TW200714138A - Plasma discharging device - Google Patents
Plasma discharging deviceInfo
- Publication number
- TW200714138A TW200714138A TW094132140A TW94132140A TW200714138A TW 200714138 A TW200714138 A TW 200714138A TW 094132140 A TW094132140 A TW 094132140A TW 94132140 A TW94132140 A TW 94132140A TW 200714138 A TW200714138 A TW 200714138A
- Authority
- TW
- Taiwan
- Prior art keywords
- cavity
- diameter
- bottom plate
- discharging device
- opening
- Prior art date
Links
Abstract
A plasma-discharging device is described, comprising: an outer electrode, an insulator layer and an inner electrode. The outer electrode comprises: a first portion including a first cavity of a first diameter, in which the first cavity includes a bottom plate, and an opening is set in the bottom plate; and a second portion connected to and beneath the first portion, the second portion includes a second cavity of a second diameter, and the second cavity penetrates through the second portion, in which the second cavity is connected with the opening in the bottom plate, and the first diameter is larger than the second diameter. The insulator layer covers an inner wall of the first cavity. The inner electrode is installed in a front end of the first cavity within the outer electrode and is opposite to the opening of the bottom plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94132140A TWI295908B (en) | 2005-09-16 | 2005-09-16 | Plasma discharging device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94132140A TWI295908B (en) | 2005-09-16 | 2005-09-16 | Plasma discharging device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200714138A true TW200714138A (en) | 2007-04-01 |
TWI295908B TWI295908B (en) | 2008-04-11 |
Family
ID=45068576
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94132140A TWI295908B (en) | 2005-09-16 | 2005-09-16 | Plasma discharging device |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI295908B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI670908B (en) * | 2017-10-20 | 2019-09-01 | 日商夏普股份有限公司 | Discharge device |
US11352696B2 (en) | 2014-06-25 | 2022-06-07 | Nederlandse Organisatie Voor Toegepast—Natuurwetenschappelijk Onderzoek Tno | Plasma source and surface treatment method |
-
2005
- 2005-09-16 TW TW94132140A patent/TWI295908B/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11352696B2 (en) | 2014-06-25 | 2022-06-07 | Nederlandse Organisatie Voor Toegepast—Natuurwetenschappelijk Onderzoek Tno | Plasma source and surface treatment method |
TWI670908B (en) * | 2017-10-20 | 2019-09-01 | 日商夏普股份有限公司 | Discharge device |
Also Published As
Publication number | Publication date |
---|---|
TWI295908B (en) | 2008-04-11 |
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