TW200610961A - Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrate - Google Patents

Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrate

Info

Publication number
TW200610961A
TW200610961A TW093129310A TW93129310A TW200610961A TW 200610961 A TW200610961 A TW 200610961A TW 093129310 A TW093129310 A TW 093129310A TW 93129310 A TW93129310 A TW 93129310A TW 200610961 A TW200610961 A TW 200610961A
Authority
TW
Taiwan
Prior art keywords
substrate
image
optical inspection
inspection system
operating
Prior art date
Application number
TW093129310A
Other languages
Chinese (zh)
Other versions
TWI273232B (en
Inventor
Tetsuo Kubo
Original Assignee
Kubotek Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kubotek Corp filed Critical Kubotek Corp
Priority to TW93129310A priority Critical patent/TWI273232B/en
Publication of TW200610961A publication Critical patent/TW200610961A/en
Application granted granted Critical
Publication of TWI273232B publication Critical patent/TWI273232B/en

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

This invention provides an optical inspection system and method for the same, which operates a plurality of defect inspection operations on a substrate in one process by using an optical inspection system, wherein the optical inspection system comprises an image obtaining unit, an image processing unit and an image displaying unit. The optical inspection method of this invention comprising the steps of: providing a substrate, obtaining a full image from the substrate by using the image obtaining unit; operating a plurality of defect inspection operations by using the image processing unit; and displaying the processed full image and the defect-related data on the image displaying unit.
TW93129310A 2004-09-27 2004-09-27 Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrate TWI273232B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93129310A TWI273232B (en) 2004-09-27 2004-09-27 Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93129310A TWI273232B (en) 2004-09-27 2004-09-27 Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrate

Publications (2)

Publication Number Publication Date
TW200610961A true TW200610961A (en) 2006-04-01
TWI273232B TWI273232B (en) 2007-02-11

Family

ID=38621434

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93129310A TWI273232B (en) 2004-09-27 2004-09-27 Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrate

Country Status (1)

Country Link
TW (1) TWI273232B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI386658B (en) * 2008-04-01 2013-02-21 Applied Res Lab Light emitter inspecting device and method thereof
JP4681033B2 (en) * 2008-07-31 2011-05-11 株式会社イクス Image correction data generation system, image data generation method, and image correction circuit

Also Published As

Publication number Publication date
TWI273232B (en) 2007-02-11

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