TW200630604A - Method and apparatus for inspection of optical component - Google Patents

Method and apparatus for inspection of optical component

Info

Publication number
TW200630604A
TW200630604A TW094146755A TW94146755A TW200630604A TW 200630604 A TW200630604 A TW 200630604A TW 094146755 A TW094146755 A TW 094146755A TW 94146755 A TW94146755 A TW 94146755A TW 200630604 A TW200630604 A TW 200630604A
Authority
TW
Taiwan
Prior art keywords
linear
optical component
line
approximated
determined
Prior art date
Application number
TW094146755A
Other languages
English (en)
Inventor
Kazumasa Takata
Hidetoshi Utsuro
Tomotaka Furuta
Takashi Urashima
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Publication of TW200630604A publication Critical patent/TW200630604A/zh

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/18—Structures comprising elongated load-supporting parts, e.g. columns, girders, skeletons
    • E04B1/24—Structures comprising elongated load-supporting parts, e.g. columns, girders, skeletons the supporting parts consisting of metal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04C—STRUCTURAL ELEMENTS; BUILDING MATERIALS
    • E04C3/00—Structural elongated elements designed for load-supporting
    • E04C3/02—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces
    • E04C3/04—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04C—STRUCTURAL ELEMENTS; BUILDING MATERIALS
    • E04C3/00—Structural elongated elements designed for load-supporting
    • E04C3/02—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces
    • E04C3/04—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal
    • E04C2003/0404—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal beams, girders, or joists characterised by cross-sectional aspects
    • E04C2003/0443—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal beams, girders, or joists characterised by cross-sectional aspects characterised by substantial shape of the cross-section
    • E04C2003/0447—Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces of metal beams, girders, or joists characterised by cross-sectional aspects characterised by substantial shape of the cross-section circular- or oval-shaped

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
TW094146755A 2005-01-06 2005-12-27 Method and apparatus for inspection of optical component TW200630604A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005001196 2005-01-06

Publications (1)

Publication Number Publication Date
TW200630604A true TW200630604A (en) 2006-09-01

Family

ID=36810935

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094146755A TW200630604A (en) 2005-01-06 2005-12-27 Method and apparatus for inspection of optical component

Country Status (4)

Country Link
US (1) US7379172B2 (zh)
KR (1) KR101175368B1 (zh)
CN (1) CN1800803B (zh)
TW (1) TW200630604A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4524689B2 (ja) * 2007-02-20 2010-08-18 ソニー株式会社 ホログラム再生装置およびホログラム再生方法並びに位相変調素子
JP2009139151A (ja) * 2007-12-04 2009-06-25 Fujinon Corp 干渉計装置のシステム誤差較正方法
DE102012217800A1 (de) * 2012-09-28 2014-04-03 Carl Zeiss Smt Gmbh Diffraktives optisches Element sowie Messverfahren
CN105277338B (zh) * 2014-07-04 2018-10-26 中国科学院长春光学精密机械与物理研究所 大数值孔径移相式双针孔衍射干涉仪及其测试方法
CN107144420B (zh) * 2017-04-26 2020-01-31 长沙青波光电科技有限公司 光学镜头像差检测装置及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3422143A1 (de) * 1984-06-14 1985-12-19 Josef Prof. Dr. Bille Geraet zur wafer-inspektion
US5155606A (en) * 1991-12-06 1992-10-13 Lockheed Missiles & Space Company, Inc. Glint suppression technique
US5801390A (en) * 1996-02-09 1998-09-01 Nikon Corporation Position-detection method and apparatus with a grating mark
SG74157A1 (en) * 1998-07-27 2000-07-18 Matsushita Electric Ind Co Ltd Method and apparatus for evaluating aberrations of optical element for use with optical device
JP3956942B2 (ja) 1998-09-18 2007-08-08 株式会社日立製作所 欠陥検査方法及びその装置
US6809829B1 (en) * 1999-05-19 2004-10-26 Matsushita Electric Industrial Co., Ltd. Method and apparatus for evaluating aberrations of optical element and method and apparatus for adjusting optical unit and lens
JP4068307B2 (ja) 2001-02-05 2008-03-26 松下電器産業株式会社 領域特定方法、収差計測方法及び収差計測装置

Also Published As

Publication number Publication date
US7379172B2 (en) 2008-05-27
US20060192977A1 (en) 2006-08-31
KR20060080878A (ko) 2006-07-11
CN1800803A (zh) 2006-07-12
CN1800803B (zh) 2010-05-12
KR101175368B1 (ko) 2012-08-20

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