TW200641490A - Method for manufacturing transparent electrode - Google Patents

Method for manufacturing transparent electrode

Info

Publication number
TW200641490A
TW200641490A TW095100652A TW95100652A TW200641490A TW 200641490 A TW200641490 A TW 200641490A TW 095100652 A TW095100652 A TW 095100652A TW 95100652 A TW95100652 A TW 95100652A TW 200641490 A TW200641490 A TW 200641490A
Authority
TW
Taiwan
Prior art keywords
transparent electrode
manufacturing
electrode
atoms
etched
Prior art date
Application number
TW095100652A
Other languages
Chinese (zh)
Other versions
TWI375099B (en
Inventor
Kazuyoshi Inoue
Nobuo Tanaka
Koki Yano
Original Assignee
Idemitsu Kosan Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005003477A external-priority patent/JP2006196200A/en
Priority claimed from JP2005003487A external-priority patent/JP2006196201A/en
Priority claimed from JP2005003473A external-priority patent/JP2006194926A/en
Application filed by Idemitsu Kosan Co filed Critical Idemitsu Kosan Co
Publication of TW200641490A publication Critical patent/TW200641490A/en
Application granted granted Critical
Publication of TWI375099B publication Critical patent/TWI375099B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2211/00—Plasma display panels with alternate current induction of the discharge, e.g. AC-PDPs
    • H01J2211/20—Constructional details
    • H01J2211/22—Electrodes
    • H01J2211/225—Material of electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8051—Anodes
    • H10K59/80515—Anodes characterised by their shape

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

To provide a method for manufacturing a transparent electrode, with which a transparent electrode using no indium is etched without making a shape of an electrode end portion an inverted trapezoid. In the method for manufacturing the transparent electrode, a transparent conductive film having zinc oxide and tin oxide as main components is etched so as to make a taper angle of the electrode end portion be 30 to 89 degree. In the method for manufacturing, the ratio of zinc atoms to the total amount of zinc atoms and tin atoms in the transparent electrode (an atomic ratio of Zn/(Zn+Sn)) is preferably 0.5-0.9.
TW095100652A 2005-01-11 2006-01-06 Method for manufacturing transparent electrode TW200641490A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005003477A JP2006196200A (en) 2005-01-11 2005-01-11 Transparent electrode and its manufacturing method
JP2005003487A JP2006196201A (en) 2005-01-11 2005-01-11 Clear electrode and its manufacturing method
JP2005003473A JP2006194926A (en) 2005-01-11 2005-01-11 Method for manufacturing transparent electrode

Publications (2)

Publication Number Publication Date
TW200641490A true TW200641490A (en) 2006-12-01
TWI375099B TWI375099B (en) 2012-10-21

Family

ID=36677536

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095100652A TW200641490A (en) 2005-01-11 2006-01-06 Method for manufacturing transparent electrode

Country Status (3)

Country Link
KR (1) KR20070093098A (en)
TW (1) TW200641490A (en)
WO (1) WO2006075506A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI618963B (en) * 2014-10-23 2018-03-21 東京威力科創股份有限公司 Pattern forhation method for pixel electrode, and formation system
US11171301B2 (en) 2017-05-15 2021-11-09 Boe Technology Group Co., Ltd. Organic light emitting diode and method for fabricating the same

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101156771B1 (en) * 2010-08-26 2012-06-18 삼성전기주식회사 Method of manufacturing conductive transparent substrate
JP5748350B2 (en) * 2011-09-05 2015-07-15 富士フイルム株式会社 Transparent conductive film, method for producing the same, flexible organic electronic device, and organic thin film solar cell
US9824899B2 (en) 2014-01-07 2017-11-21 Mitsubishi Gas Chemical Company, Inc. Etching liquid for oxide containing zinc and tin, and etching method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3616128B2 (en) * 1994-03-27 2005-02-02 グンゼ株式会社 Method for producing transparent conductive film
JPH0874033A (en) * 1994-09-02 1996-03-19 Asahi Glass Co Ltd Electrode for liquid crystal display
JP3406079B2 (en) * 1994-09-14 2003-05-12 旭電化工業株式会社 Manufacturing method of oxide etching products
JP3611618B2 (en) * 1995-02-08 2005-01-19 出光興産株式会社 Method for patterning amorphous conductive film
JP4354019B2 (en) * 1997-04-18 2009-10-28 出光興産株式会社 Organic electroluminescence device
JP3313306B2 (en) * 1997-05-30 2002-08-12 住友ベークライト株式会社 Antistatic film
JP2000067657A (en) * 1998-08-26 2000-03-03 Internatl Business Mach Corp <Ibm> Transparent conductive film excellent in infrared transmission and its manufacture
JP4559554B2 (en) * 1999-03-05 2010-10-06 出光興産株式会社 Sintered body for sputtering, electron beam and ion plating, and sputtering target
JP3366864B2 (en) * 1998-09-11 2003-01-14 グンゼ株式会社 Transparent conductive film
JP2004240091A (en) * 2003-02-05 2004-08-26 Idemitsu Kosan Co Ltd Method for manufacturing transflective type electrode substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI618963B (en) * 2014-10-23 2018-03-21 東京威力科創股份有限公司 Pattern forhation method for pixel electrode, and formation system
US11171301B2 (en) 2017-05-15 2021-11-09 Boe Technology Group Co., Ltd. Organic light emitting diode and method for fabricating the same

Also Published As

Publication number Publication date
WO2006075506A1 (en) 2006-07-20
TWI375099B (en) 2012-10-21
KR20070093098A (en) 2007-09-17

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees