TW200709947A - Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator - Google Patents
Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuatorInfo
- Publication number
- TW200709947A TW200709947A TW095126773A TW95126773A TW200709947A TW 200709947 A TW200709947 A TW 200709947A TW 095126773 A TW095126773 A TW 095126773A TW 95126773 A TW95126773 A TW 95126773A TW 200709947 A TW200709947 A TW 200709947A
- Authority
- TW
- Taiwan
- Prior art keywords
- electrostatic actuator
- discharge head
- droplet discharge
- diaphragm
- driving
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000006073 displacement reaction Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14411—Groove in the nozzle plate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Abstract
To provide an electrostatic actuator capable of attaining a large diaphragm displacement by low voltage drive. Furthermore, a droplet discharge head provided with this electrostatic actuator, a method for driving a droplet discharge head, and a method for manufacturing an electrostatic actuator are provided. A diaphragm 4, an individual electrode 11 facing the diaphragm 4 with a gap 10 therebetween, while a voltage is applied between the diaphragm 4 and the individual electrode 11, and an insulating film 4a which is disposed on a surface of the diaphragm 4, the surface facing the individual electrode 11, are included, wherein the insulating film 4a is converted to an electret.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005223218 | 2005-08-01 | ||
JP2005223217 | 2005-08-01 | ||
JP2005223216 | 2005-08-01 | ||
JP2006161130A JP4424331B2 (en) | 2005-08-01 | 2006-06-09 | Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200709947A true TW200709947A (en) | 2007-03-16 |
Family
ID=37401022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095126773A TW200709947A (en) | 2005-08-01 | 2006-07-21 | Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator |
Country Status (4)
Country | Link |
---|---|
US (2) | US7661794B2 (en) |
EP (1) | EP1749661A3 (en) |
JP (1) | JP4424331B2 (en) |
TW (1) | TW200709947A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI450827B (en) * | 2007-07-31 | 2014-09-01 | Hewlett Packard Development Co | Actuator |
TWI612330B (en) * | 2012-08-24 | 2018-01-21 | 王崇智 | A device for high voltage droplet actuation |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7956497B2 (en) * | 2006-09-29 | 2011-06-07 | Sanyo Electric Co., Ltd. | Electret device and electrostatic induction conversion apparatus comprising the same |
JP4514782B2 (en) * | 2006-11-10 | 2010-07-28 | 三洋電機株式会社 | Electret element and electrostatic operation device |
JP4834682B2 (en) * | 2008-01-25 | 2011-12-14 | 株式会社日立製作所 | Liquid prism and projector using the same |
US9085152B2 (en) * | 2008-05-22 | 2015-07-21 | Fujifilm Corporation | Etching piezoelectric material |
JP5200746B2 (en) * | 2008-08-05 | 2013-06-05 | セイコーエプソン株式会社 | Electrostatic actuator, droplet discharge head, droplet discharge device, and method for manufacturing droplet discharge head |
EP2342081B1 (en) * | 2008-10-31 | 2014-03-19 | Hewlett-Packard Development Company, L.P. | Electrostatic liquid-ejection actuation mechanism |
TWI449435B (en) * | 2009-08-06 | 2014-08-11 | Merry Electronics Co Ltd | Magnetic diaphragm and manufacture method thereof |
FR2954582B1 (en) * | 2009-12-23 | 2017-11-03 | Commissariat A L'energie Atomique | ELECTROMECHANICAL DEVICE BASED ON ELECTRET, AND METHOD FOR MANUFACTURING THE SAME |
JP5987573B2 (en) | 2012-09-12 | 2016-09-07 | セイコーエプソン株式会社 | Optical module, electronic device, and driving method |
JP6191257B2 (en) * | 2013-06-11 | 2017-09-06 | 株式会社リコー | Polarization processing apparatus and piezoelectric element manufacturing method |
CN107310271B (en) * | 2016-04-27 | 2019-04-26 | 东芝泰格有限公司 | Ink gun and ink-jet recording apparatus |
JP7172044B2 (en) * | 2017-09-12 | 2022-11-16 | セイコーエプソン株式会社 | Liquid ejection head, liquid ejection device, piezoelectric device, and ultrasonic sensor |
JP7115275B2 (en) * | 2018-12-10 | 2022-08-09 | セイコーエプソン株式会社 | Liquid ejecting head and liquid ejecting device |
CN113921616A (en) * | 2021-08-27 | 2022-01-11 | 华南师范大学 | Low-voltage-driven ink-jet printing flexible synaptic transistor and preparation method thereof |
CN113921398A (en) * | 2021-08-27 | 2022-01-11 | 华南师范大学 | Ink-jet printing synaptic transistor with low power consumption, high linearity and high recognition rate and preparation method thereof |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04344250A (en) | 1991-05-22 | 1992-11-30 | Mita Ind Co Ltd | Ink discharge device to be used in ink jet printing system |
US5652609A (en) | 1993-06-09 | 1997-07-29 | J. David Scholler | Recording device using an electret transducer |
US6977061B2 (en) * | 1997-04-04 | 2005-12-20 | Ethicon Endo-Surgery, Inc. | Method and apparatus for sterilizing a lumen device |
JP3472493B2 (en) * | 1998-11-30 | 2003-12-02 | ホシデン株式会社 | Semiconductor electret condenser microphone |
JP2000280490A (en) | 1999-03-30 | 2000-10-10 | Fuji Xerox Co Ltd | Ink jet recording head and ink jet recording apparatus |
JP2002248756A (en) | 2001-02-27 | 2002-09-03 | Ricoh Co Ltd | Ink-jet head |
JP2003282360A (en) | 2002-03-26 | 2003-10-03 | Uchitsugu Minami | Electret and manufacturing method thereof |
JP4522696B2 (en) * | 2002-04-11 | 2010-08-11 | リオン株式会社 | Electroacoustic transducer |
JP4138421B2 (en) | 2002-09-24 | 2008-08-27 | 株式会社リコー | Droplet discharge head |
JP4185379B2 (en) | 2003-02-24 | 2008-11-26 | 株式会社リコー | Image forming apparatus |
JP2004255614A (en) | 2003-02-24 | 2004-09-16 | Ricoh Co Ltd | Liquid droplet discharging head and actuator |
TWI314304B (en) * | 2003-05-05 | 2009-09-01 | Inventio Ag | System for security checking or transport of persons by a lift installation and a method for operating this system |
US7265448B2 (en) * | 2004-01-26 | 2007-09-04 | Marvell World Trade Ltd. | Interconnect structure for power transistors |
JP2005138385A (en) | 2003-11-06 | 2005-06-02 | Seiko Epson Corp | Manufacturing method for droplet ejecting head, droplet ejecting head, and droplet ejector |
JP2005144594A (en) | 2003-11-14 | 2005-06-09 | Ricoh Co Ltd | Actuator device, actuator, droplet discharging device, and droplet discharging head |
JP2005161706A (en) | 2003-12-03 | 2005-06-23 | Seiko Epson Corp | Liquid droplet jet head, method of manufacturing the same, and liquid droplet jet device having the same |
JP4419563B2 (en) | 2003-12-25 | 2010-02-24 | パナソニック株式会社 | Electret condenser |
JP2005197826A (en) * | 2003-12-26 | 2005-07-21 | Fujitsu Ltd | Central management apparatus for managing a plurality of nodes on network |
-
2006
- 2006-06-09 JP JP2006161130A patent/JP4424331B2/en not_active Expired - Fee Related
- 2006-07-21 TW TW095126773A patent/TW200709947A/en unknown
- 2006-07-31 EP EP20060015902 patent/EP1749661A3/en not_active Withdrawn
- 2006-07-31 US US11/497,034 patent/US7661794B2/en not_active Expired - Fee Related
-
2009
- 2009-08-07 US US12/537,501 patent/US8087754B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI450827B (en) * | 2007-07-31 | 2014-09-01 | Hewlett Packard Development Co | Actuator |
TWI612330B (en) * | 2012-08-24 | 2018-01-21 | 王崇智 | A device for high voltage droplet actuation |
Also Published As
Publication number | Publication date |
---|---|
EP1749661A3 (en) | 2007-12-26 |
US8087754B2 (en) | 2012-01-03 |
US20070024672A1 (en) | 2007-02-01 |
US20090295877A1 (en) | 2009-12-03 |
EP1749661A2 (en) | 2007-02-07 |
JP2007062361A (en) | 2007-03-15 |
JP4424331B2 (en) | 2010-03-03 |
US7661794B2 (en) | 2010-02-16 |
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