TW200626459A - Conveyor shaft, roll-brush shaft and treatment apparatus for substrate - Google Patents

Conveyor shaft, roll-brush shaft and treatment apparatus for substrate

Info

Publication number
TW200626459A
TW200626459A TW094145543A TW94145543A TW200626459A TW 200626459 A TW200626459 A TW 200626459A TW 094145543 A TW094145543 A TW 094145543A TW 94145543 A TW94145543 A TW 94145543A TW 200626459 A TW200626459 A TW 200626459A
Authority
TW
Taiwan
Prior art keywords
shaft
roll
substrate
treatment apparatus
conveyor
Prior art date
Application number
TW094145543A
Other languages
Chinese (zh)
Other versions
TWI279383B (en
Inventor
Yukinobu Nishibe
Shigeki Fujita
Akinori Iso
Takahiko Wakatsuki
Tsutomu Makino
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200626459A publication Critical patent/TW200626459A/en
Application granted granted Critical
Publication of TWI279383B publication Critical patent/TWI279383B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/11—Roller frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B65G13/06—Roller driving means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/02—Adaptations of individual rollers and supports therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Robotics (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Abstract

The present invention provides a conveyor shaft for conveying substrates with little bending even if it is elongated. The conveyor shaft for conveying substrates to be treated with a treatment liquid comprises a core material made of carbon fiber, a shaft part with a coating material made of synthetic resin having resistance for the treatment liquid, coating the outer surface of the core material, and a supporting roller which supports substrates prepared at a predetermined interval in the axial direction of the shaft part.
TW094145543A 2004-12-22 2005-12-21 Conveyor shaft, roll-brush shaft and treatment apparatus for substrate TWI279383B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004372217 2004-12-22
JP2005357673A JP4681441B2 (en) 2004-12-22 2005-12-12 Conveying shaft, roll brush shaft and substrate processing apparatus

Publications (2)

Publication Number Publication Date
TW200626459A true TW200626459A (en) 2006-08-01
TWI279383B TWI279383B (en) 2007-04-21

Family

ID=36960847

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094145543A TWI279383B (en) 2004-12-22 2005-12-21 Conveyor shaft, roll-brush shaft and treatment apparatus for substrate

Country Status (4)

Country Link
JP (1) JP4681441B2 (en)
KR (1) KR101199803B1 (en)
CN (1) CN1814523B (en)
TW (1) TWI279383B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20319527U1 (en) * 2003-12-16 2004-03-04 Maschinenbau Oppenweiler Binder Gmbh & Co. Kg Transport shaft for a folding machine
KR100828970B1 (en) * 2007-09-12 2008-05-13 주식회사 디엠에스 A conveyor shaft with prevention apparatus of deformation
JP5101311B2 (en) * 2008-01-16 2012-12-19 新日鉄住金マテリアルズ株式会社 Brush roll shaft and conveying roll shaft
CN101834113B (en) * 2009-03-13 2012-11-14 中芯国际集成电路制造(上海)有限公司 Wafer cassette cleaning equipment
JP5260370B2 (en) * 2009-03-19 2013-08-14 住友精密工業株式会社 Substrate processing equipment
KR101226295B1 (en) * 2012-04-04 2013-01-24 이재규 Elastic o-ring installed in glass cleaning apparatus and method for making it
KR101380163B1 (en) * 2013-01-07 2014-04-02 이재규 Elastic o-ring
TWI562836B (en) * 2016-03-24 2016-12-21 Mirle Automation Corp Cleaning mechanism
CN112792028B (en) * 2020-12-25 2022-04-29 松田电工（台山）有限公司 Efficient metal cleaning device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945843B2 (en) * 1978-08-03 1984-11-09 東レ株式会社 metal roll
JPS6077180A (en) * 1983-09-30 1985-05-01 株式会社東芝 Bonded body
JPH0733545Y2 (en) * 1984-05-07 1995-07-31 古河電気工業株式会社 Pipe cable connection sheath tube connection
JPS63101324U (en) * 1986-12-22 1988-07-01
JPH07113417A (en) * 1993-10-19 1995-05-02 Toray Ind Inc Frp roll and manufacture thereof
JPH08244930A (en) * 1995-03-13 1996-09-24 Dainippon Screen Mfg Co Ltd Base board carrier
JPH09326377A (en) * 1996-06-04 1997-12-16 Dainippon Screen Mfg Co Ltd Substrate treating system
JP3533884B2 (en) * 1997-06-03 2004-05-31 日立電子エンジニアリング株式会社 Substrate cleaning device
JPH1122720A (en) * 1997-07-04 1999-01-26 Toray Ind Inc Frp-made roll
EP0993023A1 (en) * 1998-10-05 2000-04-12 Agfa-Gevaert N.V. Method for transferring a web-or sheet-like material into a clean room
JP4537508B2 (en) * 1999-03-29 2010-09-01 新日本製鐵株式会社 Transport roll with low inertia
JP2003306223A (en) * 2002-04-12 2003-10-28 Shibaura Mechatronics Corp Carrying device and fitting structure of material to be fitted
CN2652530Y (en) * 2003-10-22 2004-11-03 长沙正中药机厂 On site cleaning device for transport net plate

Also Published As

Publication number Publication date
CN1814523B (en) 2010-05-12
CN1814523A (en) 2006-08-09
KR101199803B1 (en) 2012-11-09
JP4681441B2 (en) 2011-05-11
KR20060072069A (en) 2006-06-27
JP2006203177A (en) 2006-08-03
TWI279383B (en) 2007-04-21

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