TW200722356A - Flat material conveying method and its device - Google Patents

Flat material conveying method and its device

Info

Publication number
TW200722356A
TW200722356A TW095123392A TW95123392A TW200722356A TW 200722356 A TW200722356 A TW 200722356A TW 095123392 A TW095123392 A TW 095123392A TW 95123392 A TW95123392 A TW 95123392A TW 200722356 A TW200722356 A TW 200722356A
Authority
TW
Taiwan
Prior art keywords
flat
conveyed material
pad
flat conveyed
bend
Prior art date
Application number
TW095123392A
Other languages
Chinese (zh)
Other versions
TWI300052B (en
Inventor
Katsuhito Ogura
Yuji Negishi
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Publication of TW200722356A publication Critical patent/TW200722356A/en
Application granted granted Critical
Publication of TWI300052B publication Critical patent/TWI300052B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Abstract

To provide a flat material conveying method and its device capable of miniaturizing a holder part such as a finger and capable of accurately conveying flat conveyed materials by restricting bend of the flat conveyed material due to dead wight thereof, while restricting a contact with the flat conveyed material. The flat conveyed material 17 is held by a holding part formed of a pad 18 and a suction part 19. The pad 18 abuts on a lower surface of the flat conveyed material 17 to support it. The suction part 19 is arranged between the pad 18, and height of the pad 18 is set low in the suction condition to vacuum-suck the lower surface of the flat conveyed material 17. The flat conveyed material 17 is thereby forcibly bent to reduce the amount of bend in a direction along an angle and/or a valley of the bend.
TW095123392A 2005-07-04 2006-06-28 Flat material conveying method and its device TW200722356A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005194685A JP4873895B2 (en) 2005-07-04 2005-07-04 Method and apparatus for transporting flat plate-like conveyed product

Publications (2)

Publication Number Publication Date
TW200722356A true TW200722356A (en) 2007-06-16
TWI300052B TWI300052B (en) 2008-08-21

Family

ID=37596836

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095123392A TW200722356A (en) 2005-07-04 2006-06-28 Flat material conveying method and its device

Country Status (4)

Country Link
JP (1) JP4873895B2 (en)
KR (2) KR20070004428A (en)
CN (1) CN1891589A (en)
TW (1) TW200722356A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI725115B (en) * 2016-01-29 2021-04-21 日商達誼恆股份有限公司 Robot for substrate transfer

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007052182B4 (en) * 2007-10-31 2009-07-02 Grenzebach Maschinenbau Gmbh Apparatus and method for reacting shock-sensitive glass plates in clean rooms
CN102741993B (en) * 2009-12-16 2016-06-22 株式会社尼康 Supporting member for substrate, base board delivery device, substrate transfer method adopted therein, exposure device and manufacturing method
KR101314146B1 (en) * 2011-11-23 2013-10-04 (주)제니스월드 Fixing apparatus for ceramic product
CN103287847B (en) * 2012-02-27 2016-08-31 北京北方微电子基地设备工艺研究中心有限责任公司 Substrate transmission mechanism and the substrate transport system with it
CN102774652A (en) * 2012-07-31 2012-11-14 深圳市华星光电技术有限公司 Supporting arm of LCD (liquid crystal display) panel handling device
CN102897536B (en) * 2012-11-02 2015-04-15 深圳市华星光电技术有限公司 Transferring system for transporting flat plate and mechanical device thereof as well as transporting method
CN103354216B (en) * 2013-07-02 2016-05-18 中国电子科技集团公司第四十八研究所 A kind of batch is transmitted the atmosphere manipulator terminal clamper of solar battery sheet
CN103594409A (en) * 2013-10-23 2014-02-19 中国电子科技集团公司第四十八研究所 Device for absorbing silicon wafers in batches
CN108292620B (en) * 2015-11-20 2022-08-09 盛美半导体设备(上海)股份有限公司 Robot for transferring semiconductor substrate
JP2019010690A (en) * 2017-06-29 2019-01-24 日本電産サンキョー株式会社 Industrial Robot Hand and Industrial Robot
JP7278930B2 (en) * 2019-11-29 2023-05-22 川崎重工業株式会社 Holding device, robot and robot system
CN111791255B (en) * 2020-08-14 2022-01-25 维信诺科技股份有限公司 Mechanical arm

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10279070A (en) * 1997-04-11 1998-10-20 Canon Inc Finger for conveying substrate
JP4067810B2 (en) * 2001-11-07 2008-03-26 大日本印刷株式会社 Substrate transfer device and arm thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI725115B (en) * 2016-01-29 2021-04-21 日商達誼恆股份有限公司 Robot for substrate transfer

Also Published As

Publication number Publication date
CN1891589A (en) 2007-01-10
TWI300052B (en) 2008-08-21
KR20070004428A (en) 2007-01-09
JP4873895B2 (en) 2012-02-08
JP2007008700A (en) 2007-01-18
KR20080076895A (en) 2008-08-20

Similar Documents

Publication Publication Date Title
TW200722356A (en) Flat material conveying method and its device
ATE409147T1 (en) DEVICE FOR ATTACHING A RAIN SENSOR TO A SUPPORT
ATE516121T1 (en) SUBSTRATE CONVEYING ARM
EP1450089A3 (en) A retaining member
ATE524090T1 (en) APPLICATOR FOR APPLYING A LIP PRODUCT TO THE LIPS
EP2108453A3 (en) Portable device for crushing pills and method for using said device
TW200944082A (en) A plate-shaped work piece flipping device
GB2399002A (en) Surface cleaning apparatus
TW200500277A (en) Sheet supporting device, end effector and thin plate cassette
ATE439322T1 (en) TRANSFER DEVICE FOR TRANSPORT SYSTEM
USD507602S1 (en) Display and holder for pens
TW200520172A (en) Bounding wire and IC device using the same
US20080168821A1 (en) Lower mold assembly for punching a sheet
ATE530482T1 (en) CONVEYING DEVICE FOR CHANGING THE FORWARD DIRECTION OF SURFACES
EP1962002A3 (en) Sealing device and sliding member
EP1536365A3 (en) Card holding structure for portable electronic device
TW200735255A (en) Thin-plate supporting container
EP1933110A3 (en) Tool with non-slip feature or friction assembly
EP1930646A3 (en) Display device
EP1675170A3 (en) Package elements and methods for securing a getter
EP2489921A3 (en) Display device
WO2005008243A8 (en) Sensing element for a biosensor
EP2581520A3 (en) Bracket
DE602007014282D1 (en) High-strength base for a carrier foot for carrying heavy bodies
WO2008051687A3 (en) Electronic device with rotatable cover

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees