TW200514993A - Inspecting apparatus, inspecting method of LCD array substrate and manufacturing method of LCD - Google Patents

Inspecting apparatus, inspecting method of LCD array substrate and manufacturing method of LCD

Info

Publication number
TW200514993A
TW200514993A TW093132271A TW93132271A TW200514993A TW 200514993 A TW200514993 A TW 200514993A TW 093132271 A TW093132271 A TW 093132271A TW 93132271 A TW93132271 A TW 93132271A TW 200514993 A TW200514993 A TW 200514993A
Authority
TW
Taiwan
Prior art keywords
inspecting
array substrate
lcd
array
manufacturing
Prior art date
Application number
TW093132271A
Other languages
Chinese (zh)
Other versions
TWI260418B (en
Inventor
Shuichi Nishira
Hiroshi Hayashi
Original Assignee
Chi Mei Optoelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chi Mei Optoelectronics Corp filed Critical Chi Mei Optoelectronics Corp
Publication of TW200514993A publication Critical patent/TW200514993A/en
Application granted granted Critical
Publication of TWI260418B publication Critical patent/TWI260418B/en

Links

Landscapes

  • Liquid Crystal (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

This invention is mainly for preventing the abnormal situation that defects discovered by array inspection cannot be found out by LCD cell inspection or LCD panel inspection. In addition, accurate inspecting apparatus and inspecting method in array-manufacturing stage are provided. The inspecting apparatus comprises: a platform 14 for accommodating the array substrate 12, an inspecting device for checking electrical property of the array substrate 12, an light shade 16 for covering the array substrate 12 from being irradiated by ambient light and an blowing device 18 for blowing dry air into the array substrate 12.
TW93132271A 2003-10-30 2004-10-21 Inspecting apparatus, inspecting method of LCD array substrate and manufacturing method of LCD TWI260418B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003370570A JP4507559B2 (en) 2003-10-30 2003-10-30 Inspection apparatus and inspection method for array substrate of liquid crystal display

Publications (2)

Publication Number Publication Date
TW200514993A true TW200514993A (en) 2005-05-01
TWI260418B TWI260418B (en) 2006-08-21

Family

ID=34647542

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93132271A TWI260418B (en) 2003-10-30 2004-10-21 Inspecting apparatus, inspecting method of LCD array substrate and manufacturing method of LCD

Country Status (3)

Country Link
JP (1) JP4507559B2 (en)
CN (1) CN100380186C (en)
TW (1) TWI260418B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010032435A (en) * 2008-07-30 2010-02-12 Produce:Kk Insulation measuring device and method
TW201930847A (en) * 2017-12-29 2019-08-01 由田新技股份有限公司 Panel pressing optical inspection machine
CN114355166B (en) * 2022-01-10 2024-06-04 深圳市斯迈得半导体有限公司 LED packaging chip detection device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5321352A (en) * 1991-08-01 1994-06-14 Tokyo Electron Yamanashi Limited Probe apparatus and method of alignment for the same
US5444385A (en) * 1991-09-10 1995-08-22 Photon Dynamics, Inc. Testing apparatus for liquid crystal display substrates
US5691764A (en) * 1994-08-05 1997-11-25 Tokyo Electron Limited Apparatus for examining target objects such as LCD panels
KR100193653B1 (en) * 1995-11-20 1999-06-15 김영환 Stagger TFT-LCD with Accumulation Capacitor and Manufacturing Method Thereof
JPH10232257A (en) * 1997-02-20 1998-09-02 Micronics Japan Co Ltd Inspection equipment for display panel substrate
JP4132363B2 (en) * 1999-03-09 2008-08-13 三菱電機株式会社 Inspection equipment for electrical property inspection
JP2001007164A (en) * 1999-06-18 2001-01-12 Micronics Japan Co Ltd Prober
JP2002098727A (en) * 2000-09-25 2002-04-05 Oht Inc Inspection unit and manufacturing method of substrate
JP4059312B2 (en) * 2001-10-26 2008-03-12 インターナショナル・ビジネス・マシーンズ・コーポレーション Array substrate inspection apparatus and inspection method therefor
JP2003185713A (en) * 2001-12-21 2003-07-03 Nikon Corp Device for inspecting semiconductor
JP2003215191A (en) * 2002-01-24 2003-07-30 Toshiba Corp Method of testing active matrix substrate and device therefor

Also Published As

Publication number Publication date
TWI260418B (en) 2006-08-21
CN100380186C (en) 2008-04-09
JP2005134237A (en) 2005-05-26
CN1612003A (en) 2005-05-04
JP4507559B2 (en) 2010-07-21

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees