TW200624255A - Continuous surface-treating apparatus for film shape of polymer and continuous surface-treating method thereof - Google Patents

Continuous surface-treating apparatus for film shape of polymer and continuous surface-treating method thereof

Info

Publication number
TW200624255A
TW200624255A TW095100007A TW95100007A TW200624255A TW 200624255 A TW200624255 A TW 200624255A TW 095100007 A TW095100007 A TW 095100007A TW 95100007 A TW95100007 A TW 95100007A TW 200624255 A TW200624255 A TW 200624255A
Authority
TW
Taiwan
Prior art keywords
film
polymeric article
processing chamber
shaped polymeric
treating
Prior art date
Application number
TW095100007A
Other languages
Chinese (zh)
Inventor
Soon-Ok Kim
Original Assignee
Tescom Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tescom Co Ltd filed Critical Tescom Co Ltd
Publication of TW200624255A publication Critical patent/TW200624255A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B29C59/142—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment of profiled articles, e.g. hollow or tubular articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
    • B29K2995/0003—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds having particular electrical or magnetic properties, e.g. piezoelectric
    • B29K2995/0005—Conductive

Abstract

The present invention relates to an apparatus and method for treating a film-shaped polymeric article, and more particularly, to an apparatus and method for treating a film-shaped polymeric article, wherein a plasma sheath is formed to conform to the shape of a film-shaped polymeric article so that the hardness and surface conductivity of the polymeric article to be treated can be improved. The present invention provides an apparatus for treating a film-shaped polymeric article, comprising a generally cylindrical processing chamber capable of defining a hermetic space therein; a main roll disposed at the center of the processing chamber to move the film-shaped polymeric article while the film-shaped polymeric article is wrapped around an outer periphery of the main roll; a radio frequency power supply unit including a radio frequency power supply, a matching box and an antenna, so as to supply radio frequency power for generation of plasma within the processing chamber; a process gas supply unit including a process gas source, a process gas supply passage and a flow rate control means, so as to supply a process gas for constituting the plasma generated within the processing chamber; a pumping unit for reducing pressure in the processing chamber so that the interior of the processing chamber is under a vacuum condition; and a grid unit including a negative voltage generator and a grid so as to focus ions, wherein the antenna and the grid are provided to be spaced apart by a distance of 250 to 400mm from each other.
TW095100007A 2005-01-03 2006-01-02 Continuous surface-treating apparatus for film shape of polymer and continuous surface-treating method thereof TW200624255A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050000188A KR100649668B1 (en) 2005-01-03 2005-01-03 Continuous surface-treating apparatus for film shape of polymer and continuous surface-treating method thereof

Publications (1)

Publication Number Publication Date
TW200624255A true TW200624255A (en) 2006-07-16

Family

ID=36647708

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095100007A TW200624255A (en) 2005-01-03 2006-01-02 Continuous surface-treating apparatus for film shape of polymer and continuous surface-treating method thereof

Country Status (3)

Country Link
KR (1) KR100649668B1 (en)
TW (1) TW200624255A (en)
WO (1) WO2006073235A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4536271A (en) * 1983-12-29 1985-08-20 Mobil Oil Corporation Method of plasma treating a polymer film to change its properties
GB9601208D0 (en) * 1996-01-22 1996-03-20 Council Cent Lab Res Councils Formation and destruction of dust particle agglomerates
KR100351516B1 (en) * 2000-09-06 2002-09-05 한국과학기술연구원 Method for Surface Modification of 3-Dimensional Bulk Polymers
CN1426889A (en) * 2001-12-17 2003-07-02 中国科学院电子学研究所 Method of surface modification of PTFE/ceramic composite medium material
KR100615632B1 (en) 2004-08-13 2006-08-25 김정자 Continuous surface-treating apparatus for film shape of polymer and continuous surface-treating method thereof

Also Published As

Publication number Publication date
KR100649668B1 (en) 2006-11-27
WO2006073235A1 (en) 2006-07-13
KR20060079726A (en) 2006-07-06

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