TW200621666A - Cover glass for solid-state imaging device and manufacturing method thereof - Google Patents

Cover glass for solid-state imaging device and manufacturing method thereof

Info

Publication number
TW200621666A
TW200621666A TW094135488A TW94135488A TW200621666A TW 200621666 A TW200621666 A TW 200621666A TW 094135488 A TW094135488 A TW 094135488A TW 94135488 A TW94135488 A TW 94135488A TW 200621666 A TW200621666 A TW 200621666A
Authority
TW
Taiwan
Prior art keywords
glass plate
glass
thin film
light
imaging device
Prior art date
Application number
TW094135488A
Other languages
Chinese (zh)
Other versions
TWI372741B (en
Inventor
Hiroaki Nakahori
Daisuke Okawa
Masahiro Yodogawa
Original Assignee
Nippon Electric Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co filed Critical Nippon Electric Glass Co
Publication of TW200621666A publication Critical patent/TW200621666A/en
Application granted granted Critical
Publication of TWI372741B publication Critical patent/TWI372741B/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C14/00Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0203Containers; Encapsulations, e.g. encapsulation of photodiodes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001General methods for coating; Devices therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

A cover glass 10 for solid-state imaging device is provided. The glass plate is made of inorganic oxide glass. A first light-transmitting face 11a and a second light-transmitting face 11b are provided on the outer and the inner surface in the direction of thickness of the glass plate, respectively. And a thin film 20 is formed on the first light-transmitting face 11a for constituting the cover glass for solid-state imaging device. And, an unevenness is formed on the edges 22 of the thin film 20, where the thin film 20 is disposed on the outer edges of the first light-transmitting face 11a of the glass plate. The unevenness, which is the protruding size L from the most sunken place to the most protruding place on the parallel face to the first light-transmitting face 11a, is between 0.5μm to 50μm. And, the manufacturing method thereof contains processes as follows: the process of melting glass material mixture in the heat-resistant container; the process of forming a glass plate with the obtained melted glass; the process of forming a thin film on the glass plate; and the process of cutting the glass plate having the thin film to several pieces of little glass plate.
TW094135488A 2004-10-12 2005-10-12 Cover glass for solid-state imaging device and manufacturing method thereof TWI372741B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004297829 2004-10-12

Publications (2)

Publication Number Publication Date
TW200621666A true TW200621666A (en) 2006-07-01
TWI372741B TWI372741B (en) 2012-09-21

Family

ID=36148362

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094135488A TWI372741B (en) 2004-10-12 2005-10-12 Cover glass for solid-state imaging device and manufacturing method thereof

Country Status (4)

Country Link
KR (1) KR101201384B1 (en)
CN (1) CN100470814C (en)
TW (1) TWI372741B (en)
WO (1) WO2006041074A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110272205A (en) * 2019-06-26 2019-09-24 醴陵旗滨电子玻璃有限公司 A kind of borosilicate glass and its preparation method and application
CN114423718A (en) * 2019-10-07 2022-04-29 日本电气硝子株式会社 Ultraviolet ray transmitting glass
JPWO2021070442A1 (en) * 2019-10-11 2021-04-15
JP2023120508A (en) * 2022-02-18 2023-08-30 デンカ株式会社 Powder and powder manufacturing method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3099914B2 (en) * 1991-12-20 2000-10-16 株式会社東芝 Solid-state imaging device
JPH09283731A (en) * 1996-04-08 1997-10-31 Nippon Electric Glass Co Ltd Cover glass for solid-stage image sensing element
JP2001102470A (en) * 1999-09-30 2001-04-13 Sony Corp Semiconductor device
JP4628667B2 (en) * 2002-11-15 2011-02-09 日本電気硝子株式会社 Cover glass for solid-state image sensor

Also Published As

Publication number Publication date
TWI372741B (en) 2012-09-21
CN1993830A (en) 2007-07-04
KR101201384B1 (en) 2012-11-14
WO2006041074A1 (en) 2006-04-20
CN100470814C (en) 2009-03-18
KR20070083394A (en) 2007-08-24

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