TW200506208A - Cryogenic pump - Google Patents

Cryogenic pump

Info

Publication number
TW200506208A
TW200506208A TW093120543A TW93120543A TW200506208A TW 200506208 A TW200506208 A TW 200506208A TW 093120543 A TW093120543 A TW 093120543A TW 93120543 A TW93120543 A TW 93120543A TW 200506208 A TW200506208 A TW 200506208A
Authority
TW
Taiwan
Prior art keywords
pump
inlet opening
gas inlet
pump surface
bends
Prior art date
Application number
TW093120543A
Other languages
English (en)
Inventor
Gerhard Wilhelm Walter
Dirk Schiller
Karl Ossege
Hans Wischott
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of TW200506208A publication Critical patent/TW200506208A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
TW093120543A 2003-07-10 2004-07-09 Cryogenic pump TW200506208A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2003131201 DE10331201A1 (de) 2003-07-10 2003-07-10 Kryopumpe

Publications (1)

Publication Number Publication Date
TW200506208A true TW200506208A (en) 2005-02-16

Family

ID=33546958

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093120543A TW200506208A (en) 2003-07-10 2004-07-09 Cryogenic pump

Country Status (3)

Country Link
DE (1) DE10331201A1 (zh)
TW (1) TW200506208A (zh)
WO (1) WO2005005832A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI698582B (zh) * 2018-03-02 2020-07-11 日商住友重機械工業股份有限公司 低溫泵
CN112523993A (zh) * 2020-12-03 2021-03-19 安徽万瑞冷电科技有限公司 吸附阵及具有该吸附阵的低温泵

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070214830A1 (en) * 2006-03-20 2007-09-20 Gerd Arnold Hydrogen tank system based on high-surface materials used for intermediate storage of excess hydrogen gas in stationary applications
CH703216A1 (de) * 2010-05-27 2011-11-30 Hsr Ag Vorrichtung zur Verhinderung des Memory-Effekts bei Kryopumpen.
EP2844872A1 (de) 2012-04-03 2015-03-11 Babcock Noell GmbH Vorrichtung zur herstellung, verbesserung und stabilisierung des vakuums im gehäuse einer schwungmasse
CN102769991B (zh) * 2012-07-26 2015-12-16 中国原子能科学研究院 插入式低温冷凝板装置
JP6762672B2 (ja) * 2017-03-10 2020-09-30 住友重機械工業株式会社 クライオポンプ
GB2588826A (en) * 2019-11-11 2021-05-12 Edwards Vacuum Llc Cryopump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB770560A (en) * 1953-10-29 1957-03-20 Wilhelm Bock Improvements in diffusion pumps
DE1028734B (de) * 1957-02-09 1958-04-24 Leybolds Nachfolger E Vorrichtung zum Verhindern des Einstroemens von Daempfen in Hochvakuumraeume
DE1271305B (de) * 1963-04-24 1968-06-27 Bir Vac Ltd Kaeltefalle fuer ein Vakuumsystem
US4285710A (en) * 1978-09-18 1981-08-25 Varian Associates, Inc. Cryogenic device for restricting the pumping speed of selected gases
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
SU1698481A1 (ru) * 1987-12-17 1991-12-15 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криогенный адсорбционный насос
US5231840A (en) * 1991-03-28 1993-08-03 Daikin Industries, Ltd. Cryopump
DE9111236U1 (de) * 1991-09-10 1992-07-09 Leybold AG, 6450 Hanau Kryopumpe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI698582B (zh) * 2018-03-02 2020-07-11 日商住友重機械工業股份有限公司 低溫泵
CN112523993A (zh) * 2020-12-03 2021-03-19 安徽万瑞冷电科技有限公司 吸附阵及具有该吸附阵的低温泵

Also Published As

Publication number Publication date
WO2005005832A1 (de) 2005-01-20
DE10331201A1 (de) 2005-01-27

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