TW200720611A - Decompression drier - Google Patents
Decompression drierInfo
- Publication number
- TW200720611A TW200720611A TW095129661A TW95129661A TW200720611A TW 200720611 A TW200720611 A TW 200720611A TW 095129661 A TW095129661 A TW 095129661A TW 95129661 A TW95129661 A TW 95129661A TW 200720611 A TW200720611 A TW 200720611A
- Authority
- TW
- Taiwan
- Prior art keywords
- carrying
- port
- chamber
- lcd substrate
- decompression
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
- F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
- F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
- F26B15/18—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined the objects or batches of materials being carried by endless belts
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Molecular Biology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Drying Of Solid Materials (AREA)
- Coating Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Decompression drier 23b has the carrying port 61 where the LCD substrate G is carried in and the carrying out port 62 where the LCD substrate G is carried out in the side wall section, the chamber 6 which accommodates the LCD substrate G which is carried from the carrying port 61 in abbreviation horizontal state, the gate component 63, 64 which opens and closes the carrying port 61 and the carrying out port 62, the decompression mechanism which decompresses inside the chamber 6 when the carrying port 61 and the carrying out port 62 has been blocked by the gate component 63, 64, abbreviation conveying the LCD substrate G, horizontally, as from the carrying port 61 it carries into the chamber 6, after the decompression drying processing due to the decompression mechanism, abbreviation conveying horizontally, the conveying mechanism 7 which it carries out outside the chamber 6 from the carrying out port 62, and inside the chamber 6, without supporting the LCD substrate G locally, equally support possible belt 71.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005233092A JP4319175B2 (en) | 2005-08-11 | 2005-08-11 | Vacuum dryer |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200720611A true TW200720611A (en) | 2007-06-01 |
TWI311633B TWI311633B (en) | 2009-07-01 |
Family
ID=37721987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095129661A TWI311633B (en) | 2005-08-11 | 2006-08-11 | Decompression drier |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4319175B2 (en) |
KR (2) | KR101216747B1 (en) |
CN (1) | CN1913101A (en) |
TW (1) | TWI311633B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI386613B (en) * | 2008-10-10 | 2013-02-21 | Dainippon Screen Mfg | Substrate drying device |
TWI417497B (en) * | 2008-09-25 | 2013-12-01 | Tokyo Electron Ltd | Reduced-pressure drying device and reduced-pressure drying method |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5192747B2 (en) * | 2007-08-06 | 2013-05-08 | 東レエンジニアリング株式会社 | Vacuum dryer |
JP2009052762A (en) * | 2007-08-23 | 2009-03-12 | Shimada Phys & Chem Ind Co Ltd | Drying device |
JP5579550B2 (en) * | 2010-09-10 | 2014-08-27 | 株式会社スギノマシン | Vacuum dryer |
CN107192242A (en) * | 2017-07-19 | 2017-09-22 | 江西迪迪工业智能设备有限公司 | A kind of drier |
JP6861198B2 (en) * | 2018-12-12 | 2021-04-21 | 株式会社Screenホールディングス | Substrate transfer device and coating device |
KR102559562B1 (en) * | 2021-03-11 | 2023-07-27 | 주식회사 한국제이텍트써모시스템 | Heat treatment oven exhaust duct integrated heater unit |
CN115468389B (en) * | 2022-09-16 | 2023-08-01 | 江苏美客鼎嵘智能装备制造有限公司 | Display glass substrate baking equipment |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004299850A (en) * | 2003-03-31 | 2004-10-28 | Dainippon Printing Co Ltd | Processing method and processing device |
JP2005134013A (en) * | 2003-10-29 | 2005-05-26 | Pioneer Electronic Corp | Device and method for manufacturing substrate |
-
2005
- 2005-08-11 JP JP2005233092A patent/JP4319175B2/en not_active Expired - Fee Related
-
2006
- 2006-08-07 KR KR1020060074123A patent/KR101216747B1/en not_active IP Right Cessation
- 2006-08-11 TW TW095129661A patent/TWI311633B/en not_active IP Right Cessation
- 2006-08-11 CN CNA2006101157208A patent/CN1913101A/en active Pending
-
2012
- 2012-06-07 KR KR1020120060961A patent/KR20120090018A/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI417497B (en) * | 2008-09-25 | 2013-12-01 | Tokyo Electron Ltd | Reduced-pressure drying device and reduced-pressure drying method |
TWI386613B (en) * | 2008-10-10 | 2013-02-21 | Dainippon Screen Mfg | Substrate drying device |
Also Published As
Publication number | Publication date |
---|---|
TWI311633B (en) | 2009-07-01 |
KR20070019563A (en) | 2007-02-15 |
CN1913101A (en) | 2007-02-14 |
KR20120090018A (en) | 2012-08-16 |
JP2007046859A (en) | 2007-02-22 |
KR101216747B1 (en) | 2012-12-31 |
JP4319175B2 (en) | 2009-08-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |