TW200534459A - Package structure - Google Patents
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- TW200534459A TW200534459A TW93110434A TW93110434A TW200534459A TW 200534459 A TW200534459 A TW 200534459A TW 93110434 A TW93110434 A TW 93110434A TW 93110434 A TW93110434 A TW 93110434A TW 200534459 A TW200534459 A TW 200534459A
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200534459 五、發明說明(1) 【發明所屬之技術領域】 本發明係有關一種在覆晶封裝影像感測器之晶片 £外圍構柴—^堤壤以隔離污染及阻卩雨光線散射。 ' 、 【先前技術】 目前封裝技術的趨勢朝向覆晶(F 1丨p ch i p )封農方 式,此種製程需在晶圓(Wafer)上進行長凸塊(Bu = 製程再於切單後與基板上之電路接點迴銲接合,其所释〜 的封裝體積最小可達晶片尺寸,且晶片能有直接散熱护^ ,故覆晶封裝相當符合目前電子產品體積極小化的需、^性 第1 0圖所示為所知一種影像感測器覆晶式封1。 ,上方的玻璃基板8 0的下表面形成有導電連結電路、、、°構 (conductive interconnection circuit) 8 1 體影像感測器晶粒上設多數的銲墊萨 半導 熱壓或迴焊而與導電連結電路的電‘ 2 ς $塊經 亚於晶粒週圍充填(Underf丨丨丨〕 』开二成電11連接, ,而玻璃基板周邊區域的電路〃 8 3藉以構成氣密 路板表面粘著。此一設計的問題;_ 口植設一錫球做為與電 (1)晶粒週圍充填(Underf 、在=. 入晶粒與玻螭基板間隙, 膠材是藉由毛隙原理渙 或全部覆蓋至晶粒的影 > 备膠材控制不當時易局部 象。 因而產生所感測影像模糊像 (2 )晶粒影像感琪彳區外 π現 第1 1圖所示,佝祐构Η的破璃基板仍可透光 仁被擷取影俊 九,如 像先線T1、丁2部分在日 _粗 第 頁 200534459 五、發明說明(2) 表面反射,而自玻璃基板下表面全反射再投射入影像 感測區^因此影像感測區外圍所感測影像將被干擾。 (3 )當導體影像感測器晶粒與玻璃基板的結合為錫膏迴 銲或鉛、錫凸塊之製程,常以助焊劑(F 1 ux )塗覆於 焊接表面,當迴焊時的高溫助焊劑的溶劑揮發氣即部 分逸入晶粒影像感測區’因而導致像感測區的污染或 氧化,故影像擷取品質直接被影響到。 【發明内容】 本發明之主要目的,在於解決上述的問題而提供一種 將覆晶封裝影像感測器之晶片感測區與銲墊區域間隔開, 以隔離污染源及阻隔光線散射。 為達前述目的,本發明之影像感測器具感測區防護封 裝結構,該影像感測器包括: 一透光基板,該透光基板定義有一上表面及下表面, 至少在透光基板下表面形成有導電連結電路。 一半導體影像感測晶片其上表面電性連接於透光基板 下表面之導電連結電路,並於晶粒週圍充填膠材。 該半導體影像感測晶片之影像感測區外圍定義有一堤 壤’並因而界定該半導體影像感測晶片電性連接點於堤塌 外側。 本發明之上述目的與優點,不難從下述所選用實施例 之詳細說明與附圖中獲得深入了解。 【貫施方式】 請參閱第1 、2圖,圖中所示者為本發明所選用之實200534459 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a chip packaged on a flip chip packaged image sensor. Peripheral structures are used to isolate pollution and prevent rain light scattering. ', [Previous technology] The current packaging technology trend is towards the flip-chip (F 1 丨 p ch ip) encapsulation method. This process requires long bumps on the wafer (Bu = process and then after singulation) Soldering back to the circuit contacts on the substrate, the package volume released by it can reach the minimum chip size, and the chip can have direct heat dissipation protection, so the flip chip package is quite in line with the current miniaturization of electronic products. Figure 10 shows a known image sensor flip-chip package 1. The lower surface of the upper glass substrate 80 is formed with a conductive interconnection circuit 8 and a body image. The sensor chip is provided with a large number of pads, which are semi-thermally conductive or reflowed, and are electrically connected to the conductive circuit. 2 ς $ blocks are filled around the die (Underf 丨 丨 丨) And the circuit 〃 8 3 in the peripheral area of the glass substrate constitutes the adhesion of the surface of the airtight circuit board. The problem of this design; _ a tin ball is planted as a filling with the electrical (1) grain around (Underf, In =. The gap between the crystal and the glass substrate is inserted. The image of the grain or the whole coverage to the crystal grains is not easy to control when preparing the plastic material. Therefore, the blurred image of the sensed image is generated (2) The grain image is outside the area of the image, as shown in Figure 11 below. You Gou's broken glass substrate can still be captured by the light-transmitting kernel. For example, the first line T1 and Ding 2 are in Japan _ Coarse Page 200534459 V. Description of the invention (2) The surface is reflected under the glass substrate. The total reflection of the surface is then projected into the image sensing area ^ Therefore, the image sensed at the periphery of the image sensing area will be disturbed. (3) When the conductor image sensor chip and the glass substrate are combined with solder paste reflow soldering or lead or tin bumps In the block manufacturing process, a flux (F 1 ux) is often applied to the welding surface. When reflowing, the solvent volatile gas of the high-temperature flux is partly escaped into the grain image sensing area, thus causing pollution of the image sensing area. Or oxidation, so the quality of image capture is directly affected. [Summary of the invention] The main purpose of the present invention is to solve the above problems and provide a space between the chip sensing area and the pad area of a flip-chip packaged image sensor. To isolate pollution sources and block light scattering In order to achieve the aforementioned object, the present invention provides a protective packaging structure for a sensing area of an image sensing device. The image sensor includes: a transparent substrate, the transparent substrate defines an upper surface and a lower surface, at least on the lower surface of the transparent substrate A conductive connection circuit is formed. The upper surface of a semiconductor image sensing chip is electrically connected to the conductive connection circuit on the lower surface of the light-transmitting substrate, and a plastic material is filled around the die. The periphery of the image sensing area of the semiconductor image sensing chip A bank is defined, and the electrical connection point of the semiconductor image sensing chip is defined outside the bank. The above-mentioned objects and advantages of the present invention can be easily understood from the detailed description and accompanying drawings of the selected embodiments below. . [Implementation method] Please refer to Figs. 1 and 2, the ones shown in the figures are selected for the present invention.
第6頁 200534459 五、發明說明(3) 施例結構’此僅供說明之用’在專利申請上並不受;此種結 構之限制。 本實施例影像感測器包括: 一透光基板1 ,該透光基板定義有一上表面1 1及下 表面1 2 ,至少在透光基板下表面形成有導電連結電路1 2 1以及一圍成框形之堤壩1 2 2 ,如第3圖所示。 堤壩的製法擇取下列方式之一: (1 )以網印方式塗覆於透光基板下表面預定位置。 (2 )以點膠方式塗覆於透光基板下表面預定位置。 (3 )以射出方式成型於透光基板下表面預定位置。 (4)該堤壩成形方法係以沈積方式成型於透光基板表面 預定位置。 (5 )該堤壩係與透光基板一體射出成型,如第4圖所示 〇 (6 )堤壩成形方法係以例如射出之成型技術預製之獨立 框體,再將堤壩黏著至透光基板表面預定位置,如第 5圖所示。 堤壩材料為選自於U V膠、環氧樹脂、橡膠、塑膠或 其他非導電性材料。Page 6 200534459 V. Description of the invention (3) The structure of the embodiment "This is for illustration only" is not subject to patent applications; such structure is limited. The image sensor of this embodiment includes: a light-transmitting substrate 1, the light-transmitting substrate defines an upper surface 11 and a lower surface 1 2, and at least a conductive connection circuit 1 2 1 is formed on the lower surface of the light-transmitting substrate and a surrounding The frame-shaped dam 1 2 2 is shown in FIG. 3. The method of manufacturing the dam is one of the following methods: (1) Applying a screen printing method to a predetermined position on the lower surface of the light-transmitting substrate. (2) Applying on a predetermined position on the lower surface of the light-transmitting substrate by a dispensing method. (3) It is formed at a predetermined position on the lower surface of the light-transmitting substrate by injection. (4) The dam forming method is formed on the surface of the light-transmitting substrate at a predetermined position by a deposition method. (5) The dam is integrally injection-molded with the light-transmitting substrate, as shown in FIG. 4 (6) The dam-forming method is an independent frame prefabricated by, for example, injection molding technology, and the dam is adhered to the surface of the light-transmitting substrate for a predetermined time. Location, as shown in Figure 5. The dam material is selected from UV glue, epoxy resin, rubber, plastic or other non-conductive materials.
一半導體影像感測晶片2其上表面之銲墊2 1電性連 接於透光基板下表面之導電連結電路,此例以錫球2 2為 電性連接方式之參考,繼而依據堤壩的製法施予固化步驟 ,例如(1 ) 、 ( 2 )製法中堤壩材料選用U V膠,以U V 光曝曬即可迅速固化,最後於晶粒週圍充填(Under f i 1 1A semiconductor image sensing wafer 2 has a pad 2 on its upper surface electrically connected to a conductive connection circuit on the lower surface of a light-transmitting substrate. In this example, a solder ball 22 is used as a reference for the electrical connection method. The pre-curing step, for example, (1), (2) The dam material in the manufacturing method uses UV glue, which can be quickly cured by UV light exposure, and finally filled around the crystal grains (Under fi 1 1
第7頁 200534459 五 明2 脱彳 明 4 發膠 第 如 成 完 器 測 感 像 影 裝 封 晶 覆 示 所 圖 ,堤 壩於 堤2 一 2 有球 義錫 定及 圍 1 外2 ο墊 2銲 區之 測片 感晶 在測 是感 別像 特影 片體 晶導 測半 感該 像定 影界 該而 導 半 該 於 設 為 4 2 壩 堤 將 是 要 主 例 施 實 他 其 明 。發 側本 外 壤 圍 外 · ·ο 一 2之 區式 測方 感9 像下 t/取 之擇 片法 晶製 測的 感壩 像堤 影 體 覆 塗 式 方 印 網 以 測 感 像 影 之 片 晶 測 感 像 影 體 導 半 位 定 預 面 表 圍 外 區 置 第 如 示 所 圖 點 以 圍 外 區 堤 該 膠 壤 覆 塗 式 方 測 感 像 影 之 片 晶 測 感 像 影 體 導 半 置 位 定 預 面 表 第 如 示 所 圖 感 像 影 體 導 半 於 型 成 式 方 積 沈 以 係 法 方 形 成 測示 置 位 定 預 面 表 圍 外 區 測 感 像 影 之 片 所 圖 7 第 如 將 再 體 框 立 獨 之 製 預 術 技 型 成 以 係 法 方 形 成 墙 堤 表 圍 外 區 測 感 像 影 之 片 晶 測 感 像 影 體 導 半 至 著 黏 堤 或 膠 塑 月 橡 Λ 脂 樹 氧 〇 環 示、 所膠 圖V 8 U 第於 如自 ’ 選 置為 位料 定材 預壩 面堤 度 高 之 壞 堤 在 例 實 器 測 ◦感 料像 材影 _c一 二^一一 性種 電兩 導揭 bh 与、一月 他 其 求 要 表光 下透 板於 基觸 光抵 透為 於端 接上 連壩 性堤 電後 片裝 晶封 測在 感得 像使 影, 體h3 導距 半間 為之 少成 至形 ,所 上面 的 圍 外 被 區 測 感 之 ο 片 效晶 功測 護感 防像 佳影 最’ 得計 獲設 以的 藉明 ,發 面本 表過 下透 板 基Page 7 200534459 Wuming 2 Dezhiming 4 Hair spray The photogram of the finished device ’s sensory image is shown in the figure. The embankment is on the embankment 2-2 with ball tin tin and surrounding 1 outside 2 ο pad 2 welding area In the test, the sensing crystal should be like a special film, the body crystal guide, the semi-sensing, the image fixing circle, and the guiding half should be set to 4 2. The dyke will be the main example to implement it. On the side of the outer soil, the area of the square is measured by a 9-square method. The image of the sensing dam is measured by the t / selection method. The dam is covered with a square screen to measure the image. The plate crystal sensor image is positioned halfway in the preset surface. The outer area is set as shown in the figure to surround the outer area. The rubber-coated coated square sensor image is used for the film crystal image sensor. The setting image of the preset surface is shown in the figure as shown in Figure 7. For example, if the prefabrication technique of the body frame is independently formed to form the wall of the wall and the outer area of the bank, the sensor image will be guided to the sticky bank or plastic moon rubber. Oxygen 〇 ring display, the rubber map V 8 U Di Yuru 'was selected as a bit material fixed material pre-dam surface high dyke bad dyke in the real device measurement ◦ sensor material image material shadow_c 一二 ^ 一一Two types of electrical conductivity revealed bh and, in January he asked for it It is necessary to pass through the plate under the surface and touch the light to penetrate. After the termination is connected to the dam dyke, the chip is mounted and tested. It feels like a shadow, and the body h3 lead is half as small as possible. Sensing the outer area of the film
第8頁 200534459Page 8 200534459
堤壤所隔離,而該 壩外側,故當後續 劑揮發氣均被堤壩 膠材時也被堤壩所 的潔淨。 半導體影像感測晶片 例如錫球的迴焊製程 所阻擋,當然包括充 阻擋逸入的膠材,故 之銲墊被界定於堤 所產生的助焊劑溶 填(U n d e r f i 1 1 ) 能有效保持感測區 另一方面,如第9圖所示,當堤壩選用黑色材料或不 反射光材料,被擷取影像光線L1、L2穿透過玻璃基板後投 射在基板晶粒影像感測區外圍,並在晶粒表面反射而受堤 壩阻隔’因此影像感測區外圍所感測影像將不會被干擾, 同樣地’被擷取影像光線L3穿透過玻璃基板後投射在^場 ’故當堤壩材料為不反射光材料,光線L 3即被抑制而不备 反射至影像感測區。 曰The embankment is isolated, and the outside of the dam is cleaned when the subsequent agent volatile gases are all covered by the dam rubber. Semiconductor image sensing wafers, such as solder balls, are blocked by the reflow process, of course, including the adhesive material that blocks the escape. Therefore, the solder pads are defined by the flux filling (U nderfi 1 1) generated by the bank to effectively maintain the sensor. On the other hand, as shown in Figure 9, when the dam is made of black or non-reflective material, the captured image light L1 and L2 pass through the glass substrate and are projected on the periphery of the substrate grain image sensing area. The surface of the crystal grain is reflected and blocked by the dam '. Therefore, the image sensed at the periphery of the image sensing area will not be disturbed. Similarly, the captured image light L3 passes through the glass substrate and is projected in the field. Therefore, when the dam material is non-reflective The light material, light L 3 is suppressed and not reflected to the image sensing area. Say
第9頁 200534459 圖式簡單說明 【圖式簡 第1 第2 第3 第4 第5 第6 第7 第8 第9 第1 第1 【圖號說 (習 玻璃基板 錫球8 2 (本 單說明】 圖係本發明 圖係第1圖 圖係本發明 圖係本發明 器結構圖 圖係本發明 位置示意 圖係本發明 感測區外 圖係本發明 面預定值 圖係本發明 片表面預 圖係本發明 不意圖。 0圖係習知 1圖係習知 不意圖。 明】 用部分)8 0 發明部分) 復晶封裝影像感測器之結構圖。 覆晶封裝影像感測器之結構俯視圖。 堤壩設於透光基板下表面示意圖。 堤壩與透光基板一體成型之影像感測 〇 堤壩成型後黏著至透光基板表面預定 圖。 堤壩設於半導體影像感測晶片之影像 圍示意圖。 半導體影像 置不意圖。 堤壩成型後黏… 定位置示意圖。至半導體影像感測 设日日封裝影像残 α測為之影像擷取光路 覆晶封裝影像感測哭 覆晶封裝影彳 ⑽之、、、。構圖。 农W像感测 π之衫像擷取光路 表 曰曰 導電連 結電路8 充填膠材8 3Page 9 200534459 Brief description of the diagram [Schematic diagram 1st 2nd 3rd 4th 5th 6th 7th 8th 9th 1st 1st [illustration (Xi glass substrate solder ball 8 2 (description of this order The drawing is the first drawing of the present invention. The drawing is the structural diagram of the present invention. The schematic diagram of the position of the present invention is the outside map of the sensing area of the present invention. The predetermined value of the present invention is the surface pre-drawing of the present invention. The present invention is not intended. 0 is a picture of the prior art. 1 is a picture of the inadvertent. The use part) 8 0 invention part) the structural diagram of the image sensor with a polycrystalline package. Top view of the structure of a flip-chip packaged image sensor. The dam is provided on the lower surface of the transparent substrate. Image sensing of the dyke and the transparent substrate integrally formed 〇 After the dyke is formed, it is adhered to the predetermined image on the surface of the transparent substrate. Schematic image of the dam set on the semiconductor image sensing chip. Semiconductor images are not intended. After the dam is formed ... To Semiconductor Image Sensing Set the image capture light path of the daily package image detection. Composition. Nong W image sensing π shirt image capture light path table said conductive connection circuit 8 filling plastic 8 3
200534459 圖式簡單說明 透光基板1 下表面1 2 堤壩1 2 2 、2 4 銲墊2 1 充填膠材2 3 2 1—I 片 2 日0a 1測 路感 1 電像 ο ^~^結影2 2 面連體2區 表電導球測 上導半錫感200534459 Schematic description of the bottom surface of the light-transmitting substrate 1 1 2 dam 1 2 2 2 2 pads 2 1 filling material 2 3 2 1—I piece 2 day 0a 1 road sense 1 electric image ο ^ ~ ^ 2 2 surface conjoined 2 zone surface conductivity ball to measure the upper half of the sense of tin
第11頁Page 11
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI469331B (en) * | 2011-02-18 | 2015-01-11 | Sony Corp | Solid-state imaging apparatus and method of manufacturing the same |
TWI716124B (en) * | 2019-09-27 | 2021-01-11 | 力成科技股份有限公司 | Semiconductor package structure and manufacturing method thereof |
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2004
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI469331B (en) * | 2011-02-18 | 2015-01-11 | Sony Corp | Solid-state imaging apparatus and method of manufacturing the same |
US10529762B2 (en) | 2011-02-18 | 2020-01-07 | Sony Corporation | Solid-state imaging apparatus and method of manufacturing the same |
TWI716124B (en) * | 2019-09-27 | 2021-01-11 | 力成科技股份有限公司 | Semiconductor package structure and manufacturing method thereof |
US11522000B2 (en) | 2019-09-27 | 2022-12-06 | Powertech Technology Inc. | Semiconductor package structure and manufacturing method thereof |
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