TWI470228B - Accelerometer - Google Patents

Description

Acceleration gauge 【0001】

The present invention relates to a measuring device, and more particularly to an accelerometer.

【0002】

Conventional accelerometers can be used in different industries and as different applications, such as monitoring of semiconductor processes, airbags in the automotive industry, sphygmomanometers and pedometers in the medical industry, interactive electronic entertainment products and smart phones, etc. Wait. Among them, monitoring in semiconductor processes has been particularly important in recent years.

[0003]

In addition to general process control, the suppression of semiconductor process equipment, floor structure and vibration response of the working environment is one of the factors affecting product yield and reliability. In view of the fact that the specifications of the products are becoming lighter and thinner, the tolerance of the semiconductor process to environmental vibrations is also becoming more stringent.

[0004]

Generally, the acceleration gauge can transmit the measured vibration signal to an active vibration isolation system, and operate through a controller in the active vibration isolation system, and output a control signal to the driver to generate the active vibration isolation system. The force of vibration is suppressed to achieve the purpose of reducing the amount of environmental vibration and improving the process yield. However, in view of the fact that the semiconductor process and the optoelectronic industry's inspection equipment are sensitive to the microvibration of the surrounding environment, it is preferable to use an accelerometer with high sensitivity and low noise at low frequency vibration.

[0005]

In view of the complicated structure of the accelerometer generally used for low-frequency measurement (mostly piezoelectric material combined with beam structure), the price is high, and the noise floor is too high. Therefore, how to provide an accelerometer suitable for low-frequency measurement, compact structure, low cost, wide frequency response, and high sensitivity is an urgent task in the industry.

[0006]

In view of the above problems, an object of the present invention is to provide an acceleration gauge which is compact in structure, low in cost, and high in sensitivity.

【0007】

To achieve the above object, an acceleration gauge for measuring an axial acceleration can be provided in accordance with the present invention. And the acceleration gauge may include a base, a mass, at least three sets of elastic elements, a piezoelectric element, and a first damping element. The first damper element is disposed on at least one side of the piezoelectric element.

[0008]

The base is provided with a pressing portion in the axial direction. The mass has a first side and a second side opposite the first side. The at least three sets of elastic elements each include a first elastic element, a second elastic element, and a pre-stress adjustment element. The first elastic element is disposed on the first side of the mass, and the second elastic element is disposed on the second side of the mass, and the pre-stressing adjustment element passes through the first elastic element, the mass and the second elastic element.

【0009】

The piezoelectric element is disposed between the mass and the base. The piezoelectric element has a first side facing the first side of the pressing portion and a second side opposite the first side.

[0010]

Wherein when the mass is displaced in the axial direction, the pressing portion of the base will cause a deformation of the piezoelectric element.

[0011]

In an embodiment, the abutting portion is a thimble.

[0012]

In an embodiment, a rigid element is further included, and the rigid element is disposed on the second side of the piezoelectric element.

[0013]

In an embodiment, the first damping element is attached to the first side of the piezoelectric element.

[0014]

In an embodiment, an insulating member is further included, and the insulating member is disposed between the pressing portion and the piezoelectric element.

[0015]

In an embodiment, the first damping element is attached to the first side of the piezoelectric element. The acceleration gauge further includes a second damping element disposed on a side of the rigid element relative to the piezoelectric element.

[0016]

In an embodiment, the first damping element is disposed on the second side of the piezoelectric element, and the acceleration gauge further includes a rigid element, and the rigid element is disposed between the first damping element and the piezoelectric element.

[0017]

In an embodiment, a plurality of second damping elements are further included, and the second damping elements are disposed between the mass and the base.

[0018]

In an embodiment, at least three of the sets of elastic elements are both flattened.

[0019]

In an embodiment, the method further includes at least three fixing members, at least three first fixing seats, and at least three second fixing seats. The first end of each of the second elastic members is sleeved on each of the fixing members. At least three first fixing seats are disposed on the second side of the mass. At least three second mounts are disposed on the first side of the mass. At least three third fixing seats are disposed on the base toward one side of the mass.

[0020]

Each of the first elastic members is interposed between each of the second fixing bases and each of the third fixing bases, and each of the second elastic members is interposed between each of the fixing members and each of the first fixing seats. Each of the pre-stressing adjustment elements is provided with each fixing member, each of the first fixing seats, each of the second fixing seats, and each of the third fixing seats.

[0021]

In summary, the present invention embodies the arrangement of the piezoelectric element by arranging the base member, the mass block, the at least three elastic element groups, the piezoelectric element, and the first damper element, and arranging the pressing portion with the base. When the mass has a displacement in the axial direction, the pressing portion of the base will cause a deformation of the piezoelectric element, and then the electrical signal converted by the deformation is passed to complete the measurement. Therefore, through the above configuration, the present invention can provide an acceleration gauge with a compact structure, low cost, and high sensitivity.

[0078]

1, 2, 3, 4, 5, 6 ‧ ‧ Acceleration regulations
10, 20, 30, 40, 50, 60‧‧‧ base
102, 202, 302, 402, 502‧‧‧Resistance Department
11, 21, 31, 41, 51, 61‧ ‧ quality blocks
11a‧‧‧ first side
11b‧‧‧ second side
12, 22, 32, 42, 52, 62‧‧‧ elastic component groups
121, 221, 321, 421, 521, 621‧‧‧ first elastic element
122, 222, 322, 422, 522, 622‧‧‧ second elastic element
123, 223, 323, 423, 523, 623‧‧‧Preloading adjustment components
13, 23, 33, 43, 53, 63‧‧‧ Piezoelectric components
13a, 23a, 33a‧‧‧ first side
13b, 23b, 46b‧‧‧ second side
14, 24, 34, 44, 54, 64‧‧‧ first damping element
151, 251, 451‧‧‧ fixing parts
152, 252, 352, 452‧‧‧ first mount
153, 253, 353, 453 ‧ ‧ second mount
154, 254, 354, 454‧‧‧ third mount
16, 26, 36, 46, 56, 66‧‧‧ rigid components
202a, 302a‧‧‧Insulation
121a, 122a‧‧‧ first end
121b, 122b‧‧‧ second end
306‧‧‧ accommodating slots
34a, 44a, 54a‧‧‧ second damping element
C‧‧‧ package housing

[0022]

Fig. 1A is a schematic perspective view of a first embodiment of the present invention.
FIG. 1B is a schematic view of the explosion of FIG. 1A.
1C is a schematic cross-sectional view of FIG. 1A.
2A is a perspective view of a second embodiment of the present invention.
2B is a schematic view of the explosion of FIG. 2A.
2C is a schematic cross-sectional view of FIG. 2A.
Fig. 3A is a schematic exploded view of a third embodiment of the present invention.
3B is a schematic cross-sectional view of FIG. 3A.
4A is a schematic exploded view of a fourth embodiment of the present invention.
4B is a schematic cross-sectional view of FIG. 4A.
Fig. 5A is a schematic exploded view of a fifth embodiment of the present invention.
Figure 5B is a schematic cross-sectional view of Figure 5A.
Figure 6 is a cross-sectional view showing a sixth embodiment of the present invention.

[0023]

An accelerating gauge according to a preferred embodiment of the present invention will now be described with reference to the accompanying drawings, in which the same elements will be described with the same reference numerals.

[0024]

The acceleration gauge provided by the invention can be combined with a vibration isolation system, which can convert the measured acceleration into a digital signal and provide the vibration isolation system, and the vibration isolation system further provides a reverse force to suppress the object to be tested or The object is to be isolated to reduce vibration (providing a damped oscillation effect). The accelerometer provided by the invention can also be applied to industrial production line monitoring, seismic monitoring, semiconductor and optoelectronic plant floor micro-vibration measurement and the like.

[0025]

Further, the design of the accelerometer of the present embodiment is capable of measuring the vibration of a frequency lower than 1/3 of the natural frequency of the accelerometer itself, and the range which can be measured in the case where the rigid member is a copper foil is preferably 1 Hz to Between 40Hz. The matching of the rigid elements will be described later.

[0026]

The design of the accelerometer of the present invention will be clarified below with respect to different embodiments.

[0027]

1A to 1C, which are divided into a perspective view, an exploded view, and a cross-sectional view of the first embodiment of the present invention.

[0028]

An accelerometer 1 of this embodiment is for measuring an axial acceleration. In other words, the acceleration gauge 1 of the present embodiment is a single-axis acceleration gauge, and the acceleration gauge disposed on the X-Y plane can specifically measure the acceleration motion in the Z direction.

[0029]

The accelerometer 1 may include a base 10, a mass 11, at least three sets of elastic elements 12, a piezoelectric element 13, and a first damping element 14.

[0030]

The base 10 of the present embodiment is disposed on the surface of the object to be tested or the object to be vibration-isolating, and the base 10 of the present embodiment can be provided with the pressing portion 102 in the axial direction (Z direction). Therefore, the direction in which the pressing portion 102 is disposed must be in the same direction as the direction of acceleration to be measured by the acceleration gauge 1. Moreover, although the pressing portion 102 of the embodiment is locked to the base 10 (the pressing portion 102 can be a thimble or a screw), the pressing portion 102 and the base 10 of one embodiment can be integrated into a single member. The shape of the pressing portion 102 only needs to protrude from the surface of the base 10 and can resist the local portion of the piezoelectric element 13, so that the pressing portion 102 can be cylindrical, rectangular, and six-legged. The shape of the column or the like is not limited by the shape and arrangement of the drawings of the present embodiment.

[0031]

And in order to define the position of each element in more detail, the mass 11 disposed above the base 10 may have at least a first side 11a and a second side 11b. And the first side 11a is disposed opposite to the second side 11b, and the first side 11a of the mass 11 is adjacent to the base 10.

[0032]

Referring to FIG. 1B and FIG. 1C in particular, at least three elastic element groups 12 of the present embodiment each include a first elastic element 121, a second elastic element 122, and a pre-stress adjustment element 123. The first elastic member 121 has a first end 121a and a second end 121b, and the first end 121a is opposite to the second end 121b. The second elastic member 122 has a first end 122a and a second end 122b. The first end 122a is The second ends 122b are oppositely disposed. The first elastic element 121 is disposed on the first side 11 a of the mass 11 , and the second elastic element 122 is disposed on the second side 11 b of the mass 11 , and the pre-pressure adjusting element 123 passes through the first elastic element 121 , the mass 11 , and Second elastic element 122. Through the arrangement of the first elastic element 121 and the second elastic element 122, the base 10 and the mass 11 can move simultaneously and coaxially and provide an accurate vibration signal. Each of the pre-stressing elements 123 is disposed corresponding to each of the elastic elements 121 and 122, and sequentially passes through the mass 11, the elastic elements 121 and 122, and the base 10.

[0033]

The user can indirectly press the mass 11 to compress the elastic members 121 and 122 by adjusting the distance between the pre-stress adjusting unit 123 and the base 10, so that the first elastic member 121 and the second elastic member 122 of the elastic member group 12 are pre-predicted. Pressing, thereby finely adjusting the spacing between the mass 11 and the base 10, and pushing the pressing portion 102 to a preset position.

[0034]

Further, the preload adjusting unit 123 may also pre-stress the piezoelectric element 13 by the pressing portion 102 of the base 10. When a certain pre-stress is applied to the piezoelectric element 13, it is ensured that the piezoelectric element 13 is always subjected to a force during the measurement (the piezoelectric element 13 is not separated from the pressing portion 102 and the vibration cannot be measured). Therefore, the measurement error can be reduced. It should be noted that the adjustment of the preload may be adjusted according to different materials and structures. If the preloading depth is too shallow, the pressing portion 102 may not be in contact with the piezoelectric element 13 during the measurement process, resulting in an amount. The measured data is incorrect; if the pre-pressing is too deep, the piezoelectric element 13 may be plastically deformed or broken. However, this embodiment employs a preload of the piezoelectric element 13 by 0.75 mm.

[0035]

It should be noted that the three elastic element groups 12 of the present embodiment have the same height and are spaced apart and uniformly arranged, so that the elastic element group 12 can provide the force of the mass 11 in a Z direction (in other words, this The load of the mass 11 of the elastic element group 12 is also the same, and the mass 11 is arranged parallel to the base 10. Therefore, if the number of the elastic element groups 12 of other embodiments is adjusted, the arrangement should be such that the mass 11 can be uniformly applied and the mass 11 can be parallel to the base 10.

[0036]

Except for the arrangement of the arrangement, both ends of at least three elastic element groups 12 of the present embodiment are cut flat. In short, the first elastic element 121 and the second elastic element 122 are respectively leveled at both ends of the mass 11 and the base 10 so that the mass 11 can be disposed parallel to the base 10, and the overall measurement can be added. The accuracy. In detail, the term "cut" herein means that the elastic members 121, 122 are leveled in accordance with the mass 11 and the surface of the base 10 such that the elastic members 121, 122 are perpendicular to the cut.

[0037]

In an unstressed state, the first elastic member 121 will cause the mass 11 to assume a state in which the resultant force is zero (the mass 11 can be suspended). In addition, the first elastic element 121 and the second elastic element 122 of the embodiment are each a spring and are springs of the same length, but in other embodiments, they may be elastic pieces or other equivalent elastic elements, so This embodiment is a limitation.

[0038]

In addition, in order to match the elastic component group 12, the embodiment further includes at least three fixing members 151, at least three first fixing seats 152, at least three second fixing seats 153, and at least three third fixing seats 154 for the The elastic element group 12 is provided. At least three first fixing seats 152 are disposed on the second side 11b of the mass 11. At least three second fixing seats 153 are disposed on the first side 11a of the mass 11. At least three third fixing seats 154 are disposed on one side of the base 10 toward the mass 11 . The at least three first fixing seats 152, the at least three second fixing seats 153, and the at least three third fixing seats 154 of the embodiment may be integrated into the mass 11 or the base 10 into a single component, but may also have an embodiment. In order to be independent of the mass 11 or the base 10, it will not be limited by the drawings of the present case.

[0039]

In detail, the first end 122a of each second elastic element 122 will be sleeved on each fixing member 151. Each of the first elastic members 121 is interposed between each of the second fixing bases 153 and the third fixing base 154. The second elastic members 122 are respectively disposed on the fixing members 151 and the first ones. Between the mounts 152.

[0040]

Each of the pre-stressing adjustment elements 123 is provided with each of the fixing members 151 , the first fixing bases 152 , the second fixing bases 153 , and the third fixing bases 154 .

[0041]

The number of the at least three fixing members 151, the at least three first fixing seats 152, the at least three second fixing seats 153, and the at least three third fixing seats 154 is at least equal to or greater than the number of the elastic element groups 12. The at least three fixing members 151, the at least three first fixing seats 152, the at least three second fixing seats 153, and the at least three third fixing seats 154 are disposed in such a manner that the position where the elastic element group 12 is installed is not offset. Moreover, the process of measuring the acceleration of the elastic element group 12 does not generate additional displacement or skew, and reduces the swing effect of the measurement process of the elastic element group 12 to ensure that the measured data is more accurate.

[0042]

The piezoelectric element 13 of the present embodiment can be disposed between the mass 11 and the base 10. In detail, the piezoelectric element 13 has the first side 13a and is opposite to the second side 13b of the first side 13a, and the first side 13a of the piezoelectric element 13 is disposed opposite to the pressing portion 102.

[0043]

The following table is the piezoelectric element 13 and its material parameters that may be selected for the present embodiment, but is not limited by the type of the piezoelectric element.

[0044]

[0045]

Further, the accelerometer 1 of the present embodiment further includes a rigid member 16, and the rigid member 16 may be disposed at the second side 13b of the piezoelectric member 13. The purpose of providing the rigid member 16 is to increase the rigidity of the piezoelectric element 13, for example, a rigid member 16 (for example, a metal foil) can be attached to the other side of the piezoelectric element 13 that is pressed (a transparent epoxy resin) The rigid member 16 is attached to the negative terminal of the piezoelectric element 13 to prevent the piezoelectric element 13 from being damaged.

[0046]

Another purpose of the rigid element 16 herein is to increase the rigidity of the mass 11 support. Therefore, when the support rigidity of the mass 11 is increased, the natural frequency of the acceleration gauge 1 as a whole is increased, so that the measurable bandwidth of the acceleration gauge 1 of the present embodiment is also increased. In addition, the accelerometer 1 of the present embodiment can adjust the natural frequency of the entire accelerometer 1 by increasing or decreasing the thickness or the number of the rigid members 16.

[0047]

1B and 1C, the first damper element 14 of the present embodiment is attached to the first side 13a of the piezoelectric element 13. In other words, the first damper element 14 of the present embodiment will be disposed between the mass 11 and the base 10 and disposed on the first side 13a of the piezoelectric element 13. In detail, the first damper element 14 of the embodiment may be disposed between the piezoelectric element 13 and the pressing portion 102 of the base 10 . The material of the first damping element 14 of the present embodiment may be composed of rubber, silicone, elastic polymer or a combination thereof, but is not limited by these materials. The actual material selection of the first damping element 14 will be adjusted according to different needs.

[0048]

In addition, the first damping element 14 herein can adjust the damping coefficient of the acceleration gauge 1 as a whole, and increasing the overall damping coefficient will make the response frequency more smooth, so the range that can be measured will become larger. . In addition, the first damper element 14 can also directly contact the piezoelectric element 13 as the pressing portion 102 of the insulating base 10 to prevent the piezoelectric element 13 from being short-circuited or damaged.

[0049]

When the accelerometer 1 of the present embodiment is actually operated, when the mass 11 has a displacement in the axial direction, the pressing portion 102 of the base 10 causes the piezoelectric element 13 to undergo a deformation. The accelerometer 1 then converts this deformation into an electrical signal (or charge signal) that is passed to the vibration isolation system it is paired with.

[0050]

Since the component is subjected to a force and vibrates to force the piezoelectric material, the accumulated electric quantity is proportional to its acceleration, and the electrode on the element receives the electric quantity and sends it to the signal receiver to obtain an acceleration signal.

[0051]

In short, with the configuration of the present embodiment, it is possible to provide a structure simplification (less components are employed) and assembly is easy, so that the cost of the acceleration gauge 1 of the present embodiment is low.

[0052]

Next, please refer to FIG. 2A to FIG. 2C together, which are respectively a perspective view, an exploded view and a schematic cross-sectional view of a second embodiment of the present invention.

[0053]

The first embodiment is similar in that the accelerometer 2 of the present embodiment may include a base 20, a mass 21, at least three elastic element groups 22, a piezoelectric element 23, and a first damping element 24. The accelerometer 2 of the present embodiment further includes a rigid member 26, and at least three of the elastic member groups 22 also include a first elastic member 221, a second elastic member 222, and a pre-stress adjusting member 223. The embodiment further includes at least three fixing members 251, at least three first fixing seats 252, at least three second fixing seats 253 and at least three third fixing seats 254 for the elastic component groups 22.

[0054]

However, the difference from the first embodiment is that the first damper element 24 and the rigid element 26 of the present embodiment are both disposed on the second side 23b of the piezoelectric element 23. Further, as shown in FIG. 2B, the first damper element 24 is disposed above the rigid element 26 (corresponding to the rigid element 26 being disposed between the first damper element 24 and the piezoelectric element 23), which can suppress the rigid element 26 Resonance phenomenon. On the other hand, if the first damper element 24 is provided on the first side 23a of the piezoelectric element 23 (for example, the first embodiment), the resonance phenomenon of the rigid element 26 can also be suppressed. Although both of the above settings affect the overall sensitivity of the accelerometer, the measurement bandwidth can be increased. Therefore, preferably, it is necessary to select a suitable damping parameter (i.e., select the first damping element 24 of appropriate thickness or softness) to achieve the desired sensitivity and bandwidth.

[0055]

In addition, in the embodiment, the insulating member 202a may be further disposed between the pressing portion 202 and the piezoelectric element 23. The insulating member 202a of the embodiment can be sleeved on the pressing portion 202 to ensure that the pressing portion 202 of the insulating base 20 directly contacts the piezoelectric element 23, so that the piezoelectric element 23 is short-circuited or damaged. In addition to this effect, the insulating member 202a of the present embodiment can be more regarded as one of the damping members 24 of the accelerometer 2, in other words, the insulating member 202a also assists the first damper member 24 to adjust the damping coefficient of the entire accelerometer 2.

[0056]

The remaining components, and the relationships between the components are similar to those of the first embodiment, and thus will not be described again.

[0057]

Next, please refer to FIG. 3A and FIG. 3B together, which are respectively an exploded view and a schematic cross-sectional view of a third embodiment of the present invention.

[0058]

The first embodiment and the second embodiment are similar in that the accelerometer 3 of the present embodiment may include a base 30, a mass 31, at least three elastic element groups 32, a piezoelectric element 33, and a first damping element 34. The accelerometer 3 of the present embodiment further includes a rigid member 36, and at least three of the elastic member groups 32 also include a first elastic member 321, a second elastic member 322, and a pre-stress adjusting member 323.

[0059]

The second embodiment is similar to the second embodiment. In addition, the insulating member 302a is further disposed between the pressing portion 302 and the piezoelectric element 33. The insulating member 302a of the present embodiment can be sleeved on the pressing portion 302 so that the pressing portion 302 of the insulating base 30 directly contacts the piezoelectric element 33, so that the piezoelectric element 33 is short-circuited or damaged.

[0060]

However, the present embodiment is different from the foregoing embodiment in that the present embodiment includes a plurality of second damping elements 34a in addition to the first damping element 34, and the second damping elements 34a are disposed on the mass 31. Between the base 30 and the base. Preferably, the second damping elements 34a are a plurality of damping cylinders, and the base 30 can also be provided with a plurality of receiving slots 306 for fixing the positions of the damping cylinders on the base 30. Moreover, and the first damping element 34 herein may provide similar effects as the first damping element 14, 24 of the first or second embodiment.

[0061]

The remaining components, and the relationships between the components are similar to those of the first embodiment, and thus will not be described again.

[0062]

Next, please refer to FIG. 4A and FIG. 4B together, which are respectively an exploded view and a cross-sectional view of a fourth embodiment of the present invention.

[0063]

The first embodiment is similar in that the accelerometer 4 of the present embodiment may include a base 40, a mass 41, at least three elastic element groups 42, a piezoelectric element 43, and a first damping element 44. The accelerometer 4 of the present embodiment further includes a rigid member 46, and at least three of the elastic member groups 42 also include a first elastic member 421, a second elastic member 422, and a pre-stress adjusting member 423.

[0064]

However, the present embodiment is different from the first embodiment in that the present embodiment further includes a second damper member 44a disposed on a side of the rigid member 46 with respect to the piezoelectric member 43. The first damping element 44 can be disposed between the piezoelectric element 43 and the abutting portion 402, and the second damping element 44a is disposed at the second side 46b of the rigid member 46. In other words, each of the rigid members 46 of the present embodiment is provided with a damping member.

[0065]

In addition, although the embodiment uses a piezoelectric element 43 and a rigid element 46 as an example, a piezoelectric element 43 can be overlapped with a different number of rigid elements 46 according to different requirements to achieve different measurement purposes. . The following table is a possible experimental example of the present embodiment, and the "thickness" in the table is the thickness of the rigid member 46 and the piezoelectric element 43 after being superimposed. And the rigid element 46 in the table is a thin piece of copper.

[0066]

The remaining components, and the relationships between the components are similar to those of the first embodiment, and thus will not be described again. In addition, in various embodiments, different variations of the various elements, components or units may be used interchangeably in the embodiments, and are not limited by the aspects listed in the above embodiments.

[0067]

Please refer to FIG. 5B for a schematic cross-sectional view of FIG. 5A. FIG. 5A is a schematic exploded view of a fifth embodiment of the present invention.

[0068]

Similar to the foregoing, the accelerometer 5 of the present embodiment may include a base 50, a mass 51, at least three elastic element groups 52, a piezoelectric element 53, and a first damping element 54. The accelerometer 5 of the present embodiment further includes a rigid member 56, and at least three of the elastic member groups 52 also include a first elastic member 521, a second elastic member 522, and a preload adjusting member 523.

[0069]

The third embodiment is similar to the third embodiment in that the second damping element 54a is included in the embodiment, and the second damping element 54a is disposed on the mass 51 and the base 50. between. Preferably, the second damper members 54 are a plurality of damper cylinders, and the base 50 can also be provided with a plurality of accommodating slots 506 for fixing the positions of the damper cylinders on the base 50.

[0070]

While the third embodiment is advantageous in that the first damper member 54 is disposed, the first damper member 54 of the present embodiment is attached to the first side 53a of the piezoelectric member 53. In other words, the first damper element 54 of the present embodiment will be disposed between the mass 51 and the base 50.

[0071]

The remaining components, and the relationships between the components are similar to those of the first embodiment, and thus will not be described again.

[0072]

Finally, please refer to FIG. 6, which is a schematic cross-sectional view of a sixth embodiment of the present invention.

[0073]

The fourth embodiment is similar in that the accelerometer 6 of the present embodiment may include a base 60, a mass 61, at least three elastic element groups 62, a piezoelectric element 63, and a first damping element 64. The acceleration gauge 6 of the present embodiment further includes a rigid member 66, and at least three of the elastic member groups 62 also include a first elastic member 621, a second elastic member 622, and a preload adjusting member 623. Moreover, one of the two sides of the rigid member 66 of the present embodiment is provided with a damping member.

[0074]

The difference from the previous embodiment is that the accelerometer 1 of the embodiment can be matched with a package casing C, and the package casing C can be made of stainless steel for isolating ambient electromagnetic noise interference to achieve low noise. the goal of.

[0075]

The remaining components, and the relationships between the components are similar to those of the fourth embodiment, and thus will not be described again. In addition, in various embodiments, different variations of the various elements, components or units may be used interchangeably in the embodiments, and are not limited by the aspects listed in the above embodiments.

[0076]

In summary, the present invention embodies the arrangement of the piezoelectric element by arranging the base member, the mass block, the at least three elastic element groups, the piezoelectric element, and the first damper element, and arranging the pressing portion with the base. When the mass has a displacement in the axial direction, the pressing portion of the base will cause a deformation of the piezoelectric element, and then the electrical signal converted by the deformation is passed to complete the measurement. The mass plate, the piezoelectric element, and the pressing portion can increase the piezoelectric sheet shape variable, thereby improving the sensitivity. Therefore, through the above configuration, the present invention can provide an acceleration gauge with a compact architecture, low cost, high sensitivity, and low noise.

[0077]

The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

1‧‧ ‧ Acceleration regulations

10‧‧‧Base

102‧‧‧Resistance Department

11‧‧‧Quality

11a‧‧‧ first side

11b‧‧‧ second side

121‧‧‧First elastic element

121a, 122a‧‧‧ first end

122‧‧‧Second elastic element

121b, 122b‧‧‧ second end

123‧‧‧Preloading adjustment components

13‧‧‧Piezoelectric components

13a‧‧‧ first side

13b‧‧‧ second side

14‧‧‧First damping element

151‧‧‧Fixed parts

152‧‧‧First mount

153‧‧‧Second fixed seat

154‧‧‧ third mount

16‧‧‧Rigid components

Claims (10)

[Item 1] An acceleration gauge for measuring an axial acceleration, the acceleration gauge comprising:
a base, a pressing portion is disposed in the axial direction;
a mass having a first side and a second side opposite the first side;
At least three sets of elastic elements each including a first elastic element, a second elastic element and a pre-stressing adjustment element, the first elastic element being disposed on the first side of the mass, and the second elastic element being disposed On the second side of the mass, the pre-stressing adjustment element passes through the first elastic element, the mass and the second elastic element;
a piezoelectric element disposed between the mass and the base, the piezoelectric element having a first side facing the pressing portion and a second side opposite to the first side; and a first damping element, Provided on at least one side of the piezoelectric element;
Wherein the pressing portion of the base causes a deformation of the piezoelectric element when the mass is displaced in the axial direction. [Item 2] The acceleration gauge according to claim 1, wherein the pressing portion is a thimble. [Item 3] The acceleration gauge of claim 1, further comprising a rigid member, and the rigid member is disposed on the second side of the piezoelectric member. [Item 4] The acceleration gauge of claim 3, wherein the first damping element is attached to the first side of the piezoelectric element. [Item 5] The acceleration gauge of claim 4, further comprising a second damping element disposed on a side of the rigid element relative to the piezoelectric element. [Item 6] The acceleration gauge according to claim 1, wherein the first damping element is disposed on the second side of the piezoelectric element, and the acceleration gauge further comprises a rigid element, and the rigid element is disposed on the first damping element Between the piezoelectric element and the piezoelectric element. [Item 7] The acceleration gauge according to claim 6, further comprising an insulating member disposed between the pressing portion and the piezoelectric element. [Item 8] The acceleration gauge according to claim 4 or 7, further comprising a plurality of second damping elements disposed between the mass and the base. [Item 9] The acceleration gauge of claim 1, wherein both ends of the at least three elastic component groups are flattened. [Item 10] For example, the acceleration gauge mentioned in the first paragraph of the patent application includes:
At least three fixing members, a first end of each second elastic member is sleeved on each fixing member;
At least three first fixing seats are disposed on the second side of the mass;
At least three second fixing seats are disposed on the first side of the mass; and at least three third fixing seats are disposed on the side of the base facing the mass;
Each of the first elastic members is disposed between each of the second fixing bases and each of the third fixing bases, and each of the second elastic members is disposed between each of the fixing members and each of the first fixing seats. Each of the pre-stressing adjustment elements is provided with each fixing member, each of the first fixing seats, each of the second fixing seats and each of the third fixing seats.