TW200517320A - Hermetically sealed container for large-sized precision sheet (semi-)product - Google Patents

Hermetically sealed container for large-sized precision sheet (semi-)product

Info

Publication number
TW200517320A
TW200517320A TW093134138A TW93134138A TW200517320A TW 200517320 A TW200517320 A TW 200517320A TW 093134138 A TW093134138 A TW 093134138A TW 93134138 A TW93134138 A TW 93134138A TW 200517320 A TW200517320 A TW 200517320A
Authority
TW
Taiwan
Prior art keywords
semi
product
hermetically sealed
sealed container
precision sheet
Prior art date
Application number
TW093134138A
Other languages
Chinese (zh)
Other versions
TWI334399B (en
Inventor
Mikio Fukui
Shiro Arai
Takayuki Abe
Original Assignee
Net Plastic Inc
Kureha Chemical Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Net Plastic Inc, Kureha Chemical Ind Co Ltd filed Critical Net Plastic Inc
Publication of TW200517320A publication Critical patent/TW200517320A/en
Application granted granted Critical
Publication of TWI334399B publication Critical patent/TWI334399B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D11/00—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of plastics material
    • B65D11/18—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of plastics material collapsible, i.e. with walls hinged together or detachably connected
    • B65D11/1866—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of plastics material collapsible, i.e. with walls hinged together or detachably connected with detachable components
    • B65D11/188—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of plastics material collapsible, i.e. with walls hinged together or detachably connected with detachable components the container being formed by two mating halves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • B65D25/10—Devices to locate articles in containers
    • B65D25/107—Grooves, ribs, or the like, situated on opposed walls and between which the articles are located
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/025—Containers made of sheet-like material and having a shape to accommodate contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • B65D81/07—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents using resilient suspension means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • B65D81/107—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents using blocks of shock-absorbing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67396—Closed carriers characterised by the presence of antistatic elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packages (AREA)

Abstract

A relatively light resinous hermetically sealed container for a large-sized precision sheet (semi-)product, such as a photomask, is provided so as to accommodate, support and transport the precision sheet (semi-)product safely and in an airtight manner. The hermetically sealed container includes a main body and a lid member respectively having peripheral flange portions abutted to each other so as to accommodate a precision sheet (semi-)product therein. Each of the main body and the lid member is formed as a vacuum or air-pressure formed thermoplastic resin sheet equipped with a reinforcing rib.
TW093134138A 2003-11-18 2004-11-09 Hermetically sealed container for large-sized precision sheet (semi-)product TWI334399B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003388139 2003-11-18

Publications (2)

Publication Number Publication Date
TW200517320A true TW200517320A (en) 2005-06-01
TWI334399B TWI334399B (en) 2010-12-11

Family

ID=34567467

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093134138A TWI334399B (en) 2003-11-18 2004-11-09 Hermetically sealed container for large-sized precision sheet (semi-)product

Country Status (4)

Country Link
US (1) US20050103668A1 (en)
KR (1) KR101142298B1 (en)
CN (1) CN100450892C (en)
TW (1) TWI334399B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20060566A1 (en) * 2006-03-27 2007-09-28 Gi Erre Plastica S R L BOTTLE PROTECTION AND TRANSPORT CONTAINER
TWI303618B (en) * 2006-08-10 2008-12-01 Gudeng Prec Industral Co Ltd Metal photomask box
WO2008134174A1 (en) * 2007-04-25 2008-11-06 Ithink Packaging Solutions Reduced material container
US20110005950A1 (en) * 2009-07-09 2011-01-13 Jerry Russell Freed Transport Case For Large Plasma/LCD/LED Flat Screen Displays And Other Like Items
CN202642409U (en) * 2011-12-01 2013-01-02 优博企业有限公司 Falling-off-resistant pallet protection end cap
KR101169324B1 (en) * 2012-03-13 2012-08-13 (주)루맷 Optical Film Receiving Tray and Transfer Vehicle For Receiving Tray
CN102730326B (en) * 2012-07-04 2015-04-15 深圳市华星光电技术有限公司 Packing case and manufacturing method of packing case
JP5328966B1 (en) * 2012-10-04 2013-10-30 株式会社フジクラ Optical fiber fusion splicing system
TWI664118B (en) * 2017-11-27 2019-07-01 住華科技股份有限公司 Carrying device
CN108372974A (en) * 2018-04-10 2018-08-07 李政远 A kind of instrument and meter placement fixed equipment
EP3867701A4 (en) * 2018-10-17 2022-09-07 Sage Electrochromics, Inc. Systems, methods, and components associated with electrochromic preforms
CN109178587A (en) * 2018-10-24 2019-01-11 南京德荣包装制品有限公司 A kind of hardware tool plastic packing box and its production technology

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4557379A (en) * 1983-12-16 1985-12-10 Lane Container Company Circuit board package and method of manufacture
US4511038A (en) * 1984-01-30 1985-04-16 Ekc Technology, Inc. Container for masks and pellicles
JP3157664B2 (en) * 1993-11-22 2001-04-16 信越化学工業株式会社 Pellicle storage container
US5425453A (en) * 1993-12-10 1995-06-20 Agfa-Gevaert N.V. Light tight storage container
JPH1029616A (en) * 1996-07-15 1998-02-03 Saidetsuku Kk Container for transferring object
JPH10133359A (en) * 1996-11-05 1998-05-22 Shin Etsu Polymer Co Ltd Pellicle housing vessel
JP3218338B2 (en) * 1996-11-12 2001-10-15 有恒樹脂株式会社 Lid fixing band device for storage case of substrate such as photomask
JPH11145272A (en) * 1997-11-11 1999-05-28 Innotech Corp Clean box
JP2000173887A (en) * 1998-12-02 2000-06-23 Asahi Kasei Denshi Kk Pellicle housing case
US6216873B1 (en) * 1999-03-19 2001-04-17 Asyst Technologies, Inc. SMIF container including a reticle support structure
JP4458310B2 (en) * 1999-09-28 2010-04-28 旭化成イーマテリアルズ株式会社 Pellicle storage container and foreign object inspection method thereof
JP2001240179A (en) * 2000-02-29 2001-09-04 Shin Etsu Polymer Co Ltd Precision substrate storing container
US20020089656A1 (en) * 2001-01-09 2002-07-11 Cheng Guo Containers for lithography mask and method of use
US6837374B2 (en) * 2001-07-15 2005-01-04 Entegris, Inc. 300MM single stackable film frame carrier
JP2003307831A (en) * 2002-04-16 2003-10-31 Asahi Glass Co Ltd Container for synthetic quartz glass plate
US20030213716A1 (en) * 2002-05-17 2003-11-20 Brian Cleaver Wafer shipping and storage container

Also Published As

Publication number Publication date
CN1618712A (en) 2005-05-25
KR20050048489A (en) 2005-05-24
KR101142298B1 (en) 2012-05-07
US20050103668A1 (en) 2005-05-19
TWI334399B (en) 2010-12-11
CN100450892C (en) 2009-01-14

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees