TW200616013A - Processing system, processing method, computer readable recording medium and computer program - Google Patents

Processing system, processing method, computer readable recording medium and computer program

Info

Publication number
TW200616013A
TW200616013A TW094122719A TW94122719A TW200616013A TW 200616013 A TW200616013 A TW 200616013A TW 094122719 A TW094122719 A TW 094122719A TW 94122719 A TW94122719 A TW 94122719A TW 200616013 A TW200616013 A TW 200616013A
Authority
TW
Taiwan
Prior art keywords
alarm
information
detecting
processor
processing system
Prior art date
Application number
TW094122719A
Other languages
English (en)
Chinese (zh)
Inventor
Osamu Tanaka
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200616013A publication Critical patent/TW200616013A/zh

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q90/00—Systems or methods specially adapted for administrative, commercial, financial, managerial or supervisory purposes, not involving significant data processing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0264—Control of logging system, e.g. decision on which data to store; time-stamping measurements
TW094122719A 2004-08-11 2005-07-05 Processing system, processing method, computer readable recording medium and computer program TW200616013A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004234828 2004-08-11

Publications (1)

Publication Number Publication Date
TW200616013A true TW200616013A (en) 2006-05-16

Family

ID=35839211

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094122719A TW200616013A (en) 2004-08-11 2005-07-05 Processing system, processing method, computer readable recording medium and computer program

Country Status (2)

Country Link
TW (1) TW200616013A (fr)
WO (1) WO2006016435A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI705317B (zh) * 2018-05-30 2020-09-21 日商橫河電機股份有限公司 異常檢測裝置、異常檢測方法、異常檢測程式及記錄媒體
TWI820413B (zh) * 2020-04-28 2023-11-01 日商佳能股份有限公司 資訊處理設備、資訊處理方法、物品製造系統及物品製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007293683A (ja) * 2006-04-26 2007-11-08 Tokyo Electron Ltd 群管理システム、プロセス情報管理装置、およびプログラム
CN111966054B (zh) * 2020-07-15 2023-10-13 国家能源集团宁夏煤业有限责任公司 化工装置全厂大联锁保护方法及装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI244603B (en) * 2001-07-05 2005-12-01 Dainippon Screen Mfg Substrate processing system for managing device information of substrate processing device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI705317B (zh) * 2018-05-30 2020-09-21 日商橫河電機股份有限公司 異常檢測裝置、異常檢測方法、異常檢測程式及記錄媒體
TWI820413B (zh) * 2020-04-28 2023-11-01 日商佳能股份有限公司 資訊處理設備、資訊處理方法、物品製造系統及物品製造方法
US11829676B2 (en) 2020-04-28 2023-11-28 Canon Kabushiki Kaisha Information processing apparatus and information processing method

Also Published As

Publication number Publication date
WO2006016435A1 (fr) 2006-02-16

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