TW200705126A - Method and apparatus for removing organic coating on surface of substrate - Google Patents
Method and apparatus for removing organic coating on surface of substrateInfo
- Publication number
- TW200705126A TW200705126A TW095116258A TW95116258A TW200705126A TW 200705126 A TW200705126 A TW 200705126A TW 095116258 A TW095116258 A TW 095116258A TW 95116258 A TW95116258 A TW 95116258A TW 200705126 A TW200705126 A TW 200705126A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- organic coating
- ethylene carbonate
- propylene carbonate
- carbonate
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title abstract 4
- 238000000576 coating method Methods 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
- 239000012530 fluid Substances 0.000 abstract 3
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 abstract 3
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 abstract 2
- 229920005989 resin Polymers 0.000 abstract 2
- 239000011347 resin Substances 0.000 abstract 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical group C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 abstract 1
- 239000004696 Poly ether ether ketone Substances 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 abstract 1
- 239000002075 main ingredient Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 229920002530 polyetherether ketone Polymers 0.000 abstract 1
- 229920002379 silicone rubber Polymers 0.000 abstract 1
- 239000004945 silicone rubber Substances 0.000 abstract 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
- B29C63/0004—Component parts, details or accessories; Auxiliary operations
- B29C63/0013—Removing old coatings
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/266—Esters or carbonates
-
- C11D2111/42—
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005148816A JP2008192629A (ja) | 2005-05-20 | 2005-05-20 | 基体表面上の有機被膜の除去方法及び除去装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200705126A true TW200705126A (en) | 2007-02-01 |
Family
ID=37431105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095116258A TW200705126A (en) | 2005-05-20 | 2006-05-08 | Method and apparatus for removing organic coating on surface of substrate |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2008192629A (zh) |
| TW (1) | TW200705126A (zh) |
| WO (1) | WO2006123527A1 (zh) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003203856A (ja) * | 2001-10-23 | 2003-07-18 | Ums:Kk | 有機被膜の除去方法 |
| JP2004121495A (ja) * | 2002-10-01 | 2004-04-22 | Nomura Micro Sci Co Ltd | ホルモン様活性作用を有する化学物質の処理方法及び処理装置 |
-
2005
- 2005-05-20 JP JP2005148816A patent/JP2008192629A/ja active Pending
-
2006
- 2006-04-27 WO PCT/JP2006/308895 patent/WO2006123527A1/ja active Application Filing
- 2006-05-08 TW TW095116258A patent/TW200705126A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008192629A (ja) | 2008-08-21 |
| WO2006123527A1 (ja) | 2006-11-23 |
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