TW200714138A - Plasma discharging device - Google Patents

Plasma discharging device

Info

Publication number
TW200714138A
TW200714138A TW094132140A TW94132140A TW200714138A TW 200714138 A TW200714138 A TW 200714138A TW 094132140 A TW094132140 A TW 094132140A TW 94132140 A TW94132140 A TW 94132140A TW 200714138 A TW200714138 A TW 200714138A
Authority
TW
Taiwan
Prior art keywords
cavity
diameter
bottom plate
discharging device
opening
Prior art date
Application number
TW094132140A
Other languages
Chinese (zh)
Other versions
TWI295908B (en
Inventor
Chau-Nan Hong
Kuo-Chao Liang
Yih-Ming Shyu
Chun-Chin Chen
Liang-Chun Wang
Chun Yao Wang
Yan Gen Chen
Ji Yung Li
Original Assignee
Creating Nano Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Creating Nano Technologies Inc filed Critical Creating Nano Technologies Inc
Priority to TW94132140A priority Critical patent/TWI295908B/en
Publication of TW200714138A publication Critical patent/TW200714138A/en
Application granted granted Critical
Publication of TWI295908B publication Critical patent/TWI295908B/en

Links

Abstract

A plasma-discharging device is described, comprising: an outer electrode, an insulator layer and an inner electrode. The outer electrode comprises: a first portion including a first cavity of a first diameter, in which the first cavity includes a bottom plate, and an opening is set in the bottom plate; and a second portion connected to and beneath the first portion, the second portion includes a second cavity of a second diameter, and the second cavity penetrates through the second portion, in which the second cavity is connected with the opening in the bottom plate, and the first diameter is larger than the second diameter. The insulator layer covers an inner wall of the first cavity. The inner electrode is installed in a front end of the first cavity within the outer electrode and is opposite to the opening of the bottom plate.
TW94132140A 2005-09-16 2005-09-16 Plasma discharging device TWI295908B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94132140A TWI295908B (en) 2005-09-16 2005-09-16 Plasma discharging device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94132140A TWI295908B (en) 2005-09-16 2005-09-16 Plasma discharging device

Publications (2)

Publication Number Publication Date
TW200714138A true TW200714138A (en) 2007-04-01
TWI295908B TWI295908B (en) 2008-04-11

Family

ID=45068576

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94132140A TWI295908B (en) 2005-09-16 2005-09-16 Plasma discharging device

Country Status (1)

Country Link
TW (1) TWI295908B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI670908B (en) * 2017-10-20 2019-09-01 日商夏普股份有限公司 Discharge device
US11352696B2 (en) 2014-06-25 2022-06-07 Nederlandse Organisatie Voor Toegepast—Natuurwetenschappelijk Onderzoek Tno Plasma source and surface treatment method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11352696B2 (en) 2014-06-25 2022-06-07 Nederlandse Organisatie Voor Toegepast—Natuurwetenschappelijk Onderzoek Tno Plasma source and surface treatment method
TWI670908B (en) * 2017-10-20 2019-09-01 日商夏普股份有限公司 Discharge device

Also Published As

Publication number Publication date
TWI295908B (en) 2008-04-11

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