TW200511417A - Polishing pad and method of producing same - Google Patents
Polishing pad and method of producing sameInfo
- Publication number
- TW200511417A TW200511417A TW093109767A TW93109767A TW200511417A TW 200511417 A TW200511417 A TW 200511417A TW 093109767 A TW093109767 A TW 093109767A TW 93109767 A TW93109767 A TW 93109767A TW 200511417 A TW200511417 A TW 200511417A
- Authority
- TW
- Taiwan
- Prior art keywords
- polishing
- pad
- transmission rate
- optical transmission
- polishing pad
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title abstract 6
- 238000000034 method Methods 0.000 title abstract 2
- 230000005540 biological transmission Effects 0.000 abstract 4
- 230000003287 optical effect Effects 0.000 abstract 4
- 238000007373 indentation Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003107863A JP2004319584A (ja) | 2003-04-11 | 2003-04-11 | 研磨パッド及びその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200511417A true TW200511417A (en) | 2005-03-16 |
Family
ID=33295870
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093109767A TW200511417A (en) | 2003-04-11 | 2004-04-08 | Polishing pad and method of producing same |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1622193A4 (zh) |
JP (1) | JP2004319584A (zh) |
KR (1) | KR100721888B1 (zh) |
CN (1) | CN1771587A (zh) |
TW (1) | TW200511417A (zh) |
WO (1) | WO2004093177A1 (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6984163B2 (en) * | 2003-11-25 | 2006-01-10 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Polishing pad with high optical transmission window |
JP2007149949A (ja) * | 2005-11-28 | 2007-06-14 | Roki Techno Co Ltd | デバイスウエハ用の研磨パッド |
JP2007276009A (ja) * | 2006-04-03 | 2007-10-25 | Toyo Tire & Rubber Co Ltd | 研磨パッド |
JP4931133B2 (ja) * | 2007-03-15 | 2012-05-16 | 東洋ゴム工業株式会社 | 研磨パッド |
WO2009098917A1 (ja) * | 2008-02-04 | 2009-08-13 | Kuraray Co., Ltd. | 研磨パッドの製造方法 |
KR101750775B1 (ko) * | 2009-06-29 | 2017-06-26 | 디아이씨 가부시끼가이샤 | 연마 패드용 2액형 우레탄 수지 조성물, 폴리우레탄 연마 패드, 및 폴리우레탄 연마 패드의 제조 방법 |
JP5350309B2 (ja) * | 2010-03-31 | 2013-11-27 | 東洋ゴム工業株式会社 | 研磨パッドおよびその製造方法、ならびに半導体デバイスの製造方法 |
JP5389973B2 (ja) * | 2012-04-11 | 2014-01-15 | 東洋ゴム工業株式会社 | 積層研磨パッド及びその製造方法 |
US9156125B2 (en) * | 2012-04-11 | 2015-10-13 | Cabot Microelectronics Corporation | Polishing pad with light-stable light-transmitting region |
JP6439963B2 (ja) * | 2014-08-22 | 2018-12-19 | 富士紡ホールディングス株式会社 | 保持具及びその製造方法 |
JP2018029142A (ja) * | 2016-08-18 | 2018-02-22 | 株式会社クラレ | 研磨パッド及びそれを用いた研磨方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5893796A (en) * | 1995-03-28 | 1999-04-13 | Applied Materials, Inc. | Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus |
US5605760A (en) * | 1995-08-21 | 1997-02-25 | Rodel, Inc. | Polishing pads |
US6074287A (en) * | 1996-04-12 | 2000-06-13 | Nikon Corporation | Semiconductor wafer polishing apparatus |
JP3826729B2 (ja) * | 2001-04-25 | 2006-09-27 | Jsr株式会社 | 半導体ウエハ用研磨パッド及びこれを備える半導体ウエハ用研磨複層体並びに半導体ウエハの研磨方法 |
JP2003048151A (ja) * | 2001-08-08 | 2003-02-18 | Rodel Nitta Co | 研磨パッド |
-
2003
- 2003-04-11 JP JP2003107863A patent/JP2004319584A/ja active Pending
-
2004
- 2004-04-08 EP EP04726616A patent/EP1622193A4/en not_active Withdrawn
- 2004-04-08 KR KR1020047020057A patent/KR100721888B1/ko not_active IP Right Cessation
- 2004-04-08 CN CNA2004800097088A patent/CN1771587A/zh active Pending
- 2004-04-08 TW TW093109767A patent/TW200511417A/zh unknown
- 2004-04-08 WO PCT/JP2004/005078 patent/WO2004093177A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
KR100721888B1 (ko) | 2007-05-28 |
WO2004093177A1 (ja) | 2004-10-28 |
KR20050042752A (ko) | 2005-05-10 |
JP2004319584A (ja) | 2004-11-11 |
EP1622193A1 (en) | 2006-02-01 |
EP1622193A4 (en) | 2008-08-20 |
CN1771587A (zh) | 2006-05-10 |
WO2004093177B1 (ja) | 2005-03-31 |
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