TW200720660A - Semiconductor device, manufacturing method of semiconductor device, manufacturing method program of semiconductor device, and semiconductor manufacturing apparatus - Google Patents
Semiconductor device, manufacturing method of semiconductor device, manufacturing method program of semiconductor device, and semiconductor manufacturing apparatusInfo
- Publication number
- TW200720660A TW200720660A TW095127909A TW95127909A TW200720660A TW 200720660 A TW200720660 A TW 200720660A TW 095127909 A TW095127909 A TW 095127909A TW 95127909 A TW95127909 A TW 95127909A TW 200720660 A TW200720660 A TW 200720660A
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- semiconductor device
- semiconductor
- tester
- input
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
- G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Pressure Sensors (AREA)
- Wire Bonding (AREA)
Abstract
To provide a semiconductor device having a fine structure capable of compensating dispersion in a manufacturing stage by using a test result by a tester, its manufacturing method, its manufacturing method program, and a semiconductor manufacturing apparatus. In the tester 1, a test sound wave is input, and an output voltage from a device in response to input of the test sound wave is detected. A bonder 60 receives a test result by the tester 1, executes classification of the device, and executes bonding and adjust to acquire an amplification factor of an amplifier corresponding to a classified group.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005221691A JP4712474B2 (en) | 2005-07-29 | 2005-07-29 | Semiconductor device, semiconductor device manufacturing method, semiconductor device manufacturing method program, and semiconductor manufacturing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200720660A true TW200720660A (en) | 2007-06-01 |
TWI292042B TWI292042B (en) | 2008-01-01 |
Family
ID=37683467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095127909A TW200720660A (en) | 2005-07-29 | 2006-07-28 | Semiconductor device, manufacturing method of semiconductor device, manufacturing method program of semiconductor device, and semiconductor manufacturing apparatus |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4712474B2 (en) |
TW (1) | TW200720660A (en) |
WO (1) | WO2007013580A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5325630B2 (en) * | 2009-03-27 | 2013-10-23 | 株式会社東芝 | Microphone device and adjusting device and adjusting method thereof |
JP5511260B2 (en) * | 2009-08-19 | 2014-06-04 | キヤノン株式会社 | Capacitive electromechanical transducer and sensitivity adjustment method thereof |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3706765C3 (en) * | 1987-03-03 | 1995-11-09 | Telefunken Microelectron | Impact sensor for a vehicle, with a test circuit |
JPH0534371A (en) * | 1991-07-31 | 1993-02-09 | Tokai Rika Co Ltd | Measuring apparatus for sensitivity of semiconductor acceleration sensor |
JP3382030B2 (en) * | 1994-10-14 | 2003-03-04 | 株式会社日立製作所 | Full-mold mounting type acceleration sensor |
JPH0933567A (en) * | 1995-07-21 | 1997-02-07 | Akebono Brake Ind Co Ltd | Method and device for inspecting sensor chip of semiconductor acceleration sensor |
JPH11183507A (en) * | 1997-12-25 | 1999-07-09 | Fujikura Ltd | Semiconductor sensor |
JP4229347B2 (en) * | 1999-05-31 | 2009-02-25 | キヤノン株式会社 | Active vibration control apparatus, exposure apparatus, and device manufacturing method |
-
2005
- 2005-07-29 JP JP2005221691A patent/JP4712474B2/en not_active Expired - Fee Related
-
2006
- 2006-07-28 TW TW095127909A patent/TW200720660A/en not_active IP Right Cessation
- 2006-07-28 WO PCT/JP2006/314957 patent/WO2007013580A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2007013580A1 (en) | 2007-02-01 |
JP4712474B2 (en) | 2011-06-29 |
TWI292042B (en) | 2008-01-01 |
JP2007040704A (en) | 2007-02-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |