CN1618712A - Hermetically sealed container for large-sized precision sheet (semi-) product - Google Patents
Hermetically sealed container for large-sized precision sheet (semi-) product Download PDFInfo
- Publication number
- CN1618712A CN1618712A CNA2004100904712A CN200410090471A CN1618712A CN 1618712 A CN1618712 A CN 1618712A CN A2004100904712 A CNA2004100904712 A CN A2004100904712A CN 200410090471 A CN200410090471 A CN 200410090471A CN 1618712 A CN1618712 A CN 1618712A
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- Prior art keywords
- main body
- piece
- partly
- finished product
- holding element
- Prior art date
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Links
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- 238000007493 shaping process Methods 0.000 claims description 12
- 238000005728 strengthening Methods 0.000 claims description 8
- 230000003014 reinforcing effect Effects 0.000 abstract description 2
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67353—Closed carriers specially adapted for a single substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D11/00—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of plastics material
- B65D11/18—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of plastics material collapsible, i.e. with walls hinged together or detachably connected
- B65D11/1866—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of plastics material collapsible, i.e. with walls hinged together or detachably connected with detachable components
- B65D11/188—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of plastics material collapsible, i.e. with walls hinged together or detachably connected with detachable components the container being formed by two mating halves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/02—Internal fittings
- B65D25/10—Devices to locate articles in containers
- B65D25/107—Grooves, ribs, or the like, situated on opposed walls and between which the articles are located
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
- B65D81/025—Containers made of sheet-like material and having a shape to accommodate contents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
- B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
- B65D81/07—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents using resilient suspension means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
- B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
- B65D81/107—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents using blocks of shock-absorbing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67376—Closed carriers characterised by sealing arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67396—Closed carriers characterised by the presence of antistatic elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packages (AREA)
Abstract
A relatively light resinous hermetically sealed container for a large-sized precision sheet (semi-)product, such as a photomask, is provided so as to accommodate, support and transport the precision sheet (semi-)product safely and in an airtight manner. The hermetically sealed container includes a main body and a lid member respectively having peripheral flange portions abutted to each other so as to accommodate a precision sheet (semi-)product therein. Each of the main body and the lid member is formed as a vacuum or air-pressure formed thermoplastic resin sheet equipped with a reinforcing rib.
Description
Technical field
The present invention relates to a kind of transportation one precision sheet (partly) finished product/goods one that are applicable to is the half-blank before finishing of a precision sheet finished product or this finished product; the various demonstration products etc. one that for example comprise a photomask (having graticule) or one (glass) substrate, the semiconductor wafer Related product as the pellicle of the protective film of this photomask, comprise a Liquid Crystal Display (LCD) (LCD) are the gas-tight container of a large-sized precision sheet (partly) finished product especially; at this, Yi Bian large scale refers to that it is at least 500mm at least.
Background technology
One as mentioned above precision sheet (partly) finished product usually all is that machinery is frangible in many cases, and a precise part formed thereon or element are more frangible in many cases.In addition, consider the character relevant with its purposes of this precision sheet (partly) finished product, it abhors impurity very much, and especially therefore 0.3 μ m or the littler impurity that adheres to must pay attention to the air-tightness that this precision sheet (partly) finished product is used container especially.Especially, this tabular (partly) finished product usually by aircraft from Japan outlet to abroad, and owing to there is a difference of pressure between the inner space (particularly cargo hold) of aircraft and the barometric pressure, minute impurities is easy to introduce in this container.In addition, owing to should avoid adhering to of minute impurities, usually only the simple glass goods are adopted and (for example form a container body by a foamed resin, Japanese patent application (JP-A) 2001-31165) or with a foamed resin vibration-absorptive material be arranged in the container, because this foamed resin is because wearing and tearing are easy to generate minute impurities.In addition, this precision sheet (partly) finished product especially one shows that the size (area) that product or is used for the photomask of this demonstration product increases inevitably, so that satisfy demand that a large scale and large tracts of land show and so that show (exposure) when allowing a plurality of target products for example to show product with respect to the photomask product.Correspondingly, some new problems have appearred.Promptly, being accompanied by size increases, weight as precision sheet (partly) finished product of content itself increases to 5-10kg, and in order to support a stress that this weight avoids being produced by a distortion of vessel simultaneously in this precision sheet (partly) finished product, this container also needs to have a sizable intensity.But, if this container is made up of a metallic material according to traditional approach, the weight of this container can increase to 40kg or bigger, and the total weight of itself and content can increase to 50kg or bigger, simultaneously also because the increase of its outer profile size becomes quite difficult so utilize manpower to transport them.In addition, must should be contained in the container by (partly) finished product, contact to prevent another interior parts of its at least one surface (being formed with precise part on it) and this container by supporting one precision sheet (partly) finished product.
Summary of the invention
Therefore, a main purpose of the present invention provides a kind of weight gently and in it can hold and support a for example photomask of a large-sized precision sheet (partly) finished product safely, is somebody's turn to do the gas-tight container that (partly) finished product applies inappropriate stress and can not give.
According to the research that we are carried out for this purpose of realization, have been found that and quite effectively adopt one to have in a main body and a cover piece and this main body and the cover piece each be one to be equipped with the gas-tight container of two isolating constructions of vacuum of suitable stiffening device or barometric pressure shaping thermoplastic resin plate-like piece.More particularly, according to the present invention, a kind of large-sized precision sheet (partly) finished product gas-tight container is provided, it comprises having the peripheral flange portion that adjoins each other respectively to hold a main body and a cover piece of a precision sheet (partly) finished product therein, it is characterized in that each is made up of a vacuum or a barometric pressure shaping thermoplastic resin plate-like piece that is equipped with a strengthening rib in this main body and the cover piece.
According to the present invention, constituting this precision sheet (partly) finished product is respectively one to have the vacuum or the barometric pressure shaping thermoplastic resin plate-like piece of uniform thickness with the main body of gas-tight container and cover piece, being different from one has a uneven gauge and especially is easy to have the injection-molded item of a local thick portion, therefore no matter whether its overall weight is light, in this main body and the cover piece each shows a uniform strength, no matter simultaneously whether its area is big, each in this main body and the cover piece and the strengthening rib that an one is shaped are cooperated mutually and have been prevented that their from twisting or deviation.This main body and cover piece have the peripheral flange portion that adjoins each other respectively, thereby have strengthened the air-tightness of this container.
Description of drawings
Fig. 1 is the birds-eye view of a main body of an embodiment of horizontal vessel of the present invention;
Fig. 2 is the cutaway view of cutting open along A-A line among Fig. 1;
Fig. 3 is near the part sectional view of a holding element of container shown in Figure 1;
Fig. 4 is a part sectional view, and the gap (or play) between the edge that is positioned at holding element and (partly) finished product is shown;
Fig. 5 is the transparent view that the combination of a main body of vertical vessel according to an embodiment of the invention and a cover piece is shown;
Fig. 6 A and 6B are respectively the birds-eye view and the lateral plans of a main body of container shown in Figure 5;
Fig. 7 A is used to illustrate in the container shown in Figure 5 a schematic elevational view that is used to keep the structure of one (partly) finished product, and Fig. 7 B and 7C are respectively the cutaway views of cutting open along the B-B line among Fig. 7 A and C-C line;
Fig. 8 illustrates according to the present invention one transparent view that is used to hold the combination of the main body of vertical vessel embodiment of a plurality of (partly) finished product plate-like piece and a cover piece; And
Fig. 9 A is the transparent view that the taking-up state of one (partly) the finished product plate-like piece carrier in the container shown in Figure 8 is shown, and Fig. 9 B and Fig. 9 C are respectively the enlarged drawings of position B and position C among Fig. 9 A.
The specific embodiment
The present invention will be described in more detail with reference to accompanying drawing simultaneously below in conjunction with the preferred embodiments of the present invention.
(horizontal type structure)
Fig. 1 is horizontal large-sized precision sheet (partly) finished product with the birds-eye view of a main body 10 of gas-tight container (that is, a precision sheet (partly) finished product is contained in the class formation in the position that the adjacent surface between the circumferential flange portion of common and a main body and a cover piece parallels); Fig. 2 cuts open and cutaway view when the direction of arrow is seen along A-A line among Fig. 1, and Fig. 3 is near the part sectional view peripheral, and the assembled state of main body 10 and one cover piece 20 is shown.
With reference to Fig. 1 and 2, the container body 10 of this embodiment is to be formed on the substrate of being made by synthetic quartz and to be the basic horizontal rectangle (more particularly for one, size with the about 800mm of the about 700mm * T of L (vertically) (laterally)) the have an appointment degree of depth of face profile size * about 50mm of 880mm * about 930mm of the horizontal vessel main body that Liquid Crystal Display (LCD) (LCD) uses with photomask (below be sometimes referred to as " (partly) finished product plate-like piece "), this vessel.That this container body is normally made by about 5mm of a thickness and the thermoplastic resin plate-like piece that is shaped under vacuum or barometric pressure and be provided with four at its place, bottom and be about 580mm and be configured to the shaft-like strengthening rib of cross 2, this strengthening rib 2 has the arc section of the about 30mm of a radius of curvature, the about 10mm of height.
Along four limits of a circumference of a vacuum that forms main body 10 or barometric pressure shaping plate-like piece 1 (following abbreviate as sometimes " main body 1 "), form the flange portion 3 of a wide about 100mm, to surround a zone 4 that is used to hold a precision sheet (partly) finished product.Flange portion 3 is formed on one than the position that holds the high about 50mm in bottom in the zone 4.Near housing region 4 peripheries Si Bianchu, every limit is formed with the holding element 5 of 3 (partly) finished product plate-like pieces.Each holding element 5 comprises that one has one and highly is slightly less than the plate-like piece of thickness of (partly) finished product plate-like piece A (Fig. 3) in abutting connection with side wall portion 5b towards the have a down dip plate-like piece support 5a and on slopes of about 5 degree of mediad.Before profiled body 1 under vacuum or the barometric pressure, holding element 5 is arranged in the mould as plug-in unit, and is bound integratedly and remain on regularly in the shaping resin plate-like piece when vacuum or barometric pressure shaping.Especially, keep the part of the shaping resin plate-like piece of this holding element 5 to be formed with an entablature (apron) 6 regularly, impose on the weight of holding element 5 with supporting (partly) finished product plate-like piece A at intermediate altitude from the about 30-40mm in bottom.On peripheral flange portion 3 and along its whole peripheral lengths, be formed with a groove 7, to admit an elasticity O shape ring that is used to strengthen container air-tightness.In addition, place, four bights in peripheral flange portion 3, be formed with the lug boss 8a and the recess 8b that are used for a cover piece position alignment that is provided with respect to main body 10, with allow by with the 8b of alignment recesses portion of the corresponding position that is formed on this cover piece and the lug boss 8a incompatible realization position alignment that matches.
At the outer rim place of peripheral flange portion 3, be formed with downward usually fin 3a to show that one adds powerful, (among this embodiment, every limit has two positions) locates to be formed with otch 3b at its position.Peripheral flange portion 3 also is provided with a plurality of fixing threaded hole 3c.
One is used for cover piece 20 (Fig. 3 only illustrates its part) with main body 10 combination has one with main body 10 basic symmetries and be different from the structure of this main body, in this embodiment, it is different from this main body part and only is not to be provided with O shape ring groove 7 and it and comprises (partly) the finished product plate-like piece holding element 15 with a ramp 15a longer than the ramp 5a of (partly) finished product plate-like piece holding element 5 of this main body, has omitted plate-like piece simultaneously in abutting connection with side wall portion.
Fig. 3 illustrates the running condition of precision sheet (partly) finished product of being made up of main body 10 and lid 20 with container.One (partly) finished product plate-like piece A remains between holding element 5 and 15 by its edge and is fixed, and by under pressure, utilizing flange 3 and 13 to clamp the air-tightness that O shape ring 9 is guaranteed this container.Clamp lock by between flange 3 and 13, being provided with, be used to clamp O shape and encircle squeese pressure between 9 the flange 3 and 13 by ratchet padlock (ratchet buckle lock) being set in peripheral incision or fixing, provide to put between holding element 5 and 15 and put on by utilizing fixing threaded hole 3c to carry out screw element.
By the way be, the edge of (partly) finished product plate-like piece A need be against the sidewall 5b of holding element 5, as shown in Figure 3, but can not keep when it is apart from sidewall 5b certain interval should (partly) finished product plate-like piece A, as shown in Figure 4.Especially, when the distance between the sidewall 5b that the relative holding element on being arranged on this main body relative edge is 5 couples was set to slightly the width of being longer than (partly) finished product plate-like piece A, common state was that certain interval (or play) appears at least one relative edge as shown in Figure 4.In addition, in this embodiment, the plate-like piece that is positioned at the holding element 5 on the main body side is set to thickness a little less than (partly) finished product plate-like piece A in abutting connection with the height of sidewall, and the length that is positioned at the ramp 15a of the holding element 15 on the cover piece side is set to the length greater than the ramp 5a that is positioned at the holding element 5 on the main body side.As a result, even when fixing holding element 15, some lateral deviations occur, can prevent that also (left) horizontal part contact of holding element 15 bottom surfaces from damaging the end face of (partly) finished product plate-like piece A, as shown in Figure 4.If the difference in length of this ramp is set greatlyyer, has just increased and avoided a safety by installing and locating trouble that deviation causes, but crossed insufficient maintenance (fixing) that big-difference also is easy to cause (partly) finished product plate-like piece A.By the way be undoubtedly, can have a plate-like piece with one and be arranged on the cover piece side and in abutting connection with the holding element of sidewall and be arranged on the main body side with a holding element with a longer ramp.
(material)
The material of each parts of supplemental instruction.The vacuum or the barometric pressure goods 1 at the formation of main body 10 position except that (partly) finished product plate-like piece holding element 5 can comprise any thermoplastic resin, but preferably include an antistatic resin with on one (partly) finished product plate-like piece of avoiding the minute impurities electrostatic adherence and holding in it.Known example with this antistatic resin of permanent antistatic comprises a kind ofly having following composition and its composition is applicable to antistatic resin of the present invention: (a) hydrophilic polymer: 3-100 part weight, (b) thermoplastic resin: 0-97 part weight (providing 100 parts of weight altogether), and (c) polyvalent metal compounds: 0.001-0.5 part weight (WO-A 03/033590) with (a).But in the situation that does not require an excessive optical property rank (preventing muddiness (haze)), do not need to add (c) polyvalent metal compounds.Especially preferred is the hydrophilic polymer that adopts (a) to be made up of graft copolymer, it comprises rubber backbone poly-mer, an anionic surfactant (JP-A 59-2462) and the rigidity thermoplastic resin with an alkylene oxide group for example a polyacrylonitrile resin, a polystyrene resin or a plexiglass, so that a rigidity to be provided, thereby be not easy to apply a twisting stress to this (partly) finished product plate-like piece.By the way be, in a specific example of the foregoing description, the vacuum forming goods 1 of the thick antistatic resin plate-like piece of a 5mm of employing are formed and are shown the flexural rigidity of a 2GPa by the above-mentioned hydrophilic polymer of 10 weight % and the polyacrylonitrile resin of 90 weight % (by " BAREX210 " of BP Amoco manufacturing).
(partly) finished product plate-like piece holding element 5 also can comprise as mentioned above an antistatic resin, even if but in this case, the integral part that also is not suitable for holding element 5 is formed this vacuum or barometric pressure molded article (promptly, have a basic thickness that equates) because this structure is difficult to the concentrated stress that supporting comprises the weight of (partly) finished product plate-like piece.Therefore, in this case, preferably holding element 5 is formed independent antistatic resin spare, and this holding element is placed in the mould as plug-in unit, be shaped with vacuum or the barometric pressure of finishing an antistatic resin plate-like piece, thereby make the resin plate-like piece of formation that holding element 5 is bound integratedly and fixedly remains in it.If by adopting retaining thread spare rather than plug-in unit to be shaped this holding element is captiveed joint with this main body or cover piece, it is incomplete that the vapor seal that is obtained is easy to become.In addition, if utilize this holding element of an adhesive, (partly) finished product plate-like piece A is easy to be made dirty by this adhesives.Therefore, the plug-in unit shaping is preferred as mentioned above.Because have certain interval (or play) between the edge of the sidewall 5b of a holding element 5 and (partly) finished product plate-like piece A, so holding element 5 especially some slips can occur between the edge of one support 5a and (partly) finished product plate-like piece A.Therefore, also preferably adopt one have property slidably or self lubricity than barras, it comprises for example for example polyethylene or polyacetal resin of polytetrafluoroethylene, an olefin resin of a fluorine resin, and does not adopt the sort of resin that constitutes vacuum or barometric pressure molded article 1.In a specific example, adopt the holding element 5 of making and having a L shaped substantially cross section by polytetrafluoroethylene.
O shape ring 9 (Fig. 3) preferably are made up of an elastic resin, for example contain viton or silaatic, and especially preferably have the elastic resin of antistatic behaviour.This O shape ring is not limited to as shown a solid O shape ring (for example, diameter 8mm), also preferably is made up of to increase deformation stroke hollow O shape ring (for example, external diameter 8mm, internal diameter 4-6mm).
(remodeling)
LCD photomask horizontal vessel as a preferred embodiment below has been described.But, can retrofit to said vesse embodiment according to multiple mode.Some examples of this remodeling below will be described.
For example, in the above-described embodiments, adopt 3 on every limit and 12 holding elements 5 altogether, but there is no doubt that, can increase or reduce this quantity as required.But preferably, at least two and therefore at least 8 holding elements are altogether adopted in every limit.In addition, in the above-described embodiments, lug boss 8a and recess 8b with 2 on every limit and altogether 4 mode be arranged in the peripheral flange portion of this main body and in the peripheral flange portion of this cover piece near the position in four bights so that position alignment between this main body and the cover piece, but these alignment devices also can be arranged on the midway location on four limits, and can increase or reduce (each preferably has at least two this aligning parts as long as in this main body and the cover piece) as required.Preferably, this main body and cover piece are provided with the lug boss 8a and the recess 8b of equal amount equally, be used for the be shaped mould of this main body and cover piece of vacuum or barometric pressure common structure is provided to give as far as possible, but structurally feasible is that one of this main body and cover piece have lug boss 8b and another has recess 8b.Can carry out similar remodeling to O connected in star 7.More particularly, if will make O shape ring groove 7 more shallow and a symmetrical O shape annular groove is set also for the peripheral flange portion of this cover piece, can make via vacuum or barometric pressure and be shaped formed position in that fully symmetry is (promptly in shape, except being arranged on the holding element in the moulding as plug-in unit and not considering its shape), like this even can adopt a public mould be shaped this main body and cover piece.
The cross sectional shape of strengthening rib 2, alignment tab 8a and recess 8b can be a rectangle, rather than semicircle or semisphere.
(vertical structure)
A precision sheet of the present invention (partly) finished product also can be by a vertical vessel (that is a class formation that, holds a precision sheet (partly) finished product in it usually with a position perpendicular to the adjacent surface of the peripheral flange portion of this main body and cover piece) formation with gas-tight container.As an embodiment of this vertical vessel, with reference to Fig. 5 (transparent view of the combination of a main body and a cover piece is shown); The lateral plan of this container body) and Fig. 7 A-7C (Fig. 7 A: front elevation Fig. 6 A and Fig. 6 B (Fig. 6 A: the birds-eye view of this container body and Fig. 6 B:, Fig. 7 B and Fig. 7 C: lateral plan is used for explanation keeps one (partly) finished product plate-like piece in this container mode) illustrate that one makes the container of various glass substrate for display.
More particularly, as shown in Figure 5, this vertical vessel comprises the main body 30 of an opening Zhou Changyue 2200mm and high about 350mm and the cover piece 40 of the about 180mm of a height, and this main body 30 and cover piece 40 are made of an antistatic resin plate-like piece (comprising the hydrophilic polymer of 10 weight % and the polyacrylonitrile-radical resin of 90 weight %) as thick about 5mm of vacuum or barometric pressure molded article 21 and 31 respectively and are respectively arranged with sidewall reinforcing rib 22 and 32.The peripheral flange portion 23 and 33 that this main body and cover piece have wide about 30mm and adjoin each other, the peripheral flange portion 23 of main body 30 have an O shape articulating and receive groove 27.In the inside of this main body, a pair of its centre is provided with and is used to insert and keeps the holding element 25 of the groove 25a of a plate-like piece to insert along guide recess part 26, so that their top is extended upward beyond the peripheral flange portion 23.As shown in Figure 6A,, be formed with strengthening rib 22a, and be provided with and respectively have a holding element 26a who is used to keep the groove 26aa of holding element 25 bottoms in the bottom of this main body.When using this container, one (partly) finished product plate-like piece A2 inserts and retaining groove 25a insertion along the plate-like piece of holding element 25, and holding element 25 is conversely along the bottom that guide recess part 26 inserts and utilizes the retaining groove 26aa of holding element 26a to keep this holding element 25, and utilizes one to be arranged on the bottom of this main body and to have the bottom that the plate-like piece bottom holding element 25b of a plate-like piece retaining groove 25bb keeps (partly) finished product plate-like piece A2.Also utilize one to be arranged on the bottom of cover piece 40 and to have the top that the holding element 35 of a retaining groove 35b keeps (partly) finished product plate-like piece A2, (partly) finished product plate-like piece A2 is contained in the container of being made up of main body 30 and cover piece 40 thus.The peripheral flange portion of the peripheral flange portion 2 of main body 30 and cover piece 40 in abutting connection with before, one O shape ring (not shown) is located at admits in the groove 27, and is arranged between peripheral flange portion 23 and 33 and acts on the clamping lock of this peripheral flange portion or a abutment pressure that the ratchet padlock applies is guaranteed the vapor seal of this container by utilization.
Vacuum or barometric pressure molded article 21 and 31 and holding element 25,25b, 26a, the materials similar of 35 grades is in the material referring to figs. 1 through 4 described vacuum or barometric pressure molded article 1 and holding element 5.
(other remodeling)
More than explanation mainly is intended to be suitable for holding the container embodiments of (partly) finished product plate-like piece.But gas-tight container of the present invention also can be used for holding a plurality of (partly) finished product plate-like piece.Fig. 8 illustrates this gas-tight container that is used to hold a plurality of precision sheets (partly) finished product is upwards removed the embodiment under the state at this cover piece perspective schematic view.With reference to Fig. 8, this vertical vessel comprises and forms vacuum or barometric pressure shaping resin goods 51 and 61 and have respectively and be used to change the nozzle 52 of gas in this container and 62 a main body 50 and a cover piece 60 respectively.The inside of main body 50 is provided with one and is used for admitting and carrying for example carrier 53 of 10 (partly) finished product plate-like pieces.Fig. 9 A is this (partly) finished product plate-like piece carrier 53 at its enlarged drawing under the taking-up state in this main body, and Fig. 9 B and Fig. 9 C are respectively the enlarged drawings of position B and C among Fig. 9.More particularly, (partly) finished product plate-like piece carrier 53 comprise a pair of respectively be provided be used for admitting and supporting for example the resin plate-like piece 531, of the guide recess 532 of 10 (partly) finished product plate-like pieces and vertical parallel be used for moving the handle 533 of this carrier, and support resin board shape spare 531 with being used for fixing and guarantee the framework 534 in existence one gap between them.As a result, 10 (partly) finished product plate-like pieces insert along guide recess 532 (Fig. 9 B) with regard to for example allowing, and utilize the bottom 532c (Fig. 9 C) of groove 532 to support their bottom, and the carrier 53 that can be under this loading condition moves into and shift out main body 50.Utilize the bottom and the top of these a plurality of (partly) finished product plate-like pieces of protection such as silaatic, fluorine resin, impose on their impact when transporting to alleviate.In addition, in the bottom of main body 50, can be formed with groove admitting the bottom of resin plate-like piece 531, thereby when holding carrier 53, prevent the lateral impact etc. of this carrier.If wish, cover piece 60 also can be provided with the groove of the top 531b that is used to admit resin plate-like piece 531, to strengthen the fixing of this carrier.Be respectively that main body 50 and lid 60 is provided with and the nozzle 52 and 62 that is used to change gas in this container is suitable for for example changing one and is used for for example inner atmosphere that should avoid the container of the relevant plate-shaped products of EL (electron luminescence device) that humidity and impurity adheres to of (partly) finished product plate-like piece.If wish, this nozzle also can be connected to just like referring to figs. 1 through on the 4 described horizontal vessels.
As mentioned above, according to the present invention, provide a kind of can be safely and hold, support and carry a for example photomask of a large-sized precision sheet (partly) finished product with an air tight manner, and can not apply the light resinite container of an inappropriate stress to it.
Claims (8)
1. a large-sized precision sheet (partly) finished product gas-tight container, it comprises having the peripheral flange portion that adjoins each other respectively to hold a main body and a cover piece of a precision sheet (partly) finished product therein, wherein, each in described main body and the described cover piece is made up of a vacuum or a barometric pressure shaping thermoplastic resin plate-like piece that is equipped with a strengthening rib.
2. container according to claim 1 is characterized in that, each the described thermoplastic resin plate-like piece that forms described main body and described cover piece is made up of an antistatic resin.
3. container according to claim 1 is characterized in that, at least one the peripheral flange portion in the described peripheral flange portion of described main body and described cover piece is provided with one and is used to admit the groove of a vapor seal with O shape ring.
4. container according to claim 1 is characterized in that, a plurality of holding elements that are used to keep described precision sheet (partly) finished product are located at a plurality of positions near the described peripheral flange portion of described main body and described cover piece respectively.
5. container according to claim 4, it is characterized in that, be arranged in each holding element on described main body and described cover piece one comprise a ramp and highly be slightly less than described precision sheet (partly) finished product thickness in abutting connection with sidewall, and be arranged in each holding element on another of described main body and described cover piece and have a ramp than the described slope minister who is arranged in the described holding element on described main body and described cover piece described one.
6. container according to claim 4 is characterized in that, utilizes described vacuum or barometric pressure shaping thermoplastic resin plate-like piece to bind described holding element integratedly, and keeps described holding element with this.
7. container according to claim 6 is characterized in that, described holding element by one than described thermoplastic resin plate-like piece soft and slidably property form than its strong thermoplastic resin.
8. container according to claim 4 is characterized in that, described vacuum or barometric pressure shaping thermoplastic resin plate-like piece are provided with the entablature near described holding element, thinks that the weight of supporting described precision sheet (partly) finished product provides a fastening strength.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP388139/2003 | 2003-11-18 | ||
| JP2003388139 | 2003-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1618712A true CN1618712A (en) | 2005-05-25 |
| CN100450892C CN100450892C (en) | 2009-01-14 |
Family
ID=34567467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100904712A Expired - Fee Related CN100450892C (en) | 2003-11-18 | 2004-11-18 | Hermetically sealed container for large-sized precision sheet (semi-) product |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20050103668A1 (en) |
| KR (1) | KR101142298B1 (en) |
| CN (1) | CN100450892C (en) |
| TW (1) | TWI334399B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014005344A1 (en) * | 2012-07-04 | 2014-01-09 | 深圳市华星光电技术有限公司 | Packing box and manufacturing method therefor |
| CN104159831A (en) * | 2012-03-13 | 2014-11-19 | 路玛特株式会社 | Optical film compartment and cart for transporting said compartment |
| CN108249033A (en) * | 2017-11-27 | 2018-07-06 | 住华科技股份有限公司 | Bearing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITMI20060566A1 (en) * | 2006-03-27 | 2007-09-28 | Gi Erre Plastica S R L | BOTTLE PROTECTION AND TRANSPORT CONTAINER |
| TWI303618B (en) * | 2006-08-10 | 2008-12-01 | Gudeng Prec Industral Co Ltd | Metal photomask box |
| US20080264939A1 (en) * | 2007-04-25 | 2008-10-30 | Bray Christopher P | Reduced material container |
| US20110005950A1 (en) * | 2009-07-09 | 2011-01-13 | Jerry Russell Freed | Transport Case For Large Plasma/LCD/LED Flat Screen Displays And Other Like Items |
| CN202642409U (en) * | 2011-12-01 | 2013-01-02 | 优博企业有限公司 | Falling-off-resistant pallet protection end cap |
| JP5328966B1 (en) * | 2012-10-04 | 2013-10-30 | 株式会社フジクラ | Optical fiber fusion splicing system |
| CN108372974A (en) * | 2018-04-10 | 2018-08-07 | 李政远 | A kind of instrument and meter placement fixed equipment |
| US20200122919A1 (en) * | 2018-10-17 | 2020-04-23 | Sage Electrochromics, Inc. | Systems, methods, and components associated with electrochromic preforms |
| CN109178587A (en) * | 2018-10-24 | 2019-01-11 | 南京德荣包装制品有限公司 | A kind of hardware tool plastic packing box and its production technology |
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| US4557379A (en) * | 1983-12-16 | 1985-12-10 | Lane Container Company | Circuit board package and method of manufacture |
| US4511038A (en) * | 1984-01-30 | 1985-04-16 | Ekc Technology, Inc. | Container for masks and pellicles |
| JP3157664B2 (en) * | 1993-11-22 | 2001-04-16 | 信越化学工業株式会社 | Pellicle storage container |
| US5425453A (en) * | 1993-12-10 | 1995-06-20 | Agfa-Gevaert N.V. | Light tight storage container |
| JPH1029616A (en) * | 1996-07-15 | 1998-02-03 | Saidetsuku Kk | Container for transferring object |
| JPH10133359A (en) * | 1996-11-05 | 1998-05-22 | Shin Etsu Polymer Co Ltd | Pellicle housing vessel |
| JP3218338B2 (en) * | 1996-11-12 | 2001-10-15 | 有恒樹脂株式会社 | Lid fixing band device for storage case of substrate such as photomask |
| JPH11145272A (en) * | 1997-11-11 | 1999-05-28 | Innotech Corp | Clean box |
| JP2000173887A (en) * | 1998-12-02 | 2000-06-23 | Asahi Kasei Denshi Kk | Pellicle housing case |
| US6216873B1 (en) * | 1999-03-19 | 2001-04-17 | Asyst Technologies, Inc. | SMIF container including a reticle support structure |
| JP4458310B2 (en) * | 1999-09-28 | 2010-04-28 | 旭化成イーマテリアルズ株式会社 | Pellicle storage container and foreign object inspection method thereof |
| JP2001240179A (en) * | 2000-02-29 | 2001-09-04 | Shin Etsu Polymer Co Ltd | Precision substrate storing container |
| US20020089656A1 (en) * | 2001-01-09 | 2002-07-11 | Cheng Guo | Containers for lithography mask and method of use |
| US6837374B2 (en) * | 2001-07-15 | 2005-01-04 | Entegris, Inc. | 300MM single stackable film frame carrier |
| JP2003307831A (en) * | 2002-04-16 | 2003-10-31 | Asahi Glass Co Ltd | Container for synthetic quartz glass plate |
| US20030213716A1 (en) * | 2002-05-17 | 2003-11-20 | Brian Cleaver | Wafer shipping and storage container |
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2004
- 2004-11-09 TW TW093134138A patent/TWI334399B/en not_active IP Right Cessation
- 2004-11-17 KR KR1020040093777A patent/KR101142298B1/en active IP Right Grant
- 2004-11-17 US US10/989,470 patent/US20050103668A1/en not_active Abandoned
- 2004-11-18 CN CNB2004100904712A patent/CN100450892C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104159831A (en) * | 2012-03-13 | 2014-11-19 | 路玛特株式会社 | Optical film compartment and cart for transporting said compartment |
| CN104159831B (en) * | 2012-03-13 | 2016-02-17 | 路玛特株式会社 | Optical thin film receiver and waggon thereof |
| WO2014005344A1 (en) * | 2012-07-04 | 2014-01-09 | 深圳市华星光电技术有限公司 | Packing box and manufacturing method therefor |
| CN108249033A (en) * | 2017-11-27 | 2018-07-06 | 住华科技股份有限公司 | Bearing device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101142298B1 (en) | 2012-05-07 |
| US20050103668A1 (en) | 2005-05-19 |
| TWI334399B (en) | 2010-12-11 |
| KR20050048489A (en) | 2005-05-24 |
| CN100450892C (en) | 2009-01-14 |
| TW200517320A (en) | 2005-06-01 |
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Free format text: FORMER OWNER: KUREHA CORP. |
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| C41 | Transfer of patent application or patent right or utility model | ||
| C56 | Change in the name or address of the patentee |
Owner name: MESH PLASTIC CO., LTD. Free format text: FORMER NAME: NET MOULDING CO., LTD. |
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| CP01 | Change in the name or title of a patent holder |
Address after: Kyoto Japan Co-patentee after: KUREHA Corp. Patentee after: Mesh molding Co. Address before: Kyoto Japan Co-patentee before: Kureha Corp. Patentee before: NET MOULDING Co.,Ltd. |
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Effective date of registration: 20110322 Address after: Kyoto Japan Patentee after: Mesh molding Co. Address before: Kyoto Japan Co-patentee before: Kureha Corp. Patentee before: Mesh molding Co. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
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