TW200705136A - Lithographic apparatus and lithographic product produced thereby - Google Patents
Lithographic apparatus and lithographic product produced therebyInfo
- Publication number
- TW200705136A TW200705136A TW095118436A TW95118436A TW200705136A TW 200705136 A TW200705136 A TW 200705136A TW 095118436 A TW095118436 A TW 095118436A TW 95118436 A TW95118436 A TW 95118436A TW 200705136 A TW200705136 A TW 200705136A
- Authority
- TW
- Taiwan
- Prior art keywords
- lithographic
- stages
- confined
- lithographic apparatus
- final element
- Prior art date
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/135,655 US7161659B2 (en) | 2005-04-08 | 2005-05-24 | Dual stage lithographic apparatus and device manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200705136A true TW200705136A (en) | 2007-02-01 |
TWI301565B TWI301565B (en) | 2008-10-01 |
Family
ID=37484043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95118436A TWI301565B (en) | 2005-05-24 | 2006-05-24 | Lithographic apparatus and lithographic product produced thereby |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4410216B2 (zh) |
CN (2) | CN1873542B (zh) |
TW (1) | TWI301565B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI497220B (zh) * | 2008-12-19 | 2015-08-21 | 尼康股份有限公司 | An exposure apparatus and an exposure method, and an element manufacturing method |
TWI502284B (zh) * | 2009-06-19 | 2015-10-01 | 尼康股份有限公司 | 移動體裝置、曝光裝置及裝置製造方法 |
US9316928B2 (en) | 2010-08-25 | 2016-04-19 | Asml Netherlands B.V. | Stage apparatus, lithographic apparatus and method of positioning an object table |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG178791A1 (en) | 2006-02-21 | 2012-03-29 | Nikon Corp | Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method and device manufacturing method |
WO2007097466A1 (ja) | 2006-02-21 | 2007-08-30 | Nikon Corporation | 測定装置及び方法、処理装置及び方法、パターン形成装置及び方法、露光装置及び方法、並びにデバイス製造方法 |
EP2003680B1 (en) | 2006-02-21 | 2013-05-29 | Nikon Corporation | Exposure apparatus, exposure method and device manufacturing method |
WO2008044612A1 (en) * | 2006-09-29 | 2008-04-17 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
US7903866B2 (en) | 2007-03-29 | 2011-03-08 | Asml Netherlands B.V. | Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object |
CN104111587B (zh) * | 2007-07-18 | 2017-01-11 | 株式会社尼康 | 测量方法、载台装置、及曝光装置 |
KR101470671B1 (ko) | 2007-11-07 | 2014-12-08 | 가부시키가이샤 니콘 | 노광 장치 및 노광 방법, 그리고 디바이스 제조 방법 |
KR100891307B1 (ko) | 2007-11-22 | 2009-03-31 | 삼성전기주식회사 | 스테이지 장치 및 이를 구비한 노광 장치 |
US8115906B2 (en) | 2007-12-14 | 2012-02-14 | Nikon Corporation | Movable body system, pattern formation apparatus, exposure apparatus and measurement device, and device manufacturing method |
US8711327B2 (en) * | 2007-12-14 | 2014-04-29 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
US8237916B2 (en) | 2007-12-28 | 2012-08-07 | Nikon Corporation | Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method |
TWI547769B (zh) * | 2007-12-28 | 2016-09-01 | 尼康股份有限公司 | An exposure apparatus, a moving body driving system, a pattern forming apparatus, and an exposure method, and an element manufacturing method |
KR101670624B1 (ko) * | 2008-04-30 | 2016-11-09 | 가부시키가이샤 니콘 | 스테이지 장치, 패턴 형성 장치, 노광 장치, 스테이지 구동 방법, 노광 방법, 그리고 디바이스 제조 방법 |
JP5195022B2 (ja) * | 2008-05-23 | 2013-05-08 | 株式会社ニコン | 位置計測装置及び位置計測方法、パターン形成装置及びパターン形成方法、露光装置及び露光方法、並びにデバイス製造方法 |
JP5612810B2 (ja) * | 2008-05-23 | 2014-10-22 | 株式会社ニコン | 露光装置及び露光方法、並びにデバイス製造方法 |
JP5262455B2 (ja) * | 2008-09-01 | 2013-08-14 | 株式会社ニコン | 露光装置、露光方法、及びデバイス製造方法 |
US8294878B2 (en) * | 2009-06-19 | 2012-10-23 | Nikon Corporation | Exposure apparatus and device manufacturing method |
JP2011222726A (ja) | 2010-04-08 | 2011-11-04 | Elpida Memory Inc | 半導体装置の製造方法、ウェハ処理システム及びプログラム |
NL2008157A (en) | 2011-02-22 | 2012-08-24 | Asml Netherlands Bv | Lithographic apparatus and lithographic projection method. |
WO2014063995A1 (en) * | 2012-10-24 | 2014-05-01 | Asml Netherlands B.V. | Substrate positioning system, lithographic apparatus and device manufacturing method |
CN103034074B (zh) * | 2012-12-26 | 2015-04-15 | 清华大学 | 一种带有浸液回收装置的光刻机硅片台双台交换系统 |
CN103034073B (zh) * | 2012-12-26 | 2015-01-21 | 清华大学 | 带有浸液回收装置和激光干涉仪的硅片台双台交换系统 |
US9529280B2 (en) * | 2013-12-06 | 2016-12-27 | Kla-Tencor Corporation | Stage apparatus for semiconductor inspection and lithography systems |
TWI734799B (zh) * | 2016-06-20 | 2021-08-01 | 日商尼康股份有限公司 | 具有失真匹配的密集線極紫外光微影系統以及將圖案轉移至工件上的方法 |
EP3696605A1 (en) * | 2019-02-13 | 2020-08-19 | ASML Netherlands B.V. | Method and lithograph apparatus for measuring a radiation beam |
CN113050380B (zh) * | 2019-12-27 | 2021-12-10 | 上海微电子装备(集团)股份有限公司 | 浸没头的集成工装及其集成方法和光刻机 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1244018C (zh) * | 1996-11-28 | 2006-03-01 | 株式会社尼康 | 曝光方法和曝光装置 |
JP2001118773A (ja) * | 1999-10-18 | 2001-04-27 | Nikon Corp | ステージ装置及び露光装置 |
EP1111471B1 (en) * | 1999-12-21 | 2005-11-23 | ASML Netherlands B.V. | Lithographic projection apparatus with collision preventing device |
JP2002289515A (ja) * | 2000-12-28 | 2002-10-04 | Nikon Corp | 製品の製造方法、露光装置の製造方法、露光装置、及びデバイス製造方法 |
CN1200321C (zh) * | 2003-08-29 | 2005-05-04 | 清华大学 | 步进投影光刻机双台轮换曝光超精密定位硅片台系统 |
-
2006
- 2006-05-19 JP JP2006139902A patent/JP4410216B2/ja active Active
- 2006-05-23 CN CN2006100998600A patent/CN1873542B/zh active Active
- 2006-05-23 CN CN 201110039515 patent/CN102096339B/zh active Active
- 2006-05-24 TW TW95118436A patent/TWI301565B/zh active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI497220B (zh) * | 2008-12-19 | 2015-08-21 | 尼康股份有限公司 | An exposure apparatus and an exposure method, and an element manufacturing method |
TWI502284B (zh) * | 2009-06-19 | 2015-10-01 | 尼康股份有限公司 | 移動體裝置、曝光裝置及裝置製造方法 |
US9316928B2 (en) | 2010-08-25 | 2016-04-19 | Asml Netherlands B.V. | Stage apparatus, lithographic apparatus and method of positioning an object table |
US9915880B2 (en) | 2010-08-25 | 2018-03-13 | Asml Netherlands B.V. | Stage apparatus, lithographic apparatus and method of positioning an object table |
Also Published As
Publication number | Publication date |
---|---|
TWI301565B (en) | 2008-10-01 |
CN102096339B (zh) | 2013-10-09 |
JP4410216B2 (ja) | 2010-02-03 |
JP2006332656A (ja) | 2006-12-07 |
CN1873542B (zh) | 2011-04-13 |
CN1873542A (zh) | 2006-12-06 |
CN102096339A (zh) | 2011-06-15 |
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