TW200714893A - Apparatus for inspecting a substrate - Google Patents

Apparatus for inspecting a substrate

Info

Publication number
TW200714893A
TW200714893A TW095134444A TW95134444A TW200714893A TW 200714893 A TW200714893 A TW 200714893A TW 095134444 A TW095134444 A TW 095134444A TW 95134444 A TW95134444 A TW 95134444A TW 200714893 A TW200714893 A TW 200714893A
Authority
TW
Taiwan
Prior art keywords
substrate
stationary plate
link levers
back light
inspecting
Prior art date
Application number
TW095134444A
Other languages
Chinese (zh)
Other versions
TWI338775B (en
Inventor
Tomokazu Kiuchi
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200714893A publication Critical patent/TW200714893A/en
Application granted granted Critical
Publication of TWI338775B publication Critical patent/TWI338775B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

An apparatus for inspecting a substrate 1 is provided with a holder rotating mechanism 3 for holding and rotating a test substrate W, a back light 5 which irradiates light onto a back side surface W2 that is opposed to a front side surface W1 of the test substrate W, and moving means 6 for moving the back light 5. A rotating arm 17, which constitutes the moving means 6, includes two link levers 19 and 20 and a stationary plate 21 which is a stationary member. The two link levers 19 and 20 are rotatably supported on a supporting member 16 at one ends (19a, 20a) thereof, respectively, the one ends being separated from one another by a predetermined distance. Further, the link levers 19 and 20 are rotatably supported on the stationary plate 21 at the other ends (19b, 20b) thereof, respectively, the other ends being separated from one another by a predefined distance. The back light 5 is fixedly secured to the stationary plate 12.
TW095134444A 2005-09-29 2006-09-18 Apparatus for inspecting a substrate TWI338775B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005283776A JP2007093411A (en) 2005-09-29 2005-09-29 Substrate inspection apparatus

Publications (2)

Publication Number Publication Date
TW200714893A true TW200714893A (en) 2007-04-16
TWI338775B TWI338775B (en) 2011-03-11

Family

ID=37958913

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095134444A TWI338775B (en) 2005-09-29 2006-09-18 Apparatus for inspecting a substrate

Country Status (4)

Country Link
JP (1) JP2007093411A (en)
KR (1) KR100824395B1 (en)
CN (1) CN100578202C (en)
TW (1) TWI338775B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102033336B (en) * 2009-09-24 2012-09-05 北京京东方光电科技有限公司 Detection equipment and detection method of liquid crystal display device
JP2011141127A (en) * 2010-01-05 2011-07-21 Avanstrate Taiwan Inc Visual inspection method and visual inspection device for defect part of glass plate
JP5854370B2 (en) * 2012-02-13 2016-02-09 日本電気硝子株式会社 Inspection apparatus and inspection method for phosphor-containing glass member
CN105699400A (en) * 2014-11-28 2016-06-22 中电电气(上海)太阳能科技有限公司 Visual inspection device of toughened glass
CN104865272A (en) * 2015-05-11 2015-08-26 天津三瑞塑胶制品有限公司 Glass adhesive tape appearance tester
CN106950485A (en) * 2017-03-24 2017-07-14 京东方科技集团股份有限公司 A kind of tester substrate microscope carrier and substrate test equipment
CN108508030A (en) * 2018-05-17 2018-09-07 江苏东旭亿泰智能装备有限公司 Glass substrate inspecting apparatus and the method for checking glass substrate using it

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05264992A (en) * 1992-03-18 1993-10-15 Mitsubishi Electric Corp Lighting device
JPH0973809A (en) * 1995-09-05 1997-03-18 Mitsubishi Denki Shomei Kk Universal arm stand
JP4182745B2 (en) * 2002-12-17 2008-11-19 住友化学株式会社 Visual inspection table
JP4365603B2 (en) * 2003-03-24 2009-11-18 オリンパス株式会社 Substrate inspection apparatus and substrate inspection method
KR100506702B1 (en) * 2003-05-06 2005-08-09 주식회사 디이엔티 Substrate Inspection Apparatus
KR20050013491A (en) * 2003-07-28 2005-02-04 닛토덴코 가부시키가이샤 Inspection method and inspection system of sheet type product
JP2005249423A (en) * 2004-03-01 2005-09-15 Tokyo Cathode Laboratory Co Ltd Visual inspection device for flat display panel

Also Published As

Publication number Publication date
CN1940541A (en) 2007-04-04
KR100824395B1 (en) 2008-04-22
KR20070036680A (en) 2007-04-03
JP2007093411A (en) 2007-04-12
TWI338775B (en) 2011-03-11
CN100578202C (en) 2010-01-06

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees