TW200611175A - System and method for collecting non-secs data of semiconductor manufacturing system, and computer-readable recording medium storing program for executing the method - Google Patents

System and method for collecting non-secs data of semiconductor manufacturing system, and computer-readable recording medium storing program for executing the method

Info

Publication number
TW200611175A
TW200611175A TW093137252A TW93137252A TW200611175A TW 200611175 A TW200611175 A TW 200611175A TW 093137252 A TW093137252 A TW 093137252A TW 93137252 A TW93137252 A TW 93137252A TW 200611175 A TW200611175 A TW 200611175A
Authority
TW
Taiwan
Prior art keywords
data
atypical
request message
semiconductor manufacturing
typical
Prior art date
Application number
TW093137252A
Other languages
Chinese (zh)
Other versions
TWI303032B (en
Inventor
Man-Ki Kim
Su-Hyuk Nam
Sang-Wook Park
Original Assignee
Aim Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aim Systems Inc filed Critical Aim Systems Inc
Publication of TW200611175A publication Critical patent/TW200611175A/en
Application granted granted Critical
Publication of TWI303032B publication Critical patent/TWI303032B/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31202—Semiconductor equipment communication standard SECS

Abstract

Disclosed herein is a system and method for collecting the atypical data of a semiconductor manufacturing system. The atypical data collection system includes a program stored in memory and a processor connected to the memory to execute the program. The processor assigns a Status Variable IDentifier (SVID) to atypical data, receives a data request message from at least one of the host and the analysis system, stores the data request message, determines whether an SVID and a Collection Event IDentifier (CEID) have been defined, determines information, which is not supported by the manufacturing equipment, to be an atypical data request message, transmits a typical data request message to the manufacturing equipment, transmits the atypical data request message to an atypical data detection unit, receives first typical data, collects atypical data, converts the atypical data into second typical data, and synchronizes the second typical data with the first typical data and transmits the data to the host or analysis system.
TW093137252A 2004-09-24 2004-12-02 System and method for collecting non-secs data of semiconductor manufacturing system, and computer-readable recording medium storing program for executing the method TWI303032B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020040076927A KR100590603B1 (en) 2004-09-24 2004-09-24 System and method for collecting non-SECS data of semiconductor manufacturing equipment, and computer readable recording medium having program to perform the method

Publications (2)

Publication Number Publication Date
TW200611175A true TW200611175A (en) 2006-04-01
TWI303032B TWI303032B (en) 2008-11-11

Family

ID=36234281

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093137252A TWI303032B (en) 2004-09-24 2004-12-02 System and method for collecting non-secs data of semiconductor manufacturing system, and computer-readable recording medium storing program for executing the method

Country Status (3)

Country Link
JP (1) JP4220462B2 (en)
KR (1) KR100590603B1 (en)
TW (1) TWI303032B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4477033B2 (en) 2007-04-12 2010-06-09 株式会社東芝 Semiconductor manufacturing apparatus data collection apparatus and semiconductor manufacturing system
JP5326268B2 (en) * 2007-12-11 2013-10-30 株式会社明電舎 Transmission method and transmission method of user custom definition data
WO2010019623A2 (en) * 2008-08-11 2010-02-18 Kuity Corp. Method and apparatus for ecological evaluation and analysis of an enterprise
JP6366289B2 (en) * 2014-02-07 2018-08-01 株式会社荏原製作所 Status reporting apparatus, substrate processing apparatus, and status reporting method
JP6381324B2 (en) * 2014-07-10 2018-08-29 三菱電機ビルテクノサービス株式会社 Auxiliary storage device and auxiliary storage method
KR101687110B1 (en) * 2015-07-29 2016-12-28 엘에스산전 주식회사 A data storage system
KR101963509B1 (en) * 2017-09-12 2019-03-28 이규옥 Apparatus and method for relaying data between semiconductor equipment and SECS server
TWI790474B (en) 2019-12-09 2023-01-21 日商Ｓｕｍｃｏ股份有限公司 Wafer manufacturing system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06332976A (en) * 1993-05-25 1994-12-02 Mitsubishi Electric Corp Model parameter extracting device
KR980012188A (en) * 1996-07-29 1998-04-30 김광호 Semiconductor device manufacturing equipment and control method of manufacturing process
US6449524B1 (en) * 2000-01-04 2002-09-10 Advanced Micro Devices, Inc. Method and apparatus for using equipment state data for run-to-run control of manufacturing tools
US6704691B2 (en) * 2001-07-18 2004-03-09 Promos Technologies, Inc. Method and system for in-line monitoring process performance using measurable equipment signals

Also Published As

Publication number Publication date
JP4220462B2 (en) 2009-02-04
JP2006093641A (en) 2006-04-06
KR100590603B1 (en) 2006-06-19
TWI303032B (en) 2008-11-11
KR20060027980A (en) 2006-03-29

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees