TW200637644A - Method of suppressing contamination of a noble gas - Google Patents

Method of suppressing contamination of a noble gas

Info

Publication number
TW200637644A
TW200637644A TW095109500A TW95109500A TW200637644A TW 200637644 A TW200637644 A TW 200637644A TW 095109500 A TW095109500 A TW 095109500A TW 95109500 A TW95109500 A TW 95109500A TW 200637644 A TW200637644 A TW 200637644A
Authority
TW
Taiwan
Prior art keywords
gas
noble gas
chamber
noble
suppressing
Prior art date
Application number
TW095109500A
Other languages
Chinese (zh)
Inventor
Robert Bruce Grant
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Publication of TW200637644A publication Critical patent/TW200637644A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H01J9/395—Filling vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Abstract

A method is described for suppressing the contamination of a noble gas used in the processing of a device within a process chamber. The method comprises the steps of supplying a purge gas to a process chamber, the purge gas being substantially free from noble gas; suppressing the ingress of air into the chamber as a device is inserted into the purge gas-filled chamber; and, prior to supplying noble gas to the evacuated chamber for device processing, at least partially evacuating the chamber by drawing the purge gas therefrom. By suppressing the contamination of the noble gas with other noble gases in this manner, the subsequent recovery of the noble gas from the gas stream can be facilitated, and the lifetime of the noble gas can be increased before it requires replacement.
TW095109500A 2005-03-24 2006-03-20 Method of suppressing contamination of a noble gas TW200637644A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0506076A GB0506076D0 (en) 2005-03-24 2005-03-24 Method of suppressing contamination of a noble gas

Publications (1)

Publication Number Publication Date
TW200637644A true TW200637644A (en) 2006-11-01

Family

ID=34566446

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095109500A TW200637644A (en) 2005-03-24 2006-03-20 Method of suppressing contamination of a noble gas

Country Status (3)

Country Link
GB (1) GB0506076D0 (en)
TW (1) TW200637644A (en)
WO (1) WO2006100428A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2492065A (en) * 2011-06-16 2012-12-26 Edwards Ltd Noise reduction of a vacuum pumping system
CN103681167B (en) * 2012-09-11 2015-10-28 昆山国力真空电器有限公司 Thyratron gas charging system
JP7020951B2 (en) * 2018-02-09 2022-02-16 東京エレクトロン株式会社 Plasma processing system and plasma processing method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB191124164A (en) * 1910-11-28 1912-03-21 Air Liquide Improvements in or connected with Luminescent Tubes for Rare Gases.
NL40547C (en) * 1934-04-23
US3028712A (en) * 1959-06-01 1962-04-10 Gen Electric Apparatus for gas filling electric lamps
US3335550A (en) * 1964-04-24 1967-08-15 Union Carbide Corp Cryosorption apparatus
US3294468A (en) * 1965-02-05 1966-12-27 Duro Test Corp Method and apparatus for manufacturing fluorescent lamps
US6100634A (en) * 1991-12-11 2000-08-08 Gte Products Corporation Method for amalgam relocation in an arc discharge tube
US5352143A (en) * 1993-08-27 1994-10-04 Brown Iii Henry A Automated neon tube evacuation and gas filling system and process
WO2004100203A1 (en) * 2003-05-08 2004-11-18 Polo S.R.L. Device for connecting plasma display panels to a plant for making vacuum and successive filling with ionizable noble gases

Also Published As

Publication number Publication date
GB0506076D0 (en) 2005-05-04
WO2006100428A1 (en) 2006-09-28

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