TW200500277A - Sheet supporting device, end effector and thin plate cassette - Google Patents

Sheet supporting device, end effector and thin plate cassette

Info

Publication number
TW200500277A
TW200500277A TW092118457A TW92118457A TW200500277A TW 200500277 A TW200500277 A TW 200500277A TW 092118457 A TW092118457 A TW 092118457A TW 92118457 A TW92118457 A TW 92118457A TW 200500277 A TW200500277 A TW 200500277A
Authority
TW
Taiwan
Prior art keywords
supporting device
sheet supporting
end effector
thin plate
plate cassette
Prior art date
Application number
TW092118457A
Other languages
Chinese (zh)
Other versions
TWI231288B (en
Inventor
Hisato Ogawa
Hidekazu Okutsu
Koji Yokoyama
Original Assignee
Rorze Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rorze Corp filed Critical Rorze Corp
Publication of TW200500277A publication Critical patent/TW200500277A/en
Application granted granted Critical
Publication of TWI231288B publication Critical patent/TWI231288B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Liquid Crystal (AREA)

Abstract

When setting a large liquid crystal display glass substrate that is deflected by self-weight on a sheet supporting device formed to every pin-shaped supporting member in plural rows by a plenty of ridges, the flexibility amount comes to be diminished. In this case, a forked end effector of a robot or a cassette serves as the sheet supporting device.
TW092118457A 2003-06-19 2003-07-07 Sheet supporting device, end effector and thin plate cassette TWI231288B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2003/007829 WO2004113205A1 (en) 2003-06-19 2003-06-19 Thin plate-supporting body

Publications (2)

Publication Number Publication Date
TW200500277A true TW200500277A (en) 2005-01-01
TWI231288B TWI231288B (en) 2005-04-21

Family

ID=33524162

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092118457A TWI231288B (en) 2003-06-19 2003-07-07 Sheet supporting device, end effector and thin plate cassette

Country Status (5)

Country Link
JP (1) JPWO2004113205A1 (en)
CN (1) CN1787954A (en)
AU (1) AU2003242481A1 (en)
TW (1) TWI231288B (en)
WO (1) WO2004113205A1 (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007005582A (en) * 2005-06-24 2007-01-11 Asm Japan Kk Substrate transfer apparatus and semiconductor substrate manufacturing apparatus mounted with the same
CN101205017B (en) * 2006-12-20 2011-09-28 沈阳新松机器人自动化股份有限公司 Ultrathin glass cleaning carrying robot
US7946800B2 (en) 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
US20080259236A1 (en) * 2007-04-13 2008-10-23 Saint-Gobain Ceramics & Plastics, Inc. Electrostatic dissipative stage and effectors for use in forming lcd products
KR100910183B1 (en) * 2007-05-03 2009-07-31 주식회사 에스에프에이 Glass transfer robot
US8752449B2 (en) 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
JP5081567B2 (en) * 2007-10-12 2012-11-28 エスペック株式会社 Robot hand
CN101422904B (en) * 2008-12-09 2011-04-13 友达光电股份有限公司 Load-bearing element
KR101689550B1 (en) * 2009-01-11 2016-12-26 어플라이드 머티어리얼스, 인코포레이티드 Electrostatic end effector apparatus, systems and methods for transporting substrates
JP5938904B2 (en) * 2009-12-16 2016-06-22 株式会社ニコン Substrate support member, substrate transfer apparatus, substrate transfer method, exposure apparatus, and device manufacturing method
CN102364332B (en) * 2011-06-10 2014-07-30 乐金化学(南京)信息电子材料有限公司 Polarizing plate movement detection apparatus and method thereof
CN102357898B (en) * 2011-10-13 2013-12-25 苏州日和科技有限公司 Fetching arm
JP5913914B2 (en) * 2011-11-08 2016-04-27 東京応化工業株式会社 Substrate processing apparatus and substrate processing method
JP5563648B2 (en) * 2012-11-28 2014-07-30 キヤノン株式会社 Measuring apparatus and article manufacturing method
CN103342205B (en) * 2013-07-01 2015-12-23 深圳市华星光电技术有限公司 The device of a kind of card casket and moving glass substrate
CN103434842B (en) * 2013-09-04 2015-08-19 深圳市华星光电技术有限公司 Mechanical arm fork and mechanical arm
CN105097605B (en) * 2014-05-09 2019-07-02 深圳莱宝高科技股份有限公司 Base plate processing system and its processing method
JP6456065B2 (en) * 2014-05-16 2019-01-23 日本電産サンキョー株式会社 Industrial robot hand and industrial robot
CN107848863B (en) * 2015-07-08 2021-02-26 康宁股份有限公司 Glass substrate support apparatus and method of providing flexible glass substrate support
TWI725115B (en) * 2016-01-29 2021-04-21 日商達誼恆股份有限公司 Robot for substrate transfer
CN106348016A (en) * 2016-10-14 2017-01-25 武汉华星光电技术有限公司 Tablet pick-and-place robot
JP2019010690A (en) * 2017-06-29 2019-01-24 日本電産サンキョー株式会社 Industrial Robot Hand and Industrial Robot
TWI658532B (en) * 2017-08-09 2019-05-01 明安國際企業股份有限公司 Substrate receiving box
CN108313782A (en) * 2018-01-31 2018-07-24 六安维奥智能科技有限公司 A kind of dixie cup cup body paper paper feed

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5558482A (en) * 1992-07-29 1996-09-24 Tokyo Electron Limited Multi-chamber system
JP2837332B2 (en) * 1993-02-26 1998-12-16 東京エレクトロン株式会社 Transfer arm
JPH10279070A (en) * 1997-04-11 1998-10-20 Canon Inc Finger for conveying substrate
JPH11121580A (en) * 1997-10-13 1999-04-30 Hitachi Ltd Supporting method and processing device of plate-like object
JP2000053246A (en) * 1998-08-11 2000-02-22 Ishikawajima Harima Heavy Ind Co Ltd Supporting structure of glass substrate and hand for carrying glass substrate
JP2002217274A (en) * 2001-01-18 2002-08-02 Semiconductor Energy Lab Co Ltd Method for manufacturing semiconductor device
JP4328496B2 (en) * 2001-06-26 2009-09-09 株式会社日立プラントテクノロジー Single substrate transfer equipment

Also Published As

Publication number Publication date
WO2004113205A1 (en) 2004-12-29
CN1787954A (en) 2006-06-14
JPWO2004113205A1 (en) 2006-08-24
AU2003242481A1 (en) 2005-01-04
TWI231288B (en) 2005-04-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees