TW200708739A - Two-dimensional optical accelerometer - Google Patents

Two-dimensional optical accelerometer

Info

Publication number
TW200708739A
TW200708739A TW094129581A TW94129581A TW200708739A TW 200708739 A TW200708739 A TW 200708739A TW 094129581 A TW094129581 A TW 094129581A TW 94129581 A TW94129581 A TW 94129581A TW 200708739 A TW200708739 A TW 200708739A
Authority
TW
Taiwan
Prior art keywords
dimensional optical
base
optical accelerometer
angle measurement
accelerometer
Prior art date
Application number
TW094129581A
Other languages
Chinese (zh)
Other versions
TWI272388B (en
Inventor
Chih-Liang Chu
Cha-Hao Lin
Original Assignee
Chih-Liang Chu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chih-Liang Chu filed Critical Chih-Liang Chu
Priority to TW94129581A priority Critical patent/TWI272388B/en
Application granted granted Critical
Publication of TWI272388B publication Critical patent/TWI272388B/en
Publication of TW200708739A publication Critical patent/TW200708739A/en

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  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

A two-dimensional optical accelerometer, include a base, a two-dimensional optical angle measurement apparatus and a seismic apparatus. The two-dimensional optical angle measurement apparatus and the seismic apparatus are mounted on the base. In operation, the base of the two-dimensional optical accelerometer is attached to the vibrating structure. Vibrations of this structure cause angles of the seismic mass within the two-dimensional optical accelerometer. These angles are detected by the two-dimensional optical angle measurement apparatus, which generates a corresponding light intensity signal. The light intensity signal is acquired and used to calculate the acceleration acting on the base.
TW94129581A 2005-08-29 2005-08-29 Two-dimensional optical accelerometer TWI272388B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94129581A TWI272388B (en) 2005-08-29 2005-08-29 Two-dimensional optical accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94129581A TWI272388B (en) 2005-08-29 2005-08-29 Two-dimensional optical accelerometer

Publications (2)

Publication Number Publication Date
TWI272388B TWI272388B (en) 2007-02-01
TW200708739A true TW200708739A (en) 2007-03-01

Family

ID=38441245

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94129581A TWI272388B (en) 2005-08-29 2005-08-29 Two-dimensional optical accelerometer

Country Status (1)

Country Link
TW (1) TWI272388B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI451089B (en) * 2009-11-12 2014-09-01 Pixart Imaging Inc Optical detection method and optical mems detector, and method for making mems detector

Also Published As

Publication number Publication date
TWI272388B (en) 2007-02-01

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees