TW200702463A - Multi-stage plasma applying device - Google Patents
Multi-stage plasma applying deviceInfo
- Publication number
- TW200702463A TW200702463A TW094122335A TW94122335A TW200702463A TW 200702463 A TW200702463 A TW 200702463A TW 094122335 A TW094122335 A TW 094122335A TW 94122335 A TW94122335 A TW 94122335A TW 200702463 A TW200702463 A TW 200702463A
- Authority
- TW
- Taiwan
- Prior art keywords
- dissociation
- plasma
- electrode
- unit
- chamber
- Prior art date
Links
Abstract
A multi-stage plasma applying device comprises one plasma generation unit, one set of insulation unit which is sleevingly set on the plasma generation unit, and at least one set of dissociation unit which is set on the insulation unit. The plasma generation unit includes the first dissociation electrode and the second dissociation electrode which mutually define a plasma chamber. The dissociation unit includes the first electrode and the second electrode which mutually define a dissociation chamber connecting to the plasma chamber. The insulation unit is used to electrically insulated the dissociation unit and the plasma generation unit. When the gas is introduced into the plasma chamber from outside, the gas is transformed into the plasma by the first dissociation electrode and the second dissociation electrode. Continuously, the plasma passes through the dissociation chamber of the dissociation unit and is further dissociated by the first electrode and the second electrode to form higher density plasma which leaves the dissociation chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94122335A TWI290587B (en) | 2005-07-01 | 2005-07-01 | Multi-stage plasma applying device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94122335A TWI290587B (en) | 2005-07-01 | 2005-07-01 | Multi-stage plasma applying device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200702463A true TW200702463A (en) | 2007-01-16 |
TWI290587B TWI290587B (en) | 2007-12-01 |
Family
ID=39327523
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94122335A TWI290587B (en) | 2005-07-01 | 2005-07-01 | Multi-stage plasma applying device |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI290587B (en) |
-
2005
- 2005-07-01 TW TW94122335A patent/TWI290587B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI290587B (en) | 2007-12-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |