TW200720664A - Probe card for wafer test, wafer-testing device, and wafer-testing method - Google Patents

Probe card for wafer test, wafer-testing device, and wafer-testing method

Info

Publication number
TW200720664A
TW200720664A TW095133312A TW95133312A TW200720664A TW 200720664 A TW200720664 A TW 200720664A TW 095133312 A TW095133312 A TW 095133312A TW 95133312 A TW95133312 A TW 95133312A TW 200720664 A TW200720664 A TW 200720664A
Authority
TW
Taiwan
Prior art keywords
wafer
electrodes
sheet
electrode sheet
tested
Prior art date
Application number
TW095133312A
Other languages
English (en)
Inventor
Kiyoshi Kimura
Sugiro Shimoda
Fujio Hara
Original Assignee
Jsr Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jsr Corp filed Critical Jsr Corp
Publication of TW200720664A publication Critical patent/TW200720664A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
TW095133312A 2005-09-08 2006-09-08 Probe card for wafer test, wafer-testing device, and wafer-testing method TW200720664A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005260473 2005-09-08

Publications (1)

Publication Number Publication Date
TW200720664A true TW200720664A (en) 2007-06-01

Family

ID=37835881

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095133312A TW200720664A (en) 2005-09-08 2006-09-08 Probe card for wafer test, wafer-testing device, and wafer-testing method

Country Status (3)

Country Link
JP (1) JPWO2007029766A1 (zh)
TW (1) TW200720664A (zh)
WO (1) WO2007029766A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110546517A (zh) * 2017-02-27 2019-12-06 迪睿合株式会社 电特性的检查夹具

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108051645B (zh) * 2017-12-26 2023-10-27 宁夏钜晶源晶体科技有限公司 一种钽酸锂、铌酸锂晶片电阻率测试装置及测试方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003322665A (ja) * 2002-05-01 2003-11-14 Jsr Corp 電気抵抗測定用コネクター並びに回路基板の電気抵抗測定装置および測定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110546517A (zh) * 2017-02-27 2019-12-06 迪睿合株式会社 电特性的检查夹具

Also Published As

Publication number Publication date
WO2007029766A1 (ja) 2007-03-15
JPWO2007029766A1 (ja) 2009-03-19

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