TW200514993A - Inspecting apparatus, inspecting method of LCD array substrate and manufacturing method of LCD - Google Patents
Inspecting apparatus, inspecting method of LCD array substrate and manufacturing method of LCDInfo
- Publication number
- TW200514993A TW200514993A TW093132271A TW93132271A TW200514993A TW 200514993 A TW200514993 A TW 200514993A TW 093132271 A TW093132271 A TW 093132271A TW 93132271 A TW93132271 A TW 93132271A TW 200514993 A TW200514993 A TW 200514993A
- Authority
- TW
- Taiwan
- Prior art keywords
- inspecting
- array substrate
- lcd
- array
- manufacturing
- Prior art date
Links
Landscapes
- Liquid Crystal (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
This invention is mainly for preventing the abnormal situation that defects discovered by array inspection cannot be found out by LCD cell inspection or LCD panel inspection. In addition, accurate inspecting apparatus and inspecting method in array-manufacturing stage are provided. The inspecting apparatus comprises: a platform 14 for accommodating the array substrate 12, an inspecting device for checking electrical property of the array substrate 12, an light shade 16 for covering the array substrate 12 from being irradiated by ambient light and an blowing device 18 for blowing dry air into the array substrate 12.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003370570A JP4507559B2 (en) | 2003-10-30 | 2003-10-30 | Inspection apparatus and inspection method for array substrate of liquid crystal display |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200514993A true TW200514993A (en) | 2005-05-01 |
TWI260418B TWI260418B (en) | 2006-08-21 |
Family
ID=34647542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93132271A TWI260418B (en) | 2003-10-30 | 2004-10-21 | Inspecting apparatus, inspecting method of LCD array substrate and manufacturing method of LCD |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4507559B2 (en) |
CN (1) | CN100380186C (en) |
TW (1) | TWI260418B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010032435A (en) * | 2008-07-30 | 2010-02-12 | Produce:Kk | Insulation measuring device and method |
TW201930847A (en) * | 2017-12-29 | 2019-08-01 | 由田新技股份有限公司 | Panel pressing optical inspection machine |
CN114355166B (en) * | 2022-01-10 | 2024-06-04 | 深圳市斯迈得半导体有限公司 | LED packaging chip detection device |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5321352A (en) * | 1991-08-01 | 1994-06-14 | Tokyo Electron Yamanashi Limited | Probe apparatus and method of alignment for the same |
US5444385A (en) * | 1991-09-10 | 1995-08-22 | Photon Dynamics, Inc. | Testing apparatus for liquid crystal display substrates |
US5691764A (en) * | 1994-08-05 | 1997-11-25 | Tokyo Electron Limited | Apparatus for examining target objects such as LCD panels |
KR100193653B1 (en) * | 1995-11-20 | 1999-06-15 | 김영환 | Stagger TFT-LCD with Accumulation Capacitor and Manufacturing Method Thereof |
JPH10232257A (en) * | 1997-02-20 | 1998-09-02 | Micronics Japan Co Ltd | Inspection equipment for display panel substrate |
JP4132363B2 (en) * | 1999-03-09 | 2008-08-13 | 三菱電機株式会社 | Inspection equipment for electrical property inspection |
JP2001007164A (en) * | 1999-06-18 | 2001-01-12 | Micronics Japan Co Ltd | Prober |
JP2002098727A (en) * | 2000-09-25 | 2002-04-05 | Oht Inc | Inspection unit and manufacturing method of substrate |
JP4059312B2 (en) * | 2001-10-26 | 2008-03-12 | インターナショナル・ビジネス・マシーンズ・コーポレーション | Array substrate inspection apparatus and inspection method therefor |
JP2003185713A (en) * | 2001-12-21 | 2003-07-03 | Nikon Corp | Device for inspecting semiconductor |
JP2003215191A (en) * | 2002-01-24 | 2003-07-30 | Toshiba Corp | Method of testing active matrix substrate and device therefor |
-
2003
- 2003-10-30 JP JP2003370570A patent/JP4507559B2/en not_active Expired - Fee Related
-
2004
- 2004-10-21 TW TW93132271A patent/TWI260418B/en not_active IP Right Cessation
- 2004-11-01 CN CNB2004100898285A patent/CN100380186C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TWI260418B (en) | 2006-08-21 |
CN100380186C (en) | 2008-04-09 |
JP2005134237A (en) | 2005-05-26 |
CN1612003A (en) | 2005-05-04 |
JP4507559B2 (en) | 2010-07-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |