TW200622040A - A liquid delivery system for an electroplating apparatus and an electroplating apparatus with such a liquid delivery system - Google Patents

A liquid delivery system for an electroplating apparatus and an electroplating apparatus with such a liquid delivery system

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Publication number
TW200622040A
TW200622040A TW095105071A TW95105071A TW200622040A TW 200622040 A TW200622040 A TW 200622040A TW 095105071 A TW095105071 A TW 095105071A TW 95105071 A TW95105071 A TW 95105071A TW 200622040 A TW200622040 A TW 200622040A
Authority
TW
Taiwan
Prior art keywords
electrolyte
electroplating apparatus
delivery system
pipe
disclosed
Prior art date
Application number
TW095105071A
Other languages
Chinese (zh)
Other versions
TWI329141B (en
Inventor
Paul Henington
Kwok-Wing Ng
Yuk-Wah Leung
Ka-Man Chan
Original Assignee
Process Automation Int Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Process Automation Int Ltd filed Critical Process Automation Int Ltd
Priority to TW95105071A priority Critical patent/TWI329141B/en
Publication of TW200622040A publication Critical patent/TW200622040A/en
Application granted granted Critical
Publication of TWI329141B publication Critical patent/TWI329141B/en

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  • Electroplating Methods And Accessories (AREA)

Abstract

A liquid delivery system for an electroplating apparatus is disclosed as including a number of nozzles which are fixedly spaced apart from each other for delivering a liquid electrolyte into the apparatus, and each of the nozzle is adapted to deliver the electrolyte into the apparatus generally along a respective path, and the nozzles are movable on a plane, substantially perpendicular to the path. There is also disclosed a current distributor for controlling the electric current density directed towards different parts of a substrate, e.g. PCB, to be plated. A system for delivering an electrolyte into a container of an electroplating apparatus is also disclosed as including a pipe for receiving the electrolyte from a liquid source, a number of outlets for receiving the electrolyte from the pipe and via which the electrolyte from the pipe is deliverable into the container, and means allowing, during operation, the electrolyte in the container to enter the outlet otherwise than from the pipe. A method of operating an electroplating apparatus is also disclosed as including the steps of (a) operating the electroplating apparatus at a first lower current density for a first period of time; and (b) operating the electroplating apparatus at a higher second current density for a second period of time.
TW95105071A 2003-09-02 2003-09-02 A liquid delivery system for an electroplating apparatus and an electroplating apparatus with such a liquid delivery system TWI329141B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95105071A TWI329141B (en) 2003-09-02 2003-09-02 A liquid delivery system for an electroplating apparatus and an electroplating apparatus with such a liquid delivery system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95105071A TWI329141B (en) 2003-09-02 2003-09-02 A liquid delivery system for an electroplating apparatus and an electroplating apparatus with such a liquid delivery system

Publications (2)

Publication Number Publication Date
TW200622040A true TW200622040A (en) 2006-07-01
TWI329141B TWI329141B (en) 2010-08-21

Family

ID=45074462

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95105071A TWI329141B (en) 2003-09-02 2003-09-02 A liquid delivery system for an electroplating apparatus and an electroplating apparatus with such a liquid delivery system

Country Status (1)

Country Link
TW (1) TWI329141B (en)

Also Published As

Publication number Publication date
TWI329141B (en) 2010-08-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees