TW200702463A - Multi-stage plasma applying device - Google Patents

Multi-stage plasma applying device

Info

Publication number
TW200702463A
TW200702463A TW094122335A TW94122335A TW200702463A TW 200702463 A TW200702463 A TW 200702463A TW 094122335 A TW094122335 A TW 094122335A TW 94122335 A TW94122335 A TW 94122335A TW 200702463 A TW200702463 A TW 200702463A
Authority
TW
Taiwan
Prior art keywords
dissociation
plasma
electrode
unit
chamber
Prior art date
Application number
TW094122335A
Other languages
Chinese (zh)
Other versions
TWI290587B (en
Inventor
ming-xian Yang
Original Assignee
ming-xian Yang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ming-xian Yang filed Critical ming-xian Yang
Priority to TW94122335A priority Critical patent/TWI290587B/en
Publication of TW200702463A publication Critical patent/TW200702463A/en
Application granted granted Critical
Publication of TWI290587B publication Critical patent/TWI290587B/en

Links

Abstract

A multi-stage plasma applying device comprises one plasma generation unit, one set of insulation unit which is sleevingly set on the plasma generation unit, and at least one set of dissociation unit which is set on the insulation unit. The plasma generation unit includes the first dissociation electrode and the second dissociation electrode which mutually define a plasma chamber. The dissociation unit includes the first electrode and the second electrode which mutually define a dissociation chamber connecting to the plasma chamber. The insulation unit is used to electrically insulated the dissociation unit and the plasma generation unit. When the gas is introduced into the plasma chamber from outside, the gas is transformed into the plasma by the first dissociation electrode and the second dissociation electrode. Continuously, the plasma passes through the dissociation chamber of the dissociation unit and is further dissociated by the first electrode and the second electrode to form higher density plasma which leaves the dissociation chamber.
TW94122335A 2005-07-01 2005-07-01 Multi-stage plasma applying device TWI290587B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94122335A TWI290587B (en) 2005-07-01 2005-07-01 Multi-stage plasma applying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94122335A TWI290587B (en) 2005-07-01 2005-07-01 Multi-stage plasma applying device

Publications (2)

Publication Number Publication Date
TW200702463A true TW200702463A (en) 2007-01-16
TWI290587B TWI290587B (en) 2007-12-01

Family

ID=39327523

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94122335A TWI290587B (en) 2005-07-01 2005-07-01 Multi-stage plasma applying device

Country Status (1)

Country Link
TW (1) TWI290587B (en)

Also Published As

Publication number Publication date
TWI290587B (en) 2007-12-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees