TW200626459A - Conveyor shaft, roll-brush shaft and treatment apparatus for substrate - Google Patents
Conveyor shaft, roll-brush shaft and treatment apparatus for substrateInfo
- Publication number
- TW200626459A TW200626459A TW094145543A TW94145543A TW200626459A TW 200626459 A TW200626459 A TW 200626459A TW 094145543 A TW094145543 A TW 094145543A TW 94145543 A TW94145543 A TW 94145543A TW 200626459 A TW200626459 A TW 200626459A
- Authority
- TW
- Taiwan
- Prior art keywords
- shaft
- roll
- substrate
- treatment apparatus
- conveyor
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/11—Roller frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
- B65G13/06—Roller driving means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/02—Adaptations of individual rollers and supports therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Robotics (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Abstract
The present invention provides a conveyor shaft for conveying substrates with little bending even if it is elongated. The conveyor shaft for conveying substrates to be treated with a treatment liquid comprises a core material made of carbon fiber, a shaft part with a coating material made of synthetic resin having resistance for the treatment liquid, coating the outer surface of the core material, and a supporting roller which supports substrates prepared at a predetermined interval in the axial direction of the shaft part.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004372217 | 2004-12-22 | ||
JP2005357673A JP4681441B2 (en) | 2004-12-22 | 2005-12-12 | Conveying shaft, roll brush shaft and substrate processing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200626459A true TW200626459A (en) | 2006-08-01 |
TWI279383B TWI279383B (en) | 2007-04-21 |
Family
ID=36960847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094145543A TWI279383B (en) | 2004-12-22 | 2005-12-21 | Conveyor shaft, roll-brush shaft and treatment apparatus for substrate |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4681441B2 (en) |
KR (1) | KR101199803B1 (en) |
CN (1) | CN1814523B (en) |
TW (1) | TWI279383B (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE20319527U1 (en) * | 2003-12-16 | 2004-03-04 | Maschinenbau Oppenweiler Binder Gmbh & Co. Kg | Transport shaft for a folding machine |
KR100828970B1 (en) * | 2007-09-12 | 2008-05-13 | 주식회사 디엠에스 | A conveyor shaft with prevention apparatus of deformation |
JP5101311B2 (en) * | 2008-01-16 | 2012-12-19 | 新日鉄住金マテリアルズ株式会社 | Brush roll shaft and conveying roll shaft |
CN101834113B (en) * | 2009-03-13 | 2012-11-14 | 中芯国际集成电路制造(上海)有限公司 | Wafer cassette cleaning equipment |
JP5260370B2 (en) * | 2009-03-19 | 2013-08-14 | 住友精密工業株式会社 | Substrate processing equipment |
KR101226295B1 (en) * | 2012-04-04 | 2013-01-24 | 이재규 | Elastic o-ring installed in glass cleaning apparatus and method for making it |
KR101380163B1 (en) * | 2013-01-07 | 2014-04-02 | 이재규 | Elastic o-ring |
TWI562836B (en) * | 2016-03-24 | 2016-12-21 | Mirle Automation Corp | Cleaning mechanism |
CN112792028B (en) * | 2020-12-25 | 2022-04-29 | 松田电工(台山)有限公司 | Efficient metal cleaning device |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5945843B2 (en) * | 1978-08-03 | 1984-11-09 | 東レ株式会社 | metal roll |
JPS6077180A (en) * | 1983-09-30 | 1985-05-01 | 株式会社東芝 | Bonded body |
JPH0733545Y2 (en) * | 1984-05-07 | 1995-07-31 | 古河電気工業株式会社 | Pipe cable connection sheath tube connection |
JPS63101324U (en) * | 1986-12-22 | 1988-07-01 | ||
JPH07113417A (en) * | 1993-10-19 | 1995-05-02 | Toray Ind Inc | Frp roll and manufacture thereof |
JPH08244930A (en) * | 1995-03-13 | 1996-09-24 | Dainippon Screen Mfg Co Ltd | Base board carrier |
JPH09326377A (en) * | 1996-06-04 | 1997-12-16 | Dainippon Screen Mfg Co Ltd | Substrate treating system |
JP3533884B2 (en) * | 1997-06-03 | 2004-05-31 | 日立電子エンジニアリング株式会社 | Substrate cleaning device |
JPH1122720A (en) * | 1997-07-04 | 1999-01-26 | Toray Ind Inc | Frp-made roll |
EP0993023A1 (en) * | 1998-10-05 | 2000-04-12 | Agfa-Gevaert N.V. | Method for transferring a web-or sheet-like material into a clean room |
JP4537508B2 (en) * | 1999-03-29 | 2010-09-01 | 新日本製鐵株式会社 | Transport roll with low inertia |
JP2003306223A (en) * | 2002-04-12 | 2003-10-28 | Shibaura Mechatronics Corp | Carrying device and fitting structure of material to be fitted |
CN2652530Y (en) * | 2003-10-22 | 2004-11-03 | 长沙正中药机厂 | On site cleaning device for transport net plate |
-
2005
- 2005-12-12 JP JP2005357673A patent/JP4681441B2/en active Active
- 2005-12-21 KR KR1020050126991A patent/KR101199803B1/en active IP Right Grant
- 2005-12-21 TW TW094145543A patent/TWI279383B/en active
- 2005-12-22 CN CN2005101216663A patent/CN1814523B/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN1814523B (en) | 2010-05-12 |
CN1814523A (en) | 2006-08-09 |
KR101199803B1 (en) | 2012-11-09 |
JP4681441B2 (en) | 2011-05-11 |
KR20060072069A (en) | 2006-06-27 |
JP2006203177A (en) | 2006-08-03 |
TWI279383B (en) | 2007-04-21 |
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