TW200618039A - Semiconductor vacuum metal sintering apparatus and its process - Google Patents

Semiconductor vacuum metal sintering apparatus and its process

Info

Publication number
TW200618039A
TW200618039A TW093135125A TW93135125A TW200618039A TW 200618039 A TW200618039 A TW 200618039A TW 093135125 A TW093135125 A TW 093135125A TW 93135125 A TW93135125 A TW 93135125A TW 200618039 A TW200618039 A TW 200618039A
Authority
TW
Taiwan
Prior art keywords
metal sintering
vacuum
sintering
oven chamber
semiconductor vacuum
Prior art date
Application number
TW093135125A
Other languages
Chinese (zh)
Inventor
hong-long Zheng
hui-zhong Wu
Ji-Cheng Li
Original Assignee
Lite On Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lite On Semiconductor Corp filed Critical Lite On Semiconductor Corp
Priority to TW093135125A priority Critical patent/TW200618039A/en
Publication of TW200618039A publication Critical patent/TW200618039A/en

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

This invention provides semiconductor vacuum metal sintering apparatus and its process. The semiconductor vacuum metal sintering apparatus comprises a quartz tube, vacuum air-pumping equipment, an oven chamber, and a gas injection tube. For the semiconductor vacuum metal sintering process, it conducts in a vacuum state to perform high temperature metal sintering. By means of this way, it decreases the metal oxidation phenomenon due to low oxygen content in the vacuum state. Further, it promotes the execution of high yield-rate process. After completing the sintering process, by means of a movable oven chamber, the oven chamber is capable of immediately leaving from the quartz tube. Eventually, after sintering, it reduces the cooling time.
TW093135125A 2004-11-16 2004-11-16 Semiconductor vacuum metal sintering apparatus and its process TW200618039A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW093135125A TW200618039A (en) 2004-11-16 2004-11-16 Semiconductor vacuum metal sintering apparatus and its process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW093135125A TW200618039A (en) 2004-11-16 2004-11-16 Semiconductor vacuum metal sintering apparatus and its process

Publications (1)

Publication Number Publication Date
TW200618039A true TW200618039A (en) 2006-06-01

Family

ID=57808182

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093135125A TW200618039A (en) 2004-11-16 2004-11-16 Semiconductor vacuum metal sintering apparatus and its process

Country Status (1)

Country Link
TW (1) TW200618039A (en)

Similar Documents

Publication Publication Date Title
WO2006078340A3 (en) Method and apparatus for processing metal bearing gases
WO2011077327A3 (en) Method for generating nitric oxide
MX2015014659A (en) Process and apparatus for thermochemically hardening workpieces.
WO2007025039A3 (en) Pulsed etching cooling
EA201200001A1 (en) METHOD OF MANUFACTURING COMPOSITE MATERIAL BASED ON COPPER FOR ELECTRICAL CONTACTS
EA201690017A1 (en) DOMAIN FURNACE AND METHOD OF WORK OF THE DOMAIN FURNACE
TW200643179A (en) Method and apparatus for the recovery of the secondary metallurgy (LF) slag and its recycling in the steel production process by means of electric arc furnace
TW200623240A (en) Remote chamber methods for removing surface deposits
TW201130055A (en) Method for manufacturing oxide semiconductor film and method for manufacturing semiconductor device
TW200729285A (en) Gas-removal processing device
TW200644090A (en) Plasma doping method and system
WO2016129333A1 (en) Method and device for producing metal springs
NO20041017L (en) Method and apparatus for providing a carbon product and removing the precursor to carbon
CO6160252A2 (en) CEILING OF ELECTRIC ARC OVEN AND CENTRAL PORTION FOR THAT ROOFING
TW200618039A (en) Semiconductor vacuum metal sintering apparatus and its process
WO2008009571A3 (en) Lighting system comprising a discharge lamp and an electronic ballast, and method for the operation of a lighting system
MX2012000438A (en) Method and apparatus for heat treating a metal.
PL422596A1 (en) Method for low pressure carburizing (LPC) of elements made from iron and other metals alloys
MX2023005818A (en) Method and apparatus for treating metallic member.
TW200802593A (en) Etching method
RU2013115736A (en) METHOD FOR LOCAL PROCESSING OF MATERIAL DURING NITROGEN IN GLOW DISCHARGE
TW200637644A (en) Method of suppressing contamination of a noble gas
TW200731400A (en) Improved method for etching photolithographic substrates
MX2021004024A (en) Method and device for stabilizing precursor fibers or films for producing carbon fibers or films.
JP4255815B2 (en) Gas carburizing method