TW200636328A - Substrate cassette - Google Patents

Substrate cassette

Info

Publication number
TW200636328A
TW200636328A TW094112026A TW94112026A TW200636328A TW 200636328 A TW200636328 A TW 200636328A TW 094112026 A TW094112026 A TW 094112026A TW 94112026 A TW94112026 A TW 94112026A TW 200636328 A TW200636328 A TW 200636328A
Authority
TW
Taiwan
Prior art keywords
frames
holding
adjustive
bars
grooves
Prior art date
Application number
TW094112026A
Other languages
English (en)
Other versions
TWI315002B (en
Inventor
Tze-Wei Chou
Original Assignee
Innolux Display Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innolux Display Corp filed Critical Innolux Display Corp
Priority to TW094112026A priority Critical patent/TWI315002B/zh
Priority to US11/403,703 priority patent/US20060231515A1/en
Publication of TW200636328A publication Critical patent/TW200636328A/zh
Application granted granted Critical
Publication of TWI315002B publication Critical patent/TWI315002B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
TW094112026A 2005-04-15 2005-04-15 Substrate cassette TWI315002B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW094112026A TWI315002B (en) 2005-04-15 2005-04-15 Substrate cassette
US11/403,703 US20060231515A1 (en) 2005-04-15 2006-04-13 Adjustable cassette for substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094112026A TWI315002B (en) 2005-04-15 2005-04-15 Substrate cassette

Publications (2)

Publication Number Publication Date
TW200636328A true TW200636328A (en) 2006-10-16
TWI315002B TWI315002B (en) 2009-09-21

Family

ID=37107494

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094112026A TWI315002B (en) 2005-04-15 2005-04-15 Substrate cassette

Country Status (2)

Country Link
US (1) US20060231515A1 (zh)
TW (1) TWI315002B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2352928B1 (es) * 2009-07-28 2012-01-25 Abengoa Solar New Technologies Estantería para el transporte seguro de facetas solares de concentración.
KR101212889B1 (ko) * 2010-10-01 2012-12-14 하이디스 테크놀로지 주식회사 기판 적재용 카세트
CN102826303A (zh) * 2012-08-28 2012-12-19 深圳市华星光电技术有限公司 玻璃基板卡匣
CN103448048B (zh) * 2013-09-09 2015-11-25 深圳市华星光电技术有限公司 基板存放架
CN104309946B (zh) * 2014-11-17 2017-01-18 合肥鑫晟光电科技有限公司 一种显示面板存储装置
US10020213B1 (en) * 2016-12-30 2018-07-10 Sunpower Corporation Semiconductor wafer carriers
CN106829215B (zh) * 2017-03-01 2018-10-23 合肥鑫晟光电科技有限公司 面板存放装置及其控制方法
KR20210151527A (ko) * 2020-06-05 2021-12-14 삼성전자주식회사 개폐형 기판 수용 카세트 및 그 시스템

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153164A (en) * 1978-06-13 1979-05-08 Kasper Instruments, Inc. Carrier for semiconductive wafers
JPS63201212U (zh) * 1987-06-16 1988-12-26
US4872554A (en) * 1987-07-02 1989-10-10 Fluoroware, Inc. Reinforced carrier with embedded rigid insert
US5184854A (en) * 1992-02-03 1993-02-09 Mavis Chen Electromagnetic lock
KR100188137B1 (ko) * 1995-09-07 1999-06-01 김광호 액정 표시 장치 글래스 적재용 카세트
US5638958A (en) * 1995-09-08 1997-06-17 Micron Technology, Inc. Semiconductor film wafer cassette
US5853214A (en) * 1995-11-27 1998-12-29 Progressive System Technologies, Inc. Aligner for a substrate carrier
US5823361A (en) * 1996-02-06 1998-10-20 Progressive System Technologies, Inc. Substrate support apparatus for a substrate housing
US5858459A (en) * 1996-02-22 1999-01-12 Micron Technology, Inc. Cassette invertor apparatus and method
JP2788901B2 (ja) * 1996-07-03 1998-08-20 日本電気エンジニアリング株式会社 基板用カセット
JPH10203584A (ja) * 1997-01-22 1998-08-04 Nec Corp 基板用カセット
KR100247138B1 (ko) * 1997-11-20 2000-03-15 구본준, 론 위라하디락사 유리기판 적재용 카세트
KR100737846B1 (ko) * 1999-09-06 2007-07-12 요도가와 휴텍 가부시키가이샤 카세트용 장척(長尺)리브 및 기판용 카세트
TW547460U (en) * 2001-10-09 2003-08-11 Advanced Semiconductor Eng Storage box for chip
JP3989736B2 (ja) * 2002-01-11 2007-10-10 株式会社ニックス 板材収納枠
KR20030077070A (ko) * 2002-03-25 2003-10-01 엘지.필립스 엘시디 주식회사 중력불량측정용 카세트
TW553195U (en) * 2002-10-09 2003-09-11 Foxsemicon Integrated Tech Inc Substrate supporting slot plate and substrate cassette using the same
TW542218U (en) * 2002-10-09 2003-07-11 Foxsemicon Intergated Technolo Substrate supporting rod and substrate cassette using the same
TW568095U (en) * 2002-10-09 2003-12-21 Foxsemicon Integrated Tech Inc Substrate cassette and it's stopper
TW549569U (en) * 2002-11-13 2003-08-21 Foxsemicon Integrated Tech Inc Substrate cassette
TW565008U (en) * 2002-11-13 2003-12-01 Foxsemicon Integrated Tech Inc Substrate cassette
TWM243458U (en) * 2003-02-27 2004-09-11 Innolux Display Corp Substrate cassette
US7891937B2 (en) * 2003-06-02 2011-02-22 Texas Instruments Incorporated Adjustable width cassette for wafer film frames
KR20050003759A (ko) * 2003-07-04 2005-01-12 비오이 하이디스 테크놀로지 주식회사 유리기판 수납용 카세트
TWI268570B (en) * 2003-08-20 2006-12-11 Innolux Display Corp Substrate cassette
TWI248909B (en) * 2004-10-12 2006-02-11 Au Optronics Corp A cassette for placing multiple-sized substrate
JP2006293257A (ja) * 2005-04-08 2006-10-26 Samsung Electronics Co Ltd 表示パネル用ガラスを積載するためのガラスカセット

Also Published As

Publication number Publication date
TWI315002B (en) 2009-09-21
US20060231515A1 (en) 2006-10-19

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees