TW200519372A - Glass substrate inspection apparatus and method - Google Patents

Glass substrate inspection apparatus and method

Info

Publication number
TW200519372A
TW200519372A TW092137459A TW92137459A TW200519372A TW 200519372 A TW200519372 A TW 200519372A TW 092137459 A TW092137459 A TW 092137459A TW 92137459 A TW92137459 A TW 92137459A TW 200519372 A TW200519372 A TW 200519372A
Authority
TW
Taiwan
Prior art keywords
substrate
data
glass substrate
inspection apparatus
illuminating
Prior art date
Application number
TW092137459A
Other languages
Chinese (zh)
Other versions
TWI336397B (en
Inventor
Chang-Ha Lee
Taek-Cheon Kim
Suk-Joon Kim
Jong-Yeol Lee
Kyung-Chae Bae
Ki Nam Kim
Ji Hwa Jung
Original Assignee
Samsung Corning Prec Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Corning Prec Glass Co filed Critical Samsung Corning Prec Glass Co
Publication of TW200519372A publication Critical patent/TW200519372A/en
Application granted granted Critical
Publication of TWI336397B publication Critical patent/TWI336397B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like

Abstract

The present invention provides an inspection apparatus for inspecting a glass substrate, including: a fixing frame for fixing the substrate by clamping its edge portions, the frame being disposed in an inspection zone; a vision assembly having an illuminating device for illuminating the substrate and cameras for scanning the substrate; a transferring device for moving the assembly from one edge to another; a processing unit for generating data about substrate defects by using images from the cameras and for processing the data; and a display device for displaying the processed data. Further, the present invention provides a method for inspecting a glass substrate, including the steps of: fixing the substrate in an inspection zone by clamping its edge portions; illuminating and scanning the substrate from one edge to another; generating data about substrate defects from scanned images and processing the data; and displaying the processed data.
TW092137459A 2003-12-09 2003-12-30 Glass substrate inspection apparatus and method TWI336397B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020030088935A KR100582344B1 (en) 2003-12-09 2003-12-09 Apparatus for inspecting a glass substrate

Publications (2)

Publication Number Publication Date
TW200519372A true TW200519372A (en) 2005-06-16
TWI336397B TWI336397B (en) 2011-01-21

Family

ID=34737864

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092137459A TWI336397B (en) 2003-12-09 2003-12-30 Glass substrate inspection apparatus and method

Country Status (4)

Country Link
JP (1) JP4729699B2 (en)
KR (1) KR100582344B1 (en)
CN (1) CN100587478C (en)
TW (1) TWI336397B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI447381B (en) * 2008-03-27 2014-08-01 Nippon Electric Glass Co Glass substrate inspection device and glass substrate inspection method

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101139371B1 (en) * 2005-08-04 2012-06-28 엘아이지에이디피 주식회사 Panel display clamping apparatus and transfering and inspecting apparatuses having the same
JP2007248291A (en) * 2006-03-16 2007-09-27 Olympus Corp Substrate inspecting apparatus
KR100803046B1 (en) * 2007-03-28 2008-02-18 에스엔유 프리시젼 주식회사 Vision inspection system and method for inspecting workpiece using the same
KR100868884B1 (en) * 2007-06-20 2008-11-14 삼성코닝정밀유리 주식회사 Flat glass defect information system and classification method
KR101027042B1 (en) * 2008-12-09 2011-04-11 주식회사 엔시스 Apparatus for Inspecting Metal Refined With Electrolysis
CN101718828B (en) * 2008-12-24 2012-08-08 四川虹欧显示器件有限公司 Defect confirmation device for flat-panel display and operation method thereof
WO2010138748A2 (en) 2009-05-29 2010-12-02 Arizona Technology Enterprises Display bender and method of testing flexible display
KR101121994B1 (en) * 2010-02-02 2012-03-09 주식회사 고영테크놀러지 Method of generating inspection program
JP5652870B2 (en) * 2010-11-29 2015-01-14 Ｎｓｋテクノロジー株式会社 Foreign object detection device and foreign object detection method
JP6119398B2 (en) * 2013-04-22 2017-04-26 日本電気硝子株式会社 Sheet glass conveying apparatus, sheet glass conveying method, and sheet glass inspection apparatus
CN104730217B (en) * 2015-04-16 2016-09-07 京东方科技集团股份有限公司 The defect distribution display methods of a kind of glass substrate and display device
JP6587211B2 (en) * 2015-12-17 2019-10-09 日本電気硝子株式会社 Manufacturing method of glass plate
CN106526922B (en) * 2017-01-04 2019-12-06 京东方科技集团股份有限公司 Substrate repairing method and device, pressing mechanism and substrate repairing equipment
CN107957634B (en) * 2017-12-06 2020-04-17 苏州精濑光电有限公司 Display panel detection method and device
CN107884417A (en) * 2017-12-11 2018-04-06 苏州精濑光电有限公司 A kind of substrate edges check machine and marginal check method
KR102148167B1 (en) 2019-08-26 2020-08-26 주식회사 윈텍오토메이션 Carbide insert using an orthogonal robot MGT of the high speed inspection equipment and carbide insert top inspection camera milling depth control device for milling
CN113830558A (en) * 2021-09-18 2021-12-24 甘肃光轩高端装备产业有限公司 Glass substrate's transmission device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4138926B2 (en) * 1998-02-13 2008-08-27 株式会社アマダ Work clamp device for plate processing equipment
JP2002014309A (en) * 2000-06-30 2002-01-18 Minolta Co Ltd Film holder, film housing jig and method for manufacturing liquid crystal display element using those
JP2002250701A (en) * 2001-02-26 2002-09-06 Horiba Ltd Flaw inspection device for plane display panel
JP2003029657A (en) * 2001-07-19 2003-01-31 Minolta Co Ltd Production method for display element and film substrate holder
JP2003302346A (en) * 2002-04-12 2003-10-24 Hitachi Electronics Eng Co Ltd Surface inspection device for sheet work

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI447381B (en) * 2008-03-27 2014-08-01 Nippon Electric Glass Co Glass substrate inspection device and glass substrate inspection method

Also Published As

Publication number Publication date
TWI336397B (en) 2011-01-21
KR100582344B1 (en) 2006-05-22
JP2005172782A (en) 2005-06-30
CN100587478C (en) 2010-02-03
JP4729699B2 (en) 2011-07-20
CN1627059A (en) 2005-06-15
KR20050055883A (en) 2005-06-14

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Legal Events

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GD4A Issue of patent certificate for granted invention patent
MK4A Expiration of patent term of an invention patent