TW200702459A - Method of manufacturing gray-tone blankmask and photomask - Google Patents
Method of manufacturing gray-tone blankmask and photomaskInfo
- Publication number
- TW200702459A TW200702459A TW095110664A TW95110664A TW200702459A TW 200702459 A TW200702459 A TW 200702459A TW 095110664 A TW095110664 A TW 095110664A TW 95110664 A TW95110664 A TW 95110664A TW 200702459 A TW200702459 A TW 200702459A
- Authority
- TW
- Taiwan
- Prior art keywords
- gray
- tone
- light
- blankmask
- layer pattern
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
- G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20050060497 | 2005-07-05 | ||
KR20050092481 | 2005-09-30 | ||
KR20050105232 | 2005-11-04 | ||
KR20050127882 | 2005-12-22 | ||
KR1020060001480A KR100800301B1 (ko) | 2005-07-05 | 2006-01-05 | 그레이톤 블랭크마스크 및 포토마스크 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200702459A true TW200702459A (en) | 2007-01-16 |
TWI319017B TWI319017B (en) | 2010-01-01 |
Family
ID=37871103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095110664A TWI319017B (en) | 2005-07-05 | 2006-03-28 | Method of manufacturing gray-tone blankmask and photomask |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100800301B1 (zh) |
TW (1) | TWI319017B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI400559B (zh) * | 2007-01-11 | 2013-07-01 | S&S Tech Co Ltd | 灰度光罩基板及光罩製造方法 |
CN101315517A (zh) | 2007-05-30 | 2008-12-03 | 北京京东方光电科技有限公司 | 像素沟道区的掩模版及用该掩模版形成的薄膜晶体管 |
KR100887172B1 (ko) * | 2007-06-16 | 2009-03-10 | 주식회사 피케이엘 | 마스크 및 그 제조 방법 |
KR102089468B1 (ko) * | 2012-09-04 | 2020-03-16 | 엘지디스플레이 주식회사 | 금속 산화물 반도체 층을 차광하는 광 흡수층을 구비한 박막 트랜지스터 기판 및 그 제조 방법 |
JP5982013B2 (ja) * | 2012-12-27 | 2016-08-31 | アルバック成膜株式会社 | 位相シフトマスクおよびその製造方法 |
CN113539797B (zh) * | 2021-07-12 | 2023-03-24 | 武汉新芯集成电路制造有限公司 | 半导体器件及其制造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100340865B1 (ko) * | 1999-11-05 | 2002-06-20 | 박종섭 | 반도체 소자의 콘택 형성용 마스크 및 그 제조방법 |
JP2003173015A (ja) * | 2001-09-28 | 2003-06-20 | Hoya Corp | グレートーンマスクの製造方法 |
KR100472115B1 (ko) * | 2002-07-16 | 2005-03-10 | 주식회사 에스앤에스텍 | 블랭크 마스크 및 그의 제조 방법 |
KR100885316B1 (ko) * | 2002-10-18 | 2009-02-25 | 하이디스 테크놀로지 주식회사 | 액정표시소자용 판넬 아이디마크 형성방법 |
JP4345333B2 (ja) | 2003-03-26 | 2009-10-14 | 凸版印刷株式会社 | 位相シフトマスク及びそれを用いたパターン転写法 |
TWI286663B (en) * | 2003-06-30 | 2007-09-11 | Hoya Corp | Method for manufacturing gray tone mask, and gray tone mask |
JP4210166B2 (ja) * | 2003-06-30 | 2009-01-14 | Hoya株式会社 | グレートーンマスクの製造方法 |
JP4521694B2 (ja) * | 2004-03-09 | 2010-08-11 | Hoya株式会社 | グレートーンマスク及び薄膜トランジスタの製造方法 |
-
2006
- 2006-01-05 KR KR1020060001480A patent/KR100800301B1/ko active IP Right Grant
- 2006-03-28 TW TW095110664A patent/TWI319017B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI319017B (en) | 2010-01-01 |
KR20070005451A (ko) | 2007-01-10 |
KR100800301B1 (ko) | 2008-02-01 |
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