TW200610961A - Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrate - Google Patents
Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrateInfo
- Publication number
- TW200610961A TW200610961A TW093129310A TW93129310A TW200610961A TW 200610961 A TW200610961 A TW 200610961A TW 093129310 A TW093129310 A TW 093129310A TW 93129310 A TW93129310 A TW 93129310A TW 200610961 A TW200610961 A TW 200610961A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- image
- optical inspection
- inspection system
- operating
- Prior art date
Links
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
This invention provides an optical inspection system and method for the same, which operates a plurality of defect inspection operations on a substrate in one process by using an optical inspection system, wherein the optical inspection system comprises an image obtaining unit, an image processing unit and an image displaying unit. The optical inspection method of this invention comprising the steps of: providing a substrate, obtaining a full image from the substrate by using the image obtaining unit; operating a plurality of defect inspection operations by using the image processing unit; and displaying the processed full image and the defect-related data on the image displaying unit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93129310A TWI273232B (en) | 2004-09-27 | 2004-09-27 | Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93129310A TWI273232B (en) | 2004-09-27 | 2004-09-27 | Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200610961A true TW200610961A (en) | 2006-04-01 |
TWI273232B TWI273232B (en) | 2007-02-11 |
Family
ID=38621434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93129310A TWI273232B (en) | 2004-09-27 | 2004-09-27 | Optical inspection system and method thereof for operating a plurality of defect inspection operations to a substrate |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI273232B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI386658B (en) * | 2008-04-01 | 2013-02-21 | Applied Res Lab | Light emitter inspecting device and method thereof |
JP4681033B2 (en) * | 2008-07-31 | 2011-05-11 | 株式会社イクス | Image correction data generation system, image data generation method, and image correction circuit |
-
2004
- 2004-09-27 TW TW93129310A patent/TWI273232B/en active
Also Published As
Publication number | Publication date |
---|---|
TWI273232B (en) | 2007-02-11 |
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