JP4132363B2 - Inspection equipment for electrical property inspection - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an inspection instrument for electrical property inspection. More specifically, the present invention relates to an inspection instrument for electrical property inspection that can handle a large inspection object.
[0002]
[Prior art]
Conventionally, in order to inspect the electrical characteristics of an inspection target such as an array substrate for a liquid crystal display device, the electrical characteristics are inspected using an inspection instrument having a plurality of contacts.
[0003]
A conventional inspection method is shown in FIG. In the conventional inspection method, an opening 14 larger than the size of the panel P to be inspected is provided in a large metal plate 13 (about 1000 mm × 1000 mm), and an assembly structure of a plurality of contacts 11 around the opening 14. The contact group 12 is arranged, and all the terminals 11 are simultaneously brought into contact with the terminals of the panel to supply electrical signals, thereby electrically driving the panel and inspecting the electrical characteristics. .
[0004]
The size of the panel that can be inspected is determined by the dimension of the opening 14. The dimension of the opening 14 is determined by the dimension of the remaining area excluding the attachment area of the contact group 12 from the dimension of the fixed plate 13.
[0005]
In a normal inspection, since the panel is inspected while being fixed to a fixing means (not shown) such as a chuck top, the dimension of the opening 14 needs to be sufficiently larger than the external dimension of the panel. There is. The dimension of the fixing means is determined by the dimension of the object to be measured. When a plurality of panels are manufactured on the object to be measured, the dimension of the fixing means is usually larger than the panel size. That is, the dimensional relationship is panel size <measurement object (glass substrate) <fixing means (chuck top size).
[0006]
Further, in the conventional inspection method, when changing the model to be inspected, it is necessary to change the entire inspection instrument including the surface plate.
[0007]
Further, in the case of a model in which a terminal on the horizontal side (hereinafter simply referred to as H side) and a terminal on the vertical direction (hereinafter simply referred to as V side) of the panel to be inspected are close to each other, the H side terminal and V side Since the contact group 12 on the H side and the contact group 12 on the V side in FIG. 6 interfere with each other at the corner portion of the terminal, the contact 11 may not be in contact with the terminal to be inspected, and inspection may not be possible. It was an obstacle to the design of the panel.
[0008]
[Problems to be solved by the invention]
In the conventional inspection method as described above, when the model to be inspected is changed, it is necessary to change each plate and to move the plate that is a heavy object. Further, the size of the panel that can be inspected is determined by the dimension of the opening 14 of the fixed plate 13. Therefore, when inspecting a large panel, the opening cannot be made sufficiently wide. Moreover, even if the size of the panel is the same, even in the case of models with different resolutions, it is necessary to newly create the metal plate 13.
[0009]
In addition, since the opening 14 is formed to have a size that covers the entire panel, foreign matter such as dust may adhere to the display area of the panel to be inspected during inspection. In addition, there is a case where the environment light in the examination room enters the display area of the panel and an accurate inspection cannot be performed. As a preventive measure, conventionally, it is necessary to add a light shielding cover which is a separate part.
[0010]
Furthermore, when the light shielding cover is attached, there is a possibility that the light shielding cover may be adversely affected by contacting the alignment mechanism or the contact group.
[0011]
In addition, there is a problem that unnecessary metal material generated when the opening 14 is formed in the surface plate 13 with a size covering the entire panel becomes industrial waste.
[0012]
The present invention has been made to solve such a problem, and an object of the present invention is to provide an inspection instrument for electrical property inspection that can be applied to an inspection object such as a large liquid crystal panel.
[0013]
[Means for Solving the Problems]
The electrical property inspection inspection instrument of the present invention (hereinafter simply referred to as an inspection instrument) can easily cope with an inspection object such as a large liquid crystal panel by downsizing the inspection instrument or blocking the contact group.
[0014]
That is, the inspection instrument according to claim 1 of the present invention enables the miniaturization of the inspection instrument, and inspects the electrical characteristics by simultaneously contacting the contacts with all terminals to be inspected for electrical characteristics. An inspection instrument for
A fixed plate and a collective structure of the plurality of contacts, and comprising at least one contact group fixed to the fixed plate,
An opening is partially formed at a position near the terminal to be inspected on the surface plate,
The width of the opening is set to about 10 to 30% with respect to the width of the inspection object,
At least a part of the contact is arranged inside the opening.
[0015]
It is preferable that at least a part of the contact group is located in a region facing the inspection object.
[0017]
Moreover, when prescribed | regulated by a dimension, it is preferable that the width | variety of the said opening part is prescribed | regulated to the dimension of about 3-15 cm.
[0018]
The inspection instrument according to claim 4 of the present invention is to allow the blocking of the contact group, the electrical characteristics electrical characteristics by contacting simultaneously contact all terminals of the test object to be examined An inspection instrument for inspecting,
A fixed plate and an assembly structure of a plurality of the contacts, and a plurality of contact groups fixed to the fixed plate,
An opening is partially formed at a position near the terminal to be inspected,
The width of the opening is set to about 10 to 30% with respect to the width of the inspection object,
At least a portion of the contact is disposed within the opening;
The plurality of contact groups are connected to a block fixing member to form at least one contact block;
The contact block is detachably fixed to the fixed plate so as to be along a direction in which the contact block is aligned with the terminal to be inspected.
[0019]
Furthermore, the inspection device for electrical property inspection according to claim 5 of the present invention enables downsizing of the inspection device, and contacts are simultaneously brought into contact with all terminals to be inspected for electrical properties. An inspection instrument for inspecting electrical characteristics,
A fixed plate and an assembly structure of a plurality of the contacts, and a plurality of contact groups fixed to the fixed plate,
An opening is partially formed at a position near the terminal to be inspected,
The width of the opening is set to about 10 to 30% with respect to the width of the inspection object,
At least a portion of the contact is disposed within the opening;
At least one of the contact groups near the corner to be inspected is fixed to a bridge-shaped fixing member protruding from the surface of the surface plate, thereby interfering with other adjacent contact groups. Is prevented.
[0020]
Furthermore, the inspection instrument according to claim 6 of the present invention is capable of both reducing the size of the inspection instrument and blocking the contact group by combining the inventions of claims 1, 4 and 5 . , An inspection instrument for inspecting electrical characteristics by simultaneously contacting a contact with all terminals to be inspected for electrical characteristics,
A fixed plate and an assembly structure of a plurality of the contacts, and a plurality of contact groups fixed to the fixed plate,
An opening is partially formed at a position near the terminal to be inspected,
The width of the opening is set to about 10 to 30% with respect to the width of the inspection object,
At least a portion of the contact is disposed within the opening;
The plurality of contact groups are connected to a block fixing member to form at least one contact block;
The contact block is detachably fixed to the plate so as to be along the direction in which the terminals to be inspected are aligned,
At least one of the contact groups near the corner to be inspected is fixed to a bridge-shaped fixing member protruding from the surface of the surface plate, thereby interfering with other adjacent contact groups. Is prevented.
[0021]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the inspection instrument of the present invention will be described in more detail with reference to the drawings. FIG. 1 is an explanatory plan view showing an embodiment of an inspection instrument according to claim 1 of the present invention, and FIG. 2 is an explanatory plan view showing an embodiment of an inspection instrument according to claim 4 of the present invention. FIG. 4 is an explanatory plan view showing an embodiment of an inspection instrument according to claim 5 of the present invention, FIG. 4 is an enlarged perspective view of a main part for explaining the positional relationship between the contact group and the bridge-like fixing member of FIG. FIG. 5 is an explanatory plan view showing an embodiment of an inspection instrument according to claim 6 of the present invention.
[0022]
As an embodiment of the inspection instrument according to claim 1, the inspection instrument shown in FIG. 1 is a collective structure of a metal plate 3 and a plurality of contacts 1, and a plurality of fixtures fixed to the plate 3. And a contact group 2. The plurality of contact groups 2 are arranged in a straight line on the inspection object arranged on the lower side of the fixed plate 3, specifically on the H side and the V side of the array substrate panel P of the liquid crystal display device. Yes. An opening 4 is partially formed at a position near the terminal (not shown) of the panel P on the metal plate 3. The tip of the contact 1 extends inside the opening 4.
[0023]
In the present embodiment, since the opening 4 is significantly smaller than the conventional one, it is possible to secure a sufficient area where the contact group 2 can be attached. In addition, there is almost no decrease in the accuracy of the plate due to the decrease in the rigidity of the metal plate 3.
[0024]
In the inspection instrument shown in FIG. 1, since the surface plate 3 is also present on the display area of the panel P, at least a part of the contact group 2 is attached in the area facing the panel P as shown in FIG. be able to. Therefore, the whole inspection instrument can be reduced in size compared with the conventional inspection instrument (refer FIG. 6). Therefore, even if a fixed plate having the same outer dimensions as a conventional fixed plate is used, a larger panel can be inspected. In addition, since the weight of the inspection instrument is reduced as the inspection instrument is reduced in size, the inspection instrument can be easily replaced.
[0025]
The shape of the opening 4 may be a slit shape as shown in FIG. 1, or only a portion corresponding to each contact group 2 is opened, and a large number of small rectangular openings (or the number of contact groups). It may be formed.
[0026]
Since the size of the opening 4 is significantly smaller than that of a conventional inspection instrument, unnecessary materials such as chips generated when the opening 4 is formed on the surface plate 3 can be reduced.
[0027]
The metal plate 3 is made of a metal material such as iron or stainless steel, and the contact 1 is made of a metal material such as tungsten, an alloy of tungsten and copper, or a surface of the alloy material gold-plated. ing.
[0028]
The size of the opening 4 only needs to be such that the contact 1 can contact the terminal of the panel P, and the width W2 of the opening 4 is about 10 to 30% of the width W1 of the panel P. Is preferably set. The dimensional relationship between the widths W1 and W2 is applied to both the H side and the V side.
[0029]
Further, the dimensions of the opening W2 on the H side and the V side need only be such that the contact tip or contact group can contact the terminal of the object to be measured, and therefore may be substantially constant regardless of the object to be measured. Conceivable. Therefore, the panel size W1 varies greatly, but the opening W2 varies little. If the dimension of W2 is prescribed, about 3 cm to 15 cm is preferable.
[0030]
In addition, the inspection instrument shown in FIG. 1 does not require a light-shielding cover because the metal plate 3 covers the display area of the panel P.
[0031]
Next, as an embodiment of the inspection instrument according to claim 4 , the inspection instrument shown in FIG. 2 comprises a contact block 2 by connecting a plurality of contact groups 2 with a fixing member 5 for the block. However, the configuration is different from the inspection instrument shown in FIG. 1, and the configuration is the same in other respects.
[0032]
That is, the inspection instrument shown in FIG. 2 is composed of a metal surface plate 3 and a collective structure of a plurality of contacts 1 and a plurality of contact groups 2 fixed to the surface plate 3. The plurality of contact groups 2 are arranged in a straight line on the H side and the V side of the panel P arranged on the lower side of the surface plate 3, respectively. An opening 4 is partially formed at a position near the terminal (not shown) of the panel P on the metal plate 3. The tip of the contact 1 extends inside the opening 4.
[0033]
The contact group 2 is detachably fixed to the fixed plate 3 on the H side and the V side by the block fixing member 5, thereby constituting a detachable contact block. Therefore, without changing the heavy metal plate 3, it is possible to easily respond to changes in size or resolution specifications by increasing the size of the panel P (or downsizing) simply by changing the contact block. can do.
[0034]
The block fixing member 5 can be detachably fixed at a predetermined position with high precision to the fixed plate 3 by screwing or a cantilever.
[0035]
Next, as an embodiment of the inspection instrument according to claim 5 , the inspection instrument shown in FIGS. 3 to 4 is an assembly structure of a metal plate 3 and a plurality of contacts 1. The bridge-shaped fixing member 6 is composed of at least one contact group 2 fixed, and at least one of the contact groups 2 near the corner portion of the panel P is projected from the surface of the fixed plate 3. By being fixed in a suspended state, interference with another adjacent contact group 2 is prevented.
[0036]
Therefore, since the contact group 2 near the corner portion of the panel P can be disposed close to the panel P, the inspection instrument can be downsized.
[0037]
In the invention described in claim 5 , the size of the opening 8 is not particularly limited. As shown in FIG. 3, the H-side contact group is formed by the bridge-like fixing member 6 even if the size is the same as the conventional size. 2 can all be arranged above the opening 8, and the inspection instrument can be further miniaturized.
[0038]
Next, as an embodiment of the inspection instrument according to claim 6 , the inspection instrument shown in FIG. 5 is an embodiment combining the inventions of claims 1, 4 and 5 , and the terminal of the panel An L-shaped opening 4 partially formed in the vicinity, a plurality of V-side contact groups 2, and a block fixing member 5 detachably fixed to the metal surface plate 3, and a plurality of H-side contacts A bridge-like fixing member 6 is provided to suspend and arrange the child group 2. Therefore, since it has all the effects of the inspection instrument shown in FIGS. 1-4, it can be used suitably for the inspection of a large panel.
[0039]
As described above, in the present embodiment, the array substrate panel of the liquid crystal display device has been described as an example of an inspection target for electrical characteristics, but other inspection targets, for example, a wafer for a semiconductor device or a semiconductor device are used. The inspection instrument of the present invention can also be applied to a mounted board (for example, various computer boards and memory cards).
[0040]
【The invention's effect】
According to claims 1 to 6, wherein aspect of the present invention, since the partially formed opening of Teiita near inspected terminal, examining the large inspected in relatively small test instrument It becomes possible.
[0041]
In addition, entry of foreign matter or light into the surface to be inspected (panel display area or the like) can be prevented without providing a separate part cover or the like. Further, since the opening is significantly smaller than the conventional one, unnecessary material generated when the opening is processed is greatly reduced.
[0042]
According to invention of Claim 4 or 6 of this invention, it is not necessary to change a fixed plate by fixing a some contact group by the fixing member for blocks, and it is not necessary to change a fixed plate, and a contact block is suitably used. By changing, it becomes possible to inspect a large inspection object. Further, even when only the specification (resolution, etc.) is changed for the inspection object of the same size, it can be dealt with by changing the contact block. Therefore, the work of moving the plate that is relatively heavy is not necessary.
[0043]
Furthermore, in the past, it was necessary to manufacture an inspection instrument corresponding to each inspection object. However, since the inspection apparatus of the present invention can correspond to a plurality of inspection objects, the manufacturing cost of the inspection instrument is greatly reduced. be able to.
[0044]
According to the invention described in claim 5 or 6 of the present invention, the contact group near the corner portion to be inspected is fixed to the bridge-shaped fixing member, and interference with other adjacent contact groups is prevented. It becomes possible to inspect a large inspection object with a relatively small inspection instrument.
[0045]
In addition, since the interference between the contact groups is prevented, the inspection accuracy is improved, and at the same time, the design freedom of the inspection object is improved.
[Brief description of the drawings]
FIG. 1 is an explanatory plan view showing an embodiment of an inspection instrument according to claim 1 of the present invention.
FIG. 2 is an explanatory plan view showing an embodiment of an inspection instrument according to claim 4 of the present invention. FIG. 3 is an explanatory plan view showing an embodiment of an inspection instrument according to claim 5 of the present invention. It is.
4 is an enlarged perspective view of a main part for explaining a positional relationship between a contact group and a bridge-like fixing member in FIG. 3;
FIG. 5 is an explanatory plan view showing an embodiment of an inspection instrument according to claim 6 of the present invention.
FIG. 6 is a plan view of a conventional inspection instrument.
[Explanation of symbols]
1 Contact 2 Contact Group 3 Metal Plate 4 Opening

Claims (6)

An inspection instrument for inspecting electrical characteristics by simultaneously contacting a contact with all terminals to be inspected for electrical characteristics,
A fixed plate and a collective structure of the plurality of contacts, and comprising at least one contact group fixed to the fixed plate,
An opening is partially formed at a position near the terminal to be inspected on the surface plate,
The width of the opening is set to about 10 to 30% with respect to the width of the inspection object,
An inspection instrument for electrical characteristic inspection, wherein at least a part of the contact is disposed inside the opening.   The inspection instrument for electrical property inspection according to claim 1, wherein at least a part of the contact group is located in a region facing the inspection object. The inspection instrument for electrical property inspection according to claim 1 or 2 , wherein a width of the opening is defined to be about 3 to 15 cm. An inspection instrument for inspecting electrical characteristics by simultaneously contacting a contact with all terminals to be inspected for electrical characteristics,
A fixed plate and an assembly structure of a plurality of the contacts, and a plurality of contact groups fixed to the fixed plate,
An opening is partially formed at a position near the terminal to be inspected,
The width of the opening is set to about 10 to 30% with respect to the width of the inspection object,
At least a portion of the contact is disposed within the opening;
The plurality of contact groups are connected to a block fixing member to form at least one contact block;
An inspection instrument for electrical property inspection, wherein the contact block is detachably fixed to the fixed plate along a direction in which the contact block is aligned with the terminal to be inspected. An inspection instrument for inspecting electrical characteristics by simultaneously contacting a contact with all terminals to be inspected for electrical characteristics,
A fixed plate and an assembly structure of a plurality of the contacts, and a plurality of contact groups fixed to the fixed plate,
An opening is partially formed at a position near the terminal to be inspected,
The width of the opening is set to about 10 to 30% with respect to the width of the inspection object,
At least a portion of the contact is disposed within the opening;
At least one of the contact groups near the corner to be inspected is fixed to a bridge-shaped fixing member protruding from the surface of the surface plate, thereby interfering with other adjacent contact groups. Inspection equipment for electrical property inspection that is prevented. An inspection instrument for inspecting electrical characteristics by simultaneously contacting a contact with all terminals to be inspected for electrical characteristics,
A fixed plate and an assembly structure of a plurality of the contacts, and a plurality of contact groups fixed to the fixed plate,
An opening is partially formed at a position near the terminal to be inspected,
The width of the opening is set to about 10 to 30% with respect to the width of the inspection object,
At least a portion of the contact is disposed within the opening;
The plurality of contact groups are connected to a block fixing member to form at least one contact block;
The contact block is detachably fixed to the plate so as to be along the direction in which the terminals to be inspected are aligned,
At least one of the contact groups near the corner to be inspected is fixed to a bridge-shaped fixing member protruding from the surface of the surface plate, thereby interfering with other adjacent contact groups. Inspection equipment for electrical property inspection that is prevented.

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