ruler ball of claim 1, wherein the dual readhead optical ruler ball is coupled to a restraint that restrains the dual readhead optical ruler ball from spinning.
8. The dual readhead optical ruler club of claim 1 applied to a parallel-mechanism six-dimensional measuring device.
9. The dual readhead optical ruler cue according to claim 1, wherein the first and second rulers are relative or absolute.
10. A method for processing the measured value of a double-reading head optical ruler ball rod is characterized by comprising the following steps:
a first measurement value obtaining step, reading a first measurement value by a first reading head, wherein the first measurement value comprises a first Abbe error;
a second measurement value obtaining step, reading a second measurement value by a second reading head, wherein the second measurement value comprises a second Abbe error, and the first Abbe error and the second Abbe error have a known relationship; and
a measurement value processing step, processing the first measurement value and the second measurement value according to the known relationship to obtain a correct measurement value.
11. The method of claim 10, wherein the known relationship is a proportional relationship, a higher order function relationship, or a sine and cosine function relationship.
12. The method of claim 10, wherein in the step of processing measured values, a ratio is obtained from the actual center distance and tilt angle of the optical ruler, and the first and second measured values are processed according to the ratio to obtain the correct measured value.
13. The method of claim 10, wherein in the step of processing measured values, a maximum abbe error is obtained from the actual center distance and tilt angle of the optical ruler, and the first and second measured values are processed according to the maximum abbe error to obtain correct measured values.
14. The method of claim 10, wherein the step of processing the measured value comprises processing the first measured value and the second measured value according to an actual spin angle of the dual-head optical ruler, so as to obtain a correct measured value.
15. The method of claim 14, wherein in the step of processing the measured value, a spin angle of the dual-readhead optical ruler ball is obtained by a constraint condition of a constraint.
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