TW200514976A - Humidity sensor element, device and method for manufacturing thereof - Google Patents
Humidity sensor element, device and method for manufacturing thereofInfo
- Publication number
- TW200514976A TW200514976A TW092129125A TW92129125A TW200514976A TW 200514976 A TW200514976 A TW 200514976A TW 092129125 A TW092129125 A TW 092129125A TW 92129125 A TW92129125 A TW 92129125A TW 200514976 A TW200514976 A TW 200514976A
- Authority
- TW
- Taiwan
- Prior art keywords
- humidity sensor
- sensor element
- manufacturing
- sensitive materials
- nanocomposites
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000002114 nanocomposite Substances 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 239000002253 acid Substances 0.000 abstract 1
- 239000002041 carbon nanotube Substances 0.000 abstract 1
- 229910021393 carbon nanotube Inorganic materials 0.000 abstract 1
- 125000000524 functional group Chemical group 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/014—Resonance or resonant frequency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02845—Humidity, wetness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49007—Indicating transducer
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW092129125A TWI242639B (en) | 2003-10-21 | 2003-10-21 | Humidity sensor element, device and method for manufacturing thereof |
US10/859,240 US7270002B2 (en) | 2003-10-21 | 2004-06-03 | Humidity sensor element, device and method for manufacturing thereof |
GB0414461A GB2407384B (en) | 2003-10-21 | 2004-06-28 | Humidity sensor element, device and method for manufacturing thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW092129125A TWI242639B (en) | 2003-10-21 | 2003-10-21 | Humidity sensor element, device and method for manufacturing thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200514976A true TW200514976A (en) | 2005-05-01 |
TWI242639B TWI242639B (en) | 2005-11-01 |
Family
ID=32823119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW092129125A TWI242639B (en) | 2003-10-21 | 2003-10-21 | Humidity sensor element, device and method for manufacturing thereof |
Country Status (3)
Country | Link |
---|---|
US (1) | US7270002B2 (zh) |
GB (1) | GB2407384B (zh) |
TW (1) | TWI242639B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105588856A (zh) * | 2014-10-19 | 2016-05-18 | 吴振武 | 柔性印刷粪尿传感器 |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7814776B2 (en) * | 2004-11-11 | 2010-10-19 | The Penn State Research Foundation | Carbon nanotube-quartz resonator with femtogram resolution |
US20070017276A1 (en) * | 2005-07-20 | 2007-01-25 | Trutna William R Jr | Resonant structure humidity sensor |
US20070031318A1 (en) * | 2005-08-03 | 2007-02-08 | Jie Liu | Methods of chemically treating an electrically conductive layer having nanotubes therein with diazonium reagent |
US7995777B2 (en) * | 2005-10-03 | 2011-08-09 | Xun Yu | Thin film transparent acoustic transducer |
CN101506413A (zh) | 2006-03-03 | 2009-08-12 | 伊利诺伊大学评议会 | 制造空间排列的纳米管和纳米管阵列的方法 |
US8679630B2 (en) * | 2006-05-17 | 2014-03-25 | Purdue Research Foundation | Vertical carbon nanotube device in nanoporous templates |
GB2459265B (en) * | 2008-04-15 | 2012-08-08 | Novalia Ltd | Printed article |
WO2010005707A1 (en) * | 2008-06-16 | 2010-01-14 | The Board Of Trustees Of The University Of Illinois | Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates |
US8225641B2 (en) * | 2008-08-20 | 2012-07-24 | Headwaters Technology Innovation, Llc | Nanofibers and methods of making same and using same in humidity sensors |
US10101219B2 (en) * | 2008-09-05 | 2018-10-16 | The Research Foundation For The State University Of New York | Carbon nanotube sensing system, carbon nanotube dew point hygrometer, method of use thereof and method of forming a carbon nanotube dew point hygrometer |
US8715981B2 (en) * | 2009-01-27 | 2014-05-06 | Purdue Research Foundation | Electrochemical biosensor |
US8872154B2 (en) * | 2009-04-06 | 2014-10-28 | Purdue Research Foundation | Field effect transistor fabrication from carbon nanotubes |
US8115646B2 (en) | 2009-05-28 | 2012-02-14 | The Boeing Company | Environmental sensor system |
US9388686B2 (en) | 2010-01-13 | 2016-07-12 | Halliburton Energy Services, Inc. | Maximizing hydrocarbon production while controlling phase behavior or precipitation of reservoir impairing liquids or solids |
US9278856B2 (en) | 2011-04-08 | 2016-03-08 | Covestro Llc | Flexible sensing material containing carbon nanotubes |
JP5159992B2 (ja) * | 2011-05-18 | 2013-03-13 | 三菱電機株式会社 | 水分濃度検出装置 |
KR101922035B1 (ko) * | 2011-06-08 | 2018-11-26 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 습도 센서 및 그를 위한 센서 요소 |
US9618469B2 (en) | 2011-09-19 | 2017-04-11 | Hewlett-Packard Development Company, L.P. | Sensing water vapour |
CN103946695B (zh) * | 2011-11-18 | 2016-03-30 | 三菱电机株式会社 | 水分浓度检测装置 |
US10031097B1 (en) * | 2013-03-05 | 2018-07-24 | The United States Of America As Represented By The Administrator Of Nasa | Electrical response using nanotubes on a fibrous substrate |
FR3041730B1 (fr) * | 2015-09-30 | 2018-12-07 | Safran Transmission Systems | Dispositif de montage d'une couronne d'un train epicycloidal |
US10564047B2 (en) | 2017-02-16 | 2020-02-18 | International Business Machines Corporation | Carbon nanotube-based multi-sensor |
DE102019216310A1 (de) * | 2019-10-23 | 2021-04-29 | Technische Universität Dresden | Sensorvorrichtung zum Bestimmen der relativen Feuchtigkeit in einem Gasvolumen mit hoher Sensitivität |
CN111830088A (zh) * | 2020-07-30 | 2020-10-27 | 河海大学常州校区 | 一种离子型薄膜湿度传感器及其制备方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4662220A (en) * | 1985-06-20 | 1987-05-05 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Water-absorbing capacitor system for measuring relative humidity |
US4681855A (en) * | 1985-08-05 | 1987-07-21 | The United States Of America As Represented By The Secretary Of Commerce | Humidity sensing and measurement employing halogenated organic polymer membranes |
US5131990A (en) * | 1989-07-27 | 1992-07-21 | Texas Instruments Incorporated | Fluoropolymer humidity sensors |
US5036704A (en) * | 1990-03-23 | 1991-08-06 | Gas Research Institute | Moisture sensor |
US5338430A (en) * | 1992-12-23 | 1994-08-16 | Minnesota Mining And Manufacturing Company | Nanostructured electrode membranes |
WO2002061396A1 (fr) * | 2001-01-30 | 2002-08-08 | Initium, Inc. | Oscillateur et detecteur de masse |
US7112816B2 (en) * | 2002-04-12 | 2006-09-26 | University Of South Flordia | Carbon nanotube sensor and method of producing the same |
US20040058226A1 (en) * | 2002-04-25 | 2004-03-25 | Lamarre Philip A. | Efficiency lateral micro fuel cell |
-
2003
- 2003-10-21 TW TW092129125A patent/TWI242639B/zh not_active IP Right Cessation
-
2004
- 2004-06-03 US US10/859,240 patent/US7270002B2/en active Active
- 2004-06-28 GB GB0414461A patent/GB2407384B/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105588856A (zh) * | 2014-10-19 | 2016-05-18 | 吴振武 | 柔性印刷粪尿传感器 |
Also Published As
Publication number | Publication date |
---|---|
GB2407384B (en) | 2006-11-22 |
GB0414461D0 (en) | 2004-07-28 |
US20050081625A1 (en) | 2005-04-21 |
GB2407384A (en) | 2005-04-27 |
TWI242639B (en) | 2005-11-01 |
US7270002B2 (en) | 2007-09-18 |
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Legal Events
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MK4A | Expiration of patent term of an invention patent |