TW200605148A - Controller and method to mediate data collection from smart sensors for fab applications - Google Patents

Controller and method to mediate data collection from smart sensors for fab applications

Info

Publication number
TW200605148A
TW200605148A TW094110908A TW94110908A TW200605148A TW 200605148 A TW200605148 A TW 200605148A TW 094110908 A TW094110908 A TW 094110908A TW 94110908 A TW94110908 A TW 94110908A TW 200605148 A TW200605148 A TW 200605148A
Authority
TW
Taiwan
Prior art keywords
controller
data collection
smart sensors
mediate data
fab
Prior art date
Application number
TW094110908A
Other languages
English (en)
Other versions
TWI368930B (en
Inventor
Ami Uzi Lev
Guenter Sifnatsch
Mark Attwood
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of TW200605148A publication Critical patent/TW200605148A/zh
Application granted granted Critical
Publication of TWI368930B publication Critical patent/TWI368930B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32181—Monitor production, assembly apparatus with multiple sensors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37494—Intelligent sensor, data handling incorporated in sensor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
TW094110908A 2004-04-07 2005-04-06 Controller and method to mediate data collection from smart sensors for fab applications TWI368930B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/819,903 US7146237B2 (en) 2004-04-07 2004-04-07 Controller and method to mediate data collection from smart sensors for fab applications

Publications (2)

Publication Number Publication Date
TW200605148A true TW200605148A (en) 2006-02-01
TWI368930B TWI368930B (en) 2012-07-21

Family

ID=35061630

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094110908A TWI368930B (en) 2004-04-07 2005-04-06 Controller and method to mediate data collection from smart sensors for fab applications

Country Status (3)

Country Link
US (2) US7146237B2 (zh)
TW (1) TWI368930B (zh)
WO (1) WO2005101280A2 (zh)

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Also Published As

Publication number Publication date
TWI368930B (en) 2012-07-21
WO2005101280A2 (en) 2005-10-27
WO2005101280A3 (en) 2006-12-28
US20070150235A1 (en) 2007-06-28
US7146237B2 (en) 2006-12-05
US7693687B2 (en) 2010-04-06
US20050228529A1 (en) 2005-10-13

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