TW200708714A - A coordinate measuring device - Google Patents

A coordinate measuring device

Info

Publication number
TW200708714A
TW200708714A TW095126153A TW95126153A TW200708714A TW 200708714 A TW200708714 A TW 200708714A TW 095126153 A TW095126153 A TW 095126153A TW 95126153 A TW95126153 A TW 95126153A TW 200708714 A TW200708714 A TW 200708714A
Authority
TW
Taiwan
Prior art keywords
measuring device
coordinate measuring
tube
traversable
windows
Prior art date
Application number
TW095126153A
Other languages
English (en)
Inventor
Michael Heiden
Hans-Arthur Bosser
Original Assignee
Vistec Semicondcutor Systems Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vistec Semicondcutor Systems Gmbh filed Critical Vistec Semicondcutor Systems Gmbh
Publication of TW200708714A publication Critical patent/TW200708714A/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Public Health (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
TW095126153A 2005-08-26 2006-07-18 A coordinate measuring device TW200708714A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005040661A DE102005040661B3 (de) 2005-08-26 2005-08-26 Koordinatenmessvorrichtung

Publications (1)

Publication Number Publication Date
TW200708714A true TW200708714A (en) 2007-03-01

Family

ID=37513806

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095126153A TW200708714A (en) 2005-08-26 2006-07-18 A coordinate measuring device

Country Status (5)

Country Link
US (1) US20070046949A1 (zh)
JP (1) JP2007064972A (zh)
CN (1) CN1920475A (zh)
DE (1) DE102005040661B3 (zh)
TW (1) TW200708714A (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005046605A1 (de) * 2005-09-29 2007-04-05 Robert Bosch Gmbh Interferometrische Messeinrichtung
DE102008002968A1 (de) 2008-07-25 2010-02-04 Vistec Semiconductor Systems Gmbh Interferometrische Einrichtung zur Positionsmessung und Koordinaten-Messmaschine
JP5541722B2 (ja) * 2010-10-29 2014-07-09 キヤノン株式会社 測長装置、及び工作機械
CN115047221B (zh) * 2022-05-20 2023-09-15 浙江大学 一种面向末端稳定性的冂字型长探针装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3398287A (en) * 1965-02-15 1968-08-20 Boeing Co Radiation sensitive geophysical strain measuring apparatus
DE3006489C2 (de) * 1980-02-21 1982-09-02 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Wegmeßeinrichtung
ATE9183T1 (de) * 1980-12-02 1984-09-15 Dr. Johannes Heidenhain Gmbh Verfahren zum schrittweisen messen von geometrischen groessen und vorrichtungen zur durchfuehrung des verfahrens.
DE3370186D1 (en) * 1982-05-18 1987-04-16 Nat Res Dev Apparatus and method for measuring refractive index
US4813783A (en) * 1987-11-03 1989-03-21 Carl-Zeiss-Stiftung Interferometer system for making length or angle measurements
US5039201A (en) * 1990-04-30 1991-08-13 International Business Machines Corporation Double-pass tunable fabry-perot optical filter
US5245405A (en) * 1990-05-11 1993-09-14 Boc Health Care, Inc. Constant pressure gas cell
JPH05256611A (ja) * 1992-03-13 1993-10-05 Fujitsu Ltd レーザ干渉測長装置
US5469260A (en) * 1992-04-01 1995-11-21 Nikon Corporation Stage-position measuring apparatus
US5585922A (en) * 1992-12-24 1996-12-17 Nikon Corporation Dual interferometer apparatus compensating for environmental turbulence or fluctuation and for quantization error
JP3219349B2 (ja) * 1993-06-30 2001-10-15 キヤノン株式会社 波長コンペンセータ、該波長コンペンセータを用いたレーザ干渉測定装置、該レーザ干渉測定装置を有するステージ装置、該ステージ装置を有する露光システム、および該露光システムを用いたデバイスの製造方法
DE19528513A1 (de) * 1995-08-03 1997-02-06 Haeusler Gerd Verfahren zur berührungslosen, schnellen und genauen Erfassung der Oberflächengestalt von Objekten
DE19628969C1 (de) * 1996-07-18 1997-10-02 Leica Mikroskopie & Syst Koordinaten-Meßvorrichtung
JP3202183B2 (ja) * 1997-10-16 2001-08-27 株式会社ミツトヨ レーザ光を用いたスケール及び測長方法
US6222860B1 (en) * 1999-01-07 2001-04-24 Hewlett-Packard Company Laser system tolerating disturbances using multiple modes
JP2002541541A (ja) * 1999-04-07 2002-12-03 アルカテル 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット
US6195168B1 (en) * 1999-07-22 2001-02-27 Zygo Corporation Infrared scanning interferometry apparatus and method
US6909511B2 (en) * 2001-02-27 2005-06-21 Jds Uniphase Corporation Athermal interferometer
US7215081B2 (en) * 2002-12-18 2007-05-08 General Electric Company HID lamp having material free dosing tube seal

Also Published As

Publication number Publication date
DE102005040661B3 (de) 2006-12-28
JP2007064972A (ja) 2007-03-15
CN1920475A (zh) 2007-02-28
US20070046949A1 (en) 2007-03-01

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