TW200600748A - Measuring apparatus of an optical revolving axis error - Google Patents

Measuring apparatus of an optical revolving axis error

Info

Publication number
TW200600748A
TW200600748A TW093119551A TW93119551A TW200600748A TW 200600748 A TW200600748 A TW 200600748A TW 093119551 A TW093119551 A TW 093119551A TW 93119551 A TW93119551 A TW 93119551A TW 200600748 A TW200600748 A TW 200600748A
Authority
TW
Taiwan
Prior art keywords
revolving axis
light
revolving
beam splitter
error
Prior art date
Application number
TW093119551A
Other languages
English (en)
Other versions
TWI247095B (en
Inventor
Wen-Yuh Jywe
Chien-Hong Liu
yi-xin Lin
Lung-Tien Li
Original Assignee
Nat Huwei Inst Of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Huwei Inst Of Technology filed Critical Nat Huwei Inst Of Technology
Priority to TW93119551A priority Critical patent/TWI247095B/zh
Publication of TW200600748A publication Critical patent/TW200600748A/zh
Application granted granted Critical
Publication of TWI247095B publication Critical patent/TWI247095B/zh

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
TW93119551A 2004-06-30 2004-06-30 Optical revolving spindle error measurement device TWI247095B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93119551A TWI247095B (en) 2004-06-30 2004-06-30 Optical revolving spindle error measurement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93119551A TWI247095B (en) 2004-06-30 2004-06-30 Optical revolving spindle error measurement device

Publications (2)

Publication Number Publication Date
TW200600748A true TW200600748A (en) 2006-01-01
TWI247095B TWI247095B (en) 2006-01-11

Family

ID=37399758

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93119551A TWI247095B (en) 2004-06-30 2004-06-30 Optical revolving spindle error measurement device

Country Status (1)

Country Link
TW (1) TWI247095B (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI483804B (zh) * 2012-12-07 2015-05-11 Univ Nat Formosa The detection and processing device of the fixed seat and its working method
CN106249222A (zh) * 2016-07-07 2016-12-21 中国科学院光电研究院 一种飞秒激光跟踪仪光轴几何误差标定装置
TWI770182B (zh) * 2018-05-31 2022-07-11 揚明光學股份有限公司 測量系統及測量方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI398622B (zh) * 2009-06-06 2013-06-11 Univ Nat Formosa The Device and Method of Detecting Angle Error by Laser Interferometer
US9891428B2 (en) 2015-12-07 2018-02-13 Metal Industries Research & Development Centre Optical measurement system, measurement method for errors of rotating platform, and two dimensional sine wave annulus grating

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI483804B (zh) * 2012-12-07 2015-05-11 Univ Nat Formosa The detection and processing device of the fixed seat and its working method
CN106249222A (zh) * 2016-07-07 2016-12-21 中国科学院光电研究院 一种飞秒激光跟踪仪光轴几何误差标定装置
CN106249222B (zh) * 2016-07-07 2019-03-08 中国科学院光电研究院 一种飞秒激光跟踪仪光轴几何误差标定装置
TWI770182B (zh) * 2018-05-31 2022-07-11 揚明光學股份有限公司 測量系統及測量方法

Also Published As

Publication number Publication date
TWI247095B (en) 2006-01-11

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MM4A Annulment or lapse of patent due to non-payment of fees