CN109945786A - A kind of planar obit simulation measuring device and its installation, measurement method - Google Patents

A kind of planar obit simulation measuring device and its installation, measurement method Download PDF

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Publication number
CN109945786A
CN109945786A CN201910238893.6A CN201910238893A CN109945786A CN 109945786 A CN109945786 A CN 109945786A CN 201910238893 A CN201910238893 A CN 201910238893A CN 109945786 A CN109945786 A CN 109945786A
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bead
magnetic
rod
ball
measuring device
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Inventor
夏仰球
周怡帆
刘兴宝
米良
滕强
杨川贵
唐强
陈衡
杜坤
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Institute of Mechanical Manufacturing Technology of CAEP
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Institute of Mechanical Manufacturing Technology of CAEP
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Priority to CN201910238893.6A priority Critical patent/CN109945786A/en
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Abstract

The invention discloses a kind of planar obit simulation measuring device and its installations, measurement method, and including the internal measuring rod for having long grating, the both ends of measuring rod are separately connected bead I, bead II;Kinematic joint component includes magnet base for being connected on tested main shaft, the magnetic connector being connected to below magnet base, and the bottom of magnetic connector has the ball-and-socket to match with bead I;Base assembly includes the rotating base being arranged on work top, the magnetic rod being rotatably connected on rotating base, the fixed Circular gratings being set in outside magnetic rod, and the top of magnetic rod has the ball-and-socket to match with bead II.The present invention records the shift value and angle value of measurement point using long grating and Circular gratings respectively, measures different from the one dimension displacement of ball bar, the information of acquisition is more;Accurate bead is installed between magetic indicator joint and magnetic rod two repeated connectors, different from plane grating to the limitation of measurement plane, it can be achieved that the planar obit simulation of space any plane measures.

Description

A kind of planar obit simulation measuring device and its installation, measurement method
Technical field
The present invention relates to machine tool position accuracy detection fields, and in particular to a kind of planar obit simulation measuring device and its installation, Measurement method.
Background technique
When accurate and ultra-precision machine tool position precision detects, interpolation precision is detected as important one of detection project, should The item existing detection device of interpolation precision mainly has two class device of plane grating and ball bar.Wherein planar grid encoder method is based on Optical measurement principle is a kind of two-dimentional, contactless direct method of measurement.It is (circular arc, straight when workbench and main shaft perform relative motion Line movement or even irregular Complex Plane Curves) when, the precision of motion profile can be determined in real time, and resolution ratio is up to 5nm. But plane grating also has certain limitation, because its detection is all confined on planar obit simulation, is unable to measure and rotating shaft phase The linkage precision of pass can not also evaluate the multi-shaft interlocked spatial accuracy of lathe.Ball bar is by two precision metallic balls and one High accuracy displacement sensor composition, is one-dimensional displacement measurement, and measurement stroke is ± 2mm, can obtain the Limited information of measurement.And The analysis software of ball bar is only applicable to the flat circle track testing result of two-axle interlocking.Furthermore ball bar bar length is limited, uncomfortable For heavy duty machine tools.
It is that at present in the measuring device of lathe planar obit simulation, plane grating is a kind of two-dimentional, contactless direct measurement Method, detection are confined on single planar obit simulation, are unable to measure linkage precision relevant to rotating shaft, it is more also to evaluate lathe The spatial accuracy of axis linkage, measurement plane are limited, it is difficult to realize the measurement of space any plane track.And ball bar is one-dimensional Displacement measurement, the Circular test precision being able to achieve in tri- planes of XY, YZ, YZ, but angular position information is not recorded, analyze software The flat circle track testing of two-axle interlocking is only applicable to as a result, the Limited information of measurement can be obtained.
Summary of the invention
It is existing to solve the purpose of the present invention is to provide a kind of planar obit simulation measuring device and its installation, measurement method Drawbacks described above in technology realizes purpose efficient, high-precision, that conveniently planar obit simulation measures.
The present invention is achieved through the following technical solutions:
A kind of planar obit simulation measuring device, including the internal measuring rod for having long grating, the both ends difference of the measuring rod Bead I, bead II are connected, further includes the kinematic joint component being connected with bead I, the base assembly being connected with bead II;
The kinematic joint component includes magnet base for being connected on moving component, the magnetic being connected to below magnet base Power connector, the bottom of the magnetic connector have the ball-and-socket to match with bead I, and the ball-and-socket of the bead I and magnetic connector leans on Magnetic absorption;
The magnetic force that the base assembly includes the rotating base being arranged in fixation member, is rotatably connected on rotating base Bar, the fixed Circular gratings being set in outside magnetic rod, the top of the magnetic rod has the ball-and-socket to match with bead II, described small The ball-and-socket of ball II and magnetic rod leans on magnetic absorption.
At present in the measuring device of planar obit simulation, plane grating is a kind of two-dimentional, contactless direct method of measurement.Detection office Limit is unable to measure linkage precision relevant to rotating shaft, can not also evaluate multi-shaft interlocked space on single planar obit simulation Precision, measurement plane are limited, it is difficult to realize the measurement of space any plane track.Ball bar is one-dimensional displacement measurement, can be real Circular test precision in existing tri- planes of XY, YZ, YZ.But angular position information is not recorded, analysis software is only applicable to two axis The flat circle track testing of linkage is as a result, the Limited information of measurement can be obtained.And a kind of planar obit simulation provided by the present invention is surveyed Device is measured, measuring rod is the measuring rod of conventional belt length grating, and bead I, bead II are connected to the fixation of long grating measuring bar End, movable end, and bead I, for being connected with the ball-and-socket of magnetic connector in kinematic joint component, bead II is used for and base assembly The ball-and-socket of middle magnetic rod is connected.The equal band of magnetic connector, magnetic rod is magnetic, and can adsorb respectively to two beads.Movement When in use directly by magnetic-adsorption on tested main shaft, the rotating base of base assembly is fixed to be connected the magnet base of joint assembly It connects in fixation member, fixation member can be any work top, and during the work time, kinematic joint component is with movement portion Part is moved, and measuring rod is driven to be moved, and measuring rod drives magnetic rod, Circular gratings in base assembly to be moved, Middle moving component is arbitrary unit under test.When the present invention is applied to machine tool measuring, then moving component is tested main shaft.This hair The bright shift value and angle value for being recorded measurement point respectively using long grating and Circular gratings is surveyed different from the one dimension displacement of ball bar Amount, the information of acquisition is more, has substantive distinguishing features outstanding and significant progress compared to the prior art.
Preferably, it is connected between the magnet base and magnetic connector by flexural pivot.Enable magnetic connector and magnet base Relative to being rotated, middle plane grating can only be to the limitation that tri- datum levels of XY, YZ, ZX measure compared to the prior art Property, the planar obit simulation measurement of its complementary space any plane other than XY, YZ, ZX can be achieved in the present invention;Therefore compared to existing skill Art has substantive distinguishing features outstanding and significant progress.
Preferably, extension bar is fixedly connected on the measuring rod, the extension bar and measuring rod are coaxial, and the bead I connects It connects on extension bar.The purpose that extension bar plays development length, improves the scope of application of the invention.
It preferably, further include the bearing being set in outside magnetic rod, the bearing is located at below Circular gratings.The setting of bearing is just In the stable rotation for ensuring magnetic rod, the measurement effect of Circular gratings can be realized.In addition, bearing can also play Circular gratings Supporting role.
It preferably, further include the data collection system being connected with the long grating, Circular gratings, the data collection system is adopted Collect the reading information of long grating, Circular gratings, and passes through wireless communication transmission to data analysis system.
A kind of installation method of planar obit simulation measuring device, comprising the following steps:
(a) it calibrates: the internal measuring rod for having long grating of calibration;
(b) it installs: rotating base is connected on the table on tested main shaft by magnet base by magnetic-adsorption;
(c) it adjusts: bead being adjusted by the bottom ball absorption of magnetic connector, slowly adjusts tested main shaft and rotating base The distance between, until the top ball-and-socket of magnetic rod adsorbs adjusting bead completely, magnetic connector and magnet base are fixed at this time Relative position;Accurate bead I and accurate bead II are adsorbed in the ball-and-socket of magnetic connector and magnetic rod respectively by magnetic force again, Complete installation.
Preferably, the wherein calibration method of step (a) are as follows:
The long grating reading a of high-precision is read in the initial state1
Measuring rod is calibrated using control gauge, the reading of long grating is a after calibration2, at this time the length of measuring rod be L;
Reconnection length is L1Extension bar, the reading for reading this duration grating is a3
The physical length R=L of measuring rod after being calibrated1+(a3-a1)+L。
A kind of measurement method of planar obit simulation measuring device, comprising the following steps:
(A) installation is completed, lathe is made to be in no-load condition;
(B) angle surpassed distance is added at the starting and ending end of tested track, synchronizes the data for carrying out long grating and Circular gratings Acquisition;
Wherein the data of long grating are acquired by incision motion triggers acquisition before starting sampled data, getting over before starting point Incision campaign radially is set before journey, long grating is activated to carry out data acquisition;Cutting radially is equally set when exiting It moves out, terminates sampling;
Wherein the data acquisition of Circular gratings is returned to zero before starting measurement;
(C) according to the start angle of acquisition, angle at the end, detection radius, numerical programming program determines lathe coordinate system;
(D) lathe after trial operation, is returned to the position before incision movement, lathe pause by lathe trial operation;Then will pass through The acquisition of forward motion data is carried out between measuring rod pedestal for placed component after lengthy calibration and kinematic joint component;
(E) step (B)~(D) is repeated, the acquisition of counter motion data is carried out;
(F) pass through forward motion data collected, counter motion data Calculation Plane path accuracy.
Specifically, according to measurement point location coordinate information in forward motion data, counter motion data, it can be according to GB/T 17421.4-2016 analyzes Circular test phase closing precision, calculates separately according to GB/T 17421.2-2016 or ISO 230-2-2006 The positioning accuracy of two interpolation axis and the analysis of repetitive positioning accuracy, or least square method fitted ellipse track is used, and calculate it Major and minor axis.Wherein, when measuring lathe path accuracy, since machine tool structure limits, positive and negative rotation campaign necessarily has slight biography Moment is different, and forward motion and heterodromous track is caused to have nuance, the forward motion data that this method passes through difference Acquisition, the acquisition of counter motion data, comprehensive exercise data twice are finally analyzed, and measurement accuracy is significantly improved.In addition, Forward motion data described in this method, counter motion data also are understood as clockwise movement data, counterclockwise movement number According to that is, same motion profile exchanges two motion profiles after beginning and end.This method is preferably suitable for machine tool track survey Amount is equally applicable in the motion profile measurement of remaining arbitrary equipment.
When preferably, the origin of determining lathe coordinate system is to the connector for connecting base assembly and kinematic joint component Machine coordinates;
Preferably, in step (D), when tested track is the irregular curve in plane, the length of measurement point radially Changing value is long grating reading value, and the angle position of measurement point is Circular gratings reading value.
Preferably, measuring rod moves horizontally main spindle's along Plane Installation is tested, and reads measuring rod reading, measures at this time The practical angle of plane and work top is that repeatedly adjustment is up to the difference of practical angle and hypothesized angle is in allowable range of error It is interior;
Preferably, when measuring track is space any plane irregular curve, a length of R of measuring rod, measurement point is radially Length varying value (long grating reading value) be Δ Ri, the angle position (Circular gratings reading value) of measurement point is θi.With X/Y plane For measuring track, the coordinate of the position of measurement point is then are as follows:
xi=(R+ Δ Ri)cosθi, (0≤θi≤360°)
yi=(R+ Δ Ri)sinθi, (0≤θi≤360°)。
To sum up, it can be seen that the measurement track of long grating need to level off to round phenomenon in compared to the prior art, this hair The bright precision that can be measured when track is irregular curve, therefore there are substantive distinguishing features outstanding compared to the prior art and show The progress of work.
Compared with prior art, the present invention having the following advantages and benefits:
1, a kind of planar obit simulation measuring device of the present invention and its installation, measurement method, are distinguished using long grating and Circular gratings The shift value and angle value for recording measurement point are measured different from the one dimension displacement of ball bar, and the information of acquisition is more;
2, a kind of planar obit simulation measuring device of the present invention and its installation, measurement method, are installed on magnetism for accurate bead and connect Between head and magnetic rod two repeated connectors, different from plane grating to the limitation of measurement plane, it can be achieved that XY, YZ, ZX The planar obit simulation measurement of equal spaces any plane;
3, a kind of planar obit simulation measuring device of the present invention and its installation, measurement method, using having, measurement stroke is big, measures The long grating of high-precision with high accuracy, range of displacement measurement increase the measurement, it can be achieved that plane irregularity track.
Detailed description of the invention
Attached drawing described herein is used to provide to further understand the embodiment of the present invention, constitutes one of the application Point, do not constitute the restriction to the embodiment of the present invention.In the accompanying drawings:
Fig. 1 is the structural schematic diagram of the specific embodiment of the invention;
Fig. 2 is the cross-sectional view of base assembly in the specific embodiment of the invention;
Fig. 3 is numerical control programming track schematic diagram in the specific embodiment of the invention;
Fig. 4 is data collecting model schematic diagram in the specific embodiment of the invention;
Fig. 5 is Circular test data processing computation model schematic diagram in the specific embodiment of the invention;
Fig. 6 is that interpolation shaft position precision and the processing of repetitive positioning accuracy track data calculate mould in the specific embodiment of the invention Type schematic diagram;
Fig. 7 is elliptical orbit data processing computation model schematic diagram in the specific embodiment of the invention.
Label and corresponding parts title in attached drawing:
1- magnet base, 2. magnetic connectors, 3- precision bead I, 4- measuring rod, 5- precision bead II, 6- magnetic rod, 7- circle light Grid, 8- rotating base, 9- data collection system, 10- data analysis system, 11- extension bar, 12- bearing.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below with reference to embodiment and attached drawing, to this Invention is described in further detail, and exemplary embodiment of the invention and its explanation for explaining only the invention, are not made For limitation of the invention.
Embodiment 1:
A kind of planar obit simulation measuring device as shown in Figures 1 and 2, it is described including the internal measuring rod 4 for having long grating The both ends of measuring rod 4 are separately connected bead I 3, bead II 5, and kinematic joint component, the bead is arranged in the top of the bead I 3 Base assembly is arranged in II 5 lower section;
The kinematic joint component includes magnet base 1 for being connected on tested main shaft, is connected to 1 lower section of magnet base Magnetic connector 2, the bottom of the magnetic connector 2 have the ball-and-socket to match with bead I 3;
The base assembly includes the rotating base 8 being arranged on work top, the magnetic being rotatably connected on rotating base 8 Power bar 6, the fixed Circular gratings 7 being set in outside magnetic rod 6, the top of the magnetic rod 6 have the ball to match with bead II 5 Nest.
Embodiment 2:
A kind of planar obit simulation measuring device as shown in Figures 1 and 2, on the basis of embodiment 1, the magnet base 1 with It is connected between magnetic connector 2 by flexural pivot.Extension bar 11, the extension bar 11 and measuring rod 4 are fixedly connected on the measuring rod 4 Coaxially, the bead I 3 is connected on extension bar 11.It further include the bearing 12 being set in outside magnetic rod 6, the bearing 12 is located at 7 lower section of Circular gratings, bearing 12 are used to support the Circular gratings 7.It further include that the data being connected with the long grating, Circular gratings 7 are adopted Collecting system 9, the data collection system 9 acquires the reading information of long grating, Circular gratings 7, and passes through wireless communication transmission to number According to analysis system 10.
Preferably, the magnet base 1 is connect in magnetization or demagnetization with magnetic connector 2 with magnetic force conversion function Flexural pivot magnetizes simultaneously or demagnetization.As magnetic stand in the prior art can be realized.
Embodiment 3:
A kind of installation method of planar obit simulation measuring device, comprising the following steps:
(a) it calibrates: the internal measuring rod 4 for having long grating of calibration;
(b) it installs: rotating base 8 is connected on the table on tested main shaft by magnet base 1 by magnetic-adsorption;
(c) it adjusts: bead being adjusted by the bottom ball absorption of magnetic connector 2, slowly adjusts tested main shaft and rotation bottom Seat the distance between 8 fixes magnetic connector 2 and magnetic force until the top ball-and-socket of magnetic rod 6 adsorbs adjusting bead completely at this time The relative position of seat 1;Accurate bead I 3 and accurate bead II 5 are adsorbed in magnetic connector 2 and magnetic rod 6 by magnetic force respectively again Ball-and-socket in, complete installation.
Preferably, the accurate bead I 3, the outer diameter of accurate bead II 5 are identical, and the adjusting bead uses accurate bead I 3 or accurate bead II 5.
Different from plane grating to the limitation of measurement plane, the present embodiment can realize the spaces such as XY, YZ, ZX any plane Planar obit simulation measurement, need to only be adjusted between magnet base and magnetic connector and be relatively rotated by flexural pivot, carry out angle conversion later ?.Specific method for transformation are as follows:
By tested main axle moving to plane is measured, measurement plane and work top angle are determined.Move horizontally main spindle's b1, read measuring rod and read b2, plane is measured at this time and the practical angle of work top is arccos (b1/b2), repeatedly adjustment is straight To the difference of practical angle and hypothesized angle in allowable range of error.
Embodiment 4:
A kind of measurement method of planar obit simulation measuring device, comprising the following steps:
A) device is calibrated: calibrated using control gauge, mainly to the zero-bit of the long grating of high-precision in measuring rod main part into Row calibration.Measuring rod length component may change under difference measurement environment, and it is long to read high-precision in original state first Grating reading;Measurement bar assembly is calibrated using control gauge, the long grating reading of high-precision, measures bar assembly at this time after calibration Length is;Reconnection length is extension bar, reads the indicating value of the long grating of high-precision at this time.In conclusion after calibration being calculated Measurement bar assembly physical length be;
B) device is installed: by magnet base 1 through magnetic-adsorption on tested main shaft, rotating base 8 is connected on the table;
C) device adjusts: when installing the magnetic connector 2 in kinematic joint component, should slowly adjust tested main shaft and rotation bottom Seat the distance between 8, until the connector of accurate bead I 3 and the magnetic rod 6 for being fixed on work top is attached together completely, general Magnetic connector 2 is fixed, and then removes accurate bead;Then by tested main axle moving to measuring plane;It, will be by essence when measurement The measuring rod edge that close bead 2, accurate bead 4 are formed with the long grating 3 of high-precision is tested Plane Installation;Accurate bead I 3 and precision are small Ball II 5 is adsorbed in the ball-and-socket of magnetic connector 2 and magnetic rod 6 respectively by magnetic force;
Each axis of lathe should be moved to common position or middle position when d) detecting, asessory shaft is in returns state, Main shaft is locked.Lathe is non-loaded, i.e., without carrying out under conditions of workpiece;
E) data acquisition is carried out by data collection system 9.Angle surpassed distance is added at the starting and ending end of tested track, To eliminate the influence of transmission backlass.Data acquisition to the long grating of high-precision, passes through incision fortune before starting sampled data Triggering collection is moved, incision campaign radially is set before the surpassed distance before starting point, long grating is activated to carry out data acquisition.It is moving back The movement that cuts out radially is equally set when out, terminates sampling.Data acquisition to high accuracy circular grating 7, with the long light of high-precision Grid synchronize data acquisition, and return to zero before starting measurement;
F) according to start angle, the angle at the end, detection radius of detection actual requirement, numerical programming program determines lathe Coordinate system;
G) after having compiled program, trial operation, trial operation determine it is errorless after, by lathe return to incision movement before position, lathe Pause.Then standby mode and the measurement bar assembly pedestal for placed component and kinematic joint component after calibration be will already be at Between carry out data acquisition;
H) step e, f, g are repeated, the measurement of track counterclockwise is carried out;
I) data processing: analytical calculation planar obit simulation precision.
It is the three kinds of operating conditions met in measurement process individually below:
(1) when measuring track is Circular test: a length of R of measuring rod, length varying value (the long grating of measurement position radially Count value) it is Δ Ri, the angle position of measurement position is θi.Each measurement point coordinate value (xi,yi) be,
xi=(R+ Δ Ri)cosθi, (0≤θi≤360°)
yi=(R+ Δ Ri)sinθi, (0≤θi≤360°)
The Circular test deviation of both direction clockwise, counterclockwise is calculated separately according to GB/T 17421.4-2016, and is marked Angular position where each deviation obtains following parameter: two-way round deviation G (b), circle deviation G;Radial misalignment F, average bidirectional Radial misalignment D.
(2) X-axis, two axis interpolation of Y-axis: can establishing criteria GB/T 17421.2-2016 or ISO 230-2-2006 count respectively Calculate the position precision of two kinematic axis.The length varying value (long grating reading value) of measurement point radially is Δ Ri, the angle of measurement point Spending position (Circular gratings reading value) is θi.Have in measurement point i:
Δx0=R, Δ y0=0
Δx1=(R+ Δ R1)cosθ1-R,Δy1=(R+ Δ R1)sinθ1
Δxi=(R+ Δ Ri)·cosθi-(R+ΔRi-1)·cosθi-1, (i >=2,0≤θ≤90 °)
Δyi=(R+ Δ Ri)·sinθi-(R+ΔRi-1)·sinθi-1, (i >=2,0≤θ≤90 °)
Establishing criteria, by each measurement point position coordinates (xi,yi) correlation formula brought into standard calculated, can be able to Lower parameter: the two-way positioning accuracy A of axis, the unidirectional positioning accuracy A ↑ or A of axis ↓;Axis two-dimensional positioning system position deviation E;Axis The range M of the two-way mean place deviation of line;The unidirectional repetitive positioning accuracy R ↑ or R of axis ↓;The reversed difference B of axis.
(3) when it is oval for measuring track: least square method fitted ellipse is used, if elliptical algebraic expression are as follows:
Ax2+Bxy+Cy2+ Dx+Ey+F=0, (A+C=1)
Directly use the coordinate position (x of measurement pointi,yi) carry out least square processing, that is, seek objective function:
Minimum value determine each coefficient.
According to the least square ellipse algebraic expression of fitting, elliptical major and minor axis calculation formula is as follows:
Above-described specific embodiment has carried out further the purpose of the present invention, technical scheme and beneficial effects It is described in detail, it should be understood that being not intended to limit the present invention the foregoing is merely a specific embodiment of the invention Protection scope, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should all include Within protection scope of the present invention.

Claims (10)

1. a kind of planar obit simulation measuring device, including the internal measuring rod (4) for having long grating, which is characterized in that the measurement The both ends of bar (4) are separately connected bead I (3), bead II (5), further include the kinematic joint component being connected with bead I (3), with it is small The connected base assembly of ball II (5);
The kinematic joint component includes magnet base (1) for being connected on moving component, is connected to below magnet base (1) Magnetic connector (2), the bottom of the magnetic connector (2) have the ball-and-socket to match with bead I (3), the bead I (3) and magnetic The ball-and-socket of power connector (2) leans on magnetic absorption;
The base assembly includes the rotating base (8) being arranged in fixation member, the magnetic being rotatably connected on rotating base (8) Power bar (6), fixation are set in the Circular gratings (7) of magnetic rod (6) outside, and the top of the magnetic rod (6) has and bead II (5) phase Matched ball-and-socket, the bead II (5) and the ball-and-socket of magnetic rod (6) lean on magnetic absorption.
2. a kind of planar obit simulation measuring device according to claim 1, which is characterized in that the magnet base (1) and magnetic force It is connected between connector (2) by flexural pivot.
3. a kind of planar obit simulation measuring device according to claim 1, which is characterized in that fixed on the measuring rod (4) It connects extension bar (11), coaxially, the bead I (3) is connected on extension bar (11) for the extension bar (11) and measuring rod (4).
4. a kind of planar obit simulation measuring device according to claim 1, which is characterized in that further include being set in magnetic rod (6) outside bearing (12), the bearing (12) are located at below Circular gratings (7).
5. a kind of planar obit simulation measuring device according to claim 1, which is characterized in that further include with the long grating, The connected data collection system (9) of Circular gratings (7), the data collection system (9) acquire the reading of long grating, Circular gratings (7) Information, and pass through wireless communication transmission to data analysis system (10).
6. the installation method of any a kind of planar obit simulation measuring device in claim 1 to 5, which is characterized in that including Following steps:
(a) it calibrates: the internal measuring rod (4) for having long grating of calibration;
(b) it installs: rotating base (8) is connected on the table on tested main shaft by magnet base (1) by magnetic-adsorption;
(c) it adjusts: bead being adjusted by the bottom ball absorption of magnetic connector (2), slowly adjusts tested main shaft and rotating base The distance between (8), until the top ball-and-socket of magnetic rod (6) adsorbs adjusting bead completely, fix at this time magnetic connector (2) with The relative position of magnet base (1);Accurate bead I (3) and accurate bead II (5) are adsorbed in magnetic connector by magnetic force respectively again (2) and in the ball-and-socket of magnetic rod (6), installation is completed.
7. a kind of installation method of planar obit simulation measuring device according to claim 6, which is characterized in that wherein step (a) calibration method are as follows:
The long grating reading a of high-precision is read in the initial state1
Measuring rod is calibrated using control gauge, the reading of long grating is a after calibration2, the length of measuring rod (4) is L at this time;
Reconnection length is L1Extension bar, the reading for reading this duration grating is a3
The physical length R=L of measuring rod (4) after being calibrated1+(a3-a1)+L。
8. the measurement method based on a kind of planar obit simulation measuring device any in claim 1 to 5, which is characterized in that The following steps are included:
(A) installation is completed, lathe is made to be in no-load condition;
(B) angle surpassed distance is added at the starting and ending end of tested track, synchronizes and carries out the data of long grating and Circular gratings (7) and adopt Collection;
Wherein the data of long grating, which are acquired, is acquired before starting sampled data by incision motion triggers, surpassed distance before starting point it The incision campaign of preceding setting radially, activates long grating to carry out data acquisition;Equally be arranged when exiting radially cut out fortune It is dynamic, terminate sampling;
Wherein the data acquisition of Circular gratings (7) is returned to zero before starting measurement;
(C) according to the start angle of acquisition, angle at the end, detection radius, numerical programming program determines lathe coordinate system;
(D) lathe after trial operation, is returned to the position before incision movement, lathe pause by lathe trial operation;Then it will pass through length Measuring rod (4) pedestal for placed component after calibration and progress forward motion data acquisition between kinematic joint component;
(E) step (B)~(D) is repeated, the acquisition of counter motion data is carried out;
(F) pass through forward motion data collected, counter motion data Calculation Plane path accuracy.
9. a kind of measurement method of planar obit simulation measuring device according to claim 8, which is characterized in that determining lathe The machine coordinates when origin of coordinate system is to the connector for connecting base assembly and kinematic joint component.
10. a kind of measurement method of planar obit simulation measuring device according to claim 8, which is characterized in that step (D) In, when tested track is the irregular curve in plane, the length varying value of measurement point radially is long grating reading value, is surveyed The angle position of amount point is Circular gratings reading value.
CN201910238893.6A 2019-03-27 2019-03-27 A kind of planar obit simulation measuring device and its installation, measurement method Pending CN109945786A (en)

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TWI759970B (en) * 2020-11-20 2022-04-01 微正股份有限公司 Optical scale ball bar and measurement data processing method thereof
CN114518068A (en) * 2020-11-20 2022-05-20 微正股份有限公司 Double-reading head optical ruler ball rod and measured value processing method thereof

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