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Publication of TW200706869ApublicationCriticalpatent/TW200706869A/en
Measurement Of Mechanical Vibrations Or Ultrasonic Waves
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Abstract
An optical accelerometer which comprises a base, an optical displacement measurement apparatus and a seismic apparatus are mounted on the base. In operation, the base of the optical accelerometer is attached to the vibrating structure. Vibrations of this structure cause a displacement of the seismic mass within the optical accelerometer. These displacements are detected by the optical displacement measurement apparatus, which generates a corresponding focus error signal. The focus error signal is acquired and used to calculate the acceleration acting on the base.
Inertial force generating device, e.g. for vehicle vibration damping systems or sensor applications, has masses that can be set vibrating using a solid-state device so that they apply a force via their sprung support
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